公开(公告)号：US20230029442A9

公开(公告)日：2023-01-26

申请号：US16197107

申请日：2018-11-20

Applicant: Brooks Automation, Inc.

Inventor： Robert T. Caveney ,  Ulysses Gilchrist ,  Alexander Krupyshev

IPC: H01L21/677

Abstract: A transfer apparatus including a frame, multiple arms connected to the frame, each arm having an end effector and an independent drive axis for extension and retraction of the respective arm with respect to other ones of the multiple arms, a linear rail defining a degree of freedom for the independent drive axis for extension and retraction of at least one arm, and a common drive axis shared by each arm and configured to pivot the multiple arms about a common pivot axis, wherein at least one of the multiple arms having another drive axis defining an independent degree of freedom with respect to other ones of the multiple arms.

公开(公告)号：US11088004B2

公开(公告)日：2021-08-10

申请号：US16257595

申请日：2019-01-25

Applicant: Brooks Automation, Inc.

Inventor： Alexander Krupyshev ,  Leigh F. Sharrock

IPC: H01L21/68 ,  H01L21/677 ,  H01L21/687 ,  H01L21/67 ,  B25J9/16 ,  B25J11/00 ,  B65G47/90

Abstract: A substrate transport apparatus including a transport chamber, a drive section, a robot arm having an end effector at a distal end configured to support a substrate and being connected to the drive section generating at least arm motion in a radial direction extending and retracting the arm, an imaging system with a camera mounted in a predetermined location to image at least part of the robot arm, and a controller connected to the imaging system to image the arm moving to a predetermined repeatable position, the controller effecting capture of a first image of the robot arm proximate to the repeatable position decoupled from encoder data of the drive axis, wherein the controller calculates a positional variance of the robot arm from comparison of the first image with a calibration image, and from the positional variance determines a motion compensation factor changing the extended position of the robot arm.

公开(公告)号：US20160329234A1

公开(公告)日：2016-11-10

申请号：US15215143

申请日：2016-07-20

Applicant: Brooks Automation, Inc.

Inventor： Alexander Krupyshev ,  Robert T. Caveney ,  Daniel Babbs ,  Ulysses Gilchrist

IPC: H01L21/687 ,  B25J9/04 ,  B25J11/00 ,  H01L21/67

CPC classification number: H01L21/68707 ,  B25J9/042 ,  B25J11/0095 ,  B25J18/00 ,  H01L21/67161 ,  H01L21/67184 ,  H01L21/67196 ,  H01L21/67742

Abstract: A transfer apparatus for transporting substrates in a transfer chamber having a first and second ends and two sides extending between the ends. The transfer apparatus includes a drive section, at least one base arm fixed at one end with respect to the transfer chamber and including at least one arm link rotatably coupled to the drive section and at least one transfer arm rotatably coupled to a common end of the base arm, the at least one transfer arm has two end effectors. The drive section has motors with three independent axes of rotation defining three degrees of freedom. One degree of freedom moves the at least one base arm horizontally for transporting the at least one transfer arm and two degrees of freedom drives the at least one transfer arm to extend and retract the at least one transfer arm and swap the two end effectors.

公开(公告)号：US09401294B2

公开(公告)日：2016-07-26

申请号：US14058436

申请日：2013-10-21

Applicant: Brooks Automation, Inc.

Inventor： Christopher Hofmeister ,  Alexander Krupyshev ,  Ulysses Gilchrist

IPC: H01L21/677 ,  H01L21/67

CPC classification number: H01L21/677 ,  H01L21/6719 ,  H01L21/67201 ,  H01L21/67742 ,  H01L21/67766 ,  H01L21/67775

Abstract: A substrate processing system including a load port module configured to hold at least one substrate container for storing and transporting substrates, a substrate processing chamber, an isolatable transfer chamber capable of holding an isolated atmosphere therein configured to couple the substrate processing chamber and the load port module, and a substrate transport mounted at least partially within the transfer chamber having a drive section fixed to the transfer chamber and having a SCARA arm configured to support at least one substrate, the SCARA arm being configured to transport the at least one substrate between the at least one substrate container and the processing chamber with but one touch of the at least one substrate, wherein the SCARA arm comprises a first arm link, a second arm link, and at least one end effector serially pivotally coupled to each other, where the first and second arm links have unequal lengths.

公开(公告)号：US08662812B2

公开(公告)日：2014-03-04

申请号：US13625704

申请日：2012-09-24

Applicant: Brooks Automation, Inc.

