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公开(公告)号:US09505945B2
公开(公告)日:2016-11-29
申请号:US14527939
申请日:2014-10-30
发明人: Hengpeng Wu , Jian Yin , Guanyang Lin , JiHoon Kim , Margareta Paunescu
IPC分类号: B05D3/02 , B05D3/14 , C08F299/04 , C09D153/00 , H01J37/32 , C08F230/08 , C08F8/42 , C08F293/00 , C08L53/00 , G03F7/038 , B82Y30/00
CPC分类号: C09D153/00 , B05D3/0209 , B05D3/145 , B82Y30/00 , C08F8/42 , C08F230/08 , C08F293/005 , C08F299/04 , C08L53/005 , G03F7/0002 , G03F7/038 , H01J37/32366 , C08F297/02
摘要: The present invention relates to a novel diblock copolymer comprising a repeat unit (1) and a repeat unit (2), where R1 is hydrogen or C1-C4 alkyl, R2 is selected from a group chosen from hydrogen, C1-C4 alkyl, C1-C4 alkoxy and halide, R3 is selected from a group chosen from hydrogen, C1-C4 alkyl and C1-C4 fluoroalkyl, and R4, R5, R6, R7, R8, R9, R10, R11, and R12 are independently chosen from a C1-C4 alkyl and n=1-6. The invention also relates to a novel composition comprising the novel polymer and a solvent. The invention further relates to a process utilizing the novel composition for affecting directed self-assembly of the block copolymer.
摘要翻译: 本发明还涉及包含新型聚合物和溶剂的新型组合物。 本发明还涉及利用该组合物影响嵌段共聚物的定向自组装的方法。
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公开(公告)号:US20170174931A1
公开(公告)日:2017-06-22
申请号:US14975969
申请日:2015-12-21
发明人: Guanyang Lin , Hengpeng Wu , JiHoon Kim , Jian Yin , Durairaj Baskaran , Jianhui Shan
IPC分类号: C09D151/00 , B05D3/02 , H01L21/02 , H01L21/324 , H01L21/027
CPC分类号: C09D151/003 , B05D3/02 , C09D133/08 , C09D135/06 , H01L21/02118 , H01L21/0271 , H01L21/324
摘要: The present invention relates to non aqueous, graftable coating composition comprised of a homogenous solution of a polymer and a spin casting organic solvent, where the composition does not contain acidic compounds, coloring particles, pigments or dyes, and the polymer has a linear polymer chain structure which is comprised of repeat units derived from monomers containing a single polymerizable olefinic carbon double bond, and the polymer contains at least one triarylmethyl chalcogenide containing moiety which is selected from the group consisting of repeat units having structure (I) an end chain group unit of structure (II) and mixtures thereof, and the polymer does not contain any repeat units or end groups containing water ionizable groups, ionic groups, free thiol groups, or free hydroxy groups, and where A1, A2, and A3 are independently an Aryl or a substituted Aryl; Y is a chalcogen selected from O, S, Se or Te; X1 and X2 are individually selected organic spacers; P1 is an organic polymer repeat unit moiety derived from a monomer containing a single polymerizable olefinic carbon double bound, and P2 is an end group moiety derived from a monomer containing a single polymerizable olefinic carbon double bound, and represents a direct valence bond to the linear polymer. The invention also relates to using this novel coating composition to form a grafted polymer film on a substrate.
