公开(公告)号：US20100118411A1

公开(公告)日：2010-05-13

申请号：US12689767

申请日：2010-01-19

申请人： Yasuharu Nakajima

发明人： Yasuharu Nakajima

IPC分类号： G02B27/12 ,  G02B27/30

CPC分类号： G03B21/208 ,  G02B27/0961

摘要： Provided is a small size optical system having functions of a luminous flux splitting optical system or those of a luminous flux integrating optical system and functions of a fly's eye integrator. The integrator is provided with two surfaces. A first surface (111) is composed of a first unit surface, i.e., a positive refractive surface, and a second surface (113) is composed of a second unit surface, i.e., a positive refractive surface. Prescribed n number of second unit surfaces (113a, 113b) correspond to a prescribed first unit surface (111a). Light which entered the n number of second unit surfaces and parallel to the optical axis of the prescribed first unit surface is collected to the center of the prescribed first unit surface. The n number of second unit surfaces are arranged not to be adjacent to each other on a refractive surface having substantially the same diffractive power as that of the refractive surface of the prescribed first unit surface.

摘要翻译： 提供了具有光束分光光学系统或光束积分光学系统和蝇眼积分器的功能的小尺寸光学系统。 积分器具有两个表面。 第一表面（111）由第一单位表面即正折射表面组成，第二表面（113）由第二单位表面即正折射表面组成。 规定的n个第二单位面（113a，113b）对应于规定的第一单位面（111a）。 进入n个第二单位面并平行于规定的第一单位表面的光轴的光被收集到规定的第一单位表面的中心。 n个第二单元表面布置成在与规定的第一单位表面的折射表面具有基本相同的衍射光束的折射表面上彼此不相邻。

公开(公告)号：US20090080069A1

公开(公告)日：2009-03-26

申请号：US12289451

申请日：2008-10-28

申请人： Yasuharu Nakajima

发明人： Yasuharu Nakajima

IPC分类号： G02B21/00

CPC分类号： G02B21/02 ,  G02B21/0096 ,  G02B21/025

摘要： Provided is a microscope for focusing by inserting a split prism (5) at a focusing support time. The image of an iris stop (30) is branched into such two images by the angle deflecting action of the split prism (5) as are individually shifted and focused at symmetric positions across the optical axis of the microscope. These two branched images of the iris stop (30) are further focused on an objective lens (23) through a beam splitter (22) by the focusing action of a lens (21). The operation unit of a vertical motion device is operated to move an optical system up and down so that the images of a focused pattern (16) are viewed to move in opposite directions from each other in the field of view. At the focusing time when the focal position of the objective lens (23) is focused on a sample face (24), the images of the focused pattern (15) look in the registered state. Thus, the focusing action can be made highly precise without being restricted by the magnification or NA of the objective lens.

摘要翻译： 提供了通过在聚焦支持时间插入分割棱镜（5）来聚焦的显微镜。 虹膜光阑（30）的图像通过分裂棱镜（5）的角度偏转动作被分离成这样的两个图像，单独偏移并聚焦在跨越显微镜的光轴的对称位置处。 通过透镜（21）的聚焦作用，虹膜光阑（30）的这两个分支图像通过分束器（22）进一步聚焦在物镜（23）上。 操作垂直运动装置的操作单元以使光学系统上下移动，使得聚焦图案（16）的图像被视为在视场中彼此相反的方向移动。 在物镜（23）的焦点位置聚焦于样品面（24）的聚焦时，聚焦图案（15）的图像看起来是注册状态。 因此，不受物镜的放大率或NA的限制，聚焦动作可以高精度地进行。

公开(公告)号：US07307725B2

公开(公告)日：2007-12-11

申请号：US11150385

申请日：2005-06-13

申请人： Takeo Oomori ,  Hideo Hirose ,  Yasuharu Nakajima ,  Kenzo Chiaki ,  Tatsumi Satou

