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公开(公告)号:US5787214A
公开(公告)日:1998-07-28
申请号:US643476
申请日:1996-05-06
申请人: Arnold Peter Roscoe Harpin , Andrew George Rickman , Robin Jeremy Richard Morris , John Paul Drake
发明人: Arnold Peter Roscoe Harpin , Andrew George Rickman , Robin Jeremy Richard Morris , John Paul Drake
CPC分类号: G02B6/30 , G02B6/4207
摘要: A connection between an integrated optical waveguide and an optical fibre has a layer of silicon in which a rib waveguide is formed separated from a substrate by a layer of silicon dioxide. A V-groove is formed in the substrate for receiving an optical fibre, and the V-groove is arranged to align the optical fibre at a predetermined angle with respect to the waveguide. The rib waveguide and the underlying layer of silicon dioxide are formed to overhang the end of the V-groove so that the end of the waveguide is in close proximity with the end of an optical fibre positioned in the V-groove. A method of forming a connection, in which the V-groove is etched using a material which etches the substrate material as opposed to the layer of silicon dioxide, is also disclosed. Finally, a method of connecting an integrated optical waveguide to an optical fibre using a connection as described above is disclosed.
摘要翻译: 集成光波导和光纤之间的连接具有硅层,其中通过二氧化硅层与衬底分离形成肋波导。 在用于接收光纤的基板中形成有V形槽,并且V形槽布置成使光纤相对于波导以预定角度对准。 肋状波导和二氧化硅的下层形成为突出V形槽的端部,使得波导的端部紧邻位于V形槽中的光纤的端部。 还公开了一种形成连接的方法,其中使用与二氧化硅层相反蚀刻衬底材料的材料来蚀刻V形槽。 最后,公开了使用如上所述的连接将集成光波导连接到光纤的方法。
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公开(公告)号:US6108472A
公开(公告)日:2000-08-22
申请号:US19729
申请日:1998-02-06
申请人: Andrew George Rickman , Arnold Peter Roscoe Harpin , Robin Jeremy Richard Morris , Stephen Gorton , Mehdi Asghari
发明人: Andrew George Rickman , Arnold Peter Roscoe Harpin , Robin Jeremy Richard Morris , Stephen Gorton , Mehdi Asghari
IPC分类号: G02B6/42 , H01L31/0232 , H01S5/02 , G02B6/26
CPC分类号: H01L31/0232 , G02B6/4214 , H01S5/02
摘要: The device is formed on a silicon-on-insulator chip (which comprises a layer of silicon (1) separated from a substrate (3) by an insulator layer (2)) and comprises an integrated waveguide (4) formed in the silicon layer (1) and a reflective facet (6) formed in a recess in the silicon layer (1). The facet (6) is positioned to redirect light in a desired direction. The waveguide (4) and facet (6) are both formed in the silicon layer (1) so their positions can be defined by the same lithographic steps so they are automatically aligned with each other.
摘要翻译: 该器件形成在绝缘体上的芯片上(其包括通过绝缘体层(2)从衬底(3)分离的硅层(1)),并且包括形成在硅层中的集成波导(4) (1)和形成在硅层(1)中的凹部中的反射小面(6)。 小平面(6)被定位成将光重定向在期望的方向上。 波导(4)和刻面(6)都形成在硅层(1)中,因此它们的位置可以由相同的光刻步骤限定,使得它们彼此自动对准。
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公开(公告)号:US5881190A
公开(公告)日:1999-03-09
申请号:US853104
申请日:1997-05-08
CPC分类号: H01S5/02252 , G02B6/42 , G02B6/423 , H01S5/0224
摘要: A silicon-on-insulator chip has a location recess formed therein for receiving a laser diode. The location recess includes two non-parallel location surfaces adapted to abut against two reference surfaces formed on the laser diode. The abutment of the location surfaces against the reference surfaces enables a laser emission area of the laser diode to be accurately aligned with a rib waveguide formed on the silicon-on-insulator substrate.
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公开(公告)号:US5991484A
公开(公告)日:1999-11-23
申请号:US264441
申请日:1999-03-08
CPC分类号: H01S5/02252 , G02B6/42 , G02B6/423 , H01S5/0224
摘要: A silicon-on-insulator chip has a location recess formed therein for receiving a laser diode. The location recess includes two non-parallel location surfaces adapted to abut against two reference surfaces formed on the laser diode. The abutment of the location surfaces against the reference surfaces enables a laser emission area of the laser diode to be accurately aligned with a rib waveguide formed on the silicon-on-insulator substrate.
摘要翻译: 绝缘体上硅芯片具有形成在其中的位置凹槽,用于接收激光二极管。 位置凹槽包括适于邻接形成在激光二极管上的两个参考表面的两个非平行位置表面。 位置表面与参考表面的邻接使得激光二极管的激光发射区域能够与形成在绝缘体上硅衬底上的肋波导精确对准。
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公开(公告)号:US6108478A
公开(公告)日:2000-08-22
申请号:US19732
申请日:1998-02-06
申请人: Arnold Peter Roscoe Harpin , Andrew George Rickman , Robin Jeremy Richard Morris , Mehdi Asghari
发明人: Arnold Peter Roscoe Harpin , Andrew George Rickman , Robin Jeremy Richard Morris , Mehdi Asghari
CPC分类号: G02B6/1228 , G02B2006/12097
摘要: A tapered rib waveguide tapering from a large, multi-mode optical waveguide to a smaller, single-mode optical waveguide, the tapered rib waveguide comprising two portions (4,5) formed of the same material: a lower portion (4) which tapers laterally from the large waveguide to the smaller waveguide and an upper portion (5) formed on the lower portion (4), which tapers to a point (or other form of termination), the dimensions of the two portions (4,5) being such that substantially all of a fundamental mode propagated in the large multi-mode waveguide is coupled to the smaller, single-mode waveguide.
摘要翻译: 锥形肋波导从大的多模光波导向较小的单模光波导逐渐变细,所述锥形肋波导包括由相同材料形成的两个部分(4,5):下部(4),其逐渐变细 横向从大波导到较小的波导,以及形成在下部(4)上的上部(5),其逐渐变细到一点(或其他形式的端接),两部分(4,5)的尺寸为 使得在大型多模波导中传播的基本上所有的基本模式都耦合到较小的单模波导。
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公开(公告)号:US06212320B1
公开(公告)日:2001-04-03
申请号:US09298839
申请日:1999-04-26
申请人: Andrew George Rickman , Arnold Peter Roscoe Harpin , James Stuart McKenzie , John Paul Drake , Emma Jane Clarissa Dawnay
发明人: Andrew George Rickman , Arnold Peter Roscoe Harpin , James Stuart McKenzie , John Paul Drake , Emma Jane Clarissa Dawnay
IPC分类号: G02B630
CPC分类号: G02B6/30
摘要: An apparatus is provided for coupling an optical fibre to a waveguide on an optical chip, the apparatus comprises a recess in the chip for receiving the optical fiber, the recess comprising a V-groove the side faces of which locate the position of the fiber in directions perpendicular to the optical axis of the fiber so as to position the fibre in alignment with the waveguide, and an end face adjacent the end of the waveguide, the end face of the recess being substantially flat and substantially perpendicular to the plane of the chip with its normal inclined to the optical axis of the waveguide so an optical fiber having an inclined end face can be brought into a close, abutting relationship with the end of the waveguide and brought into rotational alignment therewith about its optical axis by positioning the fiber so its inclined end face lies in planar contact with the end face of the recess.
摘要翻译: 提供了一种用于将光纤耦合到光学芯片上的波导的设备,该设备包括用于接收光纤的芯片中的凹部,凹槽包括V形槽,其侧面将光纤的位置定位在 垂直于光纤的光轴的方向,以便将光纤定位成与波导对准,以及与波导的端部相邻的端面,凹部的端面基本上平坦且基本垂直于芯片的平面 其通常倾斜于波导的光轴,因此具有倾斜端面的光纤可以与波导的端部形成紧密的邻接关系,并且通过将光纤定位成与其光轴一起旋转对准 其倾斜端面与凹部的端面平面接触。
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公开(公告)号:US6163632A
公开(公告)日:2000-12-19
申请号:US158795
申请日:1998-09-23
申请人: Andrew George Rickman , Arnold Peter Roscoe Harpin , Ralf-Dieter Pechstedt , James Stuart McKenzie
发明人: Andrew George Rickman , Arnold Peter Roscoe Harpin , Ralf-Dieter Pechstedt , James Stuart McKenzie
CPC分类号: G02B6/12004 , G01C19/722 , G02B2006/12119 , G02B2006/2865 , G02F1/025
摘要: An integrated optical circuit for use in a fibre optic gyroscope which senses rotation rates by determining a phase shift due to the Sagnac Effect between light beams travelling around an optical fibre sensing loop (4) in opposite directions, the circuit being provided on a silicon-on-insulator chip comprising a layer of silicon separated from a substrate by an insulating layer, the circuit comprising: rib waveguides (11) formed in the silicon layer for receiving light from a light source (2) and transmitting light to a light detector (3), fibre optic connectors (9) in the form of grooves etched in the silicon layer for receiving the respective ends of the optical fibre sensing loop (4); rib waveguides (11) formed in the silicon layer for transmitting light to and from said fibre optic connectors (9) so as to direct light beams in opposite directions around the sensing loop (4) and receive light beams returning therefrom, phase determining means and (13,17,31) integrated in silicon layer for determining a phase shift between the light beams returning from the sensing loop (4).
