Microbolometer infrared detector elements and methods for forming same
    1.
    发明授权
    Microbolometer infrared detector elements and methods for forming same 有权
    微波辐射计红外探测器元件及其形成方法

    公开(公告)号:US07718965B1

    公开(公告)日:2010-05-18

    申请号:US11498939

    申请日:2006-08-03

    IPC分类号: G01J5/02

    摘要: Microbolometer infrared detector elements that may be formed and implemented by varying type/s of precursors used to form amorphous silicon-based microbolometer membrane material/s and/or by varying composition of the final amorphous silicon-based microbolometer membrane material/s (e.g., by adjusting alloy composition) to vary the material properties such as activation energy and carrier mobility. The amorphous silicon-based microbolometer membrane material/s materials may include varying amounts of one or more additional and optional materials, including hydrogen, fluorine, germanium, n-type dopants and p-type dopants.

    摘要翻译: 可以通过改变类型的用于形成非晶硅基微热辐射计膜材料的前体和/或通过改变最终的非晶硅基微热辐照仪膜材料的组成来形成和实现微辐射热计红外探测器元件(例如, 通过调节合金组成)以改变材料性质如活化能和载流子迁移率。 无定形硅基微测辐射热计薄膜材料可以包括不同量的一种或多种附加和任选的材料,包括氢,氟,锗,n型掺杂剂和p型掺杂剂。

    Pixel-level optical elements for uncooled infrared detector devices
    4.
    发明授权
    Pixel-level optical elements for uncooled infrared detector devices 有权
    用于非制冷红外探测器的像素级光学元件

    公开(公告)号:US08610070B2

    公开(公告)日:2013-12-17

    申请号:US12799626

    申请日:2010-04-28

    IPC分类号: H01L27/14 G01J5/20 H01L31/00

    摘要: Pixel-level monolithic optical element configurations for uncooled infrared detectors and focal plane arrays in which a monolithically integrated or fabricated optical element may be suspended over a microbolometer pixel membrane structure of an uncooled infrared detector element A monolithic optical element may be, for example, a polarizing or spectral filter element, an optically active filter element, or a microlens element that is structurally attached by an insulating interconnect to the existing metal interconnects such that the installation of the optical element substantially does not impact the thermal mass or thermal time constant of the microbolometer pixel structure, and such that it requires little if any additional device real estate area beyond the area originally consumed by the microbolometer pixel structure interconnects.

    摘要翻译: 用于非制冷红外探测器和焦平面阵列的像素级单片光学元件配置,其中单片集成或制造的光学元件可以悬挂在非制冷红外探测器元件的微测辐射热计像素膜结构上。单片光学元件可以是例如 偏振或光谱滤光器元件,光学有源滤光器元件或微透镜元件,其通过绝缘互连结构地附接到现有金属互连,使得光学元件的安装基本上不影响光学元件的热质量或热时间常数 微照度计像素结构,并且使得其需要很少的额外的设备房地产区域超出由微测热计像素结构原始消耗的区域互连。

    Pixel-level optical elements for uncooled infrared detector devices
    5.
    发明申请
    Pixel-level optical elements for uncooled infrared detector devices 有权
    用于非制冷红外探测器的像素级光学元件

    公开(公告)号:US20110266443A1

    公开(公告)日:2011-11-03

    申请号:US12799626

    申请日:2010-04-28

    摘要: Pixel-level monolithic optical element configurations for uncooled infrared detectors and focal plane arrays in which a monolithically integrated or fabricated optical element may be suspended over a microbolometer pixel membrane structure of an uncooled infrared detector element A monolithic optical element may be, for example, a polarizing or spectral filter element, an optically active filter element, or a microlens element that is structurally attached by an insulating interconnect to the existing metal interconnects such that the installation of the optical element substantially does not impact the thermal mass or thermal time constant of the microbolometer pixel structure, and such that it requires little if any additional device real estate area beyond the area originally consumed by the microbolometer pixel structure interconnects.

    摘要翻译: 用于非制冷红外探测器和焦平面阵列的像素级单片光学元件配置,其中单片集成或制造的光学元件可以悬挂在非制冷红外探测器元件的微测辐射热计像素膜结构上。单片光学元件可以是例如 偏振或光谱滤光器元件,光学有源滤光器元件或微透镜元件,其通过绝缘互连结构地附接到现有金属互连,使得光学元件的安装基本上不影响光学元件的热质量或热时间常数 微照度计像素结构,并且使得其需要很少的额外的设备房地产区域超出由微测热计像素结构原始消耗的区域互连。