公开(公告)号：US5147683A

公开(公告)日：1992-09-15

申请号：US638841

申请日：1991-01-08

申请人： Koichi Tanaka ,  Akiyoshi Mikami ,  Kouji Taniguchi ,  Katsushi Okibayashi ,  Kousuke Terada ,  Takuo Yamashita ,  Takashi Ogura ,  Hiroaki Nakaya ,  Masaru Yoshida ,  Shigeo Nakajima

发明人： Koichi Tanaka ,  Akiyoshi Mikami ,  Kouji Taniguchi ,  Katsushi Okibayashi ,  Kousuke Terada ,  Takuo Yamashita ,  Takashi Ogura ,  Hiroaki Nakaya ,  Masaru Yoshida ,  Shigeo Nakajima

IPC分类号： H05B33/10 ,  C23C16/30 ,  C23C16/44 ,  C23C16/455 ,  C23C16/458 ,  H01L21/365 ,  H05B33/12 ,  H05B33/14

CPC分类号： C23C16/45502 ,  C23C16/306 ,  C23C16/45512 ,  C23C16/45559 ,  C23C16/45582 ,  C23C16/458

摘要： Disclosed is an improvement of the chemical vapor deposition (CVD) process for preparing an electroluminescent device having a large area and a large size. The process includes forming a luminescent layer on a substrate by a reduced-pressure chemical vapor deposition method wherein a source material gas is introduced into a reaction chamber. The reaction chamber includes a screening means which screens the source material gas flow in the chamber to form a first area in which the gas is flowing and a second area in which the gas substantially does not flow. The screening means has apertures for connecting the first area and second area. the substrate is placed in the second area, to which the source material is supplied by means of gas diffusion.

公开(公告)号：US5334250A

公开(公告)日：1994-08-02

申请号：US22742

申请日：1993-02-17

申请人： Akiyoshi Mikami ,  Takashi Ogura ,  Kousuke Terada ,  Masaru Yoshida ,  Takuo Yamashita ,  Koichi Tanaka ,  Katsushi Okibayashi ,  Shigeo Nakajima ,  Hiroaki Nakaya ,  Kouji Taniguchi

发明人： Akiyoshi Mikami ,  Takashi Ogura ,  Kousuke Terada ,  Masaru Yoshida ,  Takuo Yamashita ,  Koichi Tanaka ,  Katsushi Okibayashi ,  Shigeo Nakajima ,  Hiroaki Nakaya ,  Kouji Taniguchi

IPC分类号： H05B33/10 ,  C23C16/44 ,  C23C16/455 ,  C30B25/08 ,  H01L21/205

CPC分类号： C23C16/455 ,  C23C16/45591

摘要： A vapor deposition apparatus for depositing thin film on substrates in which solid starting materials are used. In this apparatus, a carrier gas flows up and down in the same direction as gas convection, such that the effect of gas convection is minimized and film thickness and impurity concentration are uniform over the substrate surface. This uniformity is achieved by orienting a main reaction tube in a vertical direction, attaching two branch reaction tubes at the top of the main reaction tube, and venting carrier gas out the bottom of the main reaction tube. Alternately, the main reaction tube can be oriented horizontally, with the substrates being carried on a holder within a container having pores on its top and bottom.

摘要翻译： 一种用于在其中使用固体起始材料的基底上沉积薄膜的气相沉积设备。 在该装置中，载流气体沿与气体对流相同的方向上下流动，使得气体对流的作用最小化，并且膜厚度和杂质浓度在基板表面上是均匀的。 通过使主反应管在垂直方向取向，在主反应管的顶部安装两个分支反应管，并将载气从主反应管的底部排出，实现均匀性。 或者，主反应管可以水平取向，衬底被承载在具有其顶部和底部上的孔的容器内的保持器上。

公开(公告)号：US5223305A

公开(公告)日：1993-06-29

申请号：US698797

申请日：1991-05-13

申请人： Koichi Tanaka ,  Kousuke Terada ,  Katsushi Okibayashi ,  Akiyoshi Mikami ,  Masaru Yoshida ,  Shigeo Nakajima

