公开(公告)号：US4453181A

公开(公告)日：1984-06-05

申请号：US311889

申请日：1981-10-15

申请人： Chusuke Munakata ,  Hideki Kohno

发明人： Chusuke Munakata ,  Hideki Kohno

IPC分类号： G01R31/26 ,  G01R31/265 ,  G01R31/308 ,  H01L21/66 ,  H01L31/02 ,  H04N1/409 ,  H04N7/18

CPC分类号： G01R31/2656 ,  G01R31/308 ,  H04N1/409

摘要： A scanning-image forming apparatus using a photo-response signal according to this invention is constructed so that the photo-response signal obtained by scanning the surface of a semiconductor specimen with a photon beam is subjected to a 2nd differentiation, and that an image is displayed by employing the 2nd derivative of the photo-response signal as a modulation signal.

摘要翻译： 使用根据本发明的光响应信号的扫描图像形成装置被构造成使得通过用光子束扫描半导体样品的表面而获得的光响应信号被进行第二微分，并且图像是 通过采用光响应信号的二阶导数作为调制信号来显示。

公开(公告)号：US4791288A

公开(公告)日：1988-12-13

申请号：US42833

申请日：1987-04-27

申请人： Kanji Kinameri ,  Chusuke Munakata

发明人： Kanji Kinameri ,  Chusuke Munakata

IPC分类号： G01N21/88 ,  G01R31/265 ,  G02B21/00 ,  H01J37/28

CPC分类号： G01R31/2656 ,  G02B21/002

摘要： The scanning photon microscope according to this invention relates the phase of the ac photovoltage or photocurrent signal to the hue of a color image and the amplitude of the signal to the brightness of the image in representing the signal distribution in the specimen in the form of a color image, in order to make a clear distinction between the amplitude and phase of the ac photovoltage or photocurrent induced in the specimen when irradiated with a photon beam, thus permitting detailed and multilateral analysis of the specimen's characteristics.

摘要翻译： 根据本发明的扫描光子显微镜将交流光电压或光电流信号的相位与彩色图像的色调相关联，并且将信号的幅度与图像的亮度相关联，以表示样本中的信号分布 彩色图像，以便在用光子束照射时，明确区分在样本中感应的交流光电压或光电流的幅度和相位，从而允许对样本特征的详细和多边分析。

公开(公告)号：US4733063A

公开(公告)日：1988-03-22

申请号：US941642

申请日：1986-12-15

申请人： Shigeharu Kimura ,  Chusuke Munakata

发明人： Shigeharu Kimura ,  Chusuke Munakata

IPC分类号： G01N21/17 ,  G02B21/00 ,  G02B21/36

CPC分类号： G02B21/002

摘要： A confocal scanning laser microscope according to the present invention employs an aperture which is provided at a predetermined position within a plane of a photomask including rectilinear pattern edges orthogonal to each other formed on a transparent substrate. The aperture is moved in such a way that coordinate positions at which a laser beam traverses the respective rectilinear pattern edges orthogonal to each other are found using output signals from an optical detector, and it is consequently brought into agreement with a focused position of the laser beam.

摘要翻译： 根据本发明的共聚焦扫描激光显微镜采用一个开口，其设置在光掩模的平面内的预定位置处，该光掩模包括形成在透明基板上的彼此正交的直线图案边缘。 孔径以这样的方式移动，即使用来自光学检测器的输出信号发现激光束横过彼此正交的各个直线图案边缘的坐标位置，并且因此与激光的聚焦位置一致 光束。

公开(公告)号：US4731855A

公开(公告)日：1988-03-15

申请号：US720730

申请日：1985-04-08

申请人： Kyo Suda ,  Shigeharu Kimura ,  Shinobu Hase ,  Chusuke Munakata ,  Kanji Kinameri ,  Yoshitoshi Ito ,  Hiroto Nagatomo ,  Yuzo Taniguchi ,  Mikihito Saito

发明人： Kyo Suda ,  Shigeharu Kimura ,  Shinobu Hase ,  Chusuke Munakata ,  Kanji Kinameri ,  Yoshitoshi Ito ,  Hiroto Nagatomo ,  Yuzo Taniguchi ,  Mikihito Saito

IPC分类号： G01N21/956 ,  H01L21/26 ,  G06K9/00

CPC分类号： G01N21/956 ,  H01L21/26

摘要： A pattern defect inspection apparatus detects presence or absence of a defect in a pattern formed on a semiconductor wafer by scanning the pattern normally to the surface thereof by a coherent light beam of a predetermined spot size, detecting reflected diffraction lights generated thereby and processing the detected lights. It comprises an abnormal direction signal detector including photo-detectors having wide light receiving areas arranged in a plurality of spatial areas which the reflected diffraction lights from a normal pattern do not normally reach, a normal pattern detector including photo-detectors having large light receiving areas arranged in a plurality of spatial areas which the reflected diffraction lights from the normal pattern reach, and a defect discriminator for determining if the abnormal direction signals are due to a true defect or not in accordance with the signals from the abnormal direction signal detector and the normal pattern detector.