摘要翻译: 一种用于光纤陀螺仪的集成光学电路,其通过在相反方向上确定在光纤传感环路(4)周围传播的光束之间的Sagnac效应确定相移来感测旋转速率,该电路设置在硅 - 绝缘体芯片,包括通过绝缘层从衬底分离的硅层,所述电路包括:形成在硅层中的肋波导(11),用于接收来自光源(2)的光并将光传输到光检测器( 3),在硅层中蚀刻的凹槽形式的光纤连接器(9),用于接收光纤感测回路(4)的相应端部; 形成在所述硅层中的肋波导(11),用于将光传送到所述光纤连接器(9)并从所述光纤连接器(9)发射光,以便沿着所述感测环路(4)周围的相反方向引导光束,并且接收从其返回的光束,相位确定装置和 (13,17,31),其集成在硅层中,用于确定从感测回路(4)返回的光束之间的相移。
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公开(公告)号:US5757986A
公开(公告)日:1998-05-26
申请号:US617810
申请日:1996-03-20
CPC分类号: G02F1/025 , G02F1/3133 , G02F1/3138 , G02F2001/0152 , G02F2201/063 , G02F2202/105
摘要: The device comprises a layer of silicon separated from a substrate by a layer of insulating material. A rib having an upper surface and two side surfaces is formed in the layer of silicon to provide a waveguide for the transmission of optical signals. A lateral doped junction is formed between the side surfaces of the rib such that an electrical signal can be applied across the junction to control the density of charge carriers across a substantial part of the cross-sectional area of the rib thereby actively altering the effective refractive index of the waveguide.
摘要翻译: PCT No.PCT / GB93 / 01983 Sec。 371日期:1996年3月20日 102(e)1996年3月20日PCT PCT 1993年9月21日PCT公布。 公开号WO95 / 08787 日期:1995年3月30日该装置包括通过一层绝缘材料与衬底分离的硅层。 在硅层中形成具有上表面和两个侧表面的肋,以提供用于传输光信号的波导。 在肋的侧表面之间形成横向掺杂结,使得电信号可以跨越结点施加,以控制跨越肋的横截面区域的大部分的电荷载流子的密度,从而主动地改变有效折射率 波导指数。
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公开(公告)号:US06415066B1
公开(公告)日:2002-07-02
申请号:US09057641
申请日:1998-04-09
IPC分类号: G02B612
CPC分类号: G02B6/122 , G02B2006/12135 , G02B2006/12145 , G02B2006/12176 , G02F1/0147 , G02F1/225 , G02F2001/0113
摘要: An integrated optical circuit is formed in a silicon layer and supported on a substrate, and a portion of the silicon layer is substantially thermally isolated from the substrate by extending over a recess in the substrate, e.g. in the form of a bridge. Temperature control means are provided to control the temperature of the portion of the silicon layer or of a device provided thereon. A thermal expansion gap may be provided in the portion to accommodate thermal expansion of the portion relative to the substrate.
摘要翻译: 集成光电路形成在硅层中并且被支撑在衬底上,并且硅层的一部分通过在衬底中的凹部上延伸而与衬底基本上热隔离。 以桥的形式。 提供温度控制装置以控制硅层的部分或设置在其上的装置的温度。 可以在该部分中提供热膨胀间隙以适应部分相对于基底的热膨胀。
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公开(公告)号:US06212323B1
公开(公告)日:2001-04-03
申请号:US09121031
申请日:1998-07-23
IPC分类号: G02B610
CPC分类号: G02B6/12011 , G02B6/12028 , G02B6/122 , G02B6/125 , G02B2006/12159
摘要: The present invention is a temperature stable integrated optical device which is substantially insensitive to temperature variations. The device, such as an interferometer, includes sub-sections of a different light transmissive material within the optical pathways. The relative lengths of the two different material waveguides can be selected so as to achieve temperature insensitivity. A suitable balance is to ensure that the ratio of the difference in sub-path lengths of the first and second materials is equal to the ratio of the refractive index gradient with temperature of the second material to the refractive index gradient with temperature of the first material. Preferable materials are silicon and silicon nitride.
摘要翻译: 本发明是对温度变化基本不敏感的温度稳定的集成光学装置。 诸如干涉仪的装置包括在光学通路内的不同透光材料的子部分。 可以选择两种不同材料波导的相对长度,以达到温度不敏感性。 合适的平衡是确保第一和第二材料的子路径长度差的比值等于第二材料的折射率梯度与温度与第一材料的温度的折射率梯度的比率 。 优选的材料是硅和氮化硅。
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