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    Homing of arbitrary scan path of a rotating magnetron
    4.
    发明申请
    Homing of arbitrary scan path of a rotating magnetron 有权
    回旋磁控管的任意扫描路径

    公开(公告)号：US20120103800A1

    公开(公告)日：2012-05-03

    申请号：US13347030

    申请日：2012-01-10

    申请人： Yu Chang ,  William Kuang ,  Ronald D. DeDore ,  Jitendra R. Bhimjiyani ,  Wesley W. Zhang

    发明人： Yu Chang ,  William Kuang ,  Ronald D. DeDore ,  Jitendra R. Bhimjiyani ,  Wesley W. Zhang

    IPC分类号： C23C14/35

    CPC分类号： C23C14/35 ,  C23C14/54 ,  H01J37/3408 ,  H01J37/3455

    摘要： A control system and method for controlling two motors determining the azimuthal and circumferential position of a magnetron rotating about the central axis of the sputter chamber in back of its target sputtering and capable of a nearly arbitrary scan path, e.g., with a planetary gear mechanism. A system controller periodically sends commands to the motion controller which closely controls the motors. Each command includes a command ticket, which may be one of several values. The motion controller accepts only commands having a command ticket of a different value from the immediately preceding command. One command selects a scan profile stored in the motion controller, which calculates motor signals from the selected profile. Another command instructs a dynamic homing command which interrogates sensors of the position of two rotating arms to determine if the arms in the expected positions. If not, the arms are rehomed.

    摘要翻译： 一种用于控制两个电动机的控制系统和方法，所述两个电动机确定围绕其目标溅射背面的溅射室的中心轴线旋转的磁控管的方位角和圆周位置，并且能够以几乎任意的扫描路径，例如用行星齿轮机构。 系统控制器周期性地向运动控制器发送命令，该运动控制器紧密地控制电机。 每个命令包括一个命令票证，它可以是几个值之一。 运动控制器仅接受具有与前一个命令不同的命令票证的命令。 一个命令选择存储在运动控制器中的扫描轮廓，其从所选轮廓计算马达信号。 另一个命令指示动态归位命令，其询问两个旋转臂的位置的传感器以确定臂在预期位置。 如果没有，武器被重新安置。

    Control of arbitrary scan path of a rotating magnetron
    5.
    发明授权
    Control of arbitrary scan path of a rotating magnetron 有权
    控制旋转磁控管的任意扫描路径

    公开(公告)号：US08114256B2

    公开(公告)日：2012-02-14

    申请号：US11948118

    申请日：2007-11-30

    申请人： Yu Chang ,  William Kuang ,  Ronald D Dedore ,  Jitendra R. Bhimjiyani ,  Wesley W Zhang

    发明人： Yu Chang ,  William Kuang ,  Ronald D Dedore ,  Jitendra R. Bhimjiyani ,  Wesley W Zhang

    IPC分类号： C23C14/35

    CPC分类号： C23C14/35 ,  C23C14/54 ,  H01J37/3408 ,  H01J37/3455

    摘要： A control system and method for controlling two motors determining the azimuthal and circumferential position of a magnetron rotating about the central axis of the sputter chamber in back of its target sputtering and capable of a nearly arbitrary scan path, e.g., with a planetary gear mechanism. A system controller periodically sends commands to the motion controller which closely controls the motors. Each command includes a command ticket, which may be one of several values. The motion controller accepts only commands having a command ticket of a different value from the immediately preceding command. One command selects a scan profile stored in the motion controller, which calculates motor signals from the selected profile. Another command instructs a dynamic homing command which interrogates sensors of the position of two rotating arms to determine if the arms in the expected positions. If not, the arms are rehomed.

