公开(公告)号：US20130050346A1

公开(公告)日：2013-02-28

申请号：US13596128

申请日：2012-08-28

申请人： Atsushi TAKEUCHI ,  Osamu MACHIDA ,  Ryo TASHIRO ,  Masahiro YAGI ,  Dongsik JANG ,  Yoshinori BANDOH

发明人： Atsushi TAKEUCHI ,  Osamu MACHIDA ,  Ryo TASHIRO ,  Masahiro YAGI ,  Dongsik JANG ,  Yoshinori BANDOH

IPC分类号： B41J2/04 ,  B05D5/12 ,  H02N11/00

CPC分类号： B41J2/14233 ,  B41J2/1714 ,  B41J2/185

摘要： An applying liquid is applied to a first electrode by ejecting from a nozzle the applying liquid including a raw material for forming an elecromechanical transducer film, and a film of the applying liquid applied onto the first electrode is dried. The dried film is thermally decomposed and crystallized. At this time, a voltage is applied to an accompanying droplet collecting electrode for collecting a small accompanying droplet accompanying a chief droplet. The accompanying droplet is electrostatically attracted and collected by the accompanying droplet collecting electrode before reaching the first electrode. At this time, the voltage is applied to the accompanying droplet collecting electrode by the voltage applying part after a predetermined period of time has elapsed from when a droplet of the applying liquid has been ejected from the nozzle.

摘要翻译： 通过从喷嘴喷射包括用于形成机电换能器膜的原料的涂布液并将施加在第一电极上的涂布液的膜干燥，将涂布液施加到第一电极。 干燥的膜被热分解并结晶。 此时，将电压施加到伴随的液滴收集电极，用于收集伴随主液滴的小附带液滴。 附着的液滴在到达第一电极之前由附带的液滴收集电极静电吸引和收集。 此时，从施加液体的液滴从喷嘴喷射出经过规定时间后，电压施加到伴随的液滴收集电极。

公开(公告)号：US20160049579A1

公开(公告)日：2016-02-18

申请号：US14827902

申请日：2015-08-17

申请人： Akira SHIMOFUKU ,  Atsushi TAKEUCHI ,  Osamu MACHIDA

发明人： Akira SHIMOFUKU ,  Atsushi TAKEUCHI ,  Osamu MACHIDA

IPC分类号： H01L41/332 ,  H01L41/08 ,  H01L41/25 ,  B41J2/14

CPC分类号： H01L41/332 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1629 ,  B41J2/164 ,  B41J2/1645 ,  H01L41/0805 ,  H01L41/1876 ,  H01L41/25 ,  H01L41/318 ,  H01L41/331

摘要： A method of fabricating an electromechanical transducer film includes applying a precursor solution on a support substrate, heating the substrate at a first temperature to form a ceramic thin-film in amorphous state, applying a sol-gel solution onto the ceramic thin-film, and heating the ceramic thin-film at a second temperature to form an electromechanical transducer thin-film in amorphous state. The method further includes heating the ceramic and transducer thin-films at a third temperature to thermally decompose an organic substance in the sol-gel solution and form a unitary thin-film, processing the unitary thin-film to form a patterned unitary thin-film, modifying an area on which the patterned film is not formed, discharging the sol-gel solution onto a surface of the patterned film by a liquid discharge head to apply the sol-gel solution to the surface of the patterned film, and heating the patterned film at a fourth temperature to crystallize the patterned film.

摘要翻译： 制造机电换能器膜的方法包括将前体溶液施加在支撑基板上，在第一温度下加热基板以形成非晶状态的陶瓷薄膜，将溶胶 - 凝胶溶液施加到陶瓷薄膜上，以及 在第二温度下加热陶瓷薄膜以形成非晶态的机电换能器薄膜。 该方法还包括在第三温度下加热陶瓷和换能器薄膜以热分解溶胶 - 凝胶溶液中的有机物质并形成整体薄膜，处理整体薄膜以形成图案化单一薄膜 对未形成图案化膜的区域进行修饰，通过液体排出头将溶胶 - 凝胶溶液排出到图案化膜的表面上，将溶胶 - 凝胶溶液涂布到图案化膜的表面，并加热图案化膜 膜在第四温度下结晶图案化膜。

