公开(公告)号：US5455547A

公开(公告)日：1995-10-03

申请号：US332981

申请日：1994-10-31

Applicant: Liwei Lin ,  Clark T.-C. Nguyen ,  Roger T. Howe ,  Albert P. Pisano

Inventor： Liwei Lin ,  Clark T.-C. Nguyen ,  Roger T. Howe ,  Albert P. Pisano

IPC: H03H9/46 ,  H03H9/00

CPC classification number: H03H9/02275 ,  H03H9/02377 ,  H03H9/46 ,  H03H9/462

Abstract: A micromechanical filter having planar components, and manufacturable using very large scale integrated circuit microfabrication techniques. The input and output transducers are interdigitated comb electrodes. The mechanical coupling between the input and output transducers includes planar flexures, displacement of the electrodes producing bending of the elements of the flexures. By sealing micromechanical filters in a vacuum and providing on-board circuitry, high signal-to-noise ratios and quality factors are achievable. Construction of a real-time spectrum analyzer using many micromechanical resonators, provides a device with high accuracy and a short sample time.

Abstract translation: 具有平面部件的微机械滤波器，并且可使用非常大规模的集成电路微加工技术制造。 输入和输出换能器是叉指梳状电极。 输入和输出换能器之间的机械耦合包括平面弯曲，电极的位移产生弯曲元件的弯曲。 通过在真空中密封微机械滤波器并提供板上电路，可以实现高信噪比和质量因素。 构建使用许多微机械谐振器的实时频谱分析仪，为设备提供高精度和短的采样时间。

公开(公告)号：US5491604A

公开(公告)日：1996-02-13

申请号：US989396

申请日：1992-12-11

Applicant: Clark T.-C. Nguyen ,  Roger T. Howe

Inventor： Clark T.-C. Nguyen ,  Roger T. Howe

IPC: H01G5/14 ,  H03H9/02 ,  H03H9/46 ,  H01G5/011

CPC classification number: H03H9/02377 ,  G01R33/0286 ,  H01G5/14 ,  H03H9/02393 ,  H03H9/02425 ,  H03H9/467 ,  H03H2009/02496 ,  H03H9/0023

Abstract: Resonator systems with controlled quality factors including a resonator having a plurality of ports and a first quality factor greater than the system quality factor, and an amplifier providing negative feedback among the ports to render the system quality factor independent of the resonator quality factor.

Abstract translation: 具有受控质量因素的谐振器系统包括具有多个端口的谐振器和大于系统品质因数的第一品质因数，以及在端口之间提供负反馈的放大器，以使系统品质因数与谐振器品质因数无关。

公开(公告)号：US06985051B2

公开(公告)日：2006-01-10

申请号：US10737363

申请日：2003-12-16

Applicant: Clark T.-C. Nguyen ,  Mohamed A. Abdelmoneum

Inventor： Clark T.-C. Nguyen ,  Mohamed A. Abdelmoneum

IPC: H03H9/02 ,  H03H9/46 ,  H03H9/48

CPC classification number: H03H9/02338 ,  H03H3/0072 ,  H03H9/2431 ,  H03H9/2436 ,  H03H2009/02354 ,  H03H2009/02503

Abstract: A micromechanical resonator device and a method of making the micromechanical resonator device, as well as other extensional mode devices are provided wherein anchor losses are minimized by anchoring at one or more side nodal points of the resonator device. Lower damping forces are experienced by the resonator device when operated in air.

Abstract translation: 提供微机械谐振器装置和制造微机械谐振器装置的方法以及其它拉伸模式装置，其中锚固损耗通过锚定在谐振器装置的一个或多个侧节点处被最小化。 当在空气中操作时，谐振器装置经历较低的阻尼力。

