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    Ultra thin channel MOSFET
    4.
    发明授权
    Ultra thin channel MOSFET 失效
    超薄通道MOSFET

    公开(公告)号：US07211490B2

    公开(公告)日：2007-05-01

    申请号：US11083743

    申请日：2005-03-18

    申请人： Bruce B. Doris ,  Thomas S. Kanarsky ,  Ying Zhang ,  Huilong Zhu ,  Meikei Ieong ,  Omer Dokumaci

    发明人： Bruce B. Doris ,  Thomas S. Kanarsky ,  Ying Zhang ,  Huilong Zhu ,  Meikei Ieong ,  Omer Dokumaci

    IPC分类号： H01L21/336 ,  H01L29/76

    CPC分类号： H01L29/66772 ,  H01L21/84 ,  H01L27/1203 ,  H01L29/6656 ,  H01L29/78612 ,  H01L29/78621

    摘要： Described is a method for making thin channel silicon-on-insulator structures. The inventive method comprises forming a set of thin spacer abutting a gate region in a first device and a second device region; forming a raised source/drain region on either side of the gate region in the first device region and the second device region, implanting dopants of a first conductivity type into the raised source drain region in the first device region to form a first dopant impurity region, where the second device region is protected by a second device region block mask; implanting dopants of a second conductivity type into the raised source/drain region in the second device region to form a second dopant impurity region, where the first device region is protected by a first device region block mask; and activating the first dopant impurity region and the second dopant impurity region to provide a thin channel MOSFET.

    摘要翻译： 描述了制造薄沟道硅绝缘体上结构的方法。 本发明的方法包括在第一装置和第二装置区域中形成邻接栅极区的一组薄间隔件; 在第一器件区域和第二器件区域中的栅极区域的任一侧上形成凸起的源极/漏极区域，将第一导电类型的掺杂剂注入到第一器件区域中的凸起的源极漏极区域中以形成第一掺杂剂杂质区域 ，其中所述第二设备区域被第二设备区域块掩码保护; 将第二导电类型的掺杂剂注入所述第二器件区域中的所述升高的源极/漏极区域中以形成第二掺杂剂杂质区域，其中所述第一器件区域被第一器件区域阻挡掩模保护; 以及激活第一掺杂杂质区和第二掺杂杂质区，以提供薄沟道MOSFET。

    Structure and method to fabricate ultra-thin Si channel devices
    6.
    发明授权
    Structure and method to fabricate ultra-thin Si channel devices 失效
    制造超薄Si通道器件的结构和方法

    公开(公告)号：US06905941B2

    公开(公告)日：2005-06-14

    申请号：US10250069

    申请日：2003-06-02

    申请人： Bruce B. Doris ,  Thomas S. Kanarsky ,  Meikei Ieong ,  Wesley C. Natzle

    发明人： Bruce B. Doris ,  Thomas S. Kanarsky ,  Meikei Ieong ,  Wesley C. Natzle

    IPC分类号： H01L21/762 ,  H01L21/84 ,  H01L21/76

    CPC分类号： H01L21/84 ,  H01L21/76283

    摘要： A method for preventing polysilicon stringer formation under the active device area of an isolated ultra-thin Si channel device is provided. The method utilizes a chemical oxide removal (COR) processing step to prevent stinger formation, instead of a conventional wet etch process wherein a chemical etchant such as HF is employed. A silicon-on-insulator (SOI) structure is also provided. The structure includes at least a top Si-containing layer located on a buried insulating layer; and an oxide filled trench isolation region located in the top Si-containing layer and a portion of the buried insulating layer. No undercut regions are located beneath the top Si-containing layer.

    摘要翻译： 提供了一种用于防止在隔离的超薄Si沟道器件的有源器件区域下形成多晶硅的方法。 该方法使用化学氧化物去除（COR）处理步骤来防止托管架形成，而不是采用诸如HF的化学蚀刻剂的常规湿法蚀刻工艺。 还提供了绝缘体上硅（SOI）结构。 该结构包括至少位于掩埋绝缘层上的顶部含Si层; 以及位于顶部含Si层和掩埋绝缘层的一部分中的氧化物填充沟槽隔离区。 顶部含Si层下方没有底切区域。

    Hybrid planar and finFET CMOS devices
    7.
    发明授权
    Hybrid planar and finFET CMOS devices 失效
    混合平面和finFET CMOS器件