发明人： Koichi Tanaka ,  Kousuke Terada ,  Katsushi Okibayashi ,  Akiyoshi Mikami ,  Masaru Yoshida ,  Shigeo Nakajima

IPC分类号： H05B33/10 ,  C23C16/18 ,  C23C16/44 ,  C23C16/448 ,  C23C16/455 ,  C23C16/46 ,  H01L21/205

CPC分类号： C23C16/46 ,  C23C16/455

摘要： An apparatus for vapor deposition including a vapor deposition section to which at least one semiconductor material supply passage and at least one alkoxide material supply passage are connected, first heating means provided for the vapor deposition section and capable of maintaining the temperature thereof higher than that of the alkoxide supply passage, second heating means provided for the semiconductor material supply passage and capable of maintaining the temperature thereof higher than that of the vapor deposition section, and third heating means provided for the alkoxide material supply passage and capable of maintaining the temperature thereof constant, and a process for continuously forming a multilayered film on a substrate.

摘要翻译： 一种用于气相沉积的装置，包括连接至少一个半导体材料供应通道和至少一个醇盐材料供应通道的气相沉积部分，为蒸镀部设置的第一加热装置，并且能够将其温度保持在高于 所述醇盐供给路径，为半导体材料供给路设置的第二加热单元，其温度保持为高于蒸镀部的温度;以及第三加热单元，设置在所述醇盐材料供给路径上，能够保持其温度恒定 ，以及在基板上连续形成多层膜的工序。

公开(公告)号：US5185181A

公开(公告)日：1993-02-09

申请号：US721711

申请日：1991-06-26

申请人： Akiyoshi Mikami ,  Kousuke Terada ,  Katsushi Okibayashi ,  Koichi Tanaka ,  Masaru Yoshida ,  Shigeo Nakajima

发明人： Akiyoshi Mikami ,  Kousuke Terada ,  Katsushi Okibayashi ,  Koichi Tanaka ,  Masaru Yoshida ,  Shigeo Nakajima

IPC分类号： H05B33/10 ,  C23C16/30 ,  C23C16/44 ,  C23C16/455 ,  H05B33/12 ,  H05B33/14

CPC分类号： C23C16/45591 ,  C23C16/306 ,  C23C16/455

摘要： A process is provided for preparing uniform and homogeneous thin films such as ZnS:M film on the substrates having a large area by CVD under a reduced pressure, wherein as many plural substrates as possible can be subjected to the CVD treatment in the same apparatus without decreasing a growth rate of the film. Accordingly, EL displays having a large area which possess a high quality and can be manufactured efficiently.

摘要翻译： 提供了一种通过CVD在减压下在具有大面积的基板上制备均匀且均匀的薄膜如ZnS：M膜的方法，其中尽可能多的多个基板可以在相同的装置中进行CVD处理而没有 降低电影的增长率。 因此，EL显示器具有高质量的大面积并且可以有效地制造。

公开(公告)号：US5116640A

公开(公告)日：1992-05-26

申请号：US594139

申请日：1990-10-10

申请人： Akiyoshi Mikami ,  Takashi Ogura ,  Kousuke Terada ,  Masaru Yoshida ,  Takuo Yamashita ,  Koichi Tanaka ,  Katsushi Okibayashi ,  Shigeo Nakajima ,  Hiroaki Nakaya ,  Kouji Taniguchi

发明人： Akiyoshi Mikami ,  Takashi Ogura ,  Kousuke Terada ,  Masaru Yoshida ,  Takuo Yamashita ,  Koichi Tanaka ,  Katsushi Okibayashi ,  Shigeo Nakajima ,  Hiroaki Nakaya ,  Kouji Taniguchi

IPC分类号： C23C16/30 ,  C23C16/34 ,  C23C16/40 ,  C23C16/54 ,  H01L21/205 ,  H05B33/10

CPC分类号： H05B33/10 ,  C23C16/306 ,  C23C16/345 ,  C23C16/402 ,  C23C16/54

摘要： A process for preparing an electroluminescent device includes the steps of forming an insulating layer and a luminescent layer on a substrate, wherein the insulating and luminescent layers are respectively formed at different forming areas in the same deposition chamber.