发明人： Takeo Oomori ,  Hideo Hirose ,  Yasuharu Nakajima ,  Kenzo Chiaki ,  Tatsumi Satou

IPC分类号： G01J4/00 ,  G02B5/30

CPC分类号： G01N21/95607 ,  G01N21/21 ,  G01N21/9501 ,  G01N2201/0636

摘要： A surface inspection apparatus includes: a light source unit that emits a divergent light flux of predetermined linearly polarized light to be used to illuminate a test substrate; a first optical member that allows the divergent light flux of the predetermined linearly polarized light to enter therein with a predetermined angle of incidence and then guides a light flux to the test substrate; a second optical member that allows a light flux from the test substrate to enter therein, emits a convergent light flux thereof with a predetermined angle of emergence and forms an image at a specific surface; an extraction unit that extracts linearly polarized light in the convergent light flux from the second optical member, which is perpendicular to the predetermined linearly polarized light; a light-receiving unit that receives an image of the test substrate formed via the second optical member and the extraction unit; and at least one polarization correcting member disposed within a light path extending between the light source unit and the light-receiving unit, which corrects a disruption of a polarization plane attributable to the first optical member and the second optical member.

摘要翻译： 表面检查装置包括：光源单元，其发射用于照射测试基板的预定线性偏振光的发散光束; 第一光学构件，其允许预定线偏振光的发散光束以预定的入射角进入其中，然后将光通量引导到测试衬底; 允许来自测试基板的光束进入其中的第二光学部件以预定的出射角度发出会聚光束，并在特定表面形成图像; 提取单元，其从与所述第二光学构件垂直于所述预定线偏振光的会聚光束中提取线偏振光; 光接收单元，其接收经由所述第二光学构件和所述提取单元形成的所述测试衬底的图像; 以及设置在光源单元和光接收单元之间延伸的光路内的至少一个偏振校正构件，其校正归因于第一光学构件和第二光学构件的偏振面的破坏。

公开(公告)号：US5905384A

公开(公告)日：1999-05-18

申请号：US779363

申请日：1997-01-06

申请人： Akira Inoue ,  Yasuharu Nakajima ,  Yukio Ohta ,  Hiroto Matsubayashi

发明人： Akira Inoue ,  Yasuharu Nakajima ,  Yukio Ohta ,  Hiroto Matsubayashi

IPC分类号： G01R31/26 ,  H01L21/66

CPC分类号： G01R31/2625

摘要： An apparatus of testing a semiconductor element applies pulsed voltages synchronized with each other, respectively, to a gate and a drain of a semiconductor element being tested and measures current flowing through the semiconductor element in response to the pulsed voltages thus applied. The testing apparatus produces pulsed I-V characteristics considering the influences of self heating and surface energy levels of the semiconductor element and RF swing along a load line during large signal operation.

摘要翻译： 测试半导体元件的装置将被测量的半导体元件的栅极和漏极分别施加相互同步的脉冲电压，并响应于所施加的脉冲电压来测量流过半导体元件的电流。 考虑到在大信号操作期间，自加热和半导体元件的表面能级以及负载线上的RF摆动的影响，测试装置产生脉冲I-V特性。

公开(公告)号：US5426399A

公开(公告)日：1995-06-20

申请号：US165343

申请日：1993-12-13

申请人： Hiroto Matsubayashi ,  Yasuharu Nakajima ,  Yoshihiro Notani

发明人： Hiroto Matsubayashi ,  Yasuharu Nakajima ,  Yoshihiro Notani

IPC分类号： H01L21/60 ,  H01B7/08 ,  H01L23/12 ,  H01P3/00 ,  H01P3/08 ,  H05K1/00 ,  H05K1/02 ,  H05K3/46

CPC分类号： H01P3/003 ,  H01B7/0861 ,  H01P3/081 ,  H01P3/085 ,  H05K1/0221 ,  H01L2924/0002 ,  H05K1/0393 ,  H05K2201/09036 ,  H05K2201/09981 ,  H05K3/4644

