Magnetic write head having a self aligned, steep shoulder pole structure and method of manufacture thereof
    1.
    发明申请
    Magnetic write head having a self aligned, steep shoulder pole structure and method of manufacture thereof 失效
    具有自对准陡肩极结构的磁写头及其制造方法

    公开(公告)号:US20070058293A1

    公开(公告)日:2007-03-15

    申请号:US11228783

    申请日:2005-09-15

    IPC分类号: G11B5/147

    CPC分类号: G11B5/3116 G11B5/3163

    摘要: A magnetic write head and method of manufacture thereof that has a first pole structure having a notched structure configured with a steep shoulder portion and a narrow vertical notch portion extending from the top of the steep shoulder portion. The write head also includes a second pole structure (P2) that has a very narrow width (track width) and that is self aligned with the narrow vertical notch structure of the first pole structure. The write head provides excellent magnetic properties including a very narrow track width and minimal side writing, while avoiding magnetic saturation of the poles.

    摘要翻译: 一种磁写头及其制造方法,其具有第一极结构,其具有构造为具有陡峭肩部的切口结构和从陡峭肩部的顶部延伸的窄垂直切口部。 写头还包括具有非常窄的宽度(轨道宽度)并且与第一极结构的窄垂直切口结构自对准的第二极结构(P 2)。 写头提供优异的磁性,包括非常窄的轨道宽度和最小的侧面写入,同时避免极点的磁饱和。

    Methods of making magnetic write heads with use of a resist channel shrinking solution having corrosion inhibitors
    3.
    发明申请
    Methods of making magnetic write heads with use of a resist channel shrinking solution having corrosion inhibitors 审中-公开
    使用具有腐蚀抑制剂的抗蚀剂通道收缩溶液制造磁性写入头的方法

    公开(公告)号:US20060096081A1

    公开(公告)日:2006-05-11

    申请号:US11312064

    申请日:2005-12-19

    IPC分类号: G11B5/127 H04R31/00

    摘要: One preferred method for use in making a magnetic write head with use of the resist channel shrinking solution includes the steps of forming a first pole piece layer of a first pole piece; forming a gap layer over the first pole piece layer; forming a patterned resist over the first pole piece layer and the gap layer; electroplating a first pedestal portion of a second pole piece over the gap layer within a channel of the patterned resist; forming an oxide layer over the first pedestal portion; applying the resist channel shrinking solution comprising the resist channel shrinking film and the corrosion inhibitors over the patterned resist; baking the resist channel shrinking solution over the patterned resist to thereby reduce a width of the channel; removing the resist channel shrinking solution; electroplating a second pedestal portion of the second pole piece within the reduced-width channel of the patterned resist; removing the patterned resist; and milling the structure. Advantageously, the oxide layer and the corrosion inhibitors of the resist channel shrinking solution reduce corrosion in the pole piece during the act of baking the resist channel shrinking solution.

    摘要翻译: 使用抗蚀剂通道收缩溶液制造磁性写入头的一种优选方法包括以下步骤:形成第一极片的第一极片层; 在所述第一极片层上形成间隙层; 在所述第一极片层和所述间隙层上形成图案化的抗蚀剂; 在图案化的抗蚀剂的通道内的间隙层上电镀第二极片的第一基座部分; 在所述第一基座部分上形成氧化物层; 在图案化的抗蚀剂上施加包含抗蚀剂通道收缩膜和腐蚀抑制剂的抗蚀剂通道收缩溶液; 在图案化的抗蚀剂上烘烤抗蚀剂通道收缩溶液,从而减小通道的宽度; 去除抗蚀剂通道收缩溶液; 在所述图案化抗蚀剂的所述减小宽度的通道内电镀所述第二极靴的第二基座部分; 去除图案化的抗蚀剂; 并研磨结构。 有利地,抗蚀剂通道收缩溶液的氧化物层和腐蚀抑制剂在烘烤抗蚀剂通道收缩溶液的作用期间减少极片中的腐蚀。

    P1 write pole with shoulder formation and method of fabrication
    4.
    发明申请
    P1 write pole with shoulder formation and method of fabrication 失效
    P1写杆与肩部形成和制造方法

    公开(公告)号:US20060171069A1

    公开(公告)日:2006-08-03

    申请号:US11046740

    申请日:2005-01-31

    IPC分类号: G11B5/147

    CPC分类号: G11B5/1871 G11B5/3116

    摘要: A magnetic disk drive head is disclosed including a write head, which includes a P1 layer having a pedestal portion, a gap layer formed on the P1 layer, and a P2 layer formed on the gap layer. The P1 layer includes a shoulder formation having a neck portion and a beveled portion. Also disclosed is a disk drive having a write head with a P1 layer with shoulder formation, and a method for fabricating a write pole for a magnetic recording head having a P1 layer with shoulder formation.

