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    Test carrier with molded interconnect for testing semiconductor components
    1.
    发明授权
    Test carrier with molded interconnect for testing semiconductor components 失效
    带有模拟互连的测试载体，用于测试半导体元件

    公开(公告)号：US06544461B1

    公开(公告)日：2003-04-08

    申请号：US09677555

    申请日：2000-10-02

    申请人： David R. Hembree ,  Salman Akram ,  Warren M. Farnworth ,  Alan G. Wood ,  Derek Gochnour ,  John O. Jacobson ,  James M. Wark ,  Syed Sajid Ahmad

    发明人： David R. Hembree ,  Salman Akram ,  Warren M. Farnworth ,  Alan G. Wood ,  Derek Gochnour ,  John O. Jacobson ,  James M. Wark ,  Syed Sajid Ahmad

    IPC分类号： B29C4502

    CPC分类号： G01R1/0483

    摘要： A semiconductor carrier for testing semiconductor components, such as bare dice and chip scale packages, and a method for fabricating the carrier are provided. The carrier includes a molded plastic base, a lead frame, and an interconnect. The interconnect includes contacts for making temporary electrical connections with corresponding contacts (e.g., bond pads, solder balls) on the components. The carrier is fabricated by attaching the interconnect to the lead frame, and then molding the plastic base to the interconnect and lead frame. An alternate embodiment carrier includes a board to which multiple interconnects are molded or laminated. In addition, clip members retain the components on the board in electrical communication with the interconnects. A gasket may be used to protect the interconnect contacts during the molding step.

    摘要翻译： 提供了用于测试半导体部件的半导体载体，例如裸芯片和芯片级封装，以及制造载体的方法。 载体包括模制塑料基底，引线框架和互连件。 互连件包括用于与组件上的相应触点（例如，接合焊盘，焊球）进行临时电连接的触点。 通过将互连件附接到引线框架，然后将塑料基底模制到互连和引线框架来制造载体。 替代实施例的载体包括多个互连件模制或层压的板。 另外，夹子构件保持电路板上与组件电连通的组件。 可以在模制步骤期间使用垫圈来保护互连触点。

    Test carrier with molded interconnect for testing semiconductor components
    3.
    发明授权
    Test carrier with molded interconnect for testing semiconductor components 失效
    带有模拟互连的测试载体，用于测试半导体元件

    公开(公告)号：US06353326B2

    公开(公告)日：2002-03-05

    申请号：US09143300

    申请日：1998-08-28

    申请人： David R. Hembree ,  Salman Akram ,  Warren M. Farnworth ,  Alan G. Wood ,  Derek Gochnour ,  John O. Jacobson ,  James M. Wark ,  Syed Sajid Ahmad

    发明人： David R. Hembree ,  Salman Akram ,  Warren M. Farnworth ,  Alan G. Wood ,  Derek Gochnour ,  John O. Jacobson ,  James M. Wark ,  Syed Sajid Ahmad

    IPC分类号： G01R3102

    CPC分类号： G01R1/0483

    摘要： A semiconductor carrier for testing semiconductor components, such as bare dice and chip scale packages, and a method for fabricating the carrier are provided. The carrier includes a molded plastic base, a lead frame, and an interconnect. The interconnect includes contacts for making temporary electrical connections with corresponding contacts (e.g., bond pads, solder balls) on the components. The carrier is fabricated by attaching the interconnect to the lead frame, and then molding the plastic base to the interconnect and lead frame. An alternate embodiment carrier includes a board to which multiple interconnects are molded or laminated. In addition, clip members retain the components on the board in electrical communication with the interconnects.

    摘要翻译： 提供了用于测试半导体部件的半导体载体，例如裸芯片和芯片级封装，以及制造载体的方法。 载体包括模制塑料基底，引线框架和互连件。 互连件包括用于与组件上的相应触点（例如，接合焊盘，焊球）进行临时电连接的触点。 通过将互连件附接到引线框架，然后将塑料基底模制到互连和引线框架来制造载体。 替代实施例的载体包括多个互连件模制或层压的板。 另外，夹子构件保持电路板上与组件电连通的组件。

    Method for testing semiconductor components
    6.
    发明授权
    Method for testing semiconductor components 有权
    半导体元件测试方法

    公开(公告)号：US06208157B1

    公开(公告)日：2001-03-27

    申请号：US09298769

    申请日：1999-04-23

    申请人： Salman Akram ,  David R. Hembree ,  Warren M. Farnworth ,  Derek Gochnour ,  Alan G. Wood ,  John O. Jacobson

    发明人： Salman Akram ,  David R. Hembree ,  Warren M. Farnworth ,  Derek Gochnour ,  Alan G. Wood ,  John O. Jacobson

    IPC分类号： G01R3102

    CPC分类号： G01R1/0466 ,  G01R1/0433 ,  G01R1/0483

    摘要： A system and method for testing semiconductor components are provided. The system includes: a test board, sockets mounted to the test board in electrical communication with test circuitry, and carriers mounted to the sockets for housing the components. The carriers include bases, and interconnects mounted thereon, having contact members configured to make temporary electrical connections with contacts on the components. In addition, the contact members on the interconnects can be shaped to perform an alignment function, and to prevent excessive deformation of the contacts on the components. The sockets include camming members and electrical connectors configured to electrically contact the carriers with a zero insertion force. During a test procedure, the bases and interconnects can remain mounted to the sockets on the test board, as the components are aligned and placed in electrical contact with the interconnects. However, different bases and interconnects can be mounted to the sockets for testing different types of components.

