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1.发明授权
公开(公告)号：US5478774A
公开(公告)日：1995-12-26
申请号：US261276
申请日：1994-06-15
CPC分类号： H01S5/18308 , H01S5/18305 , H01S5/18327 , H01S5/2214 , Y10S438/969
摘要： A method of fabricating VCSELs including the steps of epitaxially growing a first mirror stack of a first conductivity type, an active region on the first mirror stack, and a first portion of a second mirror stack of a second conductivity type on the active region. A dielectric layer is then formed on the first portion of the second mirror stack, patterned to define an operating region and a remaining portion of the second mirror stack is epitaxially grown on the first portion to form a complete second mirror stack. Portions of the second mirror stack overlying the dielectric layer are polycrystalline in formation and substantially limit the remaining portion of the second mirror stack to the operating region. The polycrystalline layers can then be removed and electrical contacts formed.
摘要翻译： 一种制造VCSEL的方法，包括以下步骤：在有源区上外延生长第一导电类型的第一反射镜叠层，第一反射镜叠层上的有源区和第二导电类型的第二反射镜叠层的第一部分。 然后在第二反射镜叠层的第一部分上形成电介质层，其被图案化以限定操作区域，并且在第一部分上外延生长第二反射镜叠层的剩余部分以形成完整的第二反射镜叠层。 覆盖在介电层上的第二反射镜叠层的部分在形成时是多晶的，并且基本上将第二反射镜叠层的剩余部分限制到操作区域。 然后可以去除多晶层并形成电接触。
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公开(公告)号：US5446752A
公开(公告)日：1995-08-29
申请号：US271534
申请日：1994-07-07
CPC分类号： H01S5/18308 , H01S5/0207 , H01S5/18327 , H01S5/1833 , H01S5/18358 , H01S5/2063 , H01S5/2222
摘要： A top-emitting vertical cavity surface emitting laser with a current blocking layer at the substrate and offset layers in the mirror stack providing an optical waveguide aligned to the injected current distribution.
摘要翻译： 在衬底上具有电流阻挡层的顶发射垂直腔表面发射激光器和反射镜堆叠中的偏移层，提供与注入的电流分布对准的光波导。
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公开(公告)号：US5530715A
公开(公告)日：1996-06-25
申请号：US346559
申请日：1994-11-29
CPC分类号： H01S5/183 , B82Y20/00 , H01S5/3054 , H01S5/3215 , H01S5/34313
摘要： A first stack of distributed Bragg mirrors having alternating layers of aluminum gallium arsenide differing in concentrations of an aluminum are disposed on a surface of a substrate with a first plurality of continuous gradient layers positioned between the alternating layers of differing aluminum concentrations to dynamically move the aluminum concentration from one of the alternating layer to another alternating layers. A first cladding region is disposed on the first stack of distributed Bragg mirrors. An active region is disposed on the first cladding region with a second cladding region being dispose on the active region. A second stack of distributed Bragg mirrors having alternating layers of aluminum gallium arsenide differing concentrations of aluminum are disposed on the second cladding region with a second plurality of continuous gradient layers being positioned between the alternating layers of differing aluminum concentrations to dynamically change the aluminum concentration from one of the altering layers to another alternating layers.
摘要翻译： 具有不同于铝浓度的铝砷化镓的交替层的分布布拉格反射镜的第一堆叠被布置在基板的表面上，其中第一多个连续梯度层位于不同铝浓度的交替层之间以动态地移动铝 从交替层之一到另一个交替层的浓度。 第一包层区域布置在分布布拉格反射镜的第一堆叠上。 有源区设置在第一包层区上，第二包层区设置在有源区上。 具有不同浓度的铝的交替铝砷化镓层的第二层布拉格反射镜布置在第二覆层区域上，第二多个连续梯度层位于不同铝浓度的交替层之间以动态地将铝浓度从 另一个交替层的改变层之一。
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公开(公告)号：US5388120A
公开(公告)日：1995-02-07
申请号：US124065
申请日：1993-09-21
CPC分类号： H01S5/18391 , H01S2301/166 , H01S5/1089 , H01S5/18305 , H01S5/18388
摘要： A vertical cavity laser with unstable resonator including a substrate having opposed major surfaces with a first semiconductor mirror stack positioned on one major surface of the substrate, an active region positioned on the first stack and a second semiconductor mirror stack positioned on the active region so as to sandwich the active region between the first and second stacks. Layers of the second stack being etched so as to spatially modulate the thickness of the second stack such that reflectivity is reduced in a central portion of the second stack and increases toward an edge thereof.
