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    Low-Dimensional Material Chemical Vapor Sensors
    1.
    发明申请
    Low-Dimensional Material Chemical Vapor Sensors 有权
    低维材料化学气相传感器

    公开(公告)号：US20140273259A1

    公开(公告)日：2014-09-18

    申请号：US14075840

    申请日：2013-11-08

    申请人： Adam L. Friedman ,  F. Keith Perkins ,  Enrique Cobas ,  Paul M. Campbell ,  Glenn G. Jernigan ,  Berend T. Jonker

    发明人： Adam L. Friedman ,  F. Keith Perkins ,  Enrique Cobas ,  Paul M. Campbell ,  Glenn G. Jernigan ,  Berend T. Jonker

    IPC分类号： G01N27/12 ,  G01N33/00

    CPC分类号： G01N27/125 ,  B82Y15/00 ,  G01N27/02 ,  G01N33/0027 ,  G01N33/0036 ,  G01N33/0057 ,  Y10T29/49117 ,  Y10T436/17 ,  Y10T436/173845 ,  Y10T436/174614

    摘要： A method of making a low-dimensional material chemical vapor sensor comprising exfoliating MoS2, applying the monolayer flakes of MoS2 onto a SiO2/Si wafer, applying a methylmethacrylate (MMA)/polymethylmethacrylate (PMMA) film, defining trenches for the deposition of metal contacts, and depositing one of Ti/Au, Au, and Pt in the trench and resulting in a MoS2 sensor. A low-dimensional material chemical vapor sensor comprising monolayer flakes of MoS2, trenches in the SiO2/Si wafer, metal contacts in the trenches, and thereby resulting in a MoS2 sensor. A full spectrum sensing suite comprising similarly fabricated parallel sensors made from a variety of low-dimensional materials including graphene, carbon nanotubes, MoS2, BN, and the family of transition metal dichalcogenides. The sensing suites are small, robust, sensitive, low-power, inexpensive, and fast in their response to chemical vapor analytes.

    摘要翻译： 一种制备低分子材料化学气相传感器的方法，其包括去除MoS2，将MoS2的单层薄片施加到SiO 2 / Si晶片上，施加甲基丙烯酸甲酯（MMA）/聚甲基丙烯酸甲酯（PMMA）膜，限定用于沉积金属触点的沟槽 ，并在沟槽中沉积Ti / Au，Au和Pt中的一种，并产生MoS2传感器。 包括MoS2的单层薄片，SiO 2 / Si晶片中的沟槽，沟槽中的金属触点，从而产生MoS2传感器的低维材料化学气相传感器。 全频谱感测套件包括由包括石墨烯，碳纳米管，MoS2，BN和过渡金属二硫属化物族的各种低维材料制成的类似制造的平行传感器。 感应套件小巧，坚固，灵敏，低功耗，廉价，快速响应化学气相分析物。

    Low-dimensional material chemical vapor sensors
    2.
    发明授权
    Low-dimensional material chemical vapor sensors 有权
    低维材料化学气相传感器

    公开(公告)号：US09063063B2

    公开(公告)日：2015-06-23

    申请号：US14075840

    申请日：2013-11-08

    申请人： Adam L. Friedman ,  F. Keith Perkins ,  Enrique Cobas ,  Paul M Campbell ,  Glenn G. Jernigan ,  Berend T Jonker

    发明人： Adam L. Friedman ,  F. Keith Perkins ,  Enrique Cobas ,  Paul M Campbell ,  Glenn G. Jernigan ,  Berend T Jonker

    IPC分类号： G01N27/12 ,  G01N27/02 ,  G01N27/00 ,  G01N33/00 ,  B82Y15/00

    CPC分类号： G01N27/125 ,  B82Y15/00 ,  G01N27/02 ,  G01N33/0027 ,  G01N33/0036 ,  G01N33/0057 ,  Y10T29/49117 ,  Y10T436/17 ,  Y10T436/173845 ,  Y10T436/174614

    摘要： A method of making a low-dimensional material chemical vapor sensor comprising exfoliating MoS2, applying the monolayer flakes of MoS2 onto a SiO2/Si wafer, applying a methylmethacrylate (MMA)/polymethylmethacrylate (PMMA) film, defining trenches for the deposition of metal contacts, and depositing one of Ti/Au, Au, and Pt in the trench and resulting in a MoS2 sensor. A low-dimensional material chemical vapor sensor comprising monolayer flakes of MoS2, trenches in the SiO2/Si wafer, metal contacts in the trenches, and thereby resulting in a MoS2 sensor. A full spectrum sensing suite comprising similarly fabricated parallel sensors made from a variety of low-dimensional materials including graphene, carbon nanotubes, MoS2, BN, and the family of transition metal dichalcogenides. The sensing suites are small, robust, sensitive, low-power, inexpensive, and fast in their response to chemical vapor analytes.