摘要： A film carrier signal transmission line includes a dielectric material having a first, front surface and a second, rear surface opposite the first surface, signal lines buried in the dielectric material for transmitting a super high frequency signal, spaced from the first and second surfaces, and spaced side-by-side at a regular interval; a first grounding film disposed on the second surface of the dielectric material; separating grooves in the dielectric material between adjacent pairs of signal lines, parallel to the signal lines; and second grounding films disposed on the first surface of the dielectric material and in the separating grooves and electrically connected with said first grounding film in the separating grooves. Adjacent signal lines are electrically shielded and crosstalk between signal lines is reduced.

摘要翻译： 薄膜载体信号传输线包括具有与第一表面相对的第一前表面和第二后表面的电介质材料，掩埋在用于传输与第一和第二表面间隔开的超高频信号的电介质材料中的信号线， 并以规则的间隔并排排列; 设置在电介质材料的第二表面上的第一接地膜; 在平行于信号线的相邻信号线对之间分离介质材料中的槽; 以及第二接地膜，其设置在电介质材料的第一表面和分离槽中，并与分离槽中的所述第一接地膜电连接。 相邻的信号线被电屏蔽，信号线之间的串扰减少。

公开(公告)号：US20050280806A1

公开(公告)日：2005-12-22

申请号：US11150385

申请日：2005-06-13

申请人： Takeo Oomori ,  Hideo Hirose ,  Yasuharu Nakajima ,  Kenzo Chiaki ,  Tatsumi Satou

发明人： Takeo Oomori ,  Hideo Hirose ,  Yasuharu Nakajima ,  Kenzo Chiaki ,  Tatsumi Satou

IPC分类号： G01N21/21 ,  G01N21/88 ,  G01N21/95 ,  G01N21/956

CPC分类号： G01N21/95607 ,  G01N21/21 ,  G01N21/9501 ,  G01N2201/0636

摘要： A surface inspection apparatus includes: a light source unit that emits a divergent light flux of predetermined linearly polarized light to be used to illuminate a test substrate; a first optical member that allows the divergent light flux of the predetermined linearly polarized light to enter therein with a predetermined angle of incidence and then guides a light flux to the test substrate; a second optical member that allows a light flux from the test substrate to enter therein, emits a convergent light flux thereof with a predetermined angle of emergence and forms an image at a specific surface; an extraction unit that extracts linearly polarized light in the convergent light flux from the second optical member, which is perpendicular to the predetermined linearly polarized light; a light-receiving unit that receives an image of the test substrate formed via the second optical member and the extraction unit; and at least one polarization correcting member disposed within a light path extending between the light source unit and the light-receiving unit, which corrects a disruption of a polarization plane attributable to the first optical member and the second optical member.

摘要翻译： 表面检查装置包括：光源单元，其发射用于照射测试基板的预定线性偏振光的发散光束; 第一光学构件，其允许预定线偏振光的发散光束以预定的入射角进入其中，然后将光通量引导到测试衬底; 允许来自测试基板的光束进入其中的第二光学部件以预定的出射角度发出会聚光束，并在特定表面形成图像; 提取单元，其从与所述第二光学构件垂直于所述预定线偏振光的会聚光束中提取线偏振光; 光接收单元，其接收经由所述第二光学构件和所述提取单元形成的所述测试衬底的图像; 以及设置在光源单元和光接收单元之间延伸的光路内的至少一个偏振校正构件，其校正归因于第一光学构件和第二光学构件的偏振面的破坏。

公开(公告)号：US5311324A

公开(公告)日：1994-05-10

申请号：US92586

申请日：1993-07-16

申请人： Tetsuya Temma ,  Yasuharu Nakajima ,  Hiroyasu Matsuura ,  Takeo Tobe ,  Jun Kono ,  Takuo Fujimura ,  Isao Kikuchi ,  Atsushi Takada