    摘要翻译： 提供了一种用于测试半导体部件的系统和方法。 该系统包括：测试板，安装在与测试电路电气通信的测试板上的插座，以及安装在插座上用于容纳组件的载体。 载体包括底座和安装在其上的互连件，其具有被配置为与部件上的触点进行临时电连接的接触构件。 此外，互连上的接触构件可以成形为执行对准功能，并且防止部件上的触点的过度变形。 插座包括凸轮构件和被配置为以零插入力电接触托架的电连接器。 在测试过程中，基板和互连件可以保持安装到测试板上的插座上，因为组件对齐并放置成与互连件电接触。 然而，可以将不同的基座和互连件安装到插座以测试不同类型的部件。

    Hybrid interconnect and system for testing semiconductor dice
    7.
    发明授权
    Hybrid interconnect and system for testing semiconductor dice 失效

    公开(公告)号：US07049840B1

    公开(公告)日：2006-05-23

    申请号：US09302576

    申请日：1999-04-30

    申请人： David R. Hembree ,  Salman Akram ,  Warren M. Farnworth ,  Alan G. Wood ,  James M. Wark ,  Derek Gochnour

    发明人： David R. Hembree ,  Salman Akram ,  Warren M. Farnworth ,  Alan G. Wood ,  James M. Wark ,  Derek Gochnour

    IPC分类号： G01R31/02

    CPC分类号： G01R1/0466 ,  G01R1/0735

    摘要： An interconnect is provided for making electrical connections with a semiconductor die. The interconnect includes a substrate having integrally formed contact members, configured to electrically contact corresponding contact locations on the die. The interconnect also includes a pattern of conductors formed separately from the substrate, and then bonded to the substrate, in electrical communication with the contact members. The conductors can be mounted to a multi layered tape similar to TAB tape, or alternately bonded directly to the substrate. In addition, each conductor can include an opening aligned with a corresponding contact member, and filled with a conductive material, such as a conductive adhesive or solder. The conductive material electrically connects the contact members and conductors, and provides an expansion joint to allow expansion of the conductors without stressing the contact members. Also provided are a system for testing dice that includes the interconnect, and a system for testing wafers wherein the interconnect is formed as a probe card.

    Hybrid interconnect and system for testing semiconductor dice
    8.
    发明授权
    Hybrid interconnect and system for testing semiconductor dice 失效
    混合互连和半导体骰子测试系统

    公开(公告)号：US6025731A

    公开(公告)日：2000-02-15

    申请号：US821468

    申请日：1997-03-21

    申请人： David R. Hembree ,  Salman Akram ,  Warren M. Farnworth ,  Alan G. Wood ,  James M. Wark ,  Derek Gochnour

    发明人： David R. Hembree ,  Salman Akram ,  Warren M. Farnworth ,  Alan G. Wood ,  James M. Wark ,  Derek Gochnour

    IPC分类号： G01R1/04 ,  G01R1/073 ,  G01R1/73

    CPC分类号： G01R1/0466 ,  G01R1/0735

    摘要： An interconnect is provided for making electrical connections with a semiconductor die. The interconnect includes a substrate having integrally formed contact members, configured to electrically contact corresponding contact locations on the die. The interconnect also includes a pattern of conductors formed separately from the substrate, and then bonded to the substrate, in electrical communication with the contact members. The conductors can be mounted to a multi layered tape similar to TAB tape, or alternately bonded directly to the substrate. In addition, each conductor can include an opening aligned with a corresponding contact member, and filled with a conductive material, such as a conductive adhesive or solder. The conductive material electrically connects the contact members and conductors, and provides an expansion joint to allow expansion of the conductors without stressing the contact members. Also provided are a system for testing dice that includes the interconnect, and a system for testing wafers wherein the interconnect is formed as a probe card.

