PROBE CARD AND MANUFACTURING METHOD THEREOF
    2.
    发明申请
    PROBE CARD AND MANUFACTURING METHOD THEREOF 审中-公开
    探针卡及其制造方法

    公开(公告)号:US20130088251A1

    公开(公告)日:2013-04-11

    申请号:US13614395

    申请日:2012-09-13

    IPC分类号: G01R1/04 B29C65/72

    摘要: There are provided a probe substrate and a manufacturing method thereof that may prevent an electrode pad bonded with a probe pin from being released from the probe substrate. The probe card includes: a ceramic substrate having at least one electrode pad on one surface thereof; and a probe pin bonded to the electrode pad, and the electrode pad has a larger dimension than a bonding surface of the probe pin.

    摘要翻译: 提供了一种探针衬底及其制造方法,其可以防止与探针接合的电极垫从探针衬底释放。 探针卡包括:在其一个表面上具有至少一个电极焊盘的陶瓷基板; 以及与电极焊盘接合的探针,电极焊盘的尺寸比探针的接合面大。

    MULTILAYER CERAMIC SUBSTRATE AND METHOD FOR MANUFACTURING THE SAME
    3.
    发明申请
    MULTILAYER CERAMIC SUBSTRATE AND METHOD FOR MANUFACTURING THE SAME 审中-公开
    多层陶瓷基板及其制造方法

    公开(公告)号:US20130000958A1

    公开(公告)日:2013-01-03

    申请号:US13473047

    申请日:2012-05-16

    摘要: Disclosed herein are a multilayer ceramic substrate and a method for manufacturing the same. In a method for manufacturing the multilayer ceramic substrate, which has a ceramic laminate including multiple ceramic layers and allowