公开(公告)号：US07504011B2

公开(公告)日：2009-03-17

申请号：US11256196

申请日：2005-10-24

申请人： Armin Schmidt ,  Gerald Janicke ,  Roland Weidl ,  Hendryk Richert ,  Bernd E. Gruenler ,  Hans-Jurgen Tiller ,  Uwe Kriltz

发明人： Armin Schmidt ,  Gerald Janicke ,  Roland Weidl ,  Hendryk Richert ,  Bernd E. Gruenler ,  Hans-Jurgen Tiller ,  Uwe Kriltz

IPC分类号： C23C14/35

CPC分类号： H01J37/3497 ,  H01J37/3405

摘要： A sputtering target comprising an outer target tube, an inner support tube supporting a magnet carrier extending along substantially the entire length of the inner support tube; and a water cooling circuit including at least one passageway within the inner support tube with an inlet at one end thereof adapted to receive cooling water from an external source, at least one outlet aperture at an opposite end thereof opening to a cooling chamber radially between the inner support tube and the outer target tube; and a plurality of spiral vane segments attached to an outer surface of the inner support tube.

摘要翻译： 一种溅射靶，包括外目标管，支撑沿着内支撑管的整个长度延伸的磁体载体的内支撑管; 以及水冷却回路，其包括在所述内部支撑管内的至少一个通道，其一端处的入口适于从外部源接收冷却水;至少一个在其相对端处的出口孔， 内支撑管和外目标管; 以及附接到内部支撑管的外表面的多个螺旋叶片段。

公开(公告)号：US20070089982A1

公开(公告)日：2007-04-26

申请号：US11256195

申请日：2005-10-24

申请人： Hendryk Richert ,  Patrick Wieland ,  Armin Schmidt ,  Gerald Janicke ,  Roland Weidl ,  Bernd Gruenler ,  Hans-Jurgen Tiller ,  Uwe Kriltz

发明人： Hendryk Richert ,  Patrick Wieland ,  Armin Schmidt ,  Gerald Janicke ,  Roland Weidl ,  Bernd Gruenler ,  Hans-Jurgen Tiller ,  Uwe Kriltz

IPC分类号： C23C14/00

CPC分类号： H01J37/3405 ,  H01J37/3497

摘要： A sputtering target includes an outer target tube, an inner support tube of rectangular cross-sectional shape supporting a magnet carrier extending along substantially the entire length of the inner support tube; and a water cooling circuit including at least one passageway within said inner support tube with an inlet at one end thereof adapted to receive cooling water from an external source, at least one outlet aperture at an opposite end thereof opening to a chamber radially between the inner support tube and the outer target tube; and at least one cooling water outlet at the one end of the inner support tube.

摘要翻译： 溅射靶包括外目标管，支撑沿着内支撑管的整个长度延伸的磁体载体的矩形横截面形状的内支撑管; 以及水冷却回路，其包括在所述内部支撑管内的至少一个通道，其一端处的入口适于接收来自外部源的冷却水，在其相对端处的至少一个出口孔径向地在所述内部 支撑管和外目标管; 以及在内支撑管的一端的至少一个冷却水出口。

公开(公告)号：US20070089985A1

公开(公告)日：2007-04-26

申请号：US11256196

申请日：2005-10-24

申请人： Armin Schmidt ,  Gerald Janicke ,  Roland Weidl ,  Hendryk Richert ,  Bernd Gruenler ,  Hans-Jurgen Tiller ,  Uwe Kriltz

发明人： Armin Schmidt ,  Gerald Janicke ,  Roland Weidl ,  Hendryk Richert ,  Bernd Gruenler ,  Hans-Jurgen Tiller ,  Uwe Kriltz

IPC分类号： C23C14/00

CPC分类号： H01J37/3497 ,  H01J37/3405

摘要： A sputtering target comprising an outer target tube, an inner support tube supporting a magnet carrier extending along substantially the entire length of the inner support tube; and a water cooling circuit including at least one passageway within the inner support tube with an inlet at one end thereof adapted to receive cooling water from an external source, at least one outlet aperture at an opposite end thereof opening to a cooling chamber radially between the inner support tube and the outer target tube; and a plurality of spiral vane segments attached to an outer surface of the inner support tube.

摘要翻译： 一种溅射靶，包括外目标管，支撑沿着内支撑管的整个长度延伸的磁体载体的内支撑管; 以及水冷却回路，其包括在所述内部支撑管内的至少一个通道，其一端处的入口适于从外部源接收冷却水;至少一个在其相对端处的出口孔， 内支撑管和外目标管; 以及附接到内部支撑管的外表面的多个螺旋叶片段。

公开(公告)号：US07560011B2

公开(公告)日：2009-07-14

申请号：US11256200

申请日：2005-10-24

申请人： Hendryk Richert ,  Uwe Kriltz ,  Armin Schmidt ,  Roland Weidl ,  Gerald Janicke

发明人： Hendryk Richert ,  Uwe Kriltz ,  Armin Schmidt ,  Roland Weidl ,  Gerald Janicke

IPC分类号： C23C14/35

CPC分类号： H01J37/3497 ,  H01J37/3405

摘要： A sputtering target includes an outer target tube, an inner support tube supporting a magnet carrier bar extending along substantially the entire length of the inner support tube; and a water cooling circuit including at least one passageway within the inner support tube with an inlet at one end thereof adapted to receive cooling water from an external source, at least one outlet aperture at an opposite end thereof opening to a cooling plenum radially between the inner support tube and the outer target tube; and a baffle comprising a substantially flat plate attached to the inner support tube adjacent the opposite end, the plate extending radially within the plenum between the inner support tube and the outer target tube and having an array of flow apertures therein.

摘要翻译： 溅射靶包括外目标管，支撑沿着内支撑管的整个长度延伸的磁体承载杆的内支撑管; 以及水冷却回路，其包括在所述内支撑管内的至少一个通道，其一端处的入口适于从外部源接收冷却水，所述至少一个出口在其相对端处径向地通向所述冷却室， 内支撑管和外目标管; 以及挡板，其包括邻近所述相对端附接到所述内支撑管的基本平坦的板，所述板在所述内支撑管和所述外目标管之间的所述增压室内径向延伸并且在其中具有一组流动孔。

公开(公告)号：US20070089986A1

公开(公告)日：2007-04-26

申请号：US11256200

申请日：2005-10-24

申请人： Hendryk Richert ,  Uwe Kriltz ,  Armin Schmidt ,  Roland Weidl ,  Gerald Janicke

发明人： Hendryk Richert ,  Uwe Kriltz ,  Armin Schmidt ,  Roland Weidl ,  Gerald Janicke

IPC分类号： C23C14/00

CPC分类号： H01J37/3497 ,  H01J37/3405

摘要： A sputtering target includes an outer target tube, an inner support tube supporting a magnet carrier bar extending along substantially the entire length of the inner support tube; and a water cooling circuit including at least one passageway within the inner support tube with an inlet at one end thereof adapted to receive cooling water from an external source, at least one outlet aperture at an opposite end thereof opening to a cooling plenum radially between the inner support tube and the outer target tube; and a baffle comprising a substantially flat plate attached to the inner support tube adjacent the opposite end, the plate extending radially within the plenum between the inner support tube and the outer target tube and having an array of flow apertures therein.

摘要翻译： 溅射靶包括外目标管，支撑沿着内支撑管的整个长度延伸的磁体承载杆的内支撑管; 以及水冷却回路，其包括在所述内支撑管内的至少一个通道，其一端处的入口适于从外部源接收冷却水，所述至少一个出口在其相对端处径向地通向所述冷却室， 内支撑管和外目标管; 以及挡板，其包括邻近所述相对端附接到所述内支撑管的基本平坦的板，所述板在所述内支撑管和所述外目标管之间的所述增压室内径向延伸并且在其中具有一组流动孔。

公开(公告)号：US20080047831A1

公开(公告)日：2008-02-28

申请号：US11509075

申请日：2006-08-24

申请人： Hendryk Richert ,  Roland Weidl ,  Bernd Grunler ,  Gerald Janicke ,  Siegfried Kern ,  Uwe Kriltz