发明人： Tetsuya Temma ,  Yasuharu Nakajima ,  Hiroyasu Matsuura ,  Takeo Tobe ,  Jun Kono ,  Takuo Fujimura ,  Isao Kikuchi ,  Atsushi Takada

IPC分类号： H04N5/93 ,  G11B19/02 ,  G11B20/02 ,  G11B27/00 ,  G11B27/28 ,  G11B27/32 ,  H04N9/797 ,  H04N9/82 ,  H04N5/781 ,  H04N5/76

CPC分类号： H04N9/7973 ,  G11B27/002 ,  G11B27/28 ,  H04N9/8222 ,  H04N9/8233 ,  G11B2220/20 ,  G11B2220/2587 ,  G11B27/329

摘要： An image reproduction apparatus with a plurality of disk players which concurrently perform play operation so as to produce a plurality of division video format signal concurrently. The video format signal are combined into a signal/final video format signal. The respective frame numbers extracted from the respective division video format signals are compared with the corresponding designated frame numbers. When the extracted frame number and the designated frame number do not coincide to each other, the corresponding division video format signal is ignored in the synthesis operation for producing the final video format signal.

摘要翻译： 一种具有多个盘播放器的图像再现装置，其同时执行播放操作，以便同时产生多个分割视频格式信号。 视频格式信号被组合成信号/最终视频格式信号。 从相应的分割视频格式信号提取的各个帧号与相应的指定帧号进行比较。 当提取的帧号和指定的帧号不一致时，在用于产生最终视频格式信号的合成操作中忽略相应的分割视频格式信号。

公开(公告)号：US5160907A

公开(公告)日：1992-11-03

申请号：US753049

申请日：1991-08-30

申请人： Yasuharu Nakajima ,  Akira Inoue

发明人： Yasuharu Nakajima ,  Akira Inoue

IPC分类号： H01L21/3205 ,  H01L21/60 ,  H01L21/66 ,  H01L23/498 ,  H01L23/52 ,  H01L23/66 ,  H01L27/00

CPC分类号： H01L23/66 ,  H01L23/49822 ,  H01L24/01 ,  H01L2924/09701 ,  H01L2924/14 ,  H01L2924/3011

摘要： A multiple layer semiconductor circuit module includes a semiconductor substrate including opposed first and second surfaces and side walls; a first circuit disposed on the first surface of the substrate including a plurality of conductors, at least one of the conductors extending on the first surface of the substrate to one of the side walls; a first electrically insulating layer disposed on the first surface of the substrate, covering the first circuit, and including a second surface adjacent to the first surface of the substrate, an opposed first surface, and side walls; a second circuit disposed on the first surface of the first layer including a plurality of conductors, at least one of the conductors extending on the first surface of the first layer to one of the side walls; a second electrically insulating layer disposed on the first surface of the first layer, covering the second circuit, and including a second surface adjacent to the first surface of the first layer, an opposed first surface, and side walls; a third circuit disposed on the first surface of the second layer including a plurality of conductors, at least one of the conductors extending on the first surface of the second layer to one of the side walls; and at least one electrical conductor disposed on at least one of the side walls of the substrate and the first and second insulating layers electrically interconnecting the first, second, and third circuits.

摘要翻译： 多层半导体电路模块包括：包括相对的第一和第二表面和侧壁的半导体衬底; 设置在所述基板的包括多个导体的所述第一表面上的第一电路，所述导体中的至少一个在所述基板的所述第一表面上延伸到所述侧壁之一; 第一电绝缘层，设置在所述基板的第一表面上，覆盖所述第一电路，并且包括邻近所述基板的第一表面的第二表面，相对的第一表面和侧壁; 设置在第一层的第一表面上的第二电路包括多个导体，至少一个导体在第一层的第一表面上延伸到一个侧壁; 第二电绝缘层，设置在第一层的第一表面上，覆盖第二电路，并且包括与第一层的第一表面相邻的第二表面，相对的第一表面和侧壁; 设置在第二层的第一表面上的第三电路包括多个导体，至少一个导体在第二层的第一表面上延伸到侧壁中的一个; 以及设置在所述基板的至少一个侧壁上的至少一个电导体，并且所述第一和第二绝缘层将所述第一，第二和第三电路电连接。