    公开(公告)号：US06911383B2

    公开(公告)日：2005-06-28

    申请号：US10604097

    申请日：2003-06-26

    申请人： Bruce B. Doris ,  Diane C. Boyd ,  Meikei Ieong ,  Thomas S. Kanarsky ,  Jakub T. Kedzierski ,  Min Yang

    发明人： Bruce B. Doris ,  Diane C. Boyd ,  Meikei Ieong ,  Thomas S. Kanarsky ,  Jakub T. Kedzierski ,  Min Yang

    IPC分类号： H01L29/423 ,  H01L21/336 ,  H01L21/8234 ,  H01L21/84 ,  H01L27/08 ,  H01L27/088 ,  H01L27/12 ,  H01L29/49 ,  H01L29/786 ,  H01L21/3205

    CPC分类号： H01L27/1211 ,  H01L21/845 ,  H01L29/66795 ,  H01L29/785

    摘要： The present invention provides an integrated semiconductor circuit containing a planar single gated FET and a FinFET located on the same SOI substrate. Specifically, the integrated semiconductor circuit includes a FinFET and a planar single gated FET located atop a buried insulating layer of an silicon-on-insulator substrate, the planar single gated FET is located on a surface of a patterned top semiconductor layer of the silicon-on-insulator substrate and the FinFET has a vertical channel that is perpendicular to the planar single gated FET. A method of forming a method such an integrated circuit is also provided. In the method, resist imaging and a patterned hard mask are used in trimming the width of the FinFET active device region and subsequent resist imaging and etching are used in thinning the thickness of the FET device area. The trimmed active FinFET device region is formed such that it lies perpendicular to the thinned planar single gated FET device region.

    摘要翻译： 本发明提供一种集成半导体电路，其包含位于同一SOI衬底上的平面单栅极FET和FinFET。 具体地，集成半导体电路包括FinFET和位于绝缘体上硅衬底的掩埋绝缘层顶上的平面单栅极FET，平面单门控FET位于硅 - 硅绝缘体的图案化顶部半导体层的表面上， 绝缘体上的衬底和FinFET具有垂直于平面单门控FET的垂直沟道。 还提供了一种形成集成电路的方法。 在该方法中，抗蚀剂成像和图案化的硬掩模用于修整FinFET有源器件区域的宽度，并且随后的抗蚀剂成像和蚀刻用于减薄FET器件区域的厚度。 经修整的有源FinFET器件区域形成为垂直于薄化的平面单栅极FET器件区域。

    Hybrid planar and FinFET CMOS devices
    8.
    发明授权
    Hybrid planar and FinFET CMOS devices 有权
    混合平面和FinFET CMOS器件

    公开(公告)号：US07250658B2

    公开(公告)日：2007-07-31

    申请号：US11122193

    申请日：2005-05-04

    申请人： Bruce B. Doris ,  Diane C. Boyd ,  Meikei Leong ,  Thomas S. Kanarsky ,  Jakub T. Kedzierski ,  Min Yang

    发明人： Bruce B. Doris ,  Diane C. Boyd ,  Meikei Leong ,  Thomas S. Kanarsky ,  Jakub T. Kedzierski ,  Min Yang

    IPC分类号： H01L29/772

    CPC分类号： H01L27/1211 ,  H01L21/845 ,  H01L29/66795 ,  H01L29/785

    摘要： The present invention provides an integrated semiconductor circuit containing a planar single gated FET and a FinFET located on the same SOI substrate. Specifically, the integrated semiconductor circuit includes a FinFET and a planar single gated FET located atop a buried insulating layer of an silicon-on-insulator substrate, the planar single gated FET is located on a surface of a patterned top semiconductor layer of the silicon-on-insulator substrate and the FinFET has a vertical channel that is perpendicular to the planar single gated FET. A method of forming a method such an integrated circuit is also provided. In the method, resist imaging and a patterned hard mask are used in trimming the width of the FinFET active device region and subsequent resist imaging and etching are used in thinning the thickness of the FET device area. The trimmed active FinFET device region is formed such that it lies perpendicular to the thinned planar single gated FET device region.