    摘要翻译： 一种制备低分子材料化学气相传感器的方法，其包括去除MoS2，将MoS2的单层薄片施加到SiO 2 / Si晶片上，施加甲基丙烯酸甲酯（MMA）/聚甲基丙烯酸甲酯（PMMA）膜，限定用于沉积金属触点的沟槽 ，并在沟槽中沉积Ti / Au，Au和Pt中的一种，并产生MoS2传感器。 包括MoS2的单层薄片，SiO 2 / Si晶片中的沟槽，沟槽中的金属触点，从而产生MoS2传感器的低维材料化学气相传感器。 全频谱感测套件包括由包括石墨烯，碳纳米管，MoS2，BN和过渡金属二硫属化物族的各种低维材料制成的类似制造的平行传感器。 感应套件小巧，坚固，灵敏，低功耗，廉价，快速响应化学气相分析物。

    Molecular concentrator based on thermal ratcheting
    3.
    发明授权
    Molecular concentrator based on thermal ratcheting 有权
    基于热棘轮的分子浓缩器

    公开(公告)号：US08986615B1

    公开(公告)日：2015-03-24

    申请号：US14279394

    申请日：2014-05-16

    申请人： Mario Ancona ,  Arthur W. Snow ,  F. Keith Perkins

    发明人： Mario Ancona ,  Arthur W. Snow ,  F. Keith Perkins

    IPC分类号： G01N30/00 ,  G01N1/40 ,  G01N30/38 ,  B01D53/04

    CPC分类号： G01N1/405 ,  B01D53/0462 ,  G01N1/4022 ,  G01N30/38 ,  G01N2030/008

    摘要： A molecular concentrator comprising a thermal ratchet for driving molecules from one place to another. A plurality of conducting wires are arranged on or suspended above a substrate. Each of the wires is configured to strongly sorb a vapor of interest when the wire is at room temperature and to rapidly desorb the vapor when the wire is at an elevated temperature. By selectively heating and cooling the wires, vapor molecules incident on the wires can be directed in a desired manner, e.g., from the wires closest to the vapor-containing environment to a sensor.

    摘要翻译： 一种分子浓缩器，包括用于将分子从一个地方驱动到另一个地方的热棘轮。 多个导线布置在衬底上或悬浮在衬底上。 当导线处于室温时，每个导线被配置为强烈吸附感兴趣的蒸气，并且当导线处于升高的温度时快速解吸蒸气。 通过选择性地加热和冷却电线，入射到电线上的蒸汽分子可以以所需的方式被引导，例如从最接近含蒸汽的环境的电线到达传感器。

    Preparing Electrodes for Electroplating
    4.
    发明申请
    Preparing Electrodes for Electroplating 有权
    准备电镀电极

    公开(公告)号：US20100300887A1

    公开(公告)日：2010-12-02

    申请号：US12476522

    申请日：2009-06-02

    申请人： Perry Skeath ,  F. Keith Perkins ,  Lee James Johnson ,  John R. Peele ,  William Bassett

    发明人： Perry Skeath ,  F. Keith Perkins ,  Lee James Johnson ,  John R. Peele ,  William Bassett

    IPC分类号： C25D5/54 ,  C25D5/00

    CPC分类号： C25D5/54 ,  C25D5/003 ,  C25D5/028 ,  C25D17/10 ,  C25D21/02 ,  C25D21/04

    摘要： A method of immersing an electrode in an electroplating solution while under vacuum, to substantially eliminate air and/or other gas from microscopic holes, cavities or indentations in the electrode. A method of electroplating an electrode in an electroplating solution including the application of a vacuum to the electrode while it is immersed in the electroplating solution to thereby substantially eliminate air and/or other gas from microscopic holes, cavities or indentations in the electrode. The electroplating liquid may be applied to only one side of the electrode (“the wet side”) in which case, sufficient time is allowed to pass for the immersion liquid to fill the microscopic through-holes, cavities or indentations in the electrode. An enhancement of this mode is to force liquid through the microscopic holes from the wet side. A highly penetrating solvent may be used as an immersion liquid. Alternatively, carbon dioxide can be used as an immersion liquid, in which case the liquid carbon dioxide may be obtained by adjusting the temperature and pressure conditions in a closed container of gaseous carbon dioxide.

    摘要翻译： 一种在真空下将电极浸入电镀溶液中的方法，以基本上从电极中的微孔，空腔或凹陷中消除空气和/或其它气体。 一种在电镀溶液中电镀电极的方法，包括在将电极浸入电镀溶液中时向电极施加真空，从而基本上从电极中的微孔，空腔或凹陷中消除空气和/或其它气体。 电镀液体可以仅施加到电极的一侧（“湿侧”），在这种情况下，允许足够的时间通过浸液以填充电极中的微小通孔，空腔或凹陷。 这种模式的增强是迫使液体通过来自湿侧的微孔。 可以使用高渗透性的溶剂作为浸液。 或者，可以使用二氧化碳作为浸液，在这种情况下，可以通过调节气态二氧化碳的密闭容器中的温度和压力条件来获得液态二氧化碳。

    Molecular concentrator based on thermal ratcheting
    5.
    发明授权
    Molecular concentrator based on thermal ratcheting 有权
    基于热棘轮的分子浓缩器

    公开(公告)号：US09157842B1

    公开(公告)日：2015-10-13

    申请号：US14614481

    申请日：2015-02-05

    申请人： Mario Ancona ,  Arthur W. Snow ,  F. Keith Perkins

    发明人： Mario Ancona ,  Arthur W. Snow ,  F. Keith Perkins

    IPC分类号： G01N1/40 ,  B01D53/04 ,  G01N30/38

    CPC分类号： G01N1/405 ,  B01D53/0462 ,  G01N30/38 ,  G01N2030/008

    摘要： A molecular concentrator comprising a thermal ratchet for driving molecules from one place to another. A plurality of linear, two-dimensional, and/or three-dimensional arrangements of heater structures are arranged on or suspended above a substrate. Each of the heater structures is configured to strongly sorb a vapor of interest when the heater structure is at room temperature and to rapidly desorb the vapor when the heater structure is at an elevated temperature. The vapor sorption of the individual heater structures is made selective by surface treatments, by monomolecular film depositions or by thicker absorbent polymer depositions. By selectively heating and cooling the heater structures, vapor molecules incident on the heater structures can be directed in a desired manner, e.g., from heater structures closest to a vapor-containing environment to a sensor.

    摘要翻译： 一种分子浓缩器，包括用于将分子从一个地方驱动到另一个地方的热棘轮。 加热器结构的多个线性，二维和/或三维布置布置在衬底上或悬浮在衬底上。 每个加热器结构被构造成当加热器结构处于室温时强烈吸附感兴趣的蒸汽，并且当加热器结构处于升高的温度时快速解吸蒸气。 通过表面处理，单分子膜沉积或较厚的吸收性聚合物沉积，各个加热器结构的蒸气吸附是选择性的。 通过选择性地加热和冷却加热器结构，入射在加热器结构上的蒸汽分子可以以所需的方式被引导，例如从最接近含蒸汽的环境的加热器结构引导到传感器。

    Preparing electrodes for electroplating
    7.
    发明授权
    Preparing electrodes for electroplating 有权
    准备电极用于电镀

    公开(公告)号：US08404095B2

    公开(公告)日：2013-03-26

    申请号：US12476522

    申请日：2009-06-02

    申请人： F. Keith Perkins ,  Perry Skeath ,  Lee Johnson ,  John Peele ,  William Bassett

    发明人： F. Keith Perkins ,  Perry Skeath ,  Lee Johnson ,  John Peele ,  William Bassett

    IPC分类号： C25D5/00 ,  C25D5/54

    CPC分类号： C25D5/54 ,  C25D5/003 ,  C25D5/028 ,  C25D17/10 ,  C25D21/02 ,  C25D21/04

    摘要： A method of immersing an electrode in an electroplating solution while under vacuum, to substantially eliminate air and/or other gas from microscopic holes, cavities or indentations in the electrode. A method of electroplating an electrode in an electroplating solution including the application of a vacuum to the electrode while it is immersed in the electroplating solution to thereby substantially eliminate air and/or other gas from microscopic holes, cavities or indentations in the electrode. The electroplating liquid may be applied to only one side of the electrode (“the wet side”) in which case, sufficient time is allowed to pass for the immersion liquid to fill the microscopic through-holes, cavities or indentations in the electrode. An enhancement of this mode is to force liquid through the microscopic holes from the wet side. A highly penetrating solvent may be used as an immersion liquid. Alternatively, carbon dioxide can be used as an immersion liquid, in which case the liquid carbon dioxide may be obtained by adjusting the temperature and pressure conditions in a closed container of gaseous carbon dioxide.

