公开(公告)号：US20060214222A1

公开(公告)日：2006-09-28

申请号：US11445111

申请日：2006-05-31

申请人： Ashok Challa ,  Alan Elbanhawy ,  Thomas Grebs ,  Nathan Kraft ,  Dean Probst ,  Rodney Ridley ,  Steven Sapp ,  Qi Wang ,  Chongman Yun ,  J. Lee ,  Peter Wilson ,  Joseph Yedinak ,  J. Jung ,  H. Jang ,  Babak Sani ,  Richard Stokes ,  Gary Dolny ,  John Mytych ,  Becky Losee ,  Adam Selsley ,  Robert Herrick ,  James Murphy ,  Gordon Madson ,  Bruce Marchant ,  Christopher Rexer ,  Christopher Kocon ,  Debra Woolsey

发明人： Ashok Challa ,  Alan Elbanhawy ,  Thomas Grebs ,  Nathan Kraft ,  Dean Probst ,  Rodney Ridley ,  Steven Sapp ,  Qi Wang ,  Chongman Yun ,  J. Lee ,  Peter Wilson ,  Joseph Yedinak ,  J. Jung ,  H. Jang ,  Babak Sani ,  Richard Stokes ,  Gary Dolny ,  John Mytych ,  Becky Losee ,  Adam Selsley ,  Robert Herrick ,  James Murphy ,  Gordon Madson ,  Bruce Marchant ,  Christopher Rexer ,  Christopher Kocon ,  Debra Woolsey

IPC分类号： H01L29/76

CPC分类号： H01L29/407 ,  H01L21/26586 ,  H01L21/3065 ,  H01L21/30655 ,  H01L21/31116 ,  H01L21/6835 ,  H01L23/4952 ,  H01L23/49816 ,  H01L29/0623 ,  H01L29/0634 ,  H01L29/0653 ,  H01L29/0661 ,  H01L29/0696 ,  H01L29/1095 ,  H01L29/165 ,  H01L29/402 ,  H01L29/41766 ,  H01L29/4236 ,  H01L29/42368 ,  H01L29/4238 ,  H01L29/4933 ,  H01L29/495 ,  H01L29/66348 ,  H01L29/66734 ,  H01L29/7396 ,  H01L29/7802 ,  H01L29/7804 ,  H01L29/7805 ,  H01L29/7806 ,  H01L29/7811 ,  H01L29/7813 ,  H01L29/7815 ,  H01L29/7828 ,  H01L29/7831 ,  H01L2221/6834 ,  H01L2221/68363 ,  H01L2224/16 ,  H01L2924/01012 ,  H01L2924/01019 ,  H01L2924/01078 ,  H01L2924/10253 ,  H01L2924/12032 ,  H01L2924/1301 ,  H01L2924/13034 ,  H01L2924/1305 ,  H01L2924/13055 ,  H01L2924/13091 ,  H01L2924/15311 ,  H01L2924/1532 ,  H01L2924/19041 ,  H01L2924/30105 ,  H01L2924/3011 ,  H01L2924/3025 ,  H02M3/00 ,  H02M3/33592 ,  H02M7/48 ,  Y02B70/1475 ,  H01L2924/00 ,  H01L2924/00014

摘要： Various embodiments for improved power devices as well as their methods of manufacture, packaging and circuitry incorporating the same for use in a wide variety of power electronic applications are disclosed. One aspect of the invention combines a number of charge balancing techniques and other techniques for reducing parasitic capacitance to arrive at different embodiments for power devices with improved voltage performance, higher switching speed, and lower on-resistance. Another aspect of the invention provides improved termination structures for low, medium and high voltage devices. Improved methods of fabrication for power devices are provided according to other aspects of the invention. Improvements to specific processing steps, such as formation of trenches, formation of dielectric layers inside trenches, formation of mesa structures and processes for reducing substrate thickness, among others, are presented. According to another aspect of the invention, charge balanced power devices incorporate temperature and current sensing elements such as diodes on the same die. Other aspects of the invention improve equivalent series resistance (ESR) for power devices, incorporate additional circuitry on the same chip as the power device and provide improvements to the packaging of charge balanced power devices.