摘要翻译： 一种具有不稳定谐振器的垂直腔体激光器，其包括具有相对主表面的衬底，其具有位于衬底的一个主表面上的第一半导体镜叠层，位于第一堆叠上的有源区域和位于有源区域上的第二半导体反射镜堆叠， 以将活动区域夹在第一和第二堆叠之间。 蚀刻第二叠层的层以空间地调制第二堆叠的厚度，使得第二堆叠的中心部分的反射率减小，并朝向其边缘增加。
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公开(公告)号：US5432809A
公开(公告)日：1995-07-11
申请号：US261502
申请日：1994-06-15
CPC分类号： H01S5/18327 , H01S5/209
摘要： Patterned-mirrors for VCSELs are fabricated by forming a first mirror stack of a plurality of pairs of relatively high and low index of refraction layers of AlGaAs, forming an active region of aluminum-free material on the first mirror stack, and forming a second mirror stack of a plurality of pairs of relatively high and low index of refraction layers of AlGaAs. The second mirror stack can be selectively etched to the active region by utilizing the aluminum-free active region as an etch stop.
摘要翻译： 通过形成多对相对较高和较低折射率的AlGaAs折射率层的第一反射镜叠层，在第一反射镜叠层上形成无铝材料的有源区，并形成第二反射镜，制造用于VCSEL的图案反射镜 堆叠的多对相对较高和较低折射率的AlGaAs层。 通过利用无铝活性区域作为蚀刻停止，可以将第二反射镜堆叠选择性地蚀刻到有源区域。
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6.发明授权VCSEL with vertical offset operating region providing a lateral waveguide and current limiting and method of fabrication 失效具有垂直偏移操作区域的VCSEL提供横向波导和电流限制以及制造方法
公开(公告)号：US5351257A
公开(公告)日：1994-09-27
申请号：US28015
申请日：1993-03-08
CPC分类号： H01S5/18327 , H01S2301/176 , H01S5/0207 , H01S5/0422
摘要： A VCSEL including a first mirror stack, an active region and a second mirror stack positioned on a substrate with portions of the active region and the first and second mirror stacks being offset from surrounding portions by an offset area in the surface of the substrate so as to define a lateral waveguide which confines the operating region of the VCSEL. The surrounding portions of the second mirror stack are removed to provide current control and refractory metal contacts are formed on the upper and lower surfaces. Methods of fabricating the offset as a depression or a mesa in the surface of the substrate and the resulting VCSEL are disclosed.
摘要翻译： 包括位于衬底上的第一反射镜堆叠，有源区域和第二反射镜堆叠的VCSEL，其中有源区域和第一和第二反射镜叠层的部分通过衬底的表面中的偏移区域从周围部分偏移，从而 以限定限制VCSEL的操作区域的横向波导。 移除第二反射镜叠层的周围部分以提供电流控制，并且在上表面和下表面上形成耐火金属触点。 公开了将偏移制造为衬底表面中的凹陷或台面的方法和所得到的VCSEL。
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公开(公告)号：US5710441A
公开(公告)日：1998-01-20
申请号：US550147
申请日：1995-10-30
CPC分类号： H01L33/105 , H01L33/405 , H01L33/465
摘要： A microcavity LED with photon recycling including a substrate having at least one layer of material positioned thereon, and a first cladding layer, a second cladding layer and an active region sandwiched therebetween forming a mesa on the layer of material. The mesa has generally vertical sides and an upper surface with an electrically conductive and light reflective system positioned on the vertical sides of the mesa and partially covering the upper surface to form a first electrical contact for the LED, the electrically conductive and light reflective system defining a centrally located light emitting opening on the surface of the mesa, the mesa having a diametric dimension of the surface greater than one time larger than a diametric dimension of the opening.
