公开(公告)号：US20120293520A1

公开(公告)日：2012-11-22

申请号：US13111683

申请日：2011-05-19

申请人： Changhan Yun ,  Sang-June Park ,  Chi Shun Lo ,  Jonghae Kim ,  Je-Hsiung Lan ,  Sanghoon Joo

发明人： Changhan Yun ,  Sang-June Park ,  Chi Shun Lo ,  Jonghae Kim ,  Je-Hsiung Lan ,  Sanghoon Joo

IPC分类号： G06T1/00 ,  H03H9/17

CPC分类号： H03H9/173 ,  H03H9/02228

摘要： This disclosure provides implementations of electromechanical systems resonator structures, devices, apparatus, systems, and related processes. In one aspect, resonator apparatus includes a first conductive layer including a first electrode and a second electrode. The first electrode is coupled to receive a first input signal, and the second electrode is coupled to provide a first output signal. A piezoelectric layer includes a piezoelectric material. The piezoelectric layer has a first side and a second side opposite the first side. The first side is proximate the first conductive layer, and the second side is electrically isolated from ground. In some examples, the second side of the piezoelectric layer can be exposed and/or electrically de-coupled from one or more components.

摘要翻译： 本公开提供了机电系统谐振器结构，设备，装置，系统和相关过程的实现。 在一个方面，谐振器装置包括包括第一电极和第二电极的第一导电层。 第一电极被耦合以接收第一输入信号，并且第二电极被耦合以提供第一输出信号。 压电层包括压电材料。 压电层具有与第一侧相对的第一侧和第二侧。 第一侧靠近第一导电层，第二侧与地电隔离。 在一些示例中，压电层的第二面可以暴露和/或从一个或多个部件电脱耦合。

公开(公告)号：US09083300B2

公开(公告)日：2015-07-14

申请号：US13094707

申请日：2011-04-26

申请人： Chi Shun Lo ,  Jonghae Kim ,  Sang-June Park ,  Sanghoon Joo ,  Chengjie Zuo ,  Changhan Yun

发明人： Chi Shun Lo ,  Jonghae Kim ,  Sang-June Park ,  Sanghoon Joo ,  Chengjie Zuo ,  Changhan Yun

IPC分类号： H03H9/70 ,  H03H9/00 ,  H01P1/213 ,  H03H9/02 ,  H03H9/24 ,  H03H9/56 ,  G09G3/34 ,  H03H3/02

CPC分类号： H03H9/0095 ,  G09G3/3493 ,  G09G2310/0267 ,  G09G2310/027 ,  H01P1/2135 ,  H03H9/0014 ,  H03H9/02228 ,  H03H9/2431 ,  H03H9/2436 ,  H03H9/2463 ,  H03H9/564 ,  H03H2003/027 ,  H03H2009/02496 ,  H03H2009/02527 ,  H03H2009/241

摘要： This disclosure provides implementations of electromechanical systems resonator structures, devices, apparatus, systems, and related processes. In one aspect, a contour mode resonator device includes a first conductive layer with a plurality of first layer electrodes including a first electrode at which a first input signal can be provided and a second electrode at which a first output signal can be provided. A second conductive layer includes a plurality of second layer electrodes including a first electrode proximate the first electrode of the first conductive layer and a second electrode proximate the second electrode of the first conductive layer. A second signal can be provided at the first electrode or the second electrode of the second conductive layer to cooperate with the first input signal or the first output signal to define a differential signal. A piezoelectric layer is disposed between the first conductive layer and the second conductive layer. The piezoelectric layer includes a piezoelectric material. The piezoelectric layer is substantially oriented in a plane and capable of movement in the plane responsive to an electric field between the first electrodes or the second electrodes.

摘要翻译： 本公开提供了机电系统谐振器结构，设备，装置，系统和相关过程的实现。 一方面，轮廓模式谐振器装置包括具有多个第一层电极的第一导电层，所述第一导电层包括能够提供第一输入信号的第一电极和可以提供第一输出信号的第二电极。 第二导电层包括多个第二层电极，其包括靠近第一导电层的第一电极的第一电极和靠近第一导电层的第二电极的第二电极。 可以在第二导电层的第一电极或第二电极处提供第二信号，以与第一输入信号或第一输出信号配合以限定差分信号。 压电层设置在第一导电层和第二导电层之间。 压电层包括压电材料。 压电层基本上定向在平面中并且能够响应于第一电极或第二电极之间的电场在平面中移动。

公开(公告)号：US20120050236A1

公开(公告)日：2012-03-01

申请号：US13094707

申请日：2011-04-26

申请人： Chi Shun Lo ,  Jonghae Kim ,  Sang-June Park ,  Sanghoon Joo ,  Chengjie Zuo ,  Changhan Yun

发明人： Chi Shun Lo ,  Jonghae Kim ,  Sang-June Park ,  Sanghoon Joo ,  Chengjie Zuo ,  Changhan Yun

IPC分类号： H01P7/00 ,  H04B1/04 ,  H04B1/06 ,  H01P5/12 ,  G09G5/00

CPC分类号： H03H9/0095 ,  G09G3/3493 ,  G09G2310/0267 ,  G09G2310/027 ,  H01P1/2135 ,  H03H9/0014 ,  H03H9/02228 ,  H03H9/2431 ,  H03H9/2436 ,  H03H9/2463 ,  H03H9/564 ,  H03H2003/027 ,  H03H2009/02496 ,  H03H2009/02527 ,  H03H2009/241

摘要： This disclosure provides implementations of electromechanical systems resonator structures, devices, apparatus, systems, and related processes. In one aspect, a contour mode resonator device includes a first conductive layer with a plurality of first layer electrodes including a first electrode at which a first input signal can be provided and a second electrode at which a first output signal can be provided. A second conductive layer includes a plurality of second layer electrodes including a first electrode proximate the first electrode of the first conductive layer and a second electrode proximate the second electrode of the first conductive layer. A second signal can be provided at the first electrode or the second electrode of the second conductive layer to cooperate with the first input signal or the first output signal to define a differential signal. A piezoelectric layer is disposed between the first conductive layer and the second conductive layer. The piezoelectric layer includes a piezoelectric material. The piezoelectric layer is substantially oriented in a plane and capable of movement in the plane responsive to an electric field between the first electrodes or the second electrodes.

摘要翻译： 本公开提供了机电系统谐振器结构，设备，装置，系统和相关过程的实现。 一方面，轮廓模式谐振器装置包括具有多个第一层电极的第一导电层，所述第一导电层包括能够提供第一输入信号的第一电极和可以提供第一输出信号的第二电极。 第二导电层包括多个第二层电极，其包括靠近第一导电层的第一电极的第一电极和靠近第一导电层的第二电极的第二电极。 可以在第二导电层的第一电极或第二电极处提供第二信号，以与第一输入信号或第一输出信号配合以限定差分信号。 压电层设置在第一导电层和第二导电层之间。 压电层包括压电材料。 压电层基本上定向在平面中并且能够响应于第一电极或第二电极之间的电场在平面中移动。

公开(公告)号：US20130076209A1

公开(公告)日：2013-03-28

申请号：US13241356

申请日：2011-09-23

申请人： Chengjie Zuo ,  Chi Shun Lo ,  Sanghoon Joo ,  Changhan Yun ,  Jonghae Kim

发明人： Chengjie Zuo ,  Chi Shun Lo ,  Sanghoon Joo ,  Changhan Yun ,  Jonghae Kim

IPC分类号： H01L41/107 ,  H01L41/04 ,  H01L41/047

CPC分类号： H03H9/02157 ,  H03H9/02062 ,  H03H9/56

摘要： A method and apparatus for a piezoelectric resonator having combined thickness and width vibrational modes are disclosed. A piezoelectric resonator may include a piezoelectric substrate and a first electrode coupled to a first surface of the piezoelectric substrate. The piezoelectric resonator may further include a second electrode coupled to a second surface of the piezoelectric substrate, where the first surface and the second surface are substantially parallel and define a thickness dimension of the piezoelectric substrate. Furthermore, the thickness dimension and the width dimension of the piezoelectric substrate are configured to produce a resonance from a coherent combination of a thickness vibrational mode and a width vibrational mode when an excitation signal is applied to the electrodes.

