摘要:
To provide a polishing composition whereby the stock removal rate of a silicon nitride layer is higher than the stock removal rate of a silicon oxide layer, there is substantially no adverse effect against polishing planarization, and a sufficient stock removal rate of a silicon nitride layer is obtainable, and a polishing method employing such a composition. A polishing composition which has silicon oxide abrasive grains, an acidic additive and water, wherein the acidic additive is such that when it is formed into a 85 wt % aqueous solution, the chemical etching rate of the silicon nitride layer is at most 0.1 nm/hr in an atmosphere of 80° C. Particularly preferred is one wherein the silicon oxide abrasive grains have an average particle size of from 1 to 50 nm, and the pH of the composition is from 3.5 to 6.5.
摘要:
To provide a polishing composition whereby the stock removal rate of a silicon nitride layer is higher than the stock removal rate of a silicon oxide layer, there is substantially no adverse effect against polishing planarization, and a sufficient stock removal rate of a silicon nitride layer is obtainable, and a polishing method employing such a composition. A polishing composition which comprises silicon oxide abrasive grains, an acidic additive and water, wherein the acidic additive is such that when it is formed into a 85 wt % aqueous solution, the chemical etching rate of the silicon nitride layer is at most 0.1 nm/hr in an atmosphere of 80° C. Particularly preferred is one wherein the silicon oxide abrasive grains have an average particle size of from 1 to 50 nm, and the pH of the composition is from 3.5 to 6.5.
摘要:
To provide a polishing composition which is capable of selectively polishing a silicon oxide film against a polysilicon film, and a polishing method employing such a polishing composition.The polishing composition of the present invention comprises abrasive grains selected from silica and ceria; an alkali selected from ammonia, an ammonium salt, an alkali metal salt and an alkali metal hydroxide; and an organic modified silicone oil selected from a polyoxyethylene-modified silicone oil, a poly(oxyethyleneoxypropylene)-modified silicone oil, an epoxy/polyether-modified silicone oil and an amino/polyether-modified silicone oil.
摘要:
A polishing composition of the present invention contains cerium oxide abrasive grains with surfaces having an adsorption layer formed by adsorption of silicon oxide fine grains. The polishing composition is used in an application for polishing a polishing subject including a laminated body and a silicon oxide film arranged on the laminated body. The laminated body has a semiconductor substrate formed from a monocrystalline silicon or a polycrystalline silicon, a silicon nitride film arranged on the semiconductor substrate, and a surface with grooves. The polishing composition removes a portion of the silicon oxide film located outside the groove.
摘要:
A conductive film includes a layer 1 formed by a conductive material 1 that includes a polymer material 1 containing any of (1) an amine and an epoxy resin (where the epoxy resin and the amine are mixed in a ratio of 1.0 or more in terms of the ratio of the number of active hydrogen atoms in the amine with respect to the number of functional groups in the epoxy resin), (2) a phenoxy resin and an epoxy resin, (3) a saturated hydrocarbon polymer having a hydroxyl group, and (4) a curable resin and an elastomer and conductive particles 1. The conductive film has excellent stability in an equilibrium potential environment in a negative electrode and low electric resistance per unit area in the thickness direction. A multilayer conductive film including the conductive film achieves excellent interlayer adhesion, and using them as a current collector enables the production of a battery satisfying both weight reduction and durability.
摘要:
A bearing assembly includes an IC tag with information to be reliably exchanged between the IC tag and an external reader/writer, and a rolling bearing including outer and inner races and rolling elements disposed between the outer and inner races. The IC tag communicates with the external reader/writer device without contacting the reader/writer device, is attached to a metal member of the rolling bearing, includes a tag antenna, and is configured so information can be exchanged between the tag antenna and a reader/writer antenna of the reader/writer device by forming a closed magnetic circuit between the tag antenna and the reader/writer antenna. The IC tag is received in a hole in a metal member surface. The tag antenna includes at least two protrusions facing the opening of the hole and arranged so magnetic fluxes leaving/entering the protrusions pass inside the edge defining the hole opening and extend outside the hole.
摘要:
A searchable encryption resistant to frequency analysis. A conversion rule management device generates a conversion rule table associating a search keyword with a conversion keyword group. Based on the conversion rule table, a data registration device generates registration data associating encrypted data with an encrypted keyword, and registers the registration data in a server device. An information processing device obtains from the conversion rule table a conversion keyword group associated with a specified search keyword, generates an encrypted keyword group, and requests a data search by specifying the encrypted keyword group. Using as a search key an encrypted keyword included in the encrypted keyword group, the server device searches for encrypted data associated with the search key, and returns searched encrypted data. The information processing device decrypts the searched encrypted data, and outputs as a search result search data obtained by decryption.
摘要:
When a switch is set to off, and a switch is set to on, the voltage of a SigOut terminal is stabilized with a reference voltage, and a bias voltage is applied to a capacitor. Changing the switch from on to off, with the bias voltage retained in the capacitor, a detection signal which is input via a SigIn terminal is amplified with the reference voltage as a reference, and an amplified signal is output from the SigOut terminal.
摘要:
A data search server stores a system ciphertext including a data ciphertext and a keyword ciphertext in each category-specific DB unit for each data category, and stores each category-determination secret key being associated with each category-specific DB unit. A search request receiving unit receives from a data search terminal a search request including a search trapdoor and an index tag. A data searching unit searches for a category-determination secret key with which the index tag is decrypted to the same value as a key-determination value. Using the search trapdoor, the data searching unit performs a search of a Public-key Encryption with Keyword Search scheme on system ciphertexts in a category-specific DB unit associated with this category-determination secret key. A search result transmitting unit transmits to the data search terminal a data ciphertext included in a system ciphertext which has been found as a hit in the search.
摘要:
A lifetime estimation device to estimate a lifetime of a rolling bearing assembly comprising inner and outer rings includes a buildup height estimation unit to estimate in accordance with a predetermined rule a buildup height of the indentation based on the inputted depth of the indentation or the inputted indentation size; and a lifetime estimation unit to estimate the lifetime of the rolling bearing assembly, the lifetime estimation unit being configured to determine a preliminary estimate of the lifetime of the rolling bearing assembly based on a dynamic equivalent load, determine a rate of reduction in a rolling fatigue life based on the buildup height of the indentation, and apply the determined rate of reduction in a rolling fatigue life to the preliminary estimate of the lifetime of the rolling bearing assembly to determine an estimate of the lifetime of the rolling bearing assembly.