    摘要翻译: 公开了一种包括写头的磁盘驱动器头,该写头包括具有基座部分的P 1层,在P 1层上形成的间隙层和形成在间隙层上的P 2层。 P 1层包括具有颈部和斜面部分的肩部结构。 还公开了一种具有具有肩部形成的P 1层的写入头的磁盘驱动器,以及用于制造具有具有肩部形成的P 1层的磁性记录头的写入磁极的方法。

    Method for reducing pole height loss in the formation of a write pole for a magnetic write head
    7.
    发明授权
    Method for reducing pole height loss in the formation of a write pole for a magnetic write head 失效
    降低写入磁头写磁极的磁极高度损失的方法

    公开(公告)号:US07263762B2

    公开(公告)日:2007-09-04

    申请号:US10957038

    申请日:2004-09-30

    IPC分类号: G11B5/127 G11B5/187

    摘要: A method for reducing plated pole height loss in the formation of a write pole for a magnetic write head is disclosed. The method includes forming a conductive layer on a thin film substrate, forming a photoresist layer on the conductive layer and forming a trench in the photoresist layer. A thick seed layer is then placed on the trench and on the photoresist layer surface using a collimator. Moreover, the process includes plating while applying a voltage to the thin film substrate where the electrically isolated seed layer is removed and the trench is filled with plating material, removing the photoresist layer, and removing the exposed portions of the conductive layer on the thin film substrate.

    摘要翻译: 本发明公开了一种在形成写磁头写磁极时降低电极高度损耗的方法。 该方法包括在薄膜基板上形成导电层,在导电层上形成光致抗蚀剂层,并在光刻胶层中形成沟槽。 然后使用准直器将厚的种子层放置在沟槽和光致抗蚀剂层表面上。 此外,该方法包括电镀,同时向薄膜基板施加电压,其中去除电隔离种子层,并且沟槽填充有电镀材料,去除光致抗蚀剂层,以及去除薄膜上的导电层的暴露部分 基质。

    Apparatus for patterning a self-aligned coil using a damascene process
    8.
    发明申请
    Apparatus for patterning a self-aligned coil using a damascene process 有权
    用于使用镶嵌工艺图案化自对准线圈的装置

    公开(公告)号:US20050047014A1

    公开(公告)日:2005-03-03

    申请号:US10652877

    申请日:2003-08-29

    IPC分类号: G11B5/127 G11B5/147

    CPC分类号: G11B5/127

    摘要: An apparatus for patterning a self-aligned coil using a damascene process is disclosed. Coil pockets are formed in a first insulation layer disposed over a first pole layer. A barrier/seed layer is deposited along walls of the coil pockets in the insulation layer. Copper is formed in the coil pockets and over the insulation layer. The copper is planarized down to the insulation layer. The self-aligned coil process packs more copper into the same coil pocket and relaxes the coil alignment tolerance. Protrusions are prevented because of the more efficient and uniform spacing of the coil to reduce heat buildup in the head during a write.

    摘要翻译: 公开了一种使用镶嵌工艺图案化自对准线圈的装置。 在设置在第一极层上的第一绝缘层中形成线圈腔。 隔离层/籽晶层沿绝缘层中的线圈袋的壁被沉积。 在线圈袋中形成铜,并在绝缘层上形成铜。 铜平坦化到绝缘层。 自对准线圈工艺将更多的铜包装到相同的线圈袋中,并松弛线圈对准公差。 由于在写入期间线圈的间隔更加有效和均匀以减少头部的积聚,所以防止了突起。

    Method for making magnetic write head
    9.
    发明申请
    Method for making magnetic write head 失效
    磁头写入方法

    公开(公告)号:US20070017087A1

    公开(公告)日:2007-01-25

    申请号:US11186174

    申请日:2005-07-21

    IPC分类号: G11B5/127

    摘要: After defining the P2 pole of a magnetic read head, alumina is deposited over it and planarized by CMP, with the portion of the alumina overlaying the ABS region of the P2 pole subsequently being masked by a photoresist layer and with the portions of the alumina overlaying the flare area, back gap region, and center tap regions of the P2 pole not being masked. A reactive ion mill is performed to expose the flare area, back gap region, and center tap regions of the P2 pole by removing the alumina over these portions, so that subsequent steps such as forming a layer of coiled conductors, forming a return pole, and forming stud connections along with removing the respective seed layers can be executed with the ABS region protected by the alumina and with the flare area, back gap region, and center tap region exposed.

    摘要翻译: 在定义磁读头的P2极之后,将氧化铝沉积在其上并通过CMP平坦化,其中覆盖P2极的ABS区域的氧化铝的部分随后被光致抗蚀剂层掩蔽,并且氧化铝的部分覆盖 P2极的光斑区域,背隙区域和中心抽头区域不被掩蔽。 通过在这些部分上除去氧化铝,进行反应离子磨,以暴露P2极的火炬区域,后隙区域和中心抽头区域,从而形成后续步骤,例如形成线圈导体层,形成返回极, 并且可以利用由氧化铝保护的ABS区域和暴露的火炬区域,后隙区域和中心抽头区域来执行形成螺柱连接以及移除相应的种子层。