公开(公告)号：US06490147B2

公开(公告)日：2002-12-03

申请号：US09878483

申请日：2001-06-11

Applicant: Jun-Bo Yoon ,  Clark T.-C. Nguyen

Inventor： Jun-Bo Yoon ,  Clark T.-C. Nguyen

IPC: H01G506

CPC classification number: H01G5/0138

Abstract: A high-Q micromechanical device such as a capacitor and method of tuning same by electrostatically moving the capacitor's dielectric are provided. The high-Q, tunable, micromechanical capacitor is realized using an IC-compatible, electroplated-metal, surface-micromachining technology and demonstrates quality (Q−) factors in excess of 290—the highest reported to date for on-chip tunable capacitors at frequencies near 1 GHz. When combined with on-chip (or off-chip) high-Q inductors, these tunable capacitors are expected to be useful for not only low-phase noise integrated VCO applications, but also for tunable, low-loss, RF filters and tunable matching networks, both key functions capable of enhancing the multi-band programmability of wireless communication handsets. The key feature in this design that makes possible such high on-chip Q is the method for capacitive tuning, which is based on moving the dielectric between the capacitor plates, rather than moving the plates themselves, as done in previous designs. One version of the design achieves a measured Q of 291 at 1 GHz (C=1.2l pF) with a tuning range of 7.7% over 10 V of control voltage, and an expected self-resonant frequency (SRF) of 19 GHz. In another version of the design, with a wider tuning range of 40% over 10 V, a Q of 218 is achieved at 1 GHz (C=1.14 pF).

Abstract translation: 提供了诸如电容器的高Q微机械器件和通过静电移动电容器的电介质来调谐相位的方法。 高Q，可调谐的微机电电容器使用IC兼容的电镀金属表面微加工技术实现，并且显示出超过290的质量（Q）因子 - 迄今为止最高的片上可调谐电容器 1 GHz附近的频率。 当与片上（或片外）高Q电感器组合时，这些可调电容器不仅可用于低相位噪声集成VCO应用，还可用于可调谐，低损耗，RF滤波器和可调谐匹配 网络，能够增强无线通信手机的多频带可编程性的两个关键功能。 这种设计中的关键特征使得片上Q这样高的Q是用于电容调谐的方法，其基于移动电容器板之间的电介质，而不是像以前的设计那样移动板本身。 该设计的一个版本在1 GHz（C = 1.2l pF）下实现了291的测量Q，调谐范围为控制电压的10 V时的7.7％，预期的19 GHz的自谐振频率（SRF）。 在另一个设计版本中，具有比10 V更高的40％的更宽的调谐范围，在1 GHz（C = 1.14 pF）下实现了218的Q。

公开(公告)号：US06856217B1

公开(公告)日：2005-02-15

申请号：US10660332

申请日：2003-09-11

Applicant: John R. Clark ,  Clark T.-C. Nguyen

Inventor： John R. Clark ,  Clark T.-C. Nguyen

IPC: B81B5/00 ,  B81B3/00 ,  H03H3/007 ,  H03H3/013 ,  H03H9/02 ,  H03H9/24 ,  H03H9/46 ,  H03H9/50 ,  H03H9/05 ,  H03H9/125

CPC classification number: H03H9/505 ,  H03H3/007 ,  H03H3/0072 ,  H03H3/013 ,  H03H9/02362 ,  H03H9/2436 ,  H03H9/46 ,  H03H9/462 ,  H03H2009/02496 ,  H03H2009/02503 ,  H03H2009/02527

Abstract: A micromechanical resonator device and a micromechanical device utilizing same are disclosed based upon a radially or laterally vibrating disk structure and capable of vibrating at frequencies well past the GHz range. The center of the disk is a nodal point, so when the disk resonator is supported at its center, anchor dissipation to the substrate is minimized, allowing this design to retain high-Q at high frequency. In addition, this design retains high stiffness at high frequencies and so maximizes dynamic range. Furthermore, the sidewall surface area of this disk resonator is often larger than that attainable in previous flexural-mode resonator designs, allowing this disk design to achieve a smaller series motional resistance than its counterparts when using capacitive (or electrostatic) transduction at a given frequency. Capacitive detection is not required in this design, and piezoelectric, magnetostrictive, etc. detection are also possible. The frequency and dynamic range attainable by this resonator makes it applicable to high-Q RF filtering and oscillator applications in a wide variety of communication systems. Its size also makes it particularly suited for portable, wireless applications, where, if used in large numbers, such a resonator can greatly lower the power consumption, increase robustness, and extend the range of application of high performance wireless transceivers.

