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公开(公告)号：US20070075256A1
公开(公告)日：2007-04-05
申请号：US11241789
申请日：2005-09-30
申请人： Benyamin Buller , William Devore , Juergen Frosien , Eugene Mirro , Henry Pearce-Percy , Dieter Winkler
发明人： Benyamin Buller , William Devore , Juergen Frosien , Eugene Mirro , Henry Pearce-Percy , Dieter Winkler
IPC分类号： H01J37/147
CPC分类号： H01J37/147 , B82Y10/00 , B82Y40/00 , H01J37/045 , H01J37/24 , H01J37/3174 , H01J2237/0432 , H01J2237/1504 , H01J2237/28
摘要： An apparatus and method for deflecting electron beams with high precision and high throughput. At least one electrode of a deflecting capacitor is connected to a signal source via a coaxial cable. A termination resistor is further connected to the coaxial cable and the electrode at the joint of the coaxial cable and the electrode. The termination resistor has a resistance matched to the impedance of the coaxial cable and the electrode has an impedance matched to half of the impedance of the coaxial. The deflecting capacitors of the present invention have a minimized loss of precision due to eddy current. The spacing of electrodes in the deflecting capacitors is reduced by a factor of approximately two compared to the state-the-art system.
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2.发明授权Electrostatic deflection system with impedance matching for high positioning accuracy 失效静电偏转系统具有阻抗匹配，定位精度高公开(公告)号：US07227155B2
公开(公告)日：2007-06-05
申请号：US11241789
申请日：2005-09-30
申请人： Benyamin Buller , William J. Devore , Juergen Frosien , Eugene Mirro, Jr. , Henry Pearce-Percy , Dieter Winkler
发明人： Benyamin Buller , William J. Devore , Juergen Frosien , Eugene Mirro, Jr. , Henry Pearce-Percy , Dieter Winkler
IPC分类号： H01J37/147
CPC分类号： H01J37/147 , B82Y10/00 , B82Y40/00 , H01J37/045 , H01J37/24 , H01J37/3174 , H01J2237/0432 , H01J2237/1504 , H01J2237/28
摘要： An apparatus and method for deflecting electron beams with high precision and high throughput. At least one electrode of a deflecting capacitor is connected to a signal source via a coaxial cable. A termination resistor is further connected to the coaxial cable and the electrode at the joint of the coaxial cable and the electrode. The termination resistor has a resistance matched to the impedance of the coaxial cable and the electrode has an impedance matched to half of the impedance of the coaxial. The deflecting capacitors of the present invention have a minimized loss of precision due to eddy current. The spacing of electrodes in the deflecting capacitors is reduced by a factor of approximately two compared to the state-the-art system.
摘要翻译： 一种高精度高通量偏转电子束的装置和方法。 偏转电容器的至少一个电极通过同轴电缆连接到信号源。 终端电阻器还连接到同轴电缆和在同轴电缆和电极的接头处的电极。 终端电阻器具有与同轴电缆的阻抗匹配的电阻，并且电极具有与同轴电缆的阻抗的一半相匹配的阻抗。 本发明的偏转电容器由于涡电流而具有最小的精度损失。 与现有技术的系统相比，偏转电容器中的电极间距减小约2倍。
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公开(公告)号：US20070085033A1
公开(公告)日：2007-04-19
申请号：US11243363
申请日：2005-10-03
申请人： Benyamin Buller , William DeVore , Juergen Frosien , Xinrong Jiang , Richard Lozes , Henry Pearce-Percy , Dieter Winkler , Steven Coyle , Helmut Banzhof
发明人： Benyamin Buller , William DeVore , Juergen Frosien , Xinrong Jiang , Richard Lozes , Henry Pearce-Percy , Dieter Winkler , Steven Coyle , Helmut Banzhof
IPC分类号： G21G5/00
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , H01J2237/31754
摘要： An electron beam column comprises a thermal field emission electron source to generate an electron beam, an electron beam blanker, a beam shaping module, and electron beam optics comprising a plurality of electron beam lenses. In one version, the optical parameters of the electron beam blanker, beam shaping module, and electron beam optics are set to achieve an acceptance semi-angle β of from about ¼ to about 3 mrads, where the acceptance semi-angle β is the half the angle subtended by the electron beam at the writing plane. The beam-shaping module can also operate as a single lens using upper and lower projection lenses. A multifunction module for an electron beam column is also described.