摘要翻译： 制备电致发光器件的方法包括在衬底上形成绝缘层和发光层的步骤，其中绝缘层和发光层分别形成在同一淀积室中的不同形成区域。

公开(公告)号：US5096735A

公开(公告)日：1992-03-17

申请号：US656427

申请日：1991-02-05

申请人： Hiroaki Nakaya ,  Takuo Yamashita ,  Takashi Ogura ,  Kouji Tanaguchi ,  Koichi Tanaka ,  Akiyoshi Mikami ,  Katsushi Okibayashi ,  Kousuke Terada

发明人： Hiroaki Nakaya ,  Takuo Yamashita ,  Takashi Ogura ,  Kouji Tanaguchi ,  Koichi Tanaka ,  Akiyoshi Mikami ,  Katsushi Okibayashi ,  Kousuke Terada

IPC分类号： H01L33/00 ,  H05B33/10

CPC分类号： H01L33/0087 ,  H05B33/10

摘要： Disclosed is an improvement of a process for producing a thin film electroluminescent device wherein the luminescent film is formed by a CVD method. The improvement residues in that an unnecessary portion of the luminescent layer, which is inherently formed if the CVD method is employed, is removed by etching.

摘要翻译： 披露了通过CVD法形成发光膜的薄膜电致发光器件的制造方法的改进。 如果使用CVD法固有地形成的发光层的不需要部分的改进残留物通过蚀刻被去除。

公开(公告)号：US5504599A

公开(公告)日：1996-04-02

申请号：US136418

申请日：1993-10-15

申请人： Katsushi Okibayashi ,  Kousuke Terada ,  Akiyoshi Mikami ,  Hiroyuki Shimoyama

发明人： Katsushi Okibayashi ,  Kousuke Terada ,  Akiyoshi Mikami ,  Hiroyuki Shimoyama

IPC分类号： G02F1/1335 ,  G02F1/13357 ,  H05B33/12 ,  H05B33/22 ,  G02F1/1333

CPC分类号： G02F1/133617

摘要： To reduce the thickness of liquid crystal display device and enhance its performance by integrating the liquid crystal display element and light source. One surface of a substrate and one surface of a substrate are adhered with an adhesive layer through an intervening liquid crystal layer. On the other surface of the substrate, an EL light source is mounted, that is, a glass substrate on which a first electrode, a first insulation layer, a phosphor layer, a second insulation layer, and a second electrode are laminated in this sequence is bonded with an insulation layer. Therefore, the liquid crystal display device may be reduced in thickness and enhanced in performance.

摘要翻译： 通过集成液晶显示元件和光源来减小液晶显示装置的厚度，提高其性能。 衬底的一个表面和衬底的一个表面通过中间的液晶层用粘合剂层粘合。 在基板的另一个表面上，安装EL光源，即以这个顺序层叠有第一电极，第一绝缘层，荧光体层，第二绝缘层和第二电极的玻璃基板 与绝缘层接合。 因此，液晶显示装置的厚度可以减小，性能提高。

公开(公告)号：US5589732A

公开(公告)日：1996-12-31

申请号：US378869

申请日：1995-01-24

申请人： Katsushi Okibayashi ,  Takashi Ogura ,  Masaru Yoshida

发明人： Katsushi Okibayashi ,  Takashi Ogura ,  Masaru Yoshida

IPC分类号： H05B33/22 ,  H01J1/62 ,  H05B33/12

CPC分类号： H05B33/12 ,  H05B33/22

摘要： A color filter is laminated via a resin layer on an electroluminescence device. The resin layer includes silicone resin as its main ingredient while having a thickness of 2 to 100 .mu.m. Thereby, possible color dislocation and reduction of the angle of visibility attributed to the gap between the electroluminescence device and the color filter are prevented. Furthermore, possible damage, dielectric breakdown, pixel dropout, and line defect due to the contact between the electroluminescence device and the color filter are reduced. A surface of the resin layer is changed in condition to make the resin layer have a lipophilic property to facilitate application of a material of the color filter thereto.