摘要翻译： 公开了一种具有组合的厚度和宽度振动模式的压电谐振器的方法和装置。 压电谐振器可以包括压电衬底和耦合到压电衬底的第一表面的第一电极。 压电谐振器还可以包括耦合到压电基板的第二表面的第二电极，其中第一表面和第二表面基本平行并且限定压电基板的厚度尺寸。 此外，压电基板的厚度尺寸和宽度尺寸被构造成当激励信号施加到电极时，从厚度振动模式和宽度振动模式的相干组合产生谐振。

公开(公告)号：US20130120415A1

公开(公告)日：2013-05-16

申请号：US13295967

申请日：2011-11-14

申请人： Chengjie Zuo ,  Chi Shun Lo ,  Sanghoon Joo ,  Changhan Yun ,  Jonghae Kim

发明人： Chengjie Zuo ,  Chi Shun Lo ,  Sanghoon Joo ,  Changhan Yun ,  Jonghae Kim

IPC分类号： G06F13/14 ,  H01L41/02 ,  H01L41/22 ,  B05D5/12 ,  H03H9/54

CPC分类号： H03H9/02228 ,  H03H3/02 ,  H03H2003/021

摘要： This disclosure provides implementations of electromechanical systems combined resonator and passive circuit component structures, devices, apparatus, systems, and related processes. In one aspect, the device includes a piezoelectric resonator structure formed over an insulating substrate. A portion of the piezoelectric resonator structure is spaced apart from the substrate by a first gap. A passive circuit component structure such as an inductor or a capacitor is formed over the insulating substrate. A portion of the passive circuit component structure is spaced apart from the substrate by a second gap. The first gap and the second gap are defined by removal of a sacrificial (SAC) layer.

摘要翻译： 本公开提供机电系统组合谐振器和无源电路组件结构，设备，装置，系统和相关过程的实现。 一方面，该装置包括形成在绝缘基板上的压电谐振器结构。 压电谐振器结构的一部分与衬底间隔开第一间隙。 在绝缘基板上形成诸如电感器或电容器的无源电路部件结构。 无源电路部件结构的一部分通过第二间隙与衬底间隔开。 通过去除牺牲（SAC）层来限定第一间隙和第二间隙。

公开(公告)号：US20130120082A1

公开(公告)日：2013-05-16

申请号：US13293522

申请日：2011-11-10

申请人： Chengjie Zuo ,  Changhan Yun ,  Chi Shun Lo ,  Sanghoon Joo ,  Jonghae Kim

发明人： Chengjie Zuo ,  Changhan Yun ,  Chi Shun Lo ,  Sanghoon Joo ,  Jonghae Kim

IPC分类号： H03H9/58 ,  H01L41/22

CPC分类号： H03H9/56 ,  H03H9/02228 ,  H03H9/566 ,  Y10T29/42

摘要： Systems and method for wideband filter designs comprising two-port piezoelectric resonators electrically coupled in parallel. A resonating circuit comprises a first piezoelectric resonator formed of a first configuration, and a second piezoelectric resonator formed of a second configuration such that outputs of the first and second piezoelectric resonators have a 180-degree phase difference for a same input. The first piezoelectric resonator and the second piezoelectric resonator are coupled electrically in parallel. The first and second piezoelectric resonators have different resonating frequencies respectively controlled by lateral dimensions of the piezoelectric resonators.