公开(公告)号：US20170210132A1

公开(公告)日：2017-07-27

申请号：US15405714

申请日：2017-01-13

申请人： Osamu MACHIDA ,  Masahiro ISHIMORI ,  Atsushi TAKEUCHI ,  Shuya ABE

发明人： Osamu MACHIDA ,  Masahiro ISHIMORI ,  Atsushi TAKEUCHI ,  Shuya ABE

IPC分类号： B41J2/14 ,  H01L41/29 ,  H01L41/331 ,  H01L41/08 ,  H01L41/09

CPC分类号： B41J2/14233 ,  B41J2/1612 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1645 ,  B41J2/1646 ,  H01L41/0805 ,  H01L41/098 ,  H01L41/1876 ,  H01L41/29 ,  H01L41/318 ,  H01L41/331

摘要： An electromechanical transducer element includes a first electrode; an electromechanical transducer film stacked on one surface of the first electrode; a second electrode stacked on the electromechanical transducer film; and wiring formed on the second electrode. In an at least one cross section, each of a boundary, on a second electrode side, of the electromechanical transducer film and a boundary, on a side opposite to the electromechanical transducer film, of the second electrode is a curved shape protruding away from the first electrode. In the at least one cross section, each of a film thickness of the electromechanical transducer film and a film thickness of the second electrode becomes thinner toward end portions from a maximum height portion.

公开(公告)号：US20160221033A1

公开(公告)日：2016-08-04

申请号：US15094256

申请日：2016-04-08

申请人： Yoshikazu AKIYAMA ,  Akira SHIMOFUKU ,  Atsushi TAKEUCHI ,  Osamu MACHIDA

发明人： Yoshikazu AKIYAMA ,  Akira SHIMOFUKU ,  Atsushi TAKEUCHI ,  Osamu MACHIDA

IPC分类号： B05D1/32 ,  H01L21/02 ,  H01L41/317 ,  H01L49/02 ,  B05D1/02 ,  B05D3/00

CPC分类号： B05D1/322 ,  B05D1/02 ,  B05D3/007 ,  H01L21/02623 ,  H01L27/11568 ,  H01L27/20 ,  H01L28/40 ,  H01L41/0973 ,  H01L41/113 ,  H01L41/1132 ,  H01L41/1876 ,  H01L41/317 ,  H01L41/319 ,  H01L41/332 ,  H05K1/16 ,  H05K3/1241

摘要： An electronic device includes a substrate; and a plurality of thin-film elements formed on the substrate. Further, the thin-film element includes a thin-film section having a function selected from a group including piezoelectric effect, inverse piezoelectric effect, charge storage, semiconductivity, and conductivity, and the plurality of thin-film elements includes the thin-film sections having two or more different functions.

摘要翻译： 电子装置包括：基板; 以及形成在所述基板上的多个薄膜元件。 此外，薄膜元件包括具有选自包括压电效应，反压电效应，电荷存储，半导电性和导电性的组的功能的薄膜部分，并且多个薄膜元件包括薄膜部分 具有两个或多个不同的功能。

公开(公告)号：US20150307403A1

公开(公告)日：2015-10-29

申请号：US14689138

申请日：2015-04-17

申请人： Atsushi TAKEUCHI ,  Osamu MACHIDA ,  Akira SHIMOFUKU

发明人： Atsushi TAKEUCHI ,  Osamu MACHIDA ,  Akira SHIMOFUKU

IPC分类号： C04B35/472 ,  G01P15/02 ,  G01C19/5607 ,  C01G25/00 ,  H01L41/08 ,  F04B19/00 ,  F16K99/00 ,  F16K31/02 ,  G02B26/08 ,  H01L41/187

CPC分类号： C04B35/472 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/164 ,  C23C18/1216 ,  C23C18/1254 ,  C23C18/1283 ,  F04B19/006 ,  F04B43/046 ,  F16K99/0015 ,  F16K99/0048 ,  F16K2099/0092 ,  G02B26/0858 ,  H01L41/1876 ,  H01L41/318 ,  H01L41/331