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公开(公告)号:US09574104B1
公开(公告)日:2017-02-21
申请号:US14885328
申请日:2015-10-16
发明人: JiHoon Kim , Jian Yin , Hengpeng Wu , Jianhui Shan , Guanyang Lin
IPC分类号: C09D133/12 , G03F7/00 , C08F220/18 , G03F7/11 , G03F7/16 , G03F7/20 , H01L21/027 , C08L53/00 , G03F7/40
CPC分类号: C09D133/12 , B82Y10/00 , B82Y40/00 , C07C255/65 , C08F212/08 , C08F212/32 , C08F220/18 , C08L53/00 , C09D125/14 , C09D125/16 , G03F7/0002 , G03F7/40 , H01L21/0273 , H01L21/0274 , H01L21/0276 , C08F220/14 , C08F4/04
摘要: The present invention relates to novel copolymers containing cross-linkable and graft-able moieties, novel compositions comprised of these novel copolymers and a solvent, and methods for using these novel compositions to form neutral layer films which are both cross-linked and grafted on the substrate which are used in processes for aligning microdomains of block copolymers (BCP) on this neutral layer coated substrate such as self-assembly and directed self-assembly. The novel compositions are comprised of at least one novel random copolymer comprised of least one unit of structure (1), at least one unit of structure (2) at least one unit of structure (3) one H end group and one end group having structure (1′); where R1 is selected from the group consisting of a C1-C8 alkyl, C1-C8 fluoroalkyl, C1-C8 partially fluorinated alkyl moiety, C4-C8 cycloalkyl, C4-C8 cyclofluoroalkyl, C4-C8 partially fluorinated cycloalkyl, and a C2-C8 hydroxyalkyl; R2, R3 and R5 are independently selected from a group consisting of H, C1-C4 alkyl, CF3 and F; R4 is selected from the group consisting of H, C1-C8 alkyl, C1-C8 partially fluorinated alkyl moiety and C1-C8 fluoroalkyl, n ranges from 1 to 5, R6 is selected from the group consisting of H, F, C1-C8 alkyl and a C1-C8 fluoroalkyl and m ranges from 1 to 3, and n′ ranges from 1 to 5, and n″ ranges from 1 to 5, n′″ ranges from 1 to 5, R7 is a C1 to C8 alkyl and X is —CN, or an alkyloxycarbonyl moiety R8—O—(C═O)— where R8 is a C1 to C8 alkyl and represent the attachment point of the end group to the polymer. The novel polymers, compositions and processes are useful for fabrication of electronic devices.
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公开(公告)号:US10155879B2
公开(公告)日:2018-12-18
申请号:US14975969
申请日:2015-12-21
发明人: Guanyang Lin , Hengpeng Wu , JiHoon Kim , Jian Yin , Durairaj Baskaran , Jianhui Shan
IPC分类号: C09D151/00 , C09D133/08 , C09D135/06 , B05D3/02 , H01L21/324 , H01L21/027 , H01L21/02
摘要: The present invention relates to non aqueous, graftable coating composition comprised of a homogenous solution of a polymer and a spin casting organic solvent, where the composition does not contain acidic compounds, coloring particles, pigments or dyes, and the polymer has a linear polymer chain structure which is comprised of repeat units derived from monomers containing a single polymerizable olefinic carbon double bond, and the polymer contains at least one triarylmethyl chalcogenide containing moiety which is selected from the group consisting of repeat units having structure (I) an end chain group unit of structure (II) and mixtures thereof, and the polymer does not contain any repeat units or end groups containing water ionizable groups, ionic groups, free thiol groups, or free hydroxy groups, and where A1, A2, and A3 are independently an Aryl or a substituted Aryl; Y is a chalcogen selected from O, S, Se or Te; X1 and X2 are individually selected organic spacers; P1 is an organic polymer repeat unit moiety derived from a monomer containing a single polymerizable olefinic carbon double bound, and P2 is an end group moiety derived from a monomer containing a single polymerizable olefinic carbon double bound, and represents a direct valence bond to the linear polymer. The invention also relates to using this novel coating composition to form a grafted polymer film on a substrate.
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公开(公告)号:US10259907B2
公开(公告)日:2019-04-16
申请号:US14628002
申请日:2015-02-20
发明人: Ankit Vora , Eri Hirahara , Joy Cheng , Durairaj Baskaran , Orest Polishchuk , Melia Tjio , Margareta Paunescu , Daniel Sanders , Guanyang Lin
IPC分类号: C08G63/08 , C08G64/02 , C08G63/64 , C08J7/04 , C09D167/04 , C09D169/00 , C08F293/00 , G03F7/00 , B82Y30/00
摘要: The present invention relates to a novel block copolymer of structure 1, wherein, A- is a block polymer chain, B is a block polymer chain, wherein, A- and B- are chemically different, covalently connected polymer chains, which are phase separable and the moiety X(Y(Z)b)a is a junction group, which comprises a surface active pendant moiety Y(Z)b wherein: a is an integer from 1 to 4 denoting the number of surface active pendant moieties Y(Z)b on X, b is an integer from 1 to 5 denoting the number of Z moieties on the linking moiety Y, X is a linking group between the A polymer block, the B polymer block and the moiety Y, Y is a linking group or a direct valence bond between X and Z; and Z is a moiety independently selected from, a fluorine containing moiety, a Si1-Si8 siloxane containing moiety or a hydrocarbon moiety with at least 18 carbons, and further wherein the junction group X(Y(Z)b)a has a surface energy less than that that of the block A and less than that of the block B. The invention also relates to a composition comprising the novel copolymer and its use in direct self-assembly processes.
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