摘要翻译： 宽带滤波器设计的系统和方法包括并联电耦合的双端口压电谐振器。 谐振电路包括由第一构造形成的第一压电谐振器和由第二构造形成的第二压电谐振器，使得第一和第二压电谐振器的输出对于相同的输入具有180度的相位差。 第一压电谐振器和第二压电谐振器并联电耦合。 第一和第二压电谐振器具有分别由压电谐振器的横向尺寸控制的不同谐振频率。

公开(公告)号：US09270254B2

公开(公告)日：2016-02-23

申请号：US13295978

申请日：2011-11-14

申请人： Chengjie Zuo ,  Changhan Yun ,  Chi Shun Lo ,  Wesley Nathaniel Allen ,  Mario Francisco Velez ,  Jonghae Kim ,  Sanghoon Joo

发明人： Chengjie Zuo ,  Changhan Yun ,  Chi Shun Lo ,  Wesley Nathaniel Allen ,  Mario Francisco Velez ,  Jonghae Kim ,  Sanghoon Joo

IPC分类号： H03H9/15 ,  H03H9/46 ,  H03H9/24 ,  H03H9/54 ,  H03H9/02

CPC分类号： H03H9/462 ,  H03H9/02228 ,  H03H9/2405 ,  H03H9/2426 ,  H03H2009/02503 ,  H03H2009/241

摘要： Electromechanical systems dilation mode resonator (DMR) structures are disclosed. The DMR includes a first electrode layer, a second electrode layer, and a piezoelectric layer formed of a piezoelectric material. The piezoelectric layer has dimensions including a lateral distance (D), in a plane of an X axis and a Y axis perpendicular to the X axis, and a thickness (T), along a Z axis perpendicular to the X axis and the Y axis. A numerical ratio of the thickness and the lateral distance, T/D, is configured to provide a mode of vibration of the piezoelectric layer with displacement along the Z axis and along the plane of the X axis and the Y axis responsive to a signal provided to one or more of the electrodes. Ladder filter circuits can be constructed with DMRs as series and/or shunt elements, and the resonators can have spiral configurations.

摘要翻译： 公开了机电系统扩张模式谐振器（DMR）结构。 DMR包括第一电极层，第二电极层和由压电材料形成的压电层。 压电体层具有在与X轴正交的X轴和Y轴的平面内的横向距离（D）和与X轴正交的Z轴的厚度（T） 。 厚度和横向距离T / D的数值比被配置为提供压电层的振动模式，其具有沿Z轴的位移并且沿着X轴和Y轴的平面响应所提供的信号 到一个或多个电极。 梯形滤波器电路可以用DMR构造为串联和/或分流元件，并且谐振器可以具有螺旋配置。

公开(公告)号：US08987976B2

公开(公告)日：2015-03-24

申请号：US13241356

申请日：2011-09-23

申请人： Chengjie Zuo ,  Chi Shun Lo ,  Sanghoon Joo ,  Changhan Yun ,  Jonghae Kim

发明人： Chengjie Zuo ,  Chi Shun Lo ,  Sanghoon Joo ,  Changhan Yun ,  Jonghae Kim

IPC分类号： H01L41/047 ,  H03H9/02 ,  H03H9/56

CPC分类号： H03H9/02157 ,  H03H9/02062 ,  H03H9/56

摘要： A method and apparatus for a piezoelectric resonator having combined thickness and width vibrational modes are disclosed. A piezoelectric resonator may include a piezoelectric substrate and a first electrode coupled to a first surface of the piezoelectric substrate. The piezoelectric resonator may further include a second electrode coupled to a second surface of the piezoelectric substrate, where the first surface and the second surface are substantially parallel and define a thickness dimension of the piezoelectric substrate. Furthermore, the thickness dimension and the width dimension of the piezoelectric substrate are configured to produce a resonance from a coherent combination of a thickness vibrational mode and a width vibrational mode when an excitation signal is applied to the electrodes.

