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公开(公告)号：US20210151214A1
公开(公告)日：2021-05-20
申请号：US16689567
申请日：2019-11-20
Applicant: APPLIED MATERIALS ISRAEL LTD.
Inventor： Igor Krivts (Krayvitz) , Efim Vinnitsky , Yoram Uziel , Benzion Sender , Ron Naftali
Abstract: A method and a system. The system may include (a) evaluation units, (b) an object distribution system for receiving the objects and distributing the objects between the evaluation units, and (c) at least one controller. Each evaluation unit may include (i) a chamber housing that has an inner space, (ii) a chuck, (iii) a movement system that is configured to move the chuck, and (iv) a charged particle module that is configured to irradiate the object with a charged particle beam, and to detect particles emitted from the object. In each evaluation unit a length of the inner space is smaller than twice a length of the object, and a width of the inner space is smaller than twice a width of the object.
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公开(公告)号：US11047677B2
公开(公告)日：2021-06-29
申请号：US16692949
申请日：2019-11-22
Applicant: APPLIED MATERIALS ISRAEL LTD.
Inventor： Benzion Sender
IPC: G01B15/00
Abstract: A method that includes performing multiple test iterations to provide multiple test results; and processing the multiple test results to provide estimates of a conductivity of each of the multiple bottoms segments. The multiple test iterations includes repeating, for each bottom segment of the multiple bottom segments, the steps of: (a) illuminating the bottom segment by a charging electron beam; wherein electrons emitted from the bottom segment due to the illuminating are prevented from exiting the hole; (b) irradiating, by a probing electron beam, an area of an upper surface of the dielectric medium; (c) collecting electrons emitted from the area of the upper surface as a result of the irradiation of the area by the probing electron beam to provide collected electrons; and (d) determining an energy of at least one of the collected electrons to provide a test result.
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公开(公告)号：US09805911B2
公开(公告)日：2017-10-31
申请号：US15207024
申请日：2016-07-11
Applicant: APPLIED MATERIALS ISRAEL LTD.
Inventor： Benzion Sender , Alon Litman
IPC: H01J37/26
Abstract: A system for scanning a plurality of regions of interest of a substrate using one or more charged particle beams, the system comprises: an irradiation module having charged particle optics; a stage for introducing a relative movement between the substrate and the charged particle optics; an imaging module for collecting electrons emanating from the substrate in response to a scanning of the regions of interest by the one or more charged particle beams; and wherein the charged particle optics is arranged to perform countermovements of the charged particle beam during the scanning of the regions of interest thereby countering relative movements introduced between the substrate and the charged particle optics during the scanning of the regions of interest.
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公开(公告)号：US09666412B1
公开(公告)日：2017-05-30
申请号：US15005679
申请日：2016-01-25
Applicant: Applied Materials Israel, Ltd.
Inventor： Alon Litman , Yoram Uziel , Benzion Sender
CPC classification number: H01J37/28 , H01J37/20 , H01J37/265 , H01J2237/0048 , H01J2237/15 , H01J2237/20285
Abstract: A system that may include a first mechanical stage, a second mechanical stage, charged particle beam optics and a controller. The system may charge, with a charged particle beam, a slice of the object. During the charging of the slice the first mechanical stage may introduce a first movement along a first direction, between the object and charged particle beam optics. The charged particle beam optics may scan the slice with the charged particle beam. The scanning of the slice includes performing, by the charged particle optics, a first counter-movement deflection of the charged particle beam to at least partially counter the first movement. The second mechanical stage is configured to introduce a second movement along a second direction, between the object and the charged particle beam optics. Upon a completion of the charging of the slice, the second mechanical stage is configured to perform a first flyback operation.
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公开(公告)号：US20150200071A1
公开(公告)日：2015-07-16
申请号：US14153923
申请日：2014-01-13
Applicant: APPLIED MATERIALS ISRAEL, LTD.
