摘要:
A sputtering target includes an outer target tube, an inner support tube of rectangular cross-sectional shape supporting a magnet carrier extending along substantially the entire length of the inner support tube; and a water cooling circuit including at least one passageway within said inner support tube with an inlet at one end thereof adapted to receive cooling water from an external source, at least one outlet aperture at an opposite end thereof opening to a chamber radially between the inner support tube and the outer target tube; and at least one cooling water outlet at the one end of the inner support tube.
摘要:
A sputtering target comprising an outer target tube, an inner support tube supporting a magnet carrier extending along substantially the entire length of the inner support tube; and a water cooling circuit including at least one passageway within the inner support tube with an inlet at one end thereof adapted to receive cooling water from an external source, at least one outlet aperture at an opposite end thereof opening to a cooling chamber radially between the inner support tube and the outer target tube; and a plurality of spiral vane segments attached to an outer surface of the inner support tube.
摘要:
A sputtering target comprising an outer target tube, an inner support tube supporting a magnet carrier extending along substantially the entire length of the inner support tube; and a water cooling circuit including at least one passageway within the inner support tube with an inlet at one end thereof adapted to receive cooling water from an external source, at least one outlet aperture at an opposite end thereof opening to a cooling chamber radially between the inner support tube and the outer target tube; and a plurality of spiral vane segments attached to an outer surface of the inner support tube.
摘要:
A sputtering target includes an outer target tube, an inner support tube supporting a magnet carrier bar extending along substantially the entire length of the inner support tube; and a water cooling circuit including at least one passageway within the inner support tube with an inlet at one end thereof adapted to receive cooling water from an external source, at least one outlet aperture at an opposite end thereof opening to a cooling plenum radially between the inner support tube and the outer target tube; and a baffle comprising a substantially flat plate attached to the inner support tube adjacent the opposite end, the plate extending radially within the plenum between the inner support tube and the outer target tube and having an array of flow apertures therein.
摘要:
A sputtering target includes an outer target tube, an inner support tube supporting a magnet carrier bar extending along substantially the entire length of the inner support tube; and a water cooling circuit including at least one passageway within the inner support tube with an inlet at one end thereof adapted to receive cooling water from an external source, at least one outlet aperture at an opposite end thereof opening to a cooling plenum radially between the inner support tube and the outer target tube; and a baffle comprising a substantially flat plate attached to the inner support tube adjacent the opposite end, the plate extending radially within the plenum between the inner support tube and the outer target tube and having an array of flow apertures therein.
摘要:
A lubricating device for gear trains (10), especially for wind power stations, includes at least two gear stages (16,18) that are disposed next to each other and are effectively interconnected, and a lubricant circuit (20) into which at least one filter unit (26) is mounted. To prevent stagnant resting zones for the lubricant from being created within the gear train housing including the gear stages, while ensuring that the entire lubricant that circulates in the gear stages is fed to the filter unit to be drawn off and filtered within predefined periods of time, the lubricant circulating inside the lubricant circuit (20) is discharged at one gear stage (18), is drawn off through the filter unit, and can then be fed to the other gear stage (16).
摘要:
An apparatus for determining the filterability of fluids, in particular of transmission oils, has a test filter device (21) through which a sample amount of the fluid can flow, and a line system which forms a circulation circuit (1) for the fluid. The line system includes a foam tester (3) receiving the sample amount of the fluid. A circulating pump (23) removes fluid from the sample amount situated in the foam tester (3) and conveys it through the filter device (21) and back to the foam tester (3).
摘要:
The invention relates to a device for lubricating a transmission (1) and a bearing (1′), in particular a rotor bearing in a wind turbine. The transmission (1) and the bearing (1′) are each associated with at least one lubrication circuit (3, 5) of the device. and a lubricating medium flows in each circuit during the operation of the device. The device has a heat exchanging device (7, 59, 61) for transferring heat between the lubrication circuit (3) of the transmission (1) and the lubrication circuit (5) of the bearing (1′), and the beat exchanging device (7, 59, 61) at least partially compensates for a difference between the temperature of the lubricating medium in the lubrication circuit (3) of the transmission (1) and the temperature of the lubricating medium in the lubrication circuit (5) of the bearing (1′) by means of heat compensation during the operation of the device.
摘要:
The invention relates to a spectrometer comprising a hollow main optical body having at least one light channel, a light source, a diffraction grating having a grating central point, a light inlet opening, and a detector unit, which are arranged in such a way that the focal curve of the spectrometer satisfies the back focus equation. In order to create a spectrometer having sufficient spectral resolution from a low-price, light, and easy-to-process material, which spectrometer is able to operate in a large temperature interval even without thermostatic control, according to the invention the light inlet opening is arranged on a compensation body, the compensation body is arranged in the light channel and fastened to the main optical body between the light source and the diffraction grating, and the compensation body is dimensioned in such a way that the compensation body changes the distance between the light inlet opening and the grating central point when the main optical body thermally expands.
摘要:
The invention relates to a filter element comprising a filter material (10) which comprises individual filter folds (12) which are folded in a star-like manner, at least one fluid-permeable support element (26) which extends at least partially in the space between two adjacent filter folds (12) and/or on the inner peripheral side and/or external peripheral side of the filter folds (12). The invention is characterised in that the respective support element (26) is provided with filter-active substances or is made of said filter-active substances. A certain type of filter auxillary agent can be obtained which is used to reduce influences of fluid components which reduce the service life, in the form of specific ageing products or in the form of other agents which damage the fluid.