Abstract translation: 基于径向或横向振动盘结构并且能够在远超过GHz范围的频率振动的微机械谐振器装置和利用其的微机械装置公开。 磁盘的中心是一个节点，因此当磁盘谐振器被支撑在其中心时，对基板的锚固耗散最小化，允许该设计在高频率下保持高Q。 此外，该设计在高频下保持高刚度，从而使动态范围最大化。 此外，该盘式谐振器的侧壁表面积通常大于在先前的弯曲模式谐振器设计中可获得的侧壁表面积，允许该盘设计在给定频率下使用电容（或静电）换能时获得比其对应物更小的串联运动电阻 。 该设计中不需要电容检测，压电，磁致伸缩等检测也是可能的。 该谐振器可实现的频率和动态范围使其适用于各种通信系统中的高Q RF滤波和振荡器应用。 其尺寸也使其特别适用于便携式无线应用，其中如果大量使用，这种谐振器可以大大降低功耗，增强鲁棒性，并扩展高性能无线收发器的应用范围。

公开(公告)号：US06667558B2

公开(公告)日：2003-12-23

申请号：US10413189

申请日：2003-04-14

Applicant: Ark-Chew Wong ,  Clark T.-C. Nguyen

Inventor： Ark-Chew Wong ,  Clark T.-C. Nguyen

IPC: H01L2348

CPC classification number: B81B7/007 ,  B81B2203/0361 ,  B81C1/00253 ,  B81C2203/019 ,  B81C2203/035 ,  B81C2203/038 ,  B81C2203/051 ,  H01L24/81 ,  H01L25/0657 ,  H01L2224/81801 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01024 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01049 ,  H01L2924/01057 ,  H01L2924/01059 ,  H01L2924/01072 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/01322 ,  H01L2924/014 ,  H01L2924/10329 ,  H01L2924/14 ,  H01L2924/3011

Abstract: A module bonded together at a microplatform and an improved method for making the module are provided. The method includes providing a micromechanical device including a first substrate, the microplatform, a first plurality of bonding sites on the microplatform, a micromechanical structure fabricated and supported on the microplatform and a support structure to suspend the microplatform above the first substrate. The method further includes providing a transistor circuit wafer including a second plurality of bonding sites thereon and integrated BiCMOS transistor circuits. The first and second plurality of bonding sites are aligned and compression bonded so that the microplatform is both electrically and mechanically coupled to the second substrate to form the module. The platform carrier wafer can be torn off, leaving bonded platforms behind on the substrate wafer. This allows small form factor merging of the two different technologies.

公开(公告)号：US07295088B2

公开(公告)日：2007-11-13

申请号：US11040766

申请日：2005-01-21

Applicant: Clark T.-C. Nguyen ,  Sheng-Shian Li

Inventor： Clark T.-C. Nguyen ,  Sheng-Shian Li

IPC: H03H9/02 ,  H03H9/46 ,  H03H9/48

CPC classification number: H03H9/505 ,  H03H3/0072 ,  H03H9/02338 ,  H03H9/2431 ,  H03H9/462 ,  H03H2009/02496 ,  H03H2009/02503

Abstract: High-Q micromechanical resonator devices and filters utilizing same are provided. The devices and filters include a vibrating polysilicon micromechanical “hollow-disk” ring resonators obtained by removing quadrants of material from solid disk resonators, but purposely leaving intact beams or spokes of material with quarter-wavelength dimensions to non-intrusively support the resonators. The use of notched support attachments closer to actual extensional ring nodal points further raises the Q. Vibrating micromechanical hollow-disk ring filters including mechanically coupled resonators with resonator Q's greater than 10,000 achieve filter Q's on the order of thousands via a low-velocity coupling scheme. A longitudinally mechanical spring is utilized to attach the notched-type, low-velocity coupling locations of the resonators in order to achieve a extremely narrow passband.

Abstract translation: 提供了使用其的高Q微机械谐振器装置和滤波器。 器件和滤波器包括通过从固体盘谐振器去除象限的材料获得的振动多晶硅微机械“中空盘”环形谐振器，但有意地留下具有四分之一波长尺寸的完整的梁或辐条，以非侵入式地支撑谐振器。 使用更接近实际延伸环节点的切口支撑附件进一步提高了Q.振动微机械中空盘环形滤波器，包括谐振器Q大于10,000的机械耦合谐振器，通过低速耦合方案实现了数千级的滤波器Q 。 使用纵向机械弹簧来连接谐振器的缺口型低速耦合位置，以便实现非常窄的通带。

公开(公告)号：US06742389B2

公开(公告)日：2004-06-01

申请号：US10055210

申请日：2002-01-23

Applicant: Clark T.-C. Nguyen ,  Mustafa U. Demirci

Inventor： Clark T.-C. Nguyen ,  Mustafa U. Demirci

IPC: G01P904

CPC classification number: G01P15/0802 ,  G01C19/5719

Abstract: A method and system for measuring angular speed of an object uses a micromechanical filter apparatus and allows Q-multiplication in both drive and sense modes. The invention takes advantage of the constant amplitude region of a filter spectrum within a passband of the filter apparatus to sense with a constant scaling factor that is independent of frequency variations with the passband. Thus, the system has much less sensitivity to drive mode resonance frequency shifts due to temperature variations, fabrication non-idealities and aging. The system senses angular rate or speed at resonance, which results in a great improvement over conventional gyroscopes operated off-resonance.