    摘要翻译： 一种用于控制两个电动机的控制系统和方法，所述两个电动机确定围绕其目标溅射背面的溅射室的中心轴线旋转的磁控管的方位角和圆周位置，并且能够以几乎任意的扫描路径，例如用行星齿轮机构。 系统控制器周期性地向控制电机的运动控制器发送命令。 每个命令包括一个命令票证，它可以是几个值之一。 运动控制器仅接受具有与前一个命令不同的命令票证的命令。 一个命令选择存储在运动控制器中的扫描轮廓，其从所选轮廓计算马达信号。 另一个命令指示动态归位命令，其询问两个旋转臂的位置的传感器以确定臂在预期位置。 如果没有，武器被重新安置。

    PLASMA REACTOR WITH A CEILING ELECTRODE SUPPLY CONDUIT HAVING A SUCCESSION OF VOLTAGE DROP ELEMENTS
    6.
    发明申请
    PLASMA REACTOR WITH A CEILING ELECTRODE SUPPLY CONDUIT HAVING A SUCCESSION OF VOLTAGE DROP ELEMENTS 有权
    具有带电压下降元件继电器的天花板电极管的等离子体反应器

    公开(公告)号：US20100096085A1

    公开(公告)日：2010-04-22

    申请号：US12255492

    申请日：2008-10-21

    申请人： OLKAN CUVALCI ,  Yu Chang ,  William Kuang ,  Anqing Cui ,  Seshadri Ganguli

    发明人： OLKAN CUVALCI ,  Yu Chang ,  William Kuang ,  Anqing Cui ,  Seshadri Ganguli

    IPC分类号： C23F1/08 ,  C23C16/44

    CPC分类号： H01J37/3244 ,  C23C16/455 ,  H01J37/32091 ,  H01J37/32541

    摘要： A bridge assembly includes an electrically insulating hollow tube or bridge having a pair of ends, the bridge being supported at one of the ends over the cylindrical side wall and being supported at the other of the ends over the electrode. The bridge assembly further includes a set of conductive rings surrounding the hollow tube and spaced from one another along the length of the bridge, and plural electrically resistive elements. Each of the resistive elements has a pair of flexible connectors, respective ones the resistive elements connected at their flexible connectors between respective pairs of the rings to form a series resistor assembly.

    摘要翻译： 桥组件包括具有一对端部的电绝缘中空管或桥，所述桥被支撑在所述圆柱形侧壁上的一端，并且在所述电极的另一端支撑。 桥接组件还包括围绕中空管并且沿着桥的长度彼此间隔开的一组导电环，以及多个电阻元件。 每个电阻元件具有一对柔性连接器，相应的电阻元件在相应的成对环之间的柔性连接器处连接以形成串联电阻器组件。

    CONTROL OF ARBITRARY SCAN PATH OF A ROTATING MAGNETRON
    7.
    发明申请
    CONTROL OF ARBITRARY SCAN PATH OF A ROTATING MAGNETRON 有权
    控制旋转磁铁的横向扫描路径

    公开(公告)号：US20090139854A1

    公开(公告)日：2009-06-04

    申请号：US11948118

    申请日：2007-11-30

    申请人： Yu Chang ,  William Kuang ,  Ronald D. Dedore ,  Jitendra R. Bhimjiyani ,  Wesley W. Zhang

    发明人： Yu Chang ,  William Kuang ,  Ronald D. Dedore ,  Jitendra R. Bhimjiyani ,  Wesley W. Zhang

    IPC分类号： C23C14/54 ,  C23C14/35

    CPC分类号： C23C14/35 ,  C23C14/54 ,  H01J37/3408 ,  H01J37/3455

    摘要： A control system and method for controlling two motors determining the azimuthal and circumferential position of a magnetron rotating about the central axis of the sputter chamber in back of its target sputtering and capable of a nearly arbitrary scan path, e.g., with a planetary gear mechanism. A system controller periodically sends commands to the motion controller which closely controls the motors. Each command includes a command ticket, which may be one of several values. The motion controller accepts only commands having a command ticket of a different value from the immediately preceding command. One command selects a scan profile stored in the motion controller, which calculates motor signals from the selected profile. Another command instructs a dynamic homing command which interrogates sensors of the position of two rotating arms to determine if the arms in the expected positions. If not, the arms are rehomed.

