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公开(公告)号:US20060063347A1
公开(公告)日:2006-03-23
申请号:US10944844
申请日:2004-09-21
申请人: Yen-Chang Chao , You-Hua Chou , Yong-Ping Chan
发明人: Yen-Chang Chao , You-Hua Chou , Yong-Ping Chan
IPC分类号: H01L21/76
CPC分类号: H01L22/20 , H01L22/34 , H01L2223/54453
摘要: A method of testing a test wafer includes shielding test centers on a test wafer using shielding tabs during the deposition of a layer. The test wafer has the same size and shape of product wafers. The shielding tabs are then removed from the test wafer. A plurality of predetermined points which are separated from each test center by a critical interval are checked, and whether each point is covered by the layer is determined through an interferometer or a microprobe. The test wafer is processed after adjustments to or maintenance on equipment, or after a fixed number of product wafers have been processed.
摘要翻译: 测试测试晶片的方法包括在沉积层期间使用屏蔽片在测试晶片上屏蔽测试中心。 测试晶片具有相同的尺寸和形状的产品晶片。 然后将屏蔽突片从测试晶片上移除。 检查从每个测试中心分离临界间隔的多个预定点,并且通过干涉仪或微探针确定每个点是否被层覆盖。 测试晶片在对设备进行调整或维护后,或在固定数量的产品晶片进行处理后进行处理。
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公开(公告)号:US07169626B2
公开(公告)日:2007-01-30
申请号:US10944844
申请日:2004-09-21
申请人: Yen-Chang Chao , You-Hua Chou , Yong-Ping Chan
发明人: Yen-Chang Chao , You-Hua Chou , Yong-Ping Chan
IPC分类号: H01L31/26
CPC分类号: H01L22/20 , H01L22/34 , H01L2223/54453
摘要: A method of testing a test wafer includes shielding test centers on a test wafer using shielding tabs during the deposition of a layer. The test wafer has the same size and shape of product wafers. The shielding tabs are then removed from the test wafer. A plurality of predetermined points which are separated from each test center by a critical interval are checked, and whether each point is covered by the layer is determined through an interferometer or a microprobe. The test wafer is processed after adjustments to or maintenance on equipment, or after a fixed number of product wafers have been processed.
摘要翻译: 测试测试晶片的方法包括在沉积层期间使用屏蔽片在测试晶片上屏蔽测试中心。 测试晶片具有相同的尺寸和形状的产品晶片。 然后将屏蔽突片从测试晶片上移除。 检查从每个测试中心分离临界间隔的多个预定点,并且通过干涉仪或微探针确定每个点是否被层覆盖。 测试晶片在对设备进行调整或维护后,或在固定数量的产品晶片进行处理后进行处理。
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公开(公告)号:US20050073800A1
公开(公告)日:2005-04-07
申请号:US10678236
申请日:2003-10-03
申请人: You-Hua Chou , Yen-Shuo Su , Yen-Chang Chao , Jain-Shing Tsai , Yong-Ping Chan , Jung-Chen Yang
发明人: You-Hua Chou , Yen-Shuo Su , Yen-Chang Chao , Jain-Shing Tsai , Yong-Ping Chan , Jung-Chen Yang
IPC分类号: H01G4/005 , H01G4/06 , H01G4/228 , H01G4/232 , H01G4/30 , H01G4/33 , H01G4/38 , H01L21/02 , H01L23/522
CPC分类号: H01G4/33 , H01G4/005 , H01G4/232 , H01G4/30 , H01G4/38 , H01L23/5223 , H01L28/82 , H01L2924/0002 , Y10T29/435 , H01L2924/00
摘要: A capacitor having an electrically/conductive plate, an electrically conductive segmented plate defining a first plurality of electrically conductive plate segments and a second plurality of electrically conductive plate segments, a first capacitor dielectric disposed between the plate and the segmented plate, at least one electrically conductive interconnect coupling each of the plate segments of one of the first and second plurality of plate segments to the plate, and a second capacitor dielectric disposed between the plate segments.
摘要翻译: 具有电/导电板的电容器,限定第一多个导电板段和第二多个导电板段的导电分段板,设置在板和分段板之间的第一电容器电介质,至少一个电 所述导电互连将所述第一和第二多个板段中的一个的每个板段耦合到所述板,以及设置在所述板段之间的第二电容器电介质。
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公开(公告)号:US20140076392A1
公开(公告)日:2014-03-20
申请号:US13621879
申请日:2012-09-18
申请人: Chih Ching LIN , Yong-Ping CHAN , Wei-Chun HSU , Chen-Yun WANG
发明人: Chih Ching LIN , Yong-Ping CHAN , Wei-Chun HSU , Chen-Yun WANG
IPC分类号: H01L31/0216 , H01L31/18
CPC分类号: H01L31/022466 , H01L31/022483 , H01L31/0322 , H01L31/03923 , H01L31/073 , H01L31/0749 , H01L31/18 , Y02E10/541 , Y02E10/543 , Y02P70/521
摘要: A thin film solar cell and process for forming the same. The solar cell includes a bottom electrode layer, semiconductor light absorbing layer, and a TCO top electrode layer. In one embodiment, a TCO seed layer is formed between the top electrode and absorber layers to improve adhesion of the top electrode layer to the absorber layer. In one embodiment, the seed layer is formed at a lower temperature than the TCO top electrode layer and has a different microstructure.
摘要翻译: 薄膜太阳能电池及其形成方法。 太阳能电池包括底电极层,半导体光吸收层和TCO顶电极层。 在一个实施例中,在顶部电极和吸收层之间形成TCO种子层,以改善顶部电极层与吸收层的粘附。 在一个实施方案中,种子层形成在比TCO顶部电极层低的温度下,具有不同的微结构。
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公开(公告)号:US06934143B2
公开(公告)日:2005-08-23
申请号:US10678236
申请日:2003-10-03
申请人: You-Hua Chou , Yen-Shuo Su , Yen-Chang Chao , Jain-Shing Tsai , Yong-Ping Chan , Jung-Chen Yang
发明人: You-Hua Chou , Yen-Shuo Su , Yen-Chang Chao , Jain-Shing Tsai , Yong-Ping Chan , Jung-Chen Yang
IPC分类号: H01G4/005 , H01G4/06 , H01G4/228 , H01G4/232 , H01G4/30 , H01G4/33 , H01G4/38 , H01L21/02 , H01L23/522
CPC分类号: H01G4/33 , H01G4/005 , H01G4/232 , H01G4/30 , H01G4/38 , H01L23/5223 , H01L28/82 , H01L2924/0002 , Y10T29/435 , H01L2924/00
摘要: A capacitor having an electrically/conductive plate, an electrically conductive segmented electrically conductive plate segments and a second plurality of electrically conductive plate segments, a first capacitor dielectric disposed between the plate and the segment plate, at least one electrically conductive interconnect coupling each of the plate segment of one of the first and second plurality of plate segments to the plate, and a second capacitor dieletric disposed between the plate segments.
摘要翻译: 具有电/导电板的电容器,导电分段的导电板段和第二多个导电板段,设置在板和段板之间的第一电容器电介质,至少一个导电互连, 所述第一和第二多个板段中的一个的板段到所述板,以及设置在所述板段之间的第二电容器。
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