摘要翻译： 图案缺陷检查装置通过用预定光斑尺寸的相干光束将图案通常扫描到其表面来检测在半导体晶片上形成的图案中的缺陷的存在或不存在，检测由此产生的反射衍射光并且处理检测到的 灯光 它包括异常方向信号检测器，其包括具有布置在多个空间区域中的宽光接收区域的光检测器，正常图案的反射衍射光通常不能正常到达，包括光检测器的正常图案检测器具有大的光接收面积 布置在从正常图案到达的反射衍射光的多个空间区域中，以及用于根据来自异常方向信号检测器的信号和用于确定异常方向信号是否由于真实缺陷而导致的缺陷鉴别器 正常模式检测器

公开(公告)号：US4563642A

公开(公告)日：1986-01-07

申请号：US432805

申请日：1982-10-05

申请人： Chusuke Munakata ,  Noriaki Honma

发明人： Chusuke Munakata ,  Noriaki Honma

IPC分类号： G01R31/265 ,  G01R31/26

CPC分类号： G01R31/2656

摘要： To nondestructively measure the carrier lifetime and cutoff frequency of a semiconductor wafer having a junction, the apparatus of this invention comprises means for radiating a pulsated photo beam whose frequency is changeable to the semiconductor wafer having a junction, means for taking out the resulting photovoltage by capacitance coupling and means for calculating the carrier lifetime and cutoff frequency from the chopping-frequency dependence characteristics of this photovoltage.

摘要翻译： 为了非破坏性地测量具有结的半导体晶片的载流子寿命和截止频率，本发明的装置包括用于辐射频率可变化到具有结的半导体晶片的脉动光束的装置，用于通过以下方式取出所得光电压的装置： 电容耦合以及用于根据该光电压的斩波 - 频率依赖特性计算载流子寿命和截止频率的装置。

公开(公告)号：US5252719A

公开(公告)日：1993-10-12

申请号：US572595

申请日：1990-08-27

申请人： Kazuo Takeda ,  Yoshinori Harada ,  Hiromichi Shimizu ,  Chusuke Munakata

发明人： Kazuo Takeda ,  Yoshinori Harada ,  Hiromichi Shimizu ,  Chusuke Munakata

IPC分类号： G01J1/00 ,  B01D69/12 ,  B01D69/14 ,  B05D1/18 ,  C07K1/00 ,  C07K1/107 ,  C07K14/005 ,  C07K14/195 ,  C07K14/215 ,  C07K14/41 ,  C07K17/02 ,  H01L51/30 ,  H01L51/42 ,  C07K3/08 ,  B05D5/12 ,  H01L31/0344

CPC分类号： C07K14/215 ,  B01D69/122 ,  B01D69/141 ,  B05D1/185 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00 ,  H01L51/0093 ,  H01L51/42 ,  Y10S530/81

摘要： A process for producing a protein-oriented membrane which is enhanced physically and chemically by orienting protein and cross linking the oriented protein together, is described. The proteinaceous membrane which is subjected to orientation treatment alone is weak physically and chemically, and its processing and handling are therefore difficult. However, according to the present invention, the protein after the process of orientation is cross linked together to produce a protein-oriented membrane remarkably enhanced physically and chemically.

公开(公告)号：US4767211A

公开(公告)日：1988-08-30

申请号：US088538

申请日：1987-08-20

申请人： Chusuke Munakata ,  Shinobu Hase ,  Shigeharu Kimura

发明人： Chusuke Munakata ,  Shinobu Hase ,  Shigeharu Kimura

IPC分类号： G01B11/00 ,  G01B11/24 ,  G01B11/30

CPC分类号： G01B11/24

摘要： An apparatus for and a method of measuring a boundary surface of a sample are disclosed in which a ratio of the light quantity of a part of reflected light from a sample which travels in the vicinity of the optical axis of the reflected light, to the light quantity of another part of the reflected light which is directed to a position deviating from the optical axis by a predetermined distance is used to accurately measure a boundary surface of a sample. Since the accuracy of measurement is increased by using the above ratio, light capable of passing through the sample can be used as incident light. Thus, a deep hole in the surface of the sample and a void such as an air bubble in a living being sample, which cannot be measured by the prior art, can be measured very accurately.

