Composition for selectively polishing silicon nitride layer and polishing method employing it
    1.
    发明授权
    Composition for selectively polishing silicon nitride layer and polishing method employing it 有权
    用于选择性抛光氮化硅层的组合物和使用它的抛光方法

    公开(公告)号:US07217989B2

    公开(公告)日:2007-05-15

    申请号:US11251880

    申请日:2005-10-18

    IPC分类号: H01L23/58

    CPC分类号: C09G1/02 H01L21/31053

    摘要: To provide a polishing composition whereby the stock removal rate of a silicon nitride layer is higher than the stock removal rate of a silicon oxide layer, there is substantially no adverse effect against polishing planarization, and a sufficient stock removal rate of a silicon nitride layer is obtainable, and a polishing method employing such a composition. A polishing composition which has silicon oxide abrasive grains, an acidic additive and water, wherein the acidic additive is such that when it is formed into a 85 wt % aqueous solution, the chemical etching rate of the silicon nitride layer is at most 0.1 nm/hr in an atmosphere of 80° C. Particularly preferred is one wherein the silicon oxide abrasive grains have an average particle size of from 1 to 50 nm, and the pH of the composition is from 3.5 to 6.5.

    摘要翻译: 为了提供一种抛光组合物,其中氮化硅层的原料去除率高于氧化硅层的原料去除率,对抛光平面化基本上没有不利影响,并且氮化硅层的充分的除屑率为 以及使用这种组合物的抛光方法。 一种具有氧化硅磨粒,酸性添加剂和水的抛光组合物,其中所述酸性添加剂使得当其形成为85重量%的水溶液时,所述氮化硅层的化学蚀刻速率为至多0.1nm / hr。特别优选的是其中氧化硅磨粒的平均粒度为1〜50nm,组合物的pH为3.5〜6.5。

    Composition for selectively polishing silicon nitride layer and polishing method employing it
    2.
    发明申请
    Composition for selectively polishing silicon nitride layer and polishing method employing it 有权
    用于选择性抛光氮化硅层的组合物和使用它的抛光方法

    公开(公告)号:US20060084270A1

    公开(公告)日:2006-04-20

    申请号:US11251880

    申请日:2005-10-18

    IPC分类号: H01L21/302

    CPC分类号: C09G1/02 H01L21/31053

    摘要: To provide a polishing composition whereby the stock removal rate of a silicon nitride layer is higher than the stock removal rate of a silicon oxide layer, there is substantially no adverse effect against polishing planarization, and a sufficient stock removal rate of a silicon nitride layer is obtainable, and a polishing method employing such a composition. A polishing composition which comprises silicon oxide abrasive grains, an acidic additive and water, wherein the acidic additive is such that when it is formed into a 85 wt % aqueous solution, the chemical etching rate of the silicon nitride layer is at most 0.1 nm/hr in an atmosphere of 80° C. Particularly preferred is one wherein the silicon oxide abrasive grains have an average particle size of from 1 to 50 nm, and the pH of the composition is from 3.5 to 6.5.

    摘要翻译: 为了提供一种抛光组合物,其中氮化硅层的原料去除率高于氧化硅层的原料去除率,对抛光平面化基本上没有不利影响,并且氮化硅层的充分的除屑率为 以及使用这种组合物的抛光方法。 一种抛光组合物,其包含氧化硅磨粒,酸性添加剂和水,其中所述酸性添加剂使得当其形成为85重量%的水溶液时,所述氮化硅层的化学蚀刻速率为至多0.1nm / hr。特别优选的是其中氧化硅磨粒的平均粒度为1〜50nm,组合物的pH为3.5〜6.5。

    POLISHING COMPOSITION AND POLISHING METHOD
    3.
    发明申请
    POLISHING COMPOSITION AND POLISHING METHOD 审中-公开
    抛光组合物和抛光方法

    公开(公告)号:US20080125017A1

    公开(公告)日:2008-05-29

    申请号:US11943159

    申请日:2007-11-20

    IPC分类号: B24B1/00 C09K3/14

    摘要: To provide a polishing composition which is capable of selectively polishing a silicon oxide film against a polysilicon film, and a polishing method employing such a polishing composition.The polishing composition of the present invention comprises abrasive grains selected from silica and ceria; an alkali selected from ammonia, an ammonium salt, an alkali metal salt and an alkali metal hydroxide; and an organic modified silicone oil selected from a polyoxyethylene-modified silicone oil, a poly(oxyethyleneoxypropylene)-modified silicone oil, an epoxy/polyether-modified silicone oil and an amino/polyether-modified silicone oil.