摘要翻译： 公开了一种具有组合的厚度和宽度振动模式的压电谐振器的方法和装置。 压电谐振器可以包括压电衬底和耦合到压电衬底的第一表面的第一电极。 压电谐振器还可以包括耦合到压电基板的第二表面的第二电极，其中第一表面和第二表面基本平行并且限定压电基板的厚度尺寸。 此外，压电基板的厚度尺寸和宽度尺寸被构造成当激励信号施加到电极时，从厚度振动模式和宽度振动模式的相干组合产生谐振。

公开(公告)号：US20130120081A1

公开(公告)日：2013-05-16

申请号：US13295955

申请日：2011-11-14

申请人： Chengjie Zuo ,  Chi Shun Lo ,  Sanghoon Joo ,  Changhan Yun ,  Jonghae Kim

发明人： Chengjie Zuo ,  Chi Shun Lo ,  Sanghoon Joo ,  Changhan Yun ,  Jonghae Kim

IPC分类号： H03H9/54 ,  G06F3/038

CPC分类号： H03H9/542 ,  H03H9/02228 ,  H03H9/564

摘要： This disclosure provides implementations of electromechanical systems combined resonator and passive circuit components. In one aspect, passband flattened filter apparatus includes a resonator structure and input and output passband flattening components. The resonator structure has a first input, a second input coupled to a ground terminal, a first output, and a second output coupled to the ground terminal. The input passband flattening component includes a first inductor having an output coupled to the first input of the resonator structure, and a second inductor having an input coupled to the first input of the resonator structure and an output coupled to the ground terminal. The output passband flattening component includes a first inductor having an input coupled to the first output of the resonator structure, and a second inductor having an input coupled to the first output of the resonator structure and an output coupled to the ground terminal.

摘要翻译： 本公开提供了机电系统组合谐振器和无源电路部件的实现。 一方面，通带扁平滤波器装置包括谐振器结构以及输入和输出通带扁平部件。 谐振器结构具有耦合到接地端子的第一输入端，第二输入端，第一输出端和耦合到接地端子的第二输出端。 输入通带平坦化部件包括具有耦合到谐振器结构的第一输入的输出的第一电感器和具有耦合到谐振器结构的第一输入的输入端和耦合到接地端子的输出的第二电感器。 输出通带平坦化部件包括具有耦合到谐振器结构的第一输出的输入的第一电感器和具有耦合到谐振器结构的第一输出的输入端和耦合到接地端子的输出的第二电感器。

公开(公告)号：US20130082799A1

公开(公告)日：2013-04-04

申请号：US13295978

申请日：2011-11-14

申请人： Chengjie Zuo ,  Changhan Yun ,  Chi Shun Lo ,  Wesley Nathaniel Allen ,  Mario Francisco Velez ,  Jonghae Kim ,  Sanghoon Joo

发明人： Chengjie Zuo ,  Changhan Yun ,  Chi Shun Lo ,  Wesley Nathaniel Allen ,  Mario Francisco Velez ,  Jonghae Kim ,  Sanghoon Joo

IPC分类号： H03H9/58 ,  H01L41/04

CPC分类号： H03H9/462 ,  H03H9/02228 ,  H03H9/2405 ,  H03H9/2426 ,  H03H2009/02503 ,  H03H2009/241

摘要： Electromechanical systems dilation mode resonator (DMR) structures are disclosed. The DMR includes a first electrode layer, a second electrode layer, and a piezoelectric layer formed of a piezoelectric material. The piezoelectric layer has dimensions including a lateral distance (D), in a plane of an X axis and a Y axis perpendicular to the X axis, and a thickness (T), along a Z axis perpendicular to the X axis and the Y axis. A numerical ratio of the thickness and the lateral distance, T/D, is configured to provide a mode of vibration of the piezoelectric layer with displacement along the Z axis and along the plane of the X axis and the Y axis responsive to a signal provided to one or more of the electrodes. Ladder filter circuits can be constructed with DMRs as series and/or shunt elements, and the resonators can have spiral configurations.

摘要翻译： 公开了机电系统扩张模式谐振器（DMR）结构。 DMR包括第一电极层，第二电极层和由压电材料形成的压电层。 压电体层具有在与X轴正交的X轴和Y轴的平面内的横向距离（D）和与X轴正交的Z轴的厚度（T） 。 厚度和横向距离T / D的数值比被配置为提供压电层的振动模式，其具有沿Z轴的位移并且沿着X轴和Y轴的平面响应所提供的信号 到一个或多个电极。 梯形滤波器电路可以用DMR构造为串联和/或分流元件，并且谐振器可以具有螺旋配置。