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    CMP composition containing surface-modified abrasive particles
    1.
    发明申请
    CMP composition containing surface-modified abrasive particles 审中-公开
    含有表面改性磨料颗粒的CMP组合物

    公开(公告)号：US20060096179A1

    公开(公告)日：2006-05-11

    申请号：US10982080

    申请日：2004-11-05

    Applicant: Bin Lu ,  Li Wu

    Inventor： Bin Lu ,  Li Wu

    IPC: C09K3/14

    CPC classification number: C09K3/1436 ,  B82Y30/00 ,  C01P2004/64 ,  C01P2004/84 ,  C09C1/3054 ,  C09C3/063 ,  C09C3/10 ,  C09G1/02 ,  C09K3/1445 ,  C09K3/1463

    Abstract: The invention provides a polishing composition comprising (a) particles of an abrasive comprising a first metal oxide and a second metal oxide adhered to at least a portion of a surface of the first metal oxide, (b) a water-soluble or water-emulsifiable polymer, wherein the water-soluble or water-emulsifiable polymer coats at least a portion of the second metal oxide such that the zeta potential of the abrasive is changed, and (c) water. The invention further provides a method of chemically-mechanically polishing a substrate through use of such a polishing composition.

    Abstract translation: 本发明提供了一种抛光组合物，其包含（a）研磨剂颗粒，其包含附着到第一金属氧化物表面的至少一部分上的第一金属氧化物和第二金属氧化物，（b）水溶性或水可乳化的 聚合物，其中所述水溶性或水可乳化的聚合物涂覆所述第二金属氧化物的至少一部分，使得所述研磨剂的ζ电位改变，和（c）水。 本发明还提供了通过使用这种抛光组合物对衬底进行化学机械抛光的方法。

    Wavelength-selective laser beam splitter
    4.
    发明授权
    Wavelength-selective laser beam splitter 有权
    波长选择激光束分离器

    公开(公告)号：US06661577B1

    公开(公告)日：2003-12-09

    申请号：US10244631

    申请日：2002-09-17

    Applicant: Li Wu ,  Yinglong Lin

    Inventor： Li Wu ,  Yinglong Lin

    IPC: G02B2710

    CPC classification number: G02B27/12 ,  G02B27/1006

    Abstract: A beam splitting device for laser field is useful to spatially separate a laser beam created in the process of frequency doubling or three-wave mixing, into sub-beams according to wavelength and polarization state. The device has an optical retarder for wavelength-selective polarization rotation of the laser light, followed by a Wollaston prism and optionally a dual wedge prism to create parallel spatially separated sub-beams. Alternatively, two Wollaston prisms can be arranged to create two parallel spatially separated beams after the polarization rotation.

    Abstract translation: 用于激光场的分束装置可用于根据波长和偏振状态在倍频或三波混频过程中产生的激光束空间分离成子光束。 该装置具有用于激光的波长选择性偏振旋转的光学延迟器，随后是Wollaston棱镜和任选的双楔形棱镜以产生平行的空间上分离的子光束。 或者，可以布置两个沃拉斯顿棱镜，以便在偏振旋转之后产生两个平行的空间分离的光束。

    OPTICAL ISOLATOR DEVICE
    7.
    发明申请
    OPTICAL ISOLATOR DEVICE 有权
    光学隔离器装置

    公开(公告)号：US20090046347A1

    公开(公告)日：2009-02-19

    申请号：US12120002

    申请日：2008-05-13

    Applicant: Li Wu ,  Xianghua Shi ,  Zan Gong ,  Jiwu Ling ,  Zhaoyang Sun ,  Xiangtong Yang ,  Yunbin Xu ,  Lei Lin ,  Fuquan Huang

    Inventor： Li Wu ,  Xianghua Shi ,  Zan Gong ,  Jiwu Ling ,  Zhaoyang Sun ,  Xiangtong Yang ,  Yunbin Xu ,  Lei Lin ,  Fuquan Huang

    IPC: G02F1/09

    CPC classification number: G02F1/093

    Abstract: An optical isolator includes a birefringent material and a Faraday rotator. The birefringent material receives a forward light propagating in a forward direction and a backward light propagating opposite to the forward direction. The birefringent material has an optical axis, wherein the forward light has a first polarization aligned perpendicular to the optical axis and is configured to pass the first birefringent material substantially along the forward direction. At least a portion of the backward light has a second polarization not perpendicular to the optical axis. The first birefringent material can displace the backward light to form a first displaced backward light. A Faraday rotator can rotate the forward light, and the backward light or the first displaced backward light by a same predetermined angle along the rotation direction.