    摘要翻译： 提供用于与半导体管芯进行电连接的互连。 互连包括具有整体形成的接触构件的基板，其构造成电接触管芯上相应的接触位置。 互连还包括与衬底分开形成的导体图案，然后与接触构件电气连接到衬底。 导体可以安装到类似于TAB带的多层胶带上，或者可以直接粘合到基底上。 此外，每个导体可以包括与对应的接触构件对准的开口，并且填充有诸如导电粘合剂或焊料的导电材料。 导电材料电连接接触构件和导体，并且提供膨胀接头以允许导体的膨胀而不会压紧接触构件。 还提供了一种用于测试包括互连的骰子的系统，以及用于测试晶片的系统，其中互连形成为探针卡。

    Apparatus for testing semiconductor wafers
    9.
    发明授权
    Apparatus for testing semiconductor wafers 有权
    半导体晶片测试装置

    公开(公告)号：US6064216A

    公开(公告)日：2000-05-16

    申请号：US241553

    申请日：1999-02-01

    申请人： Warren M. Farnworth ,  Salman Akram ,  Alan G. Wood ,  David R. Hembree ,  James M. Wark ,  John O. Jacobson

    发明人： Warren M. Farnworth ,  Salman Akram ,  Alan G. Wood ,  David R. Hembree ,  James M. Wark ,  John O. Jacobson

    IPC分类号： G01R1/04 ,  G01R31/28 ,  G01R31/02

    CPC分类号： G01R1/0491 ,  G01R31/2886

    摘要： A method, apparatus and system for testing semiconductor wafers are provided. The method includes providing a wafer carrier to provide an electrical path for receiving and transmitting test signals to the wafer. The wafer carrier includes a base for retaining the wafer, and an interconnect having contact members configured to establish electrical communication with contact locations on the wafer. The wafer carrier can include one or more compressible spring members configured to bias the wafer and interconnect together in the assembled carrier. The wafer carrier can be assembled, with the wafer in alignment with the interconnect, using optical alignment techniques, and an assembly tool similar to aligner bonder tools used for flip chip bonding semiconductor dice. A system for use with the carrier can include a testing apparatus configured to apply test signals through the carrier to the wafer while the wafer is subjected to temperature cycling.

    摘要翻译： 提供了一种用于测试半导体晶片的方法，装置和系统。 该方法包括提供晶片载体以提供用于接收和传输测试信号到晶片的电路径。 晶片载体包括用于保持晶片的基座和具有被配置为与晶片上的接触位置建立电连通的接触构件的互连。 晶片载体可以包括被配置为偏置晶片并在组装的载体中互连在一起的一个或多个可压缩弹簧构件。 可以使用光学对准技术来组装晶片载体，其中晶片与互连对准，以及类似于用于倒装芯片接合半导体晶片的对准器焊接工具的组装工具。 与载体一起使用的系统可以包括测试装置，其被配置为在晶片受到温度循环的同时将测试信号通过载体施加到晶片。

    System and interconnect for making temporary electrical connections with bumped semiconductor components
    10.
    发明授权
    System and interconnect for making temporary electrical connections with bumped semiconductor components 有权
    用于与凸起的半导体部件进行临时电连接的系统和互连

    公开(公告)号：US5915977A

    公开(公告)日：1999-06-29

    申请号：US138612

    申请日：1998-08-24

    申请人： David R. Hembree ,  John O. Jacobson ,  James M. Wark ,  Warren M. Farnworth ,  Salman Akram ,  Alan G. Wood

    发明人： David R. Hembree ,  John O. Jacobson ,  James M. Wark ,  Warren M. Farnworth ,  Salman Akram ,  Alan G. Wood

    IPC分类号： G01R1/04 ,  H01L21/00 ,  H01R12/04 ,  H05K3/32 ,  H01R9/09

    CPC分类号： H01L21/67144 ,  G01R1/0408 ,  H05K3/326 ,  H01L2224/1601 ,  H01L2224/16237 ,  H01L2224/81141 ,  H01L2224/81191 ,  H01L2224/81385

    摘要： An interconnect and system for establishing temporary electrical communication with semiconductor components having contact bumps are provided. The interconnect includes a substrate with patterns of contact members adapted to electrically contact the contact bumps. The substrate can be formed of a material such as ceramic, silicon, FR-4, or photo-chemically machineable glass. The contact members can be formed as recesses covered with conductive layers in electrical communication with conductors and terminal contacts on the substrate. Alternately, the contact members can be formed as projections adapted to penetrate the contact bumps, as microbumps with a rough textured surface, or as a deposited layer formed with recesses. The interconnect can be employed in a wafer level test system for testing dice contained on a wafer, or in a die level test system for testing bare bumped dice or bumped chip scale packages.

    摘要翻译： 提供了一种用于与具有接触凸块的半导体部件建立临时电连通的互连和系统。 互连包括具有适于电接触接触凸块的接触部件图案的基板。 衬底可由诸如陶瓷，硅，FR-4或光刻化学可加工玻璃的材料形成。 接触构件可以形成为覆盖有与衬底上的导体和端子触点电连通的导电层的凹陷。 或者，接触构件可以形成为适于穿透接触凸块的突起，作为具有粗糙纹理表面的微胶囊，或者形成为具有凹陷的沉积层。 互连可以用于晶片级测试系统中，用于测试包含在晶片上的骰子，或者用于测试裸露的骰子或凸起的芯片级封装的芯片级测试系统。