公开(公告)号：US07791795B2

公开(公告)日：2010-09-07

申请号：US12289451

申请日：2008-10-28

申请人： Yasuharu Nakajima

发明人： Yasuharu Nakajima

IPC分类号： G02B21/00

CPC分类号： G02B21/02 ,  G02B21/0096 ,  G02B21/025

摘要： A microscope for focusing by inserting a split prism at a focusing support time. The image of an iris stop is branched into such two images by the angle deflecting action of the split prism as are individually shifted and focused at symmetric positions across the optical axis of the microscope. These two branched images of the iris stop are further focused on an objective lens through a beam splitter by the focusing action of a lens. The operation unit of a vertical motion device is operated to move an optical system up and down so that the images of a focused pattern are viewed to move in opposite directions from each other in the field of view.

摘要翻译： 用于通过在聚焦支持时间插入分裂棱镜进行聚焦的显微镜。 虹膜阻挡物的图像通过分裂棱镜的角度偏转动作被分支成这样的两个图像，分别移动并聚焦在跨越显微镜的光轴的对称位置处。 光圈停止器的这两个分支图像通过透镜的聚焦作用通过分束器进一步聚焦在物镜上。 操作垂直运动装置的操作单元以使光学系统上下移动，使得聚焦图案的图像被视为在视场中彼此相反的方向移动。

公开(公告)号：US5786627A

公开(公告)日：1998-07-28

申请号：US956497

申请日：1997-10-22

申请人： Akira Inoue ,  Kei Goto ,  Yoshihiro Notani ,  Yasuharu Nakajima ,  Hiroto Matsubayashi ,  Yukio Ohta

发明人： Akira Inoue ,  Kei Goto ,  Yoshihiro Notani ,  Yasuharu Nakajima ,  Hiroto Matsubayashi ,  Yukio Ohta

IPC分类号： H01L23/538 ,  H01L23/66 ,  H01L23/02 ,  H01L23/52

CPC分类号： H01L24/49 ,  H01L23/66 ,  H01L2223/6644 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2224/49175 ,  H01L24/45 ,  H01L24/48 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01079 ,  H01L2924/10329 ,  H01L2924/12042 ,  H01L2924/1306 ,  H01L2924/14 ,  H01L2924/19043 ,  H01L2924/19107 ,  H01L2924/30105 ,  H01L2924/30107 ,  H01L2924/3011 ,  H01L2924/30111

摘要： An integrated circuit device includes a substrate, circuit elements on the substrate, and an electrically conductive thermoplastic resin substance electrically connecting the circuit elements on the substrate. Therefore, since variations in the configuration of the thermoplastic resin are quite small relative to those of interconnecting wires, variation in parasitic inductance due to variation in the configuration of the connections is reduced and the uniformity and the reproducibility of the high frequency characteristics of the integrated circuit device are enhanced. A method for fabricating an integrated circuit device includes forming circuit elements on a substrate and forming an electrically conducting thermoplastic resin substance electrically connecting the circuit elements.

摘要翻译： 集成电路器件包括衬底，衬底上的电路元件和电连接衬底上的电路元件的导电热塑性树脂物质。 因此，由于热塑性树脂的结构的变化相对于互连线的变化相当小，所以连接结构的变化引起的寄生电感的变化减小，集成的高频特性的均匀性和再现性 电路设备得到增强。 一种集成电路器件的制造方法，包括在基片上形成电路元件，形成电连接电路元件的导电性热塑性树脂物质。