摘要翻译： 一种具有光子再循环的微腔LED，其包括具有位于其上的至少一层材料的基板，以及夹在其之间的第一包覆层，第二包层和有源区域，在该层材料上形成台面。 台面具有大致垂直的侧面和上表面，其具有定位在台面的垂直侧上的导电和光反射系统，并且部分地覆盖上表面以形成用于LED的第一电接触件，导电和光反射系统限定 在台面的表面上的位于中心的发光开口，台面具有比开口的直径尺寸大一倍的表面的直径尺寸。
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公开(公告)号：US5359618A
公开(公告)日：1994-10-25
申请号：US69812
申请日：1993-06-01
CPC分类号： H01S5/18313 , H01S5/18316 , H01S5/3215 , Y10S438/911
摘要： A high efficiency vertical cavity surface emitting laser with first and second mirror stacks and an active area sandwiched therebetween. The second mirror stack is formed into a mesa with exposed end surface and outer sidewalls and a centrally located light emission region. A portion of the mesa adjacent the exposed outer sidewalls has a reduced electrical conductance so as to spread operating current from the outer sidewalls into the centrally located light emission region. The electrical conductance of the portion is reduced by oxidizing or etching the outer sidewalls.
摘要翻译： 具有第一和第二反射镜叠层的高效率垂直腔表面发射激光器和夹在其间的有源区域。 第二反射镜叠层形成为具有暴露的端表面和外侧壁和位于中心的发光区域的台面。 邻近暴露的外侧壁的台面的一部分具有降低的电导，从而将工作电流从外侧壁扩展到中心定位的发光区域。 通过氧化或蚀刻外侧壁来减小该部分的导电性。
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公开(公告)号：US5557626A
公开(公告)日：1996-09-17
申请号：US261272
申请日：1994-06-15
IPC分类号： H01L21/302 , H01L21/3065 , H01S5/00 , H01S5/183 , H01S5/20 , H01S3/19
CPC分类号： H01S5/18327 , H01S5/209
摘要： Patterned-mirrors for VCSELs are fabricated by forming a first mirror stack of a plurality of pairs of relatively high and low index of refraction layers, forming an active region of aluminum-free material on the first mirror stack, and forming a second mirror stack of a plurality of pairs of relatively high and low index of refraction layers. The second mirror stack includes first and second portions of materials selected to provide different rates of etching between the first and second portions. The second portion is selectively etched to the first portion by utilizing the first portion as an etch stop.
摘要翻译： 通过形成多对相对较高和较低的折射率折射率层的第一反射镜叠层来形成用于VCSEL的图形反射镜，在第一反射镜叠层上形成无铝材料的有源区，并形成第二反射镜叠层 多对相对较高和较低的折射率折射率层。 第二反射镜叠层包括被选择为在第一和第二部分之间提供不同的蚀刻速率的第一和第二部分材料。 通过利用第一部分作为蚀刻停止，第二部分被选择性地蚀刻到第一部分。
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10.发明授权Method of fabricating top emitting ridge VCSEL with self-aligned contact and sidewall reflector 失效制造具有自对准接触和侧壁反射器的顶部发射脊VCSEL的方法
公开(公告)号：US6156582A
公开(公告)日：2000-12-05
申请号：US75934
申请日：1993-06-14
申请人： Chan-Long Shieh , Michael S. Lebby
发明人： Chan-Long Shieh , Michael S. Lebby
IPC分类号： H01L21/302 , H01L21/3065 , H01S5/00 , H01S5/042 , H01S5/183 , H01S5/20 , H01L21/00
CPC分类号： H01S5/18344 , H01S5/0425 , H01S5/2081
摘要： A method of fabricating a ridge VCSEL having a first stack of mirrors, a second stack of mirrors and an active area sandwiched therebetween, including the steps of depositing a metal layer, an etchable layer and a masking layer on the second stack, removing portions of the masking layer, the etchable layer and the metal layer to form a mask, using the mask to etch the second stack to form a mesa, removing portions of the etchable layer to expose the metal layer, depositing an additional metal layer on the side of the mesa and the exposed portion of the metal layer to define a light emitting area, removing the etchable and masking layers to expose the metal layer in the light emitting area, and removing the exposed portion of the metal layer to expose the light emitting area.
摘要翻译： 一种制造具有第一层反射镜，第二层反射镜和夹在其间的有源区域的脊VCSEL的方法，包括以下步骤：在第二堆叠上沉积金属层，可刻蚀层和掩模层， 掩模层，可蚀刻层和金属层以形成掩模，使用掩模蚀刻第二堆叠以形成台面，去除可蚀刻层的部分以暴露金属层，在金属层的侧面上沉积额外的金属层 金属层的台面和暴露部分以限定发光区域，去除可蚀刻和掩蔽层以暴露发光区域中的金属层，以及去除金属层的暴露部分以露出发光区域。
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