摘要： A precursor sol-gel solution is provided that has been subjected to a partial hydrolysis process and is used for forming an oxide dielectric film having a perovskite structure represented by the general formula ABO3. The precursor sol-gel solution is subjected to a stabilization process for controlling a viscosity change resulting from the partial hydrolysis process to be less than or equal to 50%, and water contained in the precursor sol-gel solution is controlled to be greater than or equal to 0.50 times and less than or equal to 10 times by molar ratio with respect to a B site atom contained in the precursor sol-gel solution.

摘要翻译： 提供已经进行部分水解处理的前体溶胶 - 凝胶溶液，并用于形成具有由通式ABO 3表示的钙钛矿结构的氧化物电介质膜。 将前体溶胶 - 凝胶溶液进行稳定化处理，以将由部分水解过程产生的粘度变化控制在小于或等于50％，并且将前体溶胶 - 凝胶溶液中包含的水控制为大于或等于 相对于前体溶胶 - 凝胶溶液中所含的B位原子，为摩尔比的0.50倍以上且小于等于10倍。

公开(公告)号：US20180117915A1

公开(公告)日：2018-05-03

申请号：US15668839

申请日：2017-08-04

申请人： Atsushi TAKEUCHI ,  Osamu MACHIDA ,  Akira SHIMOFUKU ,  Shuya ABE ,  Masahiro ISHIMORI ,  Takuma HIRABAYASHI

发明人： Atsushi TAKEUCHI ,  Osamu MACHIDA ,  Akira SHIMOFUKU ,  Shuya ABE ,  Masahiro ISHIMORI ,  Takuma HIRABAYASHI

IPC分类号： B41J2/14 ,  H01L41/09 ,  B41J2/16 ,  H01L41/08 ,  H01L41/29

CPC分类号： B41J2/14233 ,  B41J2/1612 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1645 ,  B41J2/1646 ,  H01L41/047 ,  H01L41/0805 ,  H01L41/0973 ,  H01L41/098 ,  H01L41/29 ,  H01L41/318

摘要： An electromechanical transducer element includes a first electrode on a substrate, an electromechanical transducer film on the first electrode, and a second electrode on the electromechanical transducer film. The electromechanical transducer film includes a thin line pattern. The thin line pattern includes a plurality of thin lines that are spaced away from each other.

公开(公告)号：US20170362127A1

公开(公告)日：2017-12-21

申请号：US15695769

申请日：2017-09-05

申请人： Atsushi TAKEUCHI ,  Osamu MACHIDA ,  Akira SHIMOFUKU

发明人： Atsushi TAKEUCHI ,  Osamu MACHIDA ,  Akira SHIMOFUKU

IPC分类号： C04B35/472 ,  B41J2/14 ,  H01L41/187 ,  G02B26/08 ,  B41J2/16 ,  F16K99/00 ,  F04B43/04 ,  F04B19/00 ,  C23C18/12 ,  H01L41/331 ,  H01L41/318

CPC分类号： C04B35/472 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/164 ,  C23C18/1216 ,  C23C18/1254 ,  C23C18/1283 ,  F04B19/006 ,  F04B43/046 ,  F16K99/0015 ,  F16K99/0048 ,  F16K2099/0092 ,  G02B26/0858 ,  H01L41/1876 ,  H01L41/318 ,  H01L41/331

摘要： A functional ink that includes a precursor sol-gel solution and a solvent is provided. The precursor sol-gel solution is used for forming an oxide dielectric film having a perovskite structure represented by a general formula ABO3, and has been subjected to a partial hydrolysis process in which a viscosity change resulting from the partial hydrolysis process is controlled to be less than or equal to 50%, and water contained in the precursor sol-gel solution is controlled to be greater than or equal to 0.50 times and less than or equal to 10 times by molar ratio with respect to a B site atom contained in the precursor sol-gel solution. The functional ink has a metal oxide concentration and a viscosity that renders the functional ink suitable for being discharged from a nozzle of a liquid droplet discharge apparatus included in a thin film fabrication apparatus.