    摘要翻译: 提供能够选择性地对多晶硅膜抛光氧化硅膜的抛光组合物和使用这种抛光组合物的抛光方法。 本发明的抛光组合物包含选自二氧化硅和二氧化铈的磨料颗粒; 选自氨,铵盐,碱金属盐和碱金属氢氧化物的碱; 和选自聚氧乙烯改性硅油,聚(氧乙烯氧丙烯)改性硅油,环氧/聚醚改性硅油和氨基/聚醚改性硅油的有机改性硅油。

    Polishing composition and polishing method using same
    4.
    发明申请
    Polishing composition and polishing method using same 审中-公开
    抛光组合物和抛光方法使用相同

    公开(公告)号:US20060258267A1

    公开(公告)日:2006-11-16

    申请号:US10569906

    申请日:2004-08-27

    摘要: A polishing composition of the present invention contains cerium oxide abrasive grains with surfaces having an adsorption layer formed by adsorption of silicon oxide fine grains. The polishing composition is used in an application for polishing a polishing subject including a laminated body and a silicon oxide film arranged on the laminated body. The laminated body has a semiconductor substrate formed from a monocrystalline silicon or a polycrystalline silicon, a silicon nitride film arranged on the semiconductor substrate, and a surface with grooves. The polishing composition removes a portion of the silicon oxide film located outside the groove.

    摘要翻译: 本发明的研磨用组合物含有具有通过吸附氧化硅细粒而形成的吸附层的表面的氧化铈磨粒。 抛光组合物用于抛光包括层压体的抛光对象和布置在层叠体上的氧化硅膜的应用中。 层叠体具有由单晶硅或多晶硅形成的半导体基板,配置在半导体基板上的氮化硅膜和具有槽的表面。 抛光组合物除去位于凹槽外部的氧化硅膜的一部分。

    Bearing assembly including IC tag
    6.
    发明授权
    Bearing assembly including IC tag 有权
    轴承总成包括IC标签

    公开(公告)号:US09441676B2

    公开(公告)日:2016-09-13

    申请号:US14130010

    申请日:2012-06-21

    摘要: A bearing assembly includes an IC tag with information to be reliably exchanged between the IC tag and an external reader/writer, and a rolling bearing including outer and inner races and rolling elements disposed between the outer and inner races. The IC tag communicates with the external reader/writer device without contacting the reader/writer device, is attached to a metal member of the rolling bearing, includes a tag antenna, and is configured so information can be exchanged between the tag antenna and a reader/writer antenna of the reader/writer device by forming a closed magnetic circuit between the tag antenna and the reader/writer antenna. The IC tag is received in a hole in a metal member surface. The tag antenna includes at least two protrusions facing the opening of the hole and arranged so magnetic fluxes leaving/entering the protrusions pass inside the edge defining the hole opening and extend outside the hole.

    摘要翻译: 轴承组件包括具有在IC标签和外部读写器之间可靠交换的信息的IC标签,以及包括设置在外圈和内圈之间的外圈和内圈和滚动元件的滚动轴承。 IC标签与外部读/写器设备通信,而不需要接触读/写器设备,连接到滚动轴承的金属构件,包括标签天线,并且被配置为可以在标签天线和读取器之间交换信息 /写入器天线,通过在标签天线和读/写天线之间形成闭合磁路。 IC标签被容纳在金属构件表面的孔中。 标签天线包括面向孔的开口的至少两个突起,并且布置成使得离开/进入突起的磁通在限定孔开口的边缘内部通过并延伸到孔的外部。

    Search system, search method of search system, and information processing device
    7.
    发明授权
    Search system, search method of search system, and information processing device 有权
    搜索系统,搜索系统的搜索方法和信息处理设备

    公开(公告)号:US09418238B2

    公开(公告)日:2016-08-16

    申请号:US14001028

    申请日:2012-02-20

    摘要: A searchable encryption resistant to frequency analysis. A conversion rule management device generates a conversion rule table associating a search keyword with a conversion keyword group. Based on the conversion rule table, a data registration device generates registration data associating encrypted data with an encrypted keyword, and registers the registration data in a server device. An information processing device obtains from the conversion rule table a conversion keyword group associated with a specified search keyword, generates an encrypted keyword group, and requests a data search by specifying the encrypted keyword group. Using as a search key an encrypted keyword included in the encrypted keyword group, the server device searches for encrypted data associated with the search key, and returns searched encrypted data. The information processing device decrypts the searched encrypted data, and outputs as a search result search data obtained by decryption.