发明人： Hendryk Richert ,  Roland Weidl ,  Bernd Grunler ,  Gerald Janicke ,  Siegfried Kern ,  Uwe Kriltz

IPC分类号： C23C14/00

CPC分类号： C23C14/3407 ,  C23C14/35 ,  H01J37/3405 ,  H01J37/3452

摘要： A modular and/or segmented magnetic bar for magnetron sputtering targets is provided. A magnet bar is made up of a plurality of magnet segments aligned in a substantially linear manner. One or more magnet bars may be provided. The positions of the magnet segments may be selectively adjusted to, for example, adjust magnetic field(s), replace magnet segment(s) that have been broken or damaged, and so forth.

摘要翻译： 提供了用于磁控溅射靶的模块化和/或分段磁棒。 磁棒由以基本线性的方式排列的多个磁体段组成。 可以提供一个或多个磁棒。 可以选择性地调整磁体段的位置以例如调节磁场，替换已经被破坏或损坏的磁体段等等。

公开(公告)号：US20060008657A1

公开(公告)日：2006-01-12

申请号：US10989728

申请日：2004-11-17

申请人： Uwe Kriltz ,  Jochen Butz ,  Gerald Janicke ,  Vijayen Veerasamy

发明人： Uwe Kriltz ,  Jochen Butz ,  Gerald Janicke ,  Vijayen Veerasamy

IPC分类号： B32B17/06 ,  C23C14/00

CPC分类号： C23C14/0652 ,  B32B17/10036 ,  B32B17/10174 ,  C03C17/002 ,  C03C17/36 ,  C03C17/3618 ,  C03C17/3626 ,  C03C17/3639 ,  C03C17/3644 ,  C03C17/3652 ,  C03C17/366 ,  C03C17/3681 ,  C03C2217/78 ,  C03C2218/154 ,  C03C2218/32 ,  C23C14/086 ,  C23C14/185 ,  C23C14/3442 ,  C23C14/35 ,  C23C14/568 ,  H01J37/3053 ,  H01J2237/3146

摘要： A coated article is provided that may be used as a vehicle windshield, insulating glass (IG) window unit, or the like. An ion beam is used to treat an infrared (IR) reflecting layer(s) of such a coated article. Advantageously, this has been found to improve sheet resistance (Rs) properties, emittance, solar control properties, and/or durability of the coated article. In certain example embodiments, an ion source(s) and a sputtering target(s) used in forming the IR reflecting layer, or any other suitable layer, may be located in a common deposition chamber of an apparatus used in forming at least part of the coating.

摘要翻译： 提供了可用作车辆挡风玻璃，中空玻璃（IG）窗单元等的涂覆制品。 使用离子束来处理这种涂覆制品的红外（IR）反射层。 有利地，已经发现这已经提高了涂层制品的薄层电阻（发射率），发射率，太阳控制性能和/或耐久性。 在某些示例性实施例中，用于形成IR反射层的任何一个或多个离子源和溅射靶或任何其它合适的层可以位于用于形成至少部分 涂层。

公开(公告)号：US20130180580A1

公开(公告)日：2013-07-18

申请号：US13349964

申请日：2012-01-13

申请人： Alexey KRASNOV ,  Jochen Butz ,  Uwe Kriltz

发明人： Alexey KRASNOV ,  Jochen Butz ,  Uwe Kriltz

IPC分类号： H01L31/0216 ,  H01L31/18 ,  B32B17/06

CPC分类号： H01L31/02167 ,  H01L31/02168 ,  H01L31/03923 ,  H01L31/048 ,  H01L31/0488 ,  H01L31/18 ,  Y02E10/541

摘要： Certain example embodiments of this invention relate to photovoltaic modules that include high contact angle coatings on one or more outermost major surfaces thereof, and/or associated methods. In certain example embodiments, the high contact angle coatings advantageously reduce the likelihood of electrical losses through parasitic leakage of the electrical current caused by moisture on surfaces of the photovoltaic modules, thereby potentially improving the efficiency of the photovoltaic devices. In certain example embodiments, the high contact angle coatings may be nitrides and/or oxides of or including Si, Ti, Ta, TaCr, NiCr, and/or Cr; hydrophobic DLC; and/or polymer-based coatings. The photovoltaic modules may be substrate-type modules or superstrate-type modules in different example embodiments.

