Single-walled Carbon Nanotube Films and Method and Apparatus for Fabricating Thereof

    公开(公告)号:US20230227313A1

    公开(公告)日:2023-07-20

    申请号:US17756895

    申请日:2020-12-04

    申请人: Atom H2O, LLC

    发明人: Huaping Li

    摘要: Disclosed herein is an apparatus and method for fabrication of large diameter single-walled carbon nanotube films. Advantageously, large diameter single-walled carbon nanotube films may be useful as transparent electrodes with high transparency and lower sheet resistance. In one embodiment, the method includes supplying carrier carbon monoxide and catalyst precursor through a first inlet at a temperature below the reaction temperature of the catalyst precursor; supplying heated carbon monoxide through a second inlet such that the heated carbon monoxide mixes with the carrier carbon monoxide and the catalyst an aerosol; reacting the aerosol in a reaction chamber to form a composite aerosol of single walled carbon nanotubes, metal nanoparticles, carbon monoxide, and carbon dioxide. In this embodiment, the heated carbon monoxide heats the catalyst precursor which reacts with the carbon monoxide to form carbon nanotubes.

    Manufacturing of carbon nanotube thin film transistor backplanes and display integration thereof

    公开(公告)号:US10978640B2

    公开(公告)日:2021-04-13

    申请号:US16678491

    申请日:2019-11-08

    申请人: Atom H2O, LLC

    发明人: Huaping Li

    摘要: Methods for producing and integrating single-walled carbon nanotubes (SWCNT) into existing TFT backplane manufacturing lines are provided. In contrast to LTPS and oxide TFT backplanes, SWCNT TFT backplanes exhibit either equivalent or better figures of merit such as high field emission mobility, low temperature fabrication, good stability, uniformity, scalability, flexibility, transparency, mechanical deformability, low voltage and low power, bendability and low cost. Methods and processes for integrating SWCNTs technologies into existing TFT backplane manufacturing lines, pilot test and mass production can start without additional capex needs are also provided.

    Carbon Nanotube Based Radio Frequency Devices

    公开(公告)号:US20220077392A1

    公开(公告)日:2022-03-10

    申请号:US17417719

    申请日:2020-01-06

    申请人: Atom H2O, LLC

    发明人: Huaping Li

    摘要: High-performance carbon nanotube (CNT) based millimeter-wave transistor technologies and demonstrate monolithic millimeter-wave integrated circuits (MMICs) based thereon, and methods and processes for the fabrication thereof are also provided. CNT technologies and MMICs demonstrate improved power efficiency, linearity, noise and dynamic range performance over existing GaAs, SiGe and RF-CMOS technologies. Methods and processes in CNT alignment and deposition, material contact and doping are configured to fabricate high quality CNT arrays beyond the current state-of-the-art and produce high performance RF transistors that are scalable to wafer size to enable fabrication of monolithic integrated circuits based on CNTs.

    Electronically pure single chirality semiconducting single-walled carbon nanotube for large scale electronic devices

    公开(公告)号:US11069867B2

    公开(公告)日:2021-07-20

    申请号:US16743844

    申请日:2020-01-15

    申请人: Atom H2O, LLC

    发明人: Huaping Li

    摘要: An electronically pure carbon nanotube ink, includes a population of semiconducting carbon nanotubes suspended in a liquid, the ink being essentially free of metallic impurities and organic material, and characterized in that when incorporated as a carbon nanotube network in a metal/carbon nanotube network/metal double diode, a nonlinear current-bias curve is obtained on application of a potential from 0.01 V to 100 V. The ink can be used to prepare air-stable n-type thin film transistors having performances similar to current thin film transistors used in flat panel displays amorphous silicon devices and high performance p-type thin film transistors with high-κ dielectrics.