公开(公告)号：US20140375728A1

公开(公告)日：2014-12-25

申请号：US14303858

申请日：2014-06-13

申请人： Osamu MACHIDA ,  Akira SHIMOFUKU ,  Atsushi TAKEUCHI

发明人： Osamu MACHIDA ,  Akira SHIMOFUKU ,  Atsushi TAKEUCHI

IPC分类号： H01L41/053 ,  H01L41/23 ,  B41J2/045

CPC分类号： B41J2/045 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1626 ,  B41J2/1631 ,  B41J2/1646 ,  B41J2202/11 ,  H01L41/0805 ,  H01L41/0973 ,  H01L41/318 ,  H01L41/331 ,  Y10T29/42

摘要： An actuator includes a base member and an electro-mechanical transducer element including a first electrode, an electro-mechanical transducer film, and a second electrode. Further, the base member includes a thin wall part having a concave shape, the electro-mechanical transducer film is formed in a manner such that a film thickness of the electro-mechanical transducer film is gradually reduced from a center part of the electro-mechanical transducer film to both end parts of the electro-mechanical transducer film in at least one direction crossing a film thickness direction of the electro-mechanical transducer film.

摘要翻译： 致动器包括基部构件和包括第一电极，机电换能器膜和第二电极的机电换能器元件。 此外，基底构件包括具有凹形形状的薄壁部分，机电换能器膜以使得机电换能器膜的膜厚度从电机械的中心部分逐渐减小的方式形成 换能器薄膜在与机电换能器薄膜的膜厚度方向交叉的至少一个方向上的机电换能器薄膜的两端部。

公开(公告)号：US20170306471A1

公开(公告)日：2017-10-26

申请号：US15491354

申请日：2017-04-19

申请人： Shuya ABE ,  Osamu MACHIDA ,  Masahiro ISHIMORI ,  Takuma HIRABAYASHI

发明人： Shuya ABE ,  Osamu MACHIDA ,  Masahiro ISHIMORI ,  Takuma HIRABAYASHI

IPC分类号： C23C14/16 ,  B41J2/14 ,  B41J2/16

摘要： There is provided a method of producing an electromechanical transducer that includes a plurality of electromechanical transducer elements on a substrate. The method includes forming a plurality of individual electrodes corresponding to the plurality of electromechanical transducer elements on the substrate, forming an insulation film to cover the plurality of individual electrodes on the substrate, forming a conductive film on the insulation film, forming a plurality of openings to expose the plurality of individual electrodes in each of the insulation film and the conductive film, and forming a plurality of electromechanical transducer films on the plurality of individual electrodes exposed in the plurality of openings.

公开(公告)号：US20120306545A1

公开(公告)日：2012-12-06

申请号：US13482384

申请日：2012-05-29

申请人： Osamu MACHIDA ,  Shinji Sato

发明人： Osamu MACHIDA ,  Shinji Sato

IPC分类号： H03K3/00

CPC分类号： H02M3/1588 ,  H02M1/08 ,  Y02B70/1466

摘要： A gate driver turns on/off a switching element Q1 by applying a control signal from a controller to a gate of the switching element. The switching element has the gate, a drain, and a source and contains a wide-bandgap semiconductor. The gate driver includes a parallel circuit that includes a first capacitor C1 and a first resistor R1 and is connected between the controller and the gate of the switching element and a short-circuit unit S4 that is connected between the gate and source of the switching element and short-circuits the gate and source of the switching element after a delay from an OFF pulse of the control signal.

摘要翻译： 栅极驱动器通过将来自控制器的控制信号施加到开关元件的栅极来打开/关闭开关元件Q1。 开关元件具有栅极，漏极和源极，并且包含宽带隙半导体。 栅极驱动器包括并联电路，其包括第一电容器C1和第一电阻器R1，并且连接在控制器和开关元件的栅极之间，并且连接在开关元件的栅极和源极之间的短路单元S4 并且在从控制信号的OFF脉冲延迟之后使开关元件的栅极和源极短路。