Abstract translation: 用于测量物体的角速度的方法和系统使用微机械滤波器装置并且允许驱动和感测模式中的Q倍增。 本发明利用滤波器​​装置的通带内的滤波器频谱的恒定幅度区域来利用与通带无关的频率变化的恒定缩放因子进行感测。 因此，由于温度变化，制造非理想性和老化，系统对驱动模式共振频移的灵敏度要低得多。 该系统感应共振时的角速率或速度，这导致比传统陀螺仪操作的非共振的改进。

公开(公告)号：US06713938B2

公开(公告)日：2004-03-30

申请号：US09839436

申请日：2001-04-20

Applicant: Clark T.-C. Nguyen

Inventor： Clark T.-C. Nguyen

IPC: H02N200

CPC classification number: H03H3/0078 ,  H01H59/0009 ,  H01H2059/0072 ,  H03H9/02409 ,  H03H9/24 ,  H03H9/2452 ,  H03H9/462 ,  H03H9/465 ,  H03H9/505 ,  H03H2009/02511 ,  H03H2009/02519 ,  H03H2009/02527

Abstract: Several MEMS-based methods and architectures which utilize vibrating micromechanical resonators in circuits to implement filtering, mixing, frequency reference and amplifying functions are provided. Apparatus is provided for filtering signals utilizing vibrating micromechanical resonators. One of the primary benefits of the use of such architectures is a savings in power consumption by trading power for high selectivity (i.e., high Q). Consequently, the present invention relies on the use of a large number of micromechanical links in SSI networks to implement signal processing functions with basically zero DC power consumption.

Abstract translation: 提供了几种利用电路中的振动微机械谐振器来实现滤波，混频，频率参考和放大功能的基于MEMS的方法和架构。 提供了利用振动微机械谐振器对信号进行滤波的装置。 使用这种架构的主要优点之一是通过为高选择性（即高Q）的交易功率节省了功耗。 因此，本发明依赖于在SSI网络中使用大量的微机械连接来实现基本上零直流功率消耗的信号处理功能。

公开(公告)号：US06628177B2

公开(公告)日：2003-09-30

申请号：US09938358

申请日：2001-08-23

Applicant: John R. Clark ,  Clark T.-C. Nguyen

Inventor： John R. Clark ,  Clark T.-C. Nguyen

IPC: H03H924

CPC classification number: H03H9/505 ,  H03H3/007 ,  H03H3/0072 ,  H03H3/013 ,  H03H9/02362 ,  H03H9/2436 ,  H03H9/46 ,  H03H9/462 ,  H03H2009/02496 ,  H03H2009/02503 ,  H03H2009/02527

Abstract: A micromechanical resonator device and a micromechanical device utilizing same are disclosed based upon a radially or laterally vibrating disk structure and capable of vibrating at frequencies well past the GHz range. The center of the disk is a nodal point, so when the disk resonator is supported at its center, anchor dissipation to the substrate is minimized, allowing this design to retain high-Q at high frequency. In addition, this design retains high stiffness at high frequencies and so maximizes dynamic range. Furthermore, the sidewall surface area of this disk resonator is often larger than that attainable in previous flexural-mode resonator designs, allowing this disk design to achieve a smaller series motional resistance than its counterparts when using capacitive (or electrostatic) transduction at a given frequency. Capacitive detection is not required in this design, and piezoelectric, magnetostrictive, etc. detection are also possible. The frequency and dynamic range attainable by this resonator makes it applicable to high-Q RF filtering and oscillator applications in a wide variety of communication systems. Its size also makes it particularly suited for portable, wireless applications, where, if used in large numbers, such a resonator can greatly lower the power consumption, increase robustness, and extend the range of application of high performance wireless transceivers.