Abstract:
The present invention relates to a method for forming a TiO2 thin film on a substrate by using an atmospheric pressure CVD method, in which a raw material gas contains titanium tetraisopropoxide (TTIP) and a chloride of a metal M vaporizable in a temperature range of 100 to 400° C. and the amount of the chloride of the metal M is from 0.01 to 0.18 as a concentration ratio to the titanium tetraisopropoxide (TTIP) (chloride of metal M (mol %)/TTIP (mol %)).
Abstract:
A carrier substrate to be used, when manufacturing a member for an electronic device on a surface of a substrate, by being bonded to the substrate, includes at least a first glass substrate. The first glass substrate has a compaction described below of 80 ppm or less. Compaction is a shrinkage in a case of subjecting the first glass substrate to a temperature raising from a room temperature at 100° C./hour and to a heat treatment at 600° C. for 80 minutes, and then to a cooling to the room temperature at 100° C./hour.
Abstract:
A substrate with conductive film includes a base material; and a film of a conductive metal oxide arranged on an upper part of the base material. The film includes, by a top plan view, a first region and a second region, the second region is configured of a same material as the first region, and an electric resistance of the second region is higher than an electric resistance of the first region. The second region includes a part configured by a plurality of cellular sections surrounded by a plurality of fine cracks. In the part, each fine crack has a width of 1 nm to 50 nm, and each cellular section has a largest measure of less than 10 μm.
Abstract:
A glass substrate for a Cu—In—Ga—Se solar cell. The glass substrate contains specific oxides with the specific amounts, respectively. The glass substrate has a glass transition temperature of from 650 to 750° C., an average coefficient of thermal expansion within a range of from 50 to 350° C. of from 75×10−7 to 95×10−7/° C., a relationship between a temperature (T4), at which a viscosity reaches 104 dPa·s, and a devitrification temperature (TL) of T4−TL≧−30° C., a density of 2.6 g/cm3 or less, and a brittleness index of less than 7,000 m−1/2.