摘要翻译： 公开了一种测量样品的边界面的装置和方法，其中，来自在反射光的光轴附近行进的样品的反射光的一部分的光量与光 使用被引导到偏离光轴的位置预定距离的反射光的另一部分的量来准确地测量样品的边界面。 由于通过使用上述比例来提高测量精度，所以可以使用能够通过样品的光作为入射光。 因此，可以非常精确地测量样品表面中的深孔和活体样品中的诸如气泡之类的空隙，这是现有技术无法测量的。

公开(公告)号：US4464627A

公开(公告)日：1984-08-07

申请号：US259427

申请日：1981-05-01

申请人： Chusuke Munakata ,  Kunihiro Yagi ,  Teruaki Motooka

发明人： Chusuke Munakata ,  Kunihiro Yagi ,  Teruaki Motooka

IPC分类号： G01R31/265 ,  G01R31/26

CPC分类号： G01R31/2656

摘要： A device for measuring semiconductor characteristics, wherein electrodes are installed maintaining a gap on the front and back sides of a semiconductor specimen of which the characteristics are to be measured, at least one of the electrodes being transparent, the surface of the semiconductor specimen is scanned with a pulsed narrow photon beam via the transparent electrode, and a photovoltage generated between the front and back surfaces of the semiconductor specimen is taken out from the two electrodes via the capacitive coupling, in order to observe the distribution of characteristics in the surface of the semiconductor specimen.

摘要翻译： 一种用于测量半导体特性的装置，其中电极被安装成在要测量特性的半导体试样的正面和背面保持间隙，至少一个电极是透明的，半导体试样的表面被扫描 通过透明电极具有脉冲的窄光子束，并且通过电容耦合从两个电极中取出在半导体样品的前表面和后表面之间产生的光电压，以观察表面的特性分布 半导体标本。

公开(公告)号：US5140272A

公开(公告)日：1992-08-18

申请号：US248497

申请日：1988-09-23

申请人： Shigeru Nishimatsu ,  Tatsumi Mizutani ,  Ryo Haruta ,  Kanji Tsujii ,  Chusuke Munakata ,  Shigeyuki Hosoki

发明人： Shigeru Nishimatsu ,  Tatsumi Mizutani ,  Ryo Haruta ,  Kanji Tsujii ,  Chusuke Munakata ,  Shigeyuki Hosoki

IPC分类号： G01R31/26 ,  G01N27/00 ,  G01N27/22 ,  G01N27/24 ,  G01R27/26 ,  G01R29/12 ,  G01R29/14 ,  G01R29/24 ,  H01L21/66

CPC分类号： G01R29/24 ,  G01R27/2605

摘要： A method of semiconductor surface measurement for measuring electrical characteristics of a surface of a semiconductor body is disclosed, by which an electrode, whose surface, which is opposite to the surface of a semiconductor substrate, is flat and the gap between the electrode and the surface is smaller than 0.5 .mu.m.

摘要翻译： 公开了一种半导体表面测量方法，用于测量半导体本体的表面的电特性，通过该方法，其表面与半导体衬底的表面相反的表面是平坦的，并且电极和表面之间的间隙 小于0.5亩。

公开(公告)号：US4876458A

公开(公告)日：1989-10-24

申请号：US250615

申请日：1988-09-29

申请人： Kazuo Takeda ,  Yoshitoshi Ito ,  Noriaki Honma ,  Chusuke Munakata

发明人： Kazuo Takeda ,  Yoshitoshi Ito ,  Noriaki Honma ,  Chusuke Munakata

IPC分类号： G01N15/14 ,  G01N21/53

CPC分类号： G01N15/1459 ,  G01N21/53

摘要： An apparatus for measuring particles in a liquid, with the apparatus including an arrangement for allowing a sample liquid to flow out from a nozzle into a gas in a stream, an arrangement for radiating light into the sample liquid stream coaxially with the axis of the stream, and an arrangement for collecting ways of light scattered by particles contained in the sample liquid stream at a point outside and by a side of the sample liquid stream and then detecting the collective light rays.

摘要翻译： 一种用于测量液体中的颗粒的装置，该装置包括用于允许样品液体从喷嘴流出到流中的气体的装置，用于将光与流的轴线同轴地照射到样品液体流中的装置 以及用于收集样品液体流中包含的颗粒在样品液体流的外部和侧面的点散射的光的方式，然后检测集合光线的布置。