    摘要翻译： 本发明提供一种集成半导体电路，其包含位于同一SOI衬底上的平面单栅极FET和FinFET。 具体地，集成半导体电路包括FinFET和位于绝缘体上硅衬底的掩埋绝缘层顶上的平面单栅极FET，平面单门控FET位于硅 - 硅绝缘体的图案化顶部半导体层的表面上， 绝缘体上的衬底和FinFET具有垂直于平面单门控FET的垂直沟道。 还提供了一种形成集成电路的方法。 在该方法中，抗蚀剂成像和图案化的硬掩模用于修整FinFET有源器件区域的宽度，并且随后的抗蚀剂成像和蚀刻用于减薄FET器件区域的厚度。 经修整的有源FinFET器件区域形成为垂直于薄化的平面单栅极FET器件区域。

    Ultra-thin Si channel CMOS with improved series resistance
    9.
    发明授权
    Ultra-thin Si channel CMOS with improved series resistance 有权
    超薄Si沟道CMOS，具有改善的串联电阻

    公开(公告)号：US07018891B2

    公开(公告)日：2006-03-28

    申请号：US10735736

    申请日：2003-12-16

    申请人： Bruce B. Doris ,  MeiKei Ieong ,  Thomas S. Kanarsky

    发明人： Bruce B. Doris ,  MeiKei Ieong ,  Thomas S. Kanarsky

    IPC分类号： H01L21/00

    CPC分类号： H01L27/1203 ,  H01L21/823814 ,  H01L21/84

    摘要： Thin silicon channel SOI devices provide the advantage of sharper sub-threshold slope, high mobility, and better short-channel effect control but exhibit a typical disadvantage of increased series resistance. This high series resistance is avoided by using a raised source-drain (RSD), and expanding the source drain on the pFET transistor in the CMOS pair using selective epitaxial Si growth which is decoupled between nFETs and pFETs. By doing so, the series resistance is improved, the extensions are implanted after RSD formation and thus not exposed to the high thermal budget of the RSD process while the pFET and nFET can achieve independent effective offsets.

    摘要翻译： 薄硅沟道SOI器件具有更清晰的子阈值斜率，高迁移率和更好的短沟道效应控制的优点，但呈现增加串联电阻的典型缺点。 通过使用升高的源极 - 漏极（RSD）和使用在nFET和pFET之间去耦合的选择性外延Si生长来扩展CMOS对中的pFET晶体管上的源极漏极来避免该高串联电阻。 通过这样做，串联电阻得到改善，扩展在RSD形成后植入，因此不暴露于RSD工艺的高热预算，而pFET和nFET可以实现独立的有效偏移。

    Dual stress memorization technique for CMOS application
    10.
    发明授权
    Dual stress memorization technique for CMOS application 有权
    CMOS应用的双重应力记忆技术

    公开(公告)号：US07968915B2

    公开(公告)日：2011-06-28

    申请号：US12538110

    申请日：2009-08-08

    申请人： Thomas S. Kanarsky ,  Qiqing Ouyang ,  Haizhou Yin

    发明人： Thomas S. Kanarsky ,  Qiqing Ouyang ,  Haizhou Yin

    IPC分类号： H01L21/8238

    CPC分类号： H01L21/823807 ,  H01L21/823412 ,  H01L21/823468 ,  H01L21/823864 ,  H01L29/7843 ,  H01L29/7847

    摘要： A stress-transmitting dielectric layer is formed on the at least one PFET and the at least one NFET. A tensile stress generating film, such as a silicon nitride, is formed on the at least one NFET by blanket deposition and patterning. A compressive stress generating film, which may be a refractive metal nitride film, is formed on the at least one PFET by a blanket deposition and patterning. An encapsulating dielectric film is deposited over the compress stress generating film. The stress is transferred from both the tensile stress generating film and the compressive stress generating film into the underlying semiconductor structures. The magnitude of the transferred compressive stress from the refractory metal nitride film may be from about 5 GPa to about 20 GPa. The stress is memorized during an anneal and remains in the semiconductor devices after the stress generating films are removed.

    摘要翻译： 在至少一个PFET和至少一个NFET上形成应力传导电介质层。 通过毯式沉积和图案化在至少一个NFET上形成拉伸应力产生膜，例如氮化硅。 可以通过覆盖沉积和图案化在至少一个PFET上形成可以是折射金属氮化物膜的压应力产生膜。 在压缩应力产生膜上沉积密封电介质膜。 应力从拉伸应力产生膜和压缩应力产生膜转移到下面的半导体结构中。 来自难熔金属氮化物膜的转移的压缩应力的大小可以为约5GPa至约20GPa。 应力在退火期间被记忆，并且在除去应力产生膜之后保留在半导体器件中。