Inventor： Christopher Hofmeister ,  Martin R. Elliot ,  Alexander Krupyshev ,  Joseph Hallisey ,  Joseph A. Kraus ,  William Fosnight ,  Craig J. Carbone ,  Jeffrey C. Blahnik ,  Ho Yin Owen Fong

IPC: H01L21/67 ,  F16K25/00

CPC classification number: H01L21/67098 ,  H01L21/67126 ,  H01L21/6719 ,  H01L21/67201

Abstract: A semiconductor processing tool is disclosed, the tool having a frame forming at least one chamber with an opening and having a sealing surface around a periphery of the opening, a door configured to interact with the sealing surface for sealing the opening, the door having sides perpendicular to the door sealing surface and perpendicular to a transfer plane of a substrate, and at least one drive located on the frame to a side of at least one of the sides that are substantially perpendicular to the door sealing surface and substantially perpendicular to the transfer plane of the substrate, the drive having actuators located at least partially in front of the sealing surface and the actuators being coupled to one of the sides of the door for moving the door from a sealed position. The at least one drive is located outside of a substrate transfer zone.

Abstract translation: 公开了一种半导体加工工具，所述工具具有框架，所述框架形成具有开口的至少一个室，并且具有围绕所述开口的周边的密封表面;门构造成与所述密封表面相互作用以密封所述开口，所述门具有侧面 垂直于所述门密封表面并垂直于衬底的传输平面的至少一个驱动器，以及位于所述框架上的至少一个侧面的至少一个驱动器，所述驱动器基本上垂直于所述门密封表面并且基本上垂直于所述传送 所述驱动器具有至少部分地位于所述密封表面前面的致动器，并且所述致动器联接到所述门的一侧以将所述门从密封位置移动。 至少一个驱动器位于衬底转移区的外部。

公开(公告)号：US11587813B2

公开(公告)日：2023-02-21

申请号：US16197107

申请日：2018-11-20

Applicant: Brooks Automation, Inc.

Inventor： Robert T. Caveney ,  Ulysses Gilchrist ,  Alexander Krupyshev

IPC: H01L21/677 ,  B25J9/04 ,  B25J11/00

Abstract: A transfer apparatus including a frame, multiple arms connected to the frame, each arm having an end effector and an independent drive axis for extension and retraction of the respective arm with respect to other ones of the multiple arms, a linear rail defining a degree of freedom for the independent drive axis for extension and retraction of at least one arm, and a common drive axis shared by each arm and configured to pivot the multiple arms about a common pivot axis, wherein at least one of the multiple arms having another drive axis defining an independent degree of freedom with respect to other ones of the multiple arms.

公开(公告)号：US09478446B2

公开(公告)日：2016-10-25

申请号：US14195086

申请日：2014-03-03

Applicant: Brooks Automation, Inc.

Inventor： Christopher Hofmeister ,  Martin R. Elliot ,  Alexander Krupyshev ,  Joseph Hallisey ,  Joseph A. Kraus ,  William Fosnight ,  Craig J. Carbone ,  Jeffrey C. Blahnik ,  Ho Yin Owen Fong

IPC: H01L21/67

CPC classification number: H01L21/67098 ,  H01L21/67126 ,  H01L21/6719 ,  H01L21/67201

Abstract: A semiconductor processing tool is disclosed, the tool having a frame forming at least one chamber with an opening and having a sealing surface around a periphery of the opening, a door configured to interact with the sealing surface for sealing the opening, the door having sides perpendicular to the door sealing surface and perpendicular to a transfer plane of a substrate, and at least one drive located on the frame to a side of at least one of the sides that are substantially perpendicular to the door sealing surface and substantially perpendicular to the transfer plane of the substrate, the drive having actuators located at least partially in front of the sealing surface and the actuators being coupled to one of the sides of the door for moving the door from a sealed position. The at least one drive is located outside of a substrate transfer zone.

Abstract translation: 公开了一种半导体加工工具，所述工具具有框架，所述框架形成具有开口的至少一个室，并且具有围绕所述开口的周边的密封表面;门构造成与所述密封表面相互作用以密封所述开口，所述门具有侧面 垂直于所述门密封表面并垂直于衬底的传输平面的至少一个驱动器，以及位于所述框架上的至少一个侧面的至少一个驱动器，所述驱动器基本上垂直于所述门密封表面并且基本上垂直于所述传送 所述驱动器具有至少部分地位于所述密封表面前面的致动器，并且所述致动器联接到所述门的一侧以将所述门从密封位置移动。 至少一个驱动器位于衬底转移区的外部。

公开(公告)号：US20150013910A1

公开(公告)日：2015-01-15

申请号：US14377987

申请日：2013-02-11

Applicant: Brooks Automation, Inc.

Inventor： Alexander Krupyshev ,  Ulysses Gilchrist ,  Robert T. Caveney ,  Daniel Babbs

IPC: H01L21/677 ,  B25J18/00 ,  H01L21/67

CPC classification number: H01L21/68707 ,  B25J9/042 ,  B25J11/0095 ,  B25J18/00 ,  H01L21/67161 ,  H01L21/67184 ,  H01L21/67196 ,  H01L21/67742

Abstract: A transfer apparatus for transporting substrates in a transfer chamber having a first and second ends and two sides extending between the ends. The transfer apparatus includes a drive section, at least one base arm fixed at one end with respect to the transfer chamber and including at least one arm link rotatably coupled to the drive section and at least one transfer arm rotatably coupled to a common end of the base arm, the at least one transfer arm has two end effectors. The drive section has motors with three independent axes of rotation defining three degrees of freedom. One degree of freedom moves the at least one base arm horizontally for transporting the at least one transfer arm and two degrees of freedom drives the at least one transfer arm to extend and retract the at least one transfer arm and swap the two end effectors.

