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    CVD reactor apparatus
    7.
    发明授权
    CVD reactor apparatus 失效
    CVD反应器装置

    公开(公告)号：US5574247A

    公开(公告)日：1996-11-12

    申请号：US263323

    申请日：1994-06-21

    申请人： Eisuke Nishitani ,  Susmu Tsuzuku ,  Natsuyo Chiba ,  Shigeru Kobayashi ,  Naoyuki Tamura ,  Norihiro Uchida

    发明人： Eisuke Nishitani ,  Susmu Tsuzuku ,  Natsuyo Chiba ,  Shigeru Kobayashi ,  Naoyuki Tamura ,  Norihiro Uchida

    IPC分类号： H01L21/285 ,  C23C16/02 ,  C23C16/44 ,  C23C16/455 ,  C23C16/458 ,  C23C16/48 ,  C23C16/54 ,  H01L21/205 ,  H01L21/31 ,  C23C16/00

    CPC分类号： C23C16/45521 ,  C23C16/0245 ,  C23C16/4585 ,  C23C16/481 ,  C23C16/54

    摘要： A CVD reactor apparatus includes a substrate clamp for clamping a peripheral edge of the front of a substrate disposed in a CVD reactor and, dividing a space in the reactor into a first space adjacent the front of the substrate and a second space adjacent the backside of the substrate. The apparatus also includes a unit for cooling the surface temperature of an inner wall of the reactor to a temperature equal to or less than a deposition lower limit, and a unit for supplying a CVD gas to the first space adjacent the substrate front and supplying an inert gas to the second space adjacent the substrate backside at different pressures and causing a reaction at only the substrate front, a reaction gas monitor and a substrate temperature monitor.

    摘要翻译： CVD反应器装置包括用于夹持设置在CVD反应器中的衬底的前部的周边边缘并将反应器中的空间分成邻近衬底前部的第一空间的衬底夹具和邻近衬底前侧的第二空间 底物。 该装置还包括用于将反应器的内壁的表面温度冷却到等于或小于沉积下限的温度的单元，以及用于将CVD气体供应到邻近基板前部的第一空间并提供 惰性气体在不同压力下靠近衬底背面的第二空间并且仅在衬底前部产生反应，反应气体监测器和衬底温度监测器。

    Liquid discharge head substrate
    8.
    发明授权
    Liquid discharge head substrate 失效
    液体排出头基板

    公开(公告)号：US08678554B2

    公开(公告)日：2014-03-25

    申请号：US13354270

    申请日：2012-01-19

    申请人： Tomoyuki Inoue ,  Toru Yamane ,  Eisuke Nishitani

    发明人： Tomoyuki Inoue ,  Toru Yamane ,  Eisuke Nishitani

    IPC分类号： B41J2/16

    CPC分类号： B41J2/1404

    摘要： In a liquid discharge head substrate having a connection line connected to a plurality of energy generating elements, and arranged between adjacent energy generating elements, a distance between the adjacent energy generating elements, between which the connection line is not arranged, is provided to be narrower than a distance of a portion where the connection line is provided.

    摘要翻译： 在具有连接到多个能量产生元件并且布置在相邻的能量产生元件之间的连接线的液体排出头基板中，在相邻的能量产生元件之间的距离不设置连接线的距离较窄 比设置连接线的部分的距离长。

    LIQUID EJECTION HEAD
    9.
    发明申请
    LIQUID EJECTION HEAD 有权
    液体喷射头

    公开(公告)号：US20120019594A1

    公开(公告)日：2012-01-26

    申请号：US13176650

    申请日：2011-07-05

    申请人： Tomoyuki Inoue ,  Ken Tsuchii ,  Eisuke Nishitani ,  Toru Yamane

    发明人： Tomoyuki Inoue ,  Ken Tsuchii ,  Eisuke Nishitani ,  Toru Yamane

    IPC分类号： B41J2/145

    CPC分类号： B41J2/1404

    摘要： A liquid ejection head includes: a first and a second common liquid chamber formed in a substrate; a first nozzle array in which short and long nozzles are connected to the first common liquid chamber and alternately arranged on one side of the chamber; a second nozzle array in which short and long nozzles are connected to the first common liquid chamber and alternately arranged on the other side; a third nozzle array in which short and long nozzles are connected to the second common liquid chamber and alternately arranged on one side of the chamber; and a fourth nozzle array in which short and long nozzles are connected to the second common liquid chamber and alternately arranged on the other side; wherein the long and short nozzles formed on the one side and the long and short nozzles formed on the other side are disposed within a pitch P.

    摘要翻译： 液体喷射头包括：形成在基板中的第一和第二公共液体室; 第一喷嘴阵列，其中短喷嘴和长喷嘴连接到第一公共液体室并交替地布置在腔室的一侧; 第二喷嘴阵列，其中短喷嘴和长喷嘴连接到第一公共液体室并且交替地布置在另一侧上; 第三喷嘴阵列，其中短喷嘴和长喷嘴连接到第二公共液体室并且交替地布置在腔室的一侧; 以及第四喷嘴阵列，其中短喷嘴和长喷嘴连接到第二公共液体室并且交替地布置在另一侧上; 其中形成在一侧的长和短喷嘴以及形成在另一侧上的长和短喷嘴设置在间距P内。

    LIQUID EJECTION HEAD
    10.
    发明申请
    LIQUID EJECTION HEAD 有权
    液体喷射头

    公开(公告)号：US20100149293A1

    公开(公告)日：2010-06-17

    申请号：US12636109

    申请日：2009-12-11

    申请人： Eisuke Nishitani ,  Toru Yamane ,  Tomoyuki Inoue ,  Ken Tsuchii

    发明人： Eisuke Nishitani ,  Toru Yamane ,  Tomoyuki Inoue ,  Ken Tsuchii

    IPC分类号： B41J2/175

    CPC分类号： B41J2/17563 ,  B41J2/1404 ,  B41J2/1433 ,  B41J2002/14475

    摘要： A liquid ejection head includes ejection orifices allowing liquid to be ejected therethrough, passages communicating with the ejection orifices and the pressure chambers each accommodating an energy generating element generating energy for ejecting the liquid therein, a supply port supplying the liquid to the passages, and a filter including substantially cylindrical members between the supply port and passages and having openings. Each of the ejection orifices has a substantially circular cross section having larger and smaller diameters substantially perpendicularly to its liquid ejecting direction. Each of the openings has a substantially rectangular cross section having longer and shorter sides substantially perpendicularly to its liquid supplying direction. The relationships D1>L1, D1 L2≧D1 are satisfied where D1 is the smaller diameter, D2 is the larger diameter, L1 is the shorter side, and L2 is the longer side.

    摘要翻译： 液体喷射头包括允许液体喷射通过的喷射孔，与喷射孔连通的通道和每个容纳能量产生元件的压力室，所述能量产生元件产生用于在其中喷射液体的能量产生元件，将液体供应到通道，以及 过滤器包括在供给口和通道之间并具有开口的基本上圆柱形的构件。 每个喷射孔具有基本上圆形的横截面，其具有大致垂直于其液体喷射方向的更大和更小的直径。 每个开口具有基本上矩形的横截面，其具有基本垂直于其液体供应方向的较短和短边。 满足关系D1> L1，D1 L2≥D1，其中D1是较小的直径，D2是较大的直径，L1是较短的一侧，L2是较长的一侧。