    摘要翻译: 可搜索的加密功能可抵抗频率分析。 转换规则管理装置生成将搜索关键字与转换关键字组关联的转换规则表。 基于转换规则表,数据登记装置生成将加密数据与加密关键词相关联的登记数据,并将注册数据登记在服务器装置中。 信息处理装置从转换规则表获得与指定搜索关键字相关联的转换关键字组,生成加密关键字组,并通过指定加密的关键字组来请求数据搜索。 使用包括在加密关键字组中的加密关键字作为搜索关键字,服务器设备搜索与搜索关键字相关联的加密数据,并返回搜索到的加密数据。 信息处理装置对所搜索的加密数据进行解密,并输出作为通过解密得到的搜索结果的搜索结果。

    Data search device, data search method, data search program, data registration device, data registration method, data registration program, and information processing device
    9.
    发明授权
    Data search device, data search method, data search program, data registration device, data registration method, data registration program, and information processing device 有权
    数据搜索装置,数据搜索方法,数据搜索程序,数据登记装置,数据登记方法,数据登记程序和信息处理装置

    公开(公告)号:US09391965B2

    公开(公告)日:2016-07-12

    申请号:US14350987

    申请日:2012-01-25

    IPC分类号: H04L29/06 H04L9/30

    摘要: A data search server stores a system ciphertext including a data ciphertext and a keyword ciphertext in each category-specific DB unit for each data category, and stores each category-determination secret key being associated with each category-specific DB unit. A search request receiving unit receives from a data search terminal a search request including a search trapdoor and an index tag. A data searching unit searches for a category-determination secret key with which the index tag is decrypted to the same value as a key-determination value. Using the search trapdoor, the data searching unit performs a search of a Public-key Encryption with Keyword Search scheme on system ciphertexts in a category-specific DB unit associated with this category-determination secret key. A search result transmitting unit transmits to the data search terminal a data ciphertext included in a system ciphertext which has been found as a hit in the search.

    摘要翻译: 数据搜索服务器在每个数据类别的每个类别特定DB单元中存储包括数据密文和关键字密文的系统密文,并且存储与每个类别专用DB单元相关联的每个类别确定秘密密钥。 搜索请求接收单元从数据搜索终端接收包括搜索陷门和索引标签的搜索请求。 数据搜索单元搜索索引标签被解密的类别确定秘密密钥与密钥确定值相同的值。 使用搜索陷门,数据搜索单元在与该类别确定秘密密钥相关联的类别特定DB单元中的系统密文上执行关键字搜索方案的公开密钥加密的搜索。 搜索结果发送单元向数据搜索终端发送包括在已经被发现为搜索中的命中的系统密文中的数据密文。

    Life estimation device and life estimation method for rolling bearing
    10.
    发明授权
    Life estimation device and life estimation method for rolling bearing 有权
    滚动轴承寿命估计装置及寿命估算方法

    公开(公告)号:US09329100B2

    公开(公告)日:2016-05-03

    申请号:US13979784

    申请日:2012-01-12

    IPC分类号: G01M13/04

    CPC分类号: G01M13/04 G01M13/045

    摘要: A lifetime estimation device to estimate a lifetime of a rolling bearing assembly comprising inner and outer rings includes a buildup height estimation unit to estimate in accordance with a predetermined rule a buildup height of the indentation based on the inputted depth of the indentation or the inputted indentation size; and a lifetime estimation unit to estimate the lifetime of the rolling bearing assembly, the lifetime estimation unit being configured to determine a preliminary estimate of the lifetime of the rolling bearing assembly based on a dynamic equivalent load, determine a rate of reduction in a rolling fatigue life based on the buildup height of the indentation, and apply the determined rate of reduction in a rolling fatigue life to the preliminary estimate of the lifetime of the rolling bearing assembly to determine an estimate of the lifetime of the rolling bearing assembly.

    摘要翻译: 用于估计包括内环和外环的滚动轴承组件的寿命的寿命估计装置包括累积高度估计单元,其基于所输入的压痕深度或输入的凹痕根据预定规则估计压痕的累积高度 尺寸; 以及寿命估计单元,其估计所述滚动轴承组件的寿命,所述寿命估计单元被配置为基于动态等效载荷来确定所述滚动轴承组件的寿命的初步估计,确定滚动疲劳减少率 基于压痕的积聚高度的寿命,并将确定的滚动疲劳寿命的降低速率应用于滚动轴承组件的寿命的初步估计,以确定滚动轴承组件的寿命的估计。