    摘要翻译： 一种用于控制两个电动机的控制系统和方法，所述两个电动机确定围绕其目标溅射背面的溅射室的中心轴线旋转的磁控管的方位角和圆周位置，并且能够以几乎任意的扫描路径，例如用行星齿轮机构。 系统控制器周期性地向控制电机的运动控制器发送命令。 每个命令包括一个命令票证，它可以是几个值之一。 运动控制器仅接受具有与前一个命令不同的命令票证的命令。 一个命令选择存储在运动控制器中的扫描轮廓，其从所选轮廓计算马达信号。 另一个命令指示动态归位命令，其询问两个旋转臂的位置的传感器以确定臂在预期位置。 如果没有，武器被重新安置。

    Plasma reactor with a ceiling electrode supply conduit having a succession of voltage drop elements
    8.
    发明授权
    Plasma reactor with a ceiling electrode supply conduit having a succession of voltage drop elements 有权
    具有天花板电极供应导管的等离子体反应器具有一系列电压降元件

    公开(公告)号：US09202674B2

    公开(公告)日：2015-12-01

    申请号：US12255492

    申请日：2008-10-21

    申请人： Olkan Cuvalci ,  Yu Chang ,  William Kuang ,  Anqing Cui ,  Seshadri Ganguli

    发明人： Olkan Cuvalci ,  Yu Chang ,  William Kuang ,  Anqing Cui ,  Seshadri Ganguli

    IPC分类号： H01J37/32 ,  C23C16/455

    CPC分类号： H01J37/3244 ,  C23C16/455 ,  H01J37/32091 ,  H01J37/32541

    摘要： A bridge assembly includes an electrically insulating hollow tube or bridge having a pair of ends, the bridge being supported at one of the ends over the cylindrical side wall and being supported at the other of the ends over the electrode. The bridge assembly further includes a set of conductive rings surrounding the hollow tube and spaced from one another along the length of the bridge, and plural electrically resistive elements. Each of the resistive elements has a pair of flexible connectors, respective ones the resistive elements connected at their flexible connectors between respective pairs of the rings to form a series resistor assembly.

    摘要翻译： 桥组件包括具有一对端部的电绝缘中空管或桥，所述桥被支撑在所述圆柱形侧壁上的一端，并且在所述电极的另一端支撑。 桥接组件还包括围绕中空管并且沿着桥的长度彼此间隔开的一组导电环，以及多个电阻元件。 每个电阻元件具有一对柔性连接器，相应的电阻元件在相应的成对环之间的柔性连接器处连接以形成串联电阻器组件。

    Homing of arbitrary scan path of a rotating magnetron
    9.
    发明授权
    Homing of arbitrary scan path of a rotating magnetron 有权
    回旋磁控管的任意扫描路径

    公开(公告)号：US08721847B2

    公开(公告)日：2014-05-13

    申请号：US13347030

    申请日：2012-01-10

    申请人： Yu Chang ,  William Kuang ,  Ronald D. DeDore ,  Jitendra R. Bhimjiyani ,  Wesley W. Zhang

    发明人： Yu Chang ,  William Kuang ,  Ronald D. DeDore ,  Jitendra R. Bhimjiyani ,  Wesley W. Zhang

    IPC分类号： C23C14/35

    CPC分类号： C23C14/35 ,  C23C14/54 ,  H01J37/3408 ,  H01J37/3455

    摘要： A control system and method for controlling two motors determining the azimuthal and circumferential position of a magnetron rotating about the central axis of the sputter chamber in back of its target sputtering and capable of a nearly arbitrary scan path, e.g., with a planetary gear mechanism. A system controller periodically sends commands to the motion controller which closely controls the motors. Each command includes a command ticket, which may be one of several values. The motion controller accepts only commands having a command ticket of a different value from the immediately preceding command. One command selects a scan profile stored in the motion controller, which calculates motor signals from the selected profile. Another command instructs a dynamic homing command which interrogates sensors of the position of two rotating arms to determine if the arms in the expected positions. If not, the arms are rehomed.

    摘要翻译： 一种用于控制两个电动机的控制系统和方法，所述两个电动机确定围绕其目标溅射背面的溅射室的中心轴线旋转的磁控管的方位角和圆周位置，并且能够以几乎任意的扫描路径，例如用行星齿轮机构。 系统控制器周期性地向控制电机的运动控制器发送命令。 每个命令包括一个命令票证，它可以是几个值之一。 运动控制器仅接受具有与前一个命令不同的命令票证的命令。 一个命令选择存储在运动控制器中的扫描轮廓，其从所选轮廓计算马达信号。 另一个命令指示动态归位命令，其询问两个旋转臂的位置的传感器以确定臂在预期位置。 如果没有，武器被重新安置。