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22 条记录 (耗时 0.028 秒)

    Method of chucking semiconductor wafers
    1.
    发明授权
    Method of chucking semiconductor wafers 失效
    夹紧半导体晶片的方法

    公开(公告)号：US5335457A

    公开(公告)日：1994-08-09

    申请号：US966484

    申请日：1992-10-26

    申请人： Akira Matsuda ,  Shigeki Shudo ,  Noboru Shimamoto ,  Kohichi Tanaka ,  Hiromasa Hashimoto ,  Fumio Suzuki

    发明人： Akira Matsuda ,  Shigeki Shudo ,  Noboru Shimamoto ,  Kohichi Tanaka ,  Hiromasa Hashimoto ,  Fumio Suzuki

    IPC分类号： B24B37/04 ,  B24B37/30 ,  H01L21/304 ,  H01L21/683 ,  B24B7/22

    CPC分类号： H01L21/6838

    摘要： A method of chucking semiconductor wafers, in which a silicone elastic layer with high flatness is formed on the surface of a hard substrate having fine through-holes for vacuum chucking. Next fine through-holes in the silicone elastic layer, are provided, each through-hole communicating with the fine through-holes of the hard substrate. Next a semi-conductor wafer is held on the hard substrate by vacuum chucking from the back side of the substrate, so as to hold the semiconductor wafer securely on the substrate only by surface adhesion of the silicone elastic layer during polishing of the wafer. This method does not require wax or similar adhesive for holding the semiconductor wafer on the hard surface during the polishing process, and can realize a high-precision and high-quality surface polishing process for the semiconductor wafers.

    摘要翻译： 一种夹持半导体晶片的方法，其中在具有用于真空吸附的精细通孔的硬质基板的表面上形成具有高平坦度的硅氧烷弹性层。 在硅弹性层中的下一个细小的通孔中，每个通孔与硬质基底的细通孔相通。 接下来，半导体晶片通过从基板的背面真空夹持而保持在硬质基板上，以便仅在晶片抛光期间通过硅树脂弹性层的表面粘合将半导体晶片牢固地保持在基板上。 该方法不需要在抛光过程中将半导体晶片保持在硬表面上的蜡或类似的粘合剂，并且可以实现用于半导体晶片的高精度和高质量的表面抛光工艺。

    Adhesive silicone rubber compositions
    3.
    发明授权
    Adhesive silicone rubber compositions 失效
    粘合硅橡胶组合物

    公开(公告)号：US5405896A

    公开(公告)日：1995-04-11

    申请号：US163556

    申请日：1993-12-09

    申请人： Hironao Fujiki ,  Shigeki Shudo ,  Akira Matsuda

    发明人： Hironao Fujiki ,  Shigeki Shudo ,  Akira Matsuda

    IPC分类号： C07F7/08 ,  C07F7/21 ,  C08K5/5419 ,  C08L83/04 ,  C08L83/07 ,  C09J183/00 ,  C09J183/04 ,  C09J183/07 ,  C08K5/24 ,  C08F8/00 ,  C08G77/06 ,  C08L83/00

    CPC分类号： C08L83/04 ,  C07F7/0896 ,  C07F7/21 ,  C08K5/5419 ,  C08G77/12 ,  C08G77/20 ,  C08G77/70

    摘要： An adhesive silicone rubber composition of addition reaction curing type comprising (a) an organopolysiloxane containing an alkenyl group; (b) an organohydrogenpolysiloxane having at least one hydrogen atom directly attached to a silicon atom in a molecule; (c) an addition reaction catalyst; and (d) an adhesive agent selected from compounds of the following formulae (I), (II) and (III):A-(D-B).sub.x -D-A (I)C-(B-D).sub.x -B-C (II)A-E (III)wherein each of A and B is a silane or siloxane group, each group having at least one hydrogen atom directly attached to a silicon atom and an optional substituent which is a substituted or unsubstituted monovalent hydrocarbon group having 1 to 8 carbon atoms attached to the same or different silicon atom, A being monovalent and B being divalent,each of C and D is a group having contained therein at least one member selected from the group consisting of a substituted or unsubstituted aryl group, a substituted or unsubstituted arylene group, ##STR1## and an optional substituent which is selected from alkyl or alkylene groups, C being monovalent and D being divalent,E is a monovalent group as defined for C, with the proviso that the total number of atoms in E other than hydrogen and halogen atoms is at least 8, andletter x is 0 or a positive number,said adhesive silicone rubber composition giving a cured product that does not adhere to metal.