公开(公告)号：US08337988B2

公开(公告)日：2012-12-25

申请号：US12662561

申请日：2010-04-22

申请人： Hartmut Knoll ,  Jochen Butz ,  Uwe Kriltz ,  Bernd Disteldorf ,  Jose Ferreira ,  Pierrot Pallotta

发明人： Hartmut Knoll ,  Jochen Butz ,  Uwe Kriltz ,  Bernd Disteldorf ,  Jose Ferreira ,  Pierrot Pallotta

IPC分类号： B32B15/04

CPC分类号： G02B5/26 ,  C03C17/36 ,  C03C17/3626 ,  C03C17/3636 ,  C03C17/3644 ,  C03C17/3649 ,  C03C17/366 ,  C03C17/3681 ,  C03C17/3689

摘要： A coated article is provided, having a coating supported by a glass substrate where the coating includes at least one color and/or reflectivity-adjusting absorber layer. The absorber layer(s) allows color tuning, and reduces the glass side reflection of the coated article and/or allows sheet resistance of the coating to be reduced without degrading glass side reflection. In certain example embodiments the absorber layer is provided between first and second dielectric layers which may be of substantially the same material and/or composition. In certain example embodiments, the coated article is capable of achieving desirable transmission, together with desired color, low reflectivity, and low selectivity, when having only one infrared (IR) reflecting layer of silver and/or gold. Coated articles according to certain example embodiments of this invention may be used in the context of insulating glass (IG) window units, monolithic windows, or the like.

摘要翻译： 提供一种涂覆制品，其具有由玻璃基底支撑的涂层，其中涂层包括至少一种颜色和/或反射率调节吸收层。 吸收层允许颜色调节，并且减少涂覆制品的玻璃侧反射和/或允许降低涂层的薄层电阻而不降低玻璃侧反射。 在某些示例性实施例中，吸收层设置在第一和第二电介质层之间，其可以具有基本上相同的材料和/或组成。 在某些示例性实施例中，当仅具有一个红外（IR）反射层的银和/或金时，涂覆制品能够实现期望的透射，连同所需的颜色，低反射率和低选择性。 根据本发明的某些示例性实施例的涂层制品可以用于中空玻璃（IG）窗单元，单片窗等的上下文中。

公开(公告)号：US07291251B2

公开(公告)日：2007-11-06

申请号：US11036187

申请日：2005-01-18

申请人： Jochen Butz ,  Uwe Kriltz ,  Sebastian Bobrowski

发明人： Jochen Butz ,  Uwe Kriltz ,  Sebastian Bobrowski

IPC分类号： C23C14/35

CPC分类号： C23C14/185 ,  C03C17/36 ,  C03C17/3626 ,  C03C17/3644 ,  C03C17/3652 ,  C03C17/366 ,  C03C17/3681 ,  C03C2217/78 ,  C03C2218/154 ,  C23C14/165 ,  C23C14/34 ,  C23C28/322 ,  C23C28/34 ,  C23C28/345 ,  C23C28/3455 ,  C23C28/36

摘要： A method of making a coated article is provided, where the coated article may be used in a window or the like and may have at least one infrared (IR) reflecting layer in a low-E coating. The IR reflecting layer may be of silver or the like. In certain example embodiments, at least krypton (Kr) gas is used in sputter-depositing a silver inclusive IR reflecting layer. It has been found that the use of Kr gas in sputtering Ag targets results in an IR reflecting layer having improved resistance and emittance properties.

摘要翻译： 提供一种制造涂覆制品的方法，其中涂覆制品可以用在窗户等中，并且可以在低E涂层中具有至少一个红外（IR）反射层。 IR反射层可以是银等。 在某些示例性实施例中，至少使用氪（Kr）气体溅射沉积含银的IR反射层。 已经发现，在溅射Ag靶中使用Kr气体导致具有改进的电阻和发射特性的IR反射层。