Inventor： Benzion Sender , Alon Litman
IPC: H01J37/30 , H01J37/304 , H01J37/20
CPC classification number: H01J37/265 , H01J2237/15 , H01J2237/202 , H01J2237/20228 , H01J2237/28
Abstract: A system for scanning a plurality of regions of interest of a substrate using one or more charged particle beams, the system may include: an irradiation module having charged particle optics; a stage for introducing a relative movement between the substrate and the charged particle optics; an imaging module for collecting electrons emanating from the substrate in response to a scanning of the regions of interest by the one or more charged particle beams; and wherein the charged particle optics is arranged to perform countermovements of the charged particle beam during the scanning of the regions of interest thereby countering relative movements introduced between the substrate and the charged particle optics during the scanning of the regions of interest.
Abstract translation: 一种用于使用一个或多个带电粒子束扫描衬底的多个感兴趣区域的系统，所述系统可以包括：具有带电粒子光学器件的照射模块; 用于在衬底和带电粒子光学器件之间引入相对运动的阶段; 成像模块，用于响应于所述一个或多个带电粒子束对感兴趣区域的扫描，收集从衬底发射的电子; 并且其中带电粒子光学器件被布置成在感兴趣区域的扫描期间执行带电粒子束的反向运动，从而抵抗在感兴趣区域的扫描期间在衬底和带电粒子光学器件之间引入的相对运动。
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Patent Agency Ranking
公开(公告)号：US11177048B2
公开(公告)日：2021-11-16
申请号：US16689567
申请日：2019-11-20
Applicant: APPLIED MATERIALS ISRAEL LTD.
Inventor： Igor Krivts (Krayvitz) , Efim Vinnitsky , Yoram Uziel , Benzion Sender , Ron Naftali
Abstract: A method and a system. The system may include (a) evaluation units, (b) an object distribution system for receiving the objects and distributing the objects between the evaluation units, and (c) at least one controller. Each evaluation unit may include (i) a chamber housing that has an inner space, (ii) a chuck, (iii) a movement system that is configured to move the chuck, and (iv) a charged particle module that is configured to irradiate the object with a charged particle beam, and to detect particles emitted from the object. In each evaluation unit a length of the inner space is smaller than twice a length of the object, and a width of the inner space is smaller than twice a width of the object.
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公开(公告)号：US20170084425A1
公开(公告)日：2017-03-23
申请号：US15371332
申请日：2016-12-07
Applicant: APPLIED MATERIALS ISRAEL LTD.
Inventor： Yoram Uziel , Benzion Sender , Doron Aspir , Yohanan Madmon , Ron Naftali , Yuri Belenky
CPC classification number: H01J37/28 , G06T7/0004 , G06T2207/30148 , H01J37/20 , H01J2237/20228 , H01J2237/2817
Abstract: A method for scanning an object, the method may include moving an object by a first mechanical stage that follows a first scan pattern; introducing multiple movements, by a second mechanical stage, between the object and the first mechanical stage while the first mechanical stage follows the first scan pattern; and obtaining, by optics, images of multiple suspected defects while the first mechanical stage follows the first scan pattern; wherein a weight of the first mechanical stage exceeds a weight of the second mechanical stage.
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公开(公告)号：US09490101B2
公开(公告)日：2016-11-08
申请号：US14658993
申请日：2015-03-16
Applicant: APPLIED MATERIALS ISRAEL LTD.
Inventor： Yuval Gronau , Ishai Schwarzband , Benzion Sender , Dror Shemesh , Ran Schleyen , Ofir Greenberg
CPC classification number: H01J37/222 , H01J37/265 , H01J37/28 , H01J2237/221 , H01J2237/24592 , H01J2237/2803
Abstract: A system for scanning an object, the system may include (a) charged particles optics that is configured to: scan, with a charged particle beam and at a first scan rate, a first region of interest (ROI) of an area of the object; detect first particles that were generated as a result of the scanning of the first ROI; scan, with the charged particle beam and at a second scan rate, a second ROI of the area of the object; wherein the second scan rate is lower than the first scan rate; wherein first ROI differs from the second ROI by at least one parameter; detect second particles that were generated as a result of the scanning of the second ROA; and (b) a processor that is configured to generate at least one image of the area in response to the first and second particles.