    摘要翻译： 一种在真空下将电极浸入电镀溶液中的方法，以基本上从电极中的微孔，空腔或凹陷中消除空气和/或其它气体。 一种在电镀溶液中电镀电极的方法，包括在将电极浸入电镀溶液中时向电极施加真空，从而基本上从电极中的微孔，空腔或凹陷中消除空气和/或其它气体。 电镀液体仅可以施加到电极的一侧（湿侧），在这种情况下，允许足够的时间通过浸液以填充电极中的微小通孔，空腔或凹陷。 这种模式的增强是迫使液体通过来自湿侧的微孔。 可以使用高渗透性的溶剂作为浸液。 或者，可以使用二氧化碳作为浸没液体，在这种情况下，可以通过调节气态二氧化碳的密闭容器中的温度和压力条件来获得液态二氧化碳。

    Analog to digital converter using sawtooth voltage signals with differential comparator
    8.
    发明授权
    Analog to digital converter using sawtooth voltage signals with differential comparator 失效
    模数转换器采用锯齿波电压信号与差分比较器

    公开(公告)号：US07158067B2

    公开(公告)日：2007-01-02

    申请号：US11053756

    申请日：2005-01-31

    申请人： Keir C. Lauritzen ,  Martin Peckerar ,  F. Keith Perkins ,  Angela M. Hodge-Miller

    发明人： Keir C. Lauritzen ,  Martin Peckerar ,  F. Keith Perkins ,  Angela M. Hodge-Miller

    IPC分类号： H03M1/12 ,  H03M1/00 ,  H03K4/06

    CPC分类号： H03M1/368

    摘要： An analog to digital converter includes a resistor-divider network including a plurality of resistors, an arbel channel circuit configured to generate a voltage sawtooth signal as an output, a dc-offset disposed to couple a node of the resistor-divider network and the arbel-channel circuit. The converter further includes a voltage reference circuit configured to generate a reference voltage, and a differential comparator configured to compare the voltage sawtooth signal with the reference voltage to produce a digital output signal corresponding to the voltage sawtooth signal. Method of converting an analog signal to a digital signal is also described.

    摘要翻译： 模数转换器包括包括多个电阻器的电阻分压网络，配置成产生电压锯齿波信号作为输出的阿贝尔通道电路，用于耦合电阻分压器网络的节点和阿贝 通道电路。 转换器还包括被配置为产生参考电压的电压参考电路，以及差分比较器，被配置为将电压锯齿波信号与参考电压进行比较，以产生对应于电压锯齿波信号的数字输出信号。 还描述了将模拟信号转换为数字信号的方法。

    Fiducial beam position monitor
    10.
    发明授权
    Fiducial beam position monitor 失效
    基准光束位置监视器

    公开(公告)号：US06392242B1

    公开(公告)日：2002-05-21

    申请号：US09320673

    申请日：1999-05-27

    申请人： F. Keith Perkins ,  Daniel McCarthy ,  Martin C. Peckerar ,  Christie R. K. Marrian ,  Eric S. Snow

    发明人： F. Keith Perkins ,  Daniel McCarthy ,  Martin C. Peckerar ,  Christie R. K. Marrian ,  Eric S. Snow

    IPC分类号： G01I100

    CPC分类号： H01J37/3045 ,  H01J2237/30438

    摘要： A fiducial beam monitor includes a patterned diode layer on a semiconducting substrate. An electrical field between the diode (or diodes) on the diode layer and the semiconducting substrate modulates the size of the depletion layer formed by the diode or diode. A high energy beam incident upon a diode on the diode layer produces a greater current than a high energy beam incident upon a non-diodic region of the same layer. In use, the beam monitor is typically fixed to the backside of a workpiece such as a semitransparent membrane being patterned by a focused high energy beam that is translated with respect to workpiece and attached monitor. The changes in current during translation are then correlated with the position of the beam with respect to the pattern on the diode layer.

    摘要翻译： 基准光束监视器包括在半导体衬底上的图案化二极管层。 二极管层上的二极管（或二极管）和半导体衬底之间的电场调制由二极管或二极管形成的耗尽层的尺寸。 入射到二极管层上的二极管上的高能束产生比入射在同一层的非二极区上的高能量束更大的电流。 在使用中，光束监视器通常固定在工件的背面，例如通过相对于工件和连接的监视器平移的聚焦的高能量光束来图案化的半透明膜。 然后平移过程中的电流变化与二极管层上图案的光束位置相关。