    Abstract translation: 光隔离器包括双折射材料和法拉第旋转器。 双折射材料接收沿正向传播的正向光和向前方向相反传播的向后光。 所述双折射材料具有光轴，其中所述正向光具有垂直于所述光轴的第一偏振，并且被配置为基本上沿着所述向前方向通过所述第一双折射材料。 反射光的至少一部分具有不垂直于光轴的第二偏振光。 第一双折射材料可以将后向光移位以形成第一位移反向光。 法拉第旋转器可以沿着旋转方向旋转向前的光，向后的光或第一个向后的光反向旋转相同的预定角度。

    Compact optical multiplexer/demultiplexer
    8.
    发明授权
    Compact optical multiplexer/demultiplexer 失效
    紧凑型光复用器/解复用器

    公开(公告)号：US06941072B2

    公开(公告)日：2005-09-06

    申请号：US09981048

    申请日：2001-10-16

    Applicant: Li Wu ,  Zhanhua Guo ,  Jiwu Ling ,  Heping Zeng ,  Zhizhan Ruan ,  Jiayong Ma

    Inventor： Li Wu ,  Zhanhua Guo ,  Jiwu Ling ,  Heping Zeng ,  Zhizhan Ruan ,  Jiayong Ma

    IPC: G02B6/34 ,  H04J14/02

    CPC classification number: G02B6/29367 ,  G02B6/2938 ,  G02B6/29395 ,  H04J14/0206 ,  H04J14/0209 ,  H04J14/0213 ,  H04J14/0219

    Abstract: The invention relates to wavelength division multiplexing (WDM) and demultiplexing of optical signals using optical filters in free space. To minimize dispersion, the present invention uses relatively small angles of incidence. To avoid the need for a large package, the present invention utilizes reflective prisms to steer the reflected beams to provide a lateral shift in the beam path that ensures that the necessary space is provided between the input/output ports. Devices including a single adjustable filter are disclosed, along with devices having a plurality of filters.

    Abstract translation: 本发明涉及波分复用（WDM）和使用自由空间中的滤光器的光信号的解复用。 为了最小化分散，本发明使用相对小的入射角。 为了避免对大封装的需要，本发明利用反射棱镜来控制反射光束以提供光束路径中的横向偏移，从而确保在输入/输出端口之间提供必要的空间。 公开了包括单个可调节滤光器的装置以及具有多个滤光器的装置。

    Method of temperature compensation for interleaver
    9.
    发明授权
    Method of temperature compensation for interleaver 失效
    交织器温度补偿方法

    公开(公告)号：US06687055B2

    公开(公告)日：2004-02-03

    申请号：US10186377

    申请日：2002-07-01

    Applicant: Li Wu ,  Jiwu Ling ,  Feng Liang ,  Heping Zeing

    Inventor： Li Wu ,  Jiwu Ling ,  Feng Liang ,  Heping Zeing

    IPC: G02B2728

    CPC classification number: G02B7/008 ,  G02B5/3083 ,  Y10S359/90

    Abstract: The invention provides a simple temperature insensitive optical retarder (waveplate) having a first and a second wedge shaped birefringent crystals, and a crystal mount comprising a first material having a low thermal expansion coefficient and a second material having a high thermal expansion coefficient, wherein the first and the second wedge shaped birefringent crystals are attached onto the first and second materials, respectively, so that the total retardance by the first and second birefringent crystals at a first temperature is substantially the same as that at a second different temperature at a given wavelength. Advantageously, the temperature insensitive optical retarder is simple, easy to construct, can be used for any birefringent crystal and does not require the use of different birefringent crystals.

    Abstract translation: 本发明提供一种具有第一和第二楔形双折射晶体的简单的温度不敏感光学延迟器（波片），以及包括具有低热膨胀系数的第一材料和具有高热膨胀系数的第二材料的晶体安装座，其中， 第一和第二楔形双折射晶体分别附着到第一和第二材料上，使得第一和第二双折射晶体在第一温度下的总延迟与在给定波长处的第二不同温度下的总延迟基本相同 。 有利的是，温度不敏感的光学延迟器简单，易于构造，可用于任何双折射晶体，不需要使用不同的双折射晶体。

    Method of performing titanium/titanium nitride integration
    10.
    发明授权
    Method of performing titanium/titanium nitride integration 失效
    执行钛/氮化钛整合的方法

    公开(公告)号：US06221174B1

    公开(公告)日：2001-04-24

    申请号：US09248869

    申请日：1999-02-11

    Applicant: Fufa Chen ,  Yin Lin ,  Jianhua Hu ,  Frederick Wu ,  Ming Xi ,  Li Wu

    Inventor： Fufa Chen ,  Yin Lin ,  Jianhua Hu ,  Frederick Wu ,  Ming Xi ,  Li Wu

    IPC: C23C824

    CPC classification number: C23C16/0281 ,  H01L21/28568

    Abstract: The present invention is a method of wafer processing which improves the reliability of an integrated titanium (Ti)/titanium nitride (TiN) CVD film formed from a reaction of titanium tetrachloride (TiCi4) and ammonia (NH3). A Ti film is subject to a treatment of NH3 gas to render the Ti film unreactive towards attack by chlorine and hydrogen chloride. A thin seed layer of TiN film is deposited upon the treated Ti film using a thermal TiCl4/NH3 reaction. Subsequent TiN film deposition upon the seed layer results in a successful integration of a Ti/TiN film stack for a Ti film thickness up to about 300 Å.

    Abstract translation: 本发明是提高由四氯化钛（TiCi4）和氨（NH3）的反应形成的钛（Ti）/氮化钛（TiN）CVD膜的一体化的可靠性的晶片处理方法。 对Ti膜进行NH 3气处理，使Ti膜不受氯和氯化氢侵蚀。 使用热TiCl 4 / NH 3反应将TiN膜的薄晶种层沉积在处理的Ti膜上。 随后在种子层上的TiN膜沉积导致Ti / TiN膜叠层的成功整合，使Ti膜厚度达到约300。

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