Abstract translation: 一种用于扫描对象的系统，系统可以包括（a）带电粒子光学器件，其被配置为：以带电粒子束和第一扫描速率扫描物体的区域的第一感兴趣区域（ROI） ; 检测由于第一ROI的扫描而产生的第一粒子; 用所述带电粒子束以第二扫描速率扫描所述物体区域的第二ROI; 其中所述第二扫描速率低于所述第一扫描速率; 其中第一ROI与所述第二ROI相差至少一个参数; 检测由于第二ROA的扫描而产生的第二颗粒; 以及（b）处理器，被配置为响应于所述第一和第二粒子而产生所述区域的至少一个图像。
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公开(公告)号：US20160322195A1
公开(公告)日：2016-11-03
申请号：US15207024
申请日：2016-07-11
Applicant: APPLIED MATERIALS ISRAEL, LTD. , Applied Materials, Inc.
Inventor： Benzion Sender , Alon Litman
CPC classification number: H01J37/265 , H01J2237/15 , H01J2237/202 , H01J2237/20228 , H01J2237/28
Abstract: A system for scanning a plurality of regions of interest of a substrate using one or more charged particle beams, the system comprises: an irradiation module having charged particle optics; a stage for introducing a relative movement between the substrate and the charged particle optics; an imaging module for collecting electrons emanating from the substrate in response to a scanning of the regions of interest by the one or more charged particle beams; and wherein the charged particle optics is arranged to perform countermovements of the charged particle beam during the scanning of the regions of interest thereby countering relative movements introduced between the substrate and the charged particle optics during the scanning of the regions of interest.
Abstract translation: 一种用于使用一个或多个带电粒子束扫描衬底的多个感兴趣区域的系统，所述系统包括：具有带电粒子光学器件的照射模块; 用于在衬底和带电粒子光学器件之间引入相对运动的阶段; 成像模块，用于响应于所述一个或多个带电粒子束对感兴趣区域的扫描，收集从衬底发射的电子; 并且其中带电粒子光学器件被布置成在感兴趣区域的扫描期间执行带电粒子束的反向运动，从而抵抗在感兴趣区域的扫描期间在衬底和带电粒子光学器件之间引入的相对运动。
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公开(公告)号：US09466462B2
公开(公告)日：2016-10-11
申请号：US14153923
申请日：2014-01-13
Applicant: APPLIED MATERIALS ISRAEL, LTD.
Inventor： Benzion Sender , Alon Litman
IPC: H01J37/26
CPC classification number: H01J37/265 , H01J2237/15 , H01J2237/202 , H01J2237/20228 , H01J2237/28
Abstract: A system for scanning a plurality of regions of interest of a substrate using one or more charged particle beams, the system may include: an irradiation module having charged particle optics; a stage for introducing a relative movement between the substrate and the charged particle optics; an imaging module for collecting electrons emanating from the substrate in response to a scanning of the regions of interest by the one or more charged particle beams; and wherein the charged particle optics is arranged to perform countermovements of the charged particle beam during the scanning of the regions of interest thereby countering relative movements introduced between the substrate and the charged particle optics during the scanning of the regions of interest.
Abstract translation: 一种用于使用一个或多个带电粒子束扫描衬底的多个感兴趣区域的系统，所述系统可以包括：具有带电粒子光学器件的照射模块; 用于在衬底和带电粒子光学器件之间引入相对运动的阶段; 成像模块，用于响应于所述一个或多个带电粒子束对感兴趣区域的扫描，收集从衬底发射的电子; 并且其中带电粒子光学器件被布置成在感兴趣区域的扫描期间执行带电粒子束的反向运动，从而抵抗在感兴趣区域的扫描期间在衬底和带电粒子光学器件之间引入的相对运动。
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