Plasma processing method and apparatus
    3.
    发明授权
    Plasma processing method and apparatus 失效
    等离子体处理方法和装置

    公开(公告)号:US5651867A

    公开(公告)日:1997-07-29

    申请号:US591935

    申请日:1990-10-02

    摘要: A plasma processing apparatus comprising: a vacuum container; an evacuation means for keeping the interior of the vacuum container at a pressure not higher than atmospheric pressure; a substrate support device for supporting a substrate to be subjected to plasma processing; an electrode for generating plasma in cooperation with the substrate support; a voltage supply for applying a voltage to the electrode; a gas introducing system for introducing a gaseous material into a space where the plasma is produced; a surrounding member for enclosing the space above the substrate support, and a drive for relatively moving the surrounding member to space an end of the surrounding member proximate from the substrate from at least one of the substrate support and the substrate supported thereon by a distance which is short enough to suppress plasma leakage during the plasma processing and to position the end of the surrounding member away from said at least one of the substrate support and the substrate thereon for charging and discharging of the substrate.

    摘要翻译: 一种等离子体处理装置,包括:真空容器; 用于将真空容器的内部保持在不高于大气压的压力的排气装置; 用于支撑待进行等离子体处理的基板的基板支撑装置; 用于与衬底支撑件协作产生等离子体的电极; 用于向电极施加电压的电压源; 用于将气态物质引入制造等离子体的空间中的气体导入系统; 用于封闭衬底支撑件上方的空间的周围构件以及用于相对移动周围构件的驱动器,用于将基板支撑件和支撑在其上的衬底中的至少一个上的衬底附近的邻近基板的一端远离一定距离, 足够短以抑制等离子体处理期间的等离子体泄漏并且使周围部件的端部远离所述至少一个基板支撑件和其上的基板,以对基板进行充电和放电。

    Plasma surface treatment method and apparatus
    4.
    发明授权
    Plasma surface treatment method and apparatus 失效
    等离子体表面处理方法和装置

    公开(公告)号:US5300189A

    公开(公告)日:1994-04-05

    申请号:US51701

    申请日:1987-05-20

    CPC分类号: B29C59/14 B29C2037/90

    摘要: A surface treatment method and apparatus permitting the treatment of a film with plasma with a high treatment speed and a high efficiency without uselessly complicating the construction of a device for realizing it are disclosed. The area where the counter electrode is in contact with the plasma is sufficiently larger than the area where the rotating electrode is in contact therewith. The ratio of the areas is preferably not smaller than 1.5 and the etching speed may be increased to a value more than ten times as great as that obtained by a prior art method.

    摘要翻译: 公开了一种能够以高处理速度和高效率处理具有等离子体的膜的表面处理方法和装置,而没有使实现装置的结构无任何复杂化。 对电极与等离子体接触的区域比旋转电极与其接触的面积充分大。 面积比优选为1.5以上,蚀刻速度可以提高到通过现有技术得到的数值的10倍以上的值。

    Magnetic recording medium, method of manufacturing the magnetic recording medium and a magnetic disk drive using the magnetic recording medium
    9.
    发明申请
    Magnetic recording medium, method of manufacturing the magnetic recording medium and a magnetic disk drive using the magnetic recording medium 审中-公开
    磁记录介质,磁记录介质的制造方法和使用该磁记录介质的磁盘驱动器

    公开(公告)号:US20060121317A1

    公开(公告)日:2006-06-08

    申请号:US11288546

    申请日:2005-11-28

    IPC分类号: B05D5/12

    摘要: The present invention restricts defect density on the magnetic disk based on predetermined polishing conditions by applying a magnetic field to the entire surface of a magnetic disk in a direction vertical thereto, rotating the magnetic disk, loading a magnetic head to the magnetic disk, reproducing signals from the magnetic disk, processing the reproduced signals by a waveform analyzer, counting pulse waveforms of 0.9 times or more a servo-bit length at ½ threshold value of an average output, and measuring the defect density on the magnetic disk giving an undesired effect on the I/O performance of the magnetic disk drive. In a case of a magnetic recording medium using a vertical magnetic recording system, even with fine defect of magnetic layer, a servo pattern cannot be judged correctly. This provides degradation of the I/O performance of increasing the time necessary for reading out large capacity data, lowering the performance of the entire magnetic disk drive.

    摘要翻译: 本发明基于预定的抛光条件来限制磁盘上的缺陷密度,通过向垂直于其的方向的磁盘的整个表面施加磁场,旋转磁盘,将磁头加载到磁盘,再现信号 通过波形分析器对再生信号进行处理,对平均输出的1/2阈值的伺服位长度的0.9倍以上的脉冲波形进行计数,并测量磁盘上的缺陷密度,给出不期望的影响 磁盘驱动器的I / O性能。 在使用垂直磁记录系统的磁记录介质的情况下,即使磁性层的细小缺陷,也不能正确判断伺服图案。 这提供了I / O性能的劣化,从而增加了读取大容量数据所需的时间,降低了整个磁盘驱动器的性能。

    Magnetic disk with protection film and magnetic disk manufacturing method
    10.
    发明申请
    Magnetic disk with protection film and magnetic disk manufacturing method 审中-公开
    磁盘带保护膜和磁盘制造方法

    公开(公告)号:US20060044688A1

    公开(公告)日:2006-03-02

    申请号:US11215533

    申请日:2005-08-29

    IPC分类号: G11B5/82

    CPC分类号: G11B5/84 G11B5/8408

    摘要: Embodiments of the invention provide a magnetic disk capable of maintaining a satisfactory sliding resistance and having a high corrosion resistance and a manufacturing method thereof. The magnetic disk and the manufacturing method thereof are realized by forming a protection film having a less film thickness distribution on a magnetic film surface, particularly by reducing a film thickness distribution in a load/unload zone in addition to a reduction in film thickness of the protection film. In one embodiment, a shortest distance between a substrate and a supporting member is 10 mm or more in a step of forming the protection film, the substrate being mounted on a holder having claws for holding the substrate and supporting members for supporting the claws. In addition, the method is characterized by chamfering the face confronting the substrate of the supporting member and setting the shortest distance between the substrate and the supporting member to 5 mm or more.

    摘要翻译: 本发明的实施例提供一种能够保持令人满意的滑动阻力并具有高耐腐蚀性的磁盘及其制造方法。 磁盘及其制造方法通过在磁性膜表面上形成具有较小膜厚分布的保护膜,特别是通过降低负载/卸载区域中的膜厚度分布,除了减小膜厚度 保护膜 在一个实施例中,在形成保护膜的步骤中,衬底和支撑构件之间的最短距离为10mm以上,衬底安装在具有用于保持衬底的支架和用于支撑爪的支撑构件的保持器上。 此外,该方法的特征在于使面对面的支撑构件的基板倒角并将基板和支撑构件之间的最短距离设定为5mm以上。