    摘要翻译： 一种加成反应固化型粘合性硅橡胶组合物，其包含（a）含有烯基的有机聚硅氧烷; （b）具有至少一个氢原子的有机氢聚硅氧烷，其直接连接到分子中的硅原子上; （c）加成反应催化剂; 和（d）选自下式（I），（II）和（III）的化合物的粘合剂：A-（DB）xDA（I）C-（BD）xBC（II）AE（III） 的A和B是硅烷或硅氧烷基团，每个基团具有至少一个与硅原子直接相连的氢原子和任选的取代基，其是具有1-8个碳原子的取代或未取代的一价烃基彼此相连或不同 硅原子，A为一价，B为二价，C和D各自为含有至少一个选自取代或未取代的芳基，取代或未取代的亚芳基，取代或未取代的亚芳基，和 选自烷基或亚烷基的任选的取代基，C为一价，D为二价，E为C定义的一价基团，条件是除氢和卤素原子以外的E中的原子总数至少为 8，字母x为0或正数， 所述粘合性硅橡胶组合物产生不粘附到金属上的固化产物。

    Addition reaction-curable liquid silicone rubber compositions and process of preparing same
    6.
    发明授权
    Addition reaction-curable liquid silicone rubber compositions and process of preparing same 有权
    加成反应可固化液体硅橡胶组合物及其制备方法

    公开(公告)号：US07271215B2

    公开(公告)日：2007-09-18

    申请号：US11151255

    申请日：2005-06-14

    申请人： Masayuki Ikeno ,  Shigeki Shudo ,  Naoki Yamakawa ,  Yujiro Taira

    发明人： Masayuki Ikeno ,  Shigeki Shudo ,  Naoki Yamakawa ,  Yujiro Taira

    IPC分类号： C08L83/04

    CPC分类号： C08L83/04 ,  C08G77/12 ,  C08G77/20 ,  Y10T428/2995 ,  C08L83/00

    摘要： An addition reaction-curable liquid silicone rubber composition includes an organopolysiloxane containing at least one Si-bonded vinyl group only at each end of its backbone and having a viscosity of from 1 to 1,000 Pa·s at 25° C., an organopolysiloxane containing at least two Si-bonded vinyl groups only in side chains on its backbone and having a viscosity of from 0.1 to 100 Pa·s at 25° C., the amount of siloxane units bonded to the vinyl groups being from 2 to 20 mole % of its total siloxane units, finely divided silica having a specific surface area of at least 50 m2/g, hexamethyldisilazane, water, an organohydrogenpolysiloxane containing at least two Si-bonded hydrogen atoms per molecule, and a hydrosilation catalyst. Another addition reaction-curable liquid silicone rubber composition additionally includes a specific non-functional dimethylpolysiloxane. The silicone rubber compositions are cured into products having a hardness of at least 75 as measured by a type-A durometer and an elongation at break of at least 200%.

    摘要翻译： 加成的可反应固化的液体硅橡胶组合物包括仅在其主链的每个末端含有至少一个与Si键合的乙烯基的有机聚硅氧烷，并且其在25℃下的粘度为1至1,000Pa.s， 至少两个Si键合的乙烯基仅在其主链的侧链上，并且在25℃下的粘度为0.1至100Pa.s，与乙烯基键合的硅氧烷单元的量为2-20摩尔％ 其总硅氧烷单元，具有至少50m 2 / g比表面积的细分二氧化硅，六甲基二硅氮烷，水，每分子含有至少两个与Si键合的氢原子的有机氢聚硅氧烷和氢硅化物 催化剂。 另一种另外的反应可固化的液体硅橡胶组合物另外包括特定的非官能的二甲基聚硅氧烷。 将硅橡胶组合物固化成硬度至少为75的产品，通过A型硬度计测定，断裂伸长率至少为200％。

    Heat-fixing silicone rubber roller
    7.
    发明授权
    Heat-fixing silicone rubber roller 失效
    热固硅胶辊

    公开(公告)号：US06328682B1

    公开(公告)日：2001-12-11

    申请号：US09580527

    申请日：2000-05-30

    申请人： Shigeki Shudo

    发明人： Shigeki Shudo

    IPC分类号： H05B100

    CPC分类号： G03G15/2057 ,  C08G77/12 ,  C08G77/20 ,  C08G77/70 ,  C08L83/04 ,  C08L83/00

    摘要： A heat-fixing silicone rubber roller comprising a roller shaft, a silicone rubber layer provided on the outer periphery of the roller shaft, and at least one of a fluorine resin layer and a fluorine rubber layer, provided on the outer periphery of the silicone rubber layer. The silicone rubber layer comprises a cured product of a silicone rubber composition containing at least (A) an organopolysiloxane with an average molecular weight of from 30,000 to 100,000, having in one molecule at least two alkenyl groups bonded to silicon atoms; (B) an organohydrogenpolysiloxane having in one molecule at least two hydrogen atoms bonded to silicon atoms; the hydrogen atoms bonded to silicon atoms being in the weight that is from 0.1 to 3.0 equivalent weight per one alkenyl group in the component (A); and (C) a platinum group metal catalyst. The heat-fixing silicone rubber roller has a coating layer of fluorine resin and/or fluorine rubber excellent in interlaminar adhesion and durability.

    摘要翻译： 一种热定影硅橡胶辊，其包括辊轴，设置在辊轴的外周上的硅橡胶层，以及设置在硅橡胶的外周上的氟树脂层和氟橡胶层中的至少一个 层。 硅橡胶层包含至少包含（A）平均分子量为30,000至100,000的有机聚硅氧烷的硅橡胶组合物的固化产物，其在一个分子中具有至少两个与硅原子键合的烯基; （B）在一个分子中具有至少两个与硅原子键合的氢原子的有机氢聚硅氧烷; 与硅原子键合的氢原子的重量比为组分（A）中每一个烯基的0.1至3.0当量; 和（C）铂族金属催化剂。 热固性硅橡胶辊具有层间粘合性和耐久性优异的氟树脂和/或氟橡胶的涂层。