Abstract translation: 一种用于在具有第一端和第二端以及两端之间延伸的两侧的传送室中传送基板的传送装置。 传送装置包括驱动部分，至少一个基部臂相对于传送室固定在一端，并且包括可旋转地联接到驱动部分的至少一个臂连杆和至少一个可转动地连接到驱动部分的公共端的传送臂 所述至少一个传送臂具有两个末端执行器。 驱动部分具有三个独立的旋转轴定义三个自由度的电机。 一个自由度水平地移动至少一个基部臂以便传送至少一个传送臂，并且两个自由度驱动至少一个传送臂，以延伸和缩回至少一个传送臂并且互换两个末端执行器。

公开(公告)号：US20140044504A1

公开(公告)日：2014-02-13

申请号：US14058436

申请日：2013-10-21

Applicant: Brooks Automation, Inc.

Inventor： Christopher Hofmeister ,  Alexander Krupyshev ,  Ulysses Gilchrist

IPC: H01L21/677

CPC classification number: H01L21/677 ,  H01L21/6719 ,  H01L21/67201 ,  H01L21/67742 ,  H01L21/67766 ,  H01L21/67775

Abstract: A substrate processing system including a load port module configured to hold at least one substrate container for storing and transporting substrates, a substrate processing chamber, an isolatable transfer chamber capable of holding an isolated atmosphere therein configured to couple the substrate processing chamber and the load port module, and a substrate transport mounted at least partially within the transfer chamber having a drive section fixed to the transfer chamber and having a SCARA arm configured to support at least one substrate, the SCARA arm being configured to transport the at least one substrate between the at least one substrate container and the processing chamber with but one touch of the at least one substrate, wherein the SCARA arm comprises a first arm link, a second arm link, and at least one end effector serially pivotally coupled to each other, where the first and second arm links have unequal lengths.

Abstract translation: 一种基板处理系统，包括负载端口模块，该负载端口模块被配置为保持用于存储和传送基板的至少一个基板容器，基板处理室，能够保持隔离气体的可隔离转移室，配置成将基板处理室和负载端口 模块和至少部分地安装在所述传送室内的衬底传送器，其具有固定到所述传送室的驱动部分并且具有被配置为支撑至少一个衬底的SCARA臂，所述SCARA臂被配置为将所述至少一个衬底 至少一个衬底容器和所述处理室，所述处理室具有所述至少一个衬底的一个触点，其中所述SCARA臂包括第一臂连杆，第二臂连杆和至少一个末端执行器，所述至少一个末端执行器彼此串联地枢转地联接，其中 第一和第二臂连杆具有不相等的长度。

公开(公告)号：US20130078057A1

公开(公告)日：2013-03-28

申请号：US13625704

申请日：2012-09-24

Applicant: BROOKS AUTOMATION, INC.

Inventor： Christopher Hofmeister ,  Martin R. Elliot ,  Alexander Krupyshev ,  Joseph Hallisey ,  Joseph A. Kraus ,  William Fosnight ,  Craig J. Carbone ,  Jeffrey C. Blahnik ,  Ho Yin Owen Fong

IPC: H01L21/67

CPC classification number: H01L21/67098 ,  H01L21/67126 ,  H01L21/6719 ,  H01L21/67201

Abstract: A semiconductor processing tool is disclosed, the tool having a frame forming at least one chamber with an opening and having a sealing surface around a periphery of the opening, a door configured to interact with the sealing surface for sealing the opening, the door having sides perpendicular to the door sealing surface and perpendicular to a transfer plane of a substrate, and at least one drive located on the frame to a side of at least one of the sides that are substantially perpendicular to the door sealing surface and substantially perpendicular to the transfer plane of the substrate, the drive having actuators located at least partially in front of the sealing surface and the actuators being coupled to one of the sides of the door for moving the door from a sealed position. The at least one drive is located outside of a substrate transfer zone.

Abstract translation: 公开了一种半导体加工工具，所述工具具有框架，所述框架形成具有开口的至少一个室，并且具有围绕所述开口的周边的密封表面;门构造成与所述密封表面相互作用以密封所述开口，所述门具有侧面 垂直于所述门密封表面并垂直于衬底的传输平面的至少一个驱动器，以及位于所述框架上的至少一个侧面的至少一个驱动器，所述驱动器基本上垂直于所述门密封表面并且基本上垂直于所述传送 所述驱动器具有至少部分地位于所述密封表面前面的致动器，并且所述致动器联接到所述门的一侧以将所述门从密封位置移动。 至少一个驱动器位于衬底转移区的外部。