摘要翻译： 通过电致发光器件上的树脂层层叠滤色器。 树脂层以硅树脂为主要成分，厚度为2〜100μm。 由此，可以防止归因于电致发光元件和滤色器之间的间隙的视觉角度的可能的色差和减小。 此外，减少了由于电致发光器件和滤色器之间的接触引起的可能的损坏，电介质击穿，像素脱落和线缺陷。 改变树脂层的表面以使树脂层具有亲油性，以便于对其进行滤色器的材料的施加。

公开(公告)号：US4650985A

公开(公告)日：1987-03-17

申请号：US670869

申请日：1984-11-13

申请人： Katsushi Okibayashi ,  Shohichi Katoh

发明人： Katsushi Okibayashi ,  Shohichi Katoh

IPC分类号： H01L27/146 ,  H01L31/0384 ,  H01L31/09 ,  H04N1/028 ,  H01J40/14

CPC分类号： H01L31/0384 ,  H01L31/09

摘要： An image readout element of an image readout sensor for reading image information comprises an insulation substrate which transmits light, a pair of electrodes opposite to each other which are deposited on the substrate, and a photoconductive layer coated on the substrate and the pair of electrodes, the photoconductive layer comprising particles showing photoconductive characteristics and a resin material for dispersing and binding the photoconductive particles. There are provided a plurality of the sensor element in a single image readout sensor, and one of each pair of electrodes is arranged in parallel with one of the other pairs of electrodes.

摘要翻译： 用于读取图像信息的图像读出传感器的图像读出元件包括透光的绝缘基板，沉积在基板上的彼此相对的一对电极以及涂覆在基板和一对电极上的光电导层， 光导电层包含显示光导特性的颗粒和用于分散和结合光电导颗粒的树脂材料。 在单个图像读出传感器中设置有多个传感器元件，并且每对电极之一与另一对电极平行设置。

公开(公告)号：US4641359A

公开(公告)日：1987-02-03

申请号：US629339

申请日：1984-07-10

申请人： Katsushi Okibayashi ,  Masataka Itoh ,  Shohichi Katoh

发明人： Katsushi Okibayashi ,  Masataka Itoh ,  Shohichi Katoh

IPC分类号： H01L27/146 ,  H01L31/0216 ,  H01L31/09 ,  H04N5/335 ,  H04N5/355 ,  H04N5/357 ,  H04N5/369 ,  G06K9/28

CPC分类号： H01L31/09 ,  H01L31/0216

摘要： A two-dimensional image read-out device comprising a photoconducting layer, a plurality of X stripe electrodes applied on one surface of the photoconducting layer and arranged parallel with each other, and a plurality of Y electrodes applied on the other surface of the photoconducting layer and arranged parallel with each other in a direction perpendicular to the X electrodes. Both the X and Y electrodes are made of electrically conductive material, and the X or Y electrodes through which light from an image enters are made of transparent or translucent material. The light-entering side of the two-dimensional image read-out device is covered with an opaque material which allows the passage of light only through the picture elements which are formed at the intersections of the X and Y electrodes.

摘要翻译： 一种二维图像读出装置，包括光导层，多个X条纹电极，其被施加在光导层的一个表面上并且彼此平行布置，并且多个Y电极施加在光电导层的另一个表面上 并且在垂直于X电极的方向上彼此平行地布置。 X和Y电极均由导电材料制成，并且来自图像的光进入的X或Y电极由透明或半透明材料制成。 二维图像读出装置的光入射侧被不透明材料覆盖，该不透明材料仅允许光通过形成在X和Y电极的交点处的像素。