摘要翻译： 电子束柱包括产生电子束的热场发射电子源，电子束消除器，光束整形模块和包括多个电子束透镜的电子束光学器件。 在一个版本中，电子束消隐器，光束整形模块和电子束光学器件的光学参数被设置为实现约¼至约3mrads的接受半角β，其中接受半角β是半 在写平面处电子束对着的角度。 光束成形模块也可以使用上下投影透镜作为单个透镜进行操作。 还描述了用于电子束柱的多功能模块。
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公开(公告)号：US07514682B2
公开(公告)日：2009-04-07
申请号：US11537062
申请日：2006-09-29
申请人： Benyamin Buller , William J. Devore , Juergen Frosien , Richard L. Lozes , Henry Pearce-Percy , Dieter Winkler
发明人： Benyamin Buller , William J. Devore , Juergen Frosien , Richard L. Lozes , Henry Pearce-Percy , Dieter Winkler
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , H01J37/244 , H01J2237/004 , H01J2237/0213 , H01J2237/0262 , H01J2237/2448 , H01J2237/24571
摘要： Methods and apparatus to facilitate the measurement of the amount of scattered electrons collected by an anti-fogging baffle arrangement are provided. For some embodiments, by affixing a lead to an electrically isolated (floating) portion of the baffle arrangement, the amount of scattered electrons collected thereby may be read out, for example, as a current signal. Thus, for such embodiments, the baffle arrangement may double as a detector, allowing an image of surface (e.g., a mask or substrate surface) to be generated.
摘要翻译： 提供了有助于测量由防雾挡板装置收集的散射电子量的方法和装置。 对于一些实施例，通过将导线附接到挡板装置的电隔离（浮动）部分，由此收集的散射电子的量可以例如被读取为电流信号。 因此，对于这样的实施例，挡板装置可以作为检测器加倍，从而允许产生表面（例如，掩模或衬底表面）的图像。
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公开(公告)号：US07800075B2
公开(公告)日：2010-09-21
申请号：US12194220
申请日：2008-08-19
申请人： Benyamin Buller , William J. DeVore , Juergen Frosien , Xinrong Jiang , Richard L. Lozes , Henry Thomas Pearce-Percy , Dieter Winkler , Steven T. Coyle , Helmut Banzhof
发明人： Benyamin Buller , William J. DeVore , Juergen Frosien , Xinrong Jiang , Richard L. Lozes , Henry Thomas Pearce-Percy , Dieter Winkler , Steven T. Coyle , Helmut Banzhof
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , H01J2237/31754
摘要： A multifunction module for an electron beam column comprises upper and lower electrodes, and a central ring electrode. The upper and lower electrodes have multipoles and are capable of deflecting, or correcting an aberration of, an electron beam passing through the electrodes. A voltage can be applied to the central ring electrode independently of the voltages applied to the upper and lower electrodes to focus the electron beam on a substrate.
摘要翻译： 用于电子束柱的多功能模块包括上电极和下电极以及中心环电极。 上电极和下电极具有多极并且能够偏转或校正通过电极的电子束的像差。 可以独立于施加到上电极和下电极的电压而将电压施加到中心环电极，以将电子束聚焦在衬底上。
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公开(公告)号：US20080308751A1
公开(公告)日：2008-12-18
申请号：US12194220
申请日：2008-08-19
申请人： Benyamin Buller , William J. DeVore , Juergen Frosien , Xinrong Jiang , Richard L. Lozes , Henry Thomas Pearce-Percy , Dieter Winkler , Steven T. Coyle , Helmut Banzhof
发明人： Benyamin Buller , William J. DeVore , Juergen Frosien , Xinrong Jiang , Richard L. Lozes , Henry Thomas Pearce-Percy , Dieter Winkler , Steven T. Coyle , Helmut Banzhof
IPC分类号： A61N5/00
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , H01J2237/31754
摘要： A multifunction module for an electron beam column comprises upper and lower electrodes, and a central ring electrode. The upper and lower electrodes have multipoles and are capable of deflecting, or correcting an aberration of, an electron beam passing through the electrodes. A voltage can be applied to the central ring electrode independently of the voltages applied to the upper and lower electrodes to focus the electron beam on a substrate.
摘要翻译： 用于电子束柱的多功能模块包括上电极和下电极以及中心环电极。 上电极和下电极具有多极并且能够偏转或校正通过电极的电子束的像差。 可以独立于施加到上电极和下电极的电压而将电压施加到中心环电极，以将电子束聚焦在衬底上。
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公开(公告)号：US07427765B2
公开(公告)日：2008-09-23
申请号：US11243363
申请日：2005-10-03
申请人： Benyamin Buller , William J. DeVore , Juergen Frosien , Xinrong Jiang , Richard L. Lozes , Henry Thomas Pearce-Percy , Dieter Winkler , Steven T. Coyle , Helmut Banzhof
发明人： Benyamin Buller , William J. DeVore , Juergen Frosien , Xinrong Jiang , Richard L. Lozes , Henry Thomas Pearce-Percy , Dieter Winkler , Steven T. Coyle , Helmut Banzhof
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , H01J2237/31754
摘要： An electron beam column comprises a thermal field emission electron source to generate an electron beam, an electron beam blanker, a beam shaping module, and electron beam optics comprising a plurality of electron beam lenses. In one version, the optical parameters of the electron beam blanker, beam shaping module, and electron beam optics are set to achieve an acceptance semi-angle β of from about ¼ to about 3 mrads, where the acceptance semi-angle β is half the angle subtended by the electron beam at the writing plane. The beam-shaping module can also operate as a single lens using upper and lower projection lenses. A multifunction module for an electron beam column is also described.
摘要翻译： 电子束柱包括产生电子束的热场发射电子源，电子束消除器，光束整形模块和包括多个电子束透镜的电子束光学器件。 在一个版本中，电子束消隐器，光束整形模块和电子束光学器件的光学参数被设置为实现约¼至约3mrads的接受半角β，其中接受半角β是一半 在写平面处电子束对着的角度。 光束成形模块也可以使用上下投影透镜作为单个透镜进行操作。 还描述了用于电子束柱的多功能模块。
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公开(公告)号：US07456414B2
公开(公告)日：2008-11-25
申请号：US11236893
申请日：2005-09-28
IPC分类号： G01N23/00
CPC分类号： H01J37/3045 , B82Y10/00 , B82Y40/00 , H01J37/3174
摘要： A beam re-registration system and method for error correction of a particle or other beam are disclosed. The beam re-registration system and method may include a particle or other beam, a stage movable in relation to the particle beam, at least two servos for controlling movement of the stage, a fixed target or grid located on the stage, and a re-registration controller adapted to control the servos. The re-registration controller may attenuate high frequency signals and amplify low frequency signals, and may be a type 2 controller which accurately corrects a ramp disturbance.
摘要翻译： 公开了一种用于粒子或其他光束的纠错的光束重新配准系统和方法。 光束重新注册系统和方法可以包括粒子或其他光束，相对于粒子束可移动的台，用于控制舞台的移动，位于舞台上的固定目标或网格的至少两个舵机， 注册控制器适用于控制舵机。 再注册控制器可以衰减高频信号并放大低频信号，并且可以是精确校正斜坡干扰的2型控制器。
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公开(公告)号：US20070069155A1
公开(公告)日：2007-03-29
申请号：US11236893
申请日：2005-09-28
申请人： Eugene Mirro , Benyamin Buller , Thomas Lamson
发明人： Eugene Mirro , Benyamin Buller , Thomas Lamson
IPC分类号： G01N23/00
CPC分类号： H01J37/3045 , B82Y10/00 , B82Y40/00 , H01J37/3174
摘要： A beam re-registration system and method for error correction of a particle or other beam are disclosed. The beam re-registration system and method may include a particle or other beam, a stage movable in relation to the particle beam, at least two servos for controlling movement of the stage, a fixed target or grid located on the stage, and a reregistration controller adapted to control the servos. The reregistration controller may attenuate high frequency signals and amplify low frequency signals, and may be a type 2 controller which accurately corrects a ramp disturbance.
摘要翻译： 公开了一种用于粒子或其他光束的纠错的光束重新配准系统和方法。 光束重新注册系统和方法可以包括粒子或其他光束，相对于粒子束可移动的平台，用于控制舞台的移动的至少两个舵机，位于舞台上的固定目标或网格以及重新注册 控制器适用于控制舵机。 再注册控制器可以衰减高频信号并放大低频信号，并且可以是精确校正斜坡干扰的2型控制器。
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10.发明申请TRAJECTORY MAPPING FOR IMPROVED MOTION-SYSTEM JITTER WHILE MINIMIZING TRACKING ERROR 审中-公开用于改善运动系统抖动的轨迹绘图在最小化跟踪误差公开(公告)号：US20070206456A1
公开(公告)日：2007-09-06
申请号：US11537054
申请日：2006-09-29
申请人： Jeffrey Sullivan , Benyamin Buller , Eugene Mirro , William Eckes
发明人： Jeffrey Sullivan , Benyamin Buller , Eugene Mirro , William Eckes
IPC分类号： G11B7/00
CPC分类号： G05B19/19 , G02B27/0012 , G05B2219/37275 , G05B2219/41036 , G05B2219/41219
摘要： Methods and apparatus to compensate for low-frequency tracking errors in motion control of a movable stage are provided. By recording tracking errors during earlier traversal of a trajectory, filtering, and applying those recorded tracking errors to subsequent traversals of the same or a similar trajectory, tracking errors of the subsequent traversals may be significantly reduced.
摘要翻译： 提供了补偿可移动台的运动控制中的低频跟踪误差的方法和装置。 通过在先前遍历轨迹期间记录跟踪误差，过滤并将这些记录的跟踪误差应用于相同或相似轨迹的后续遍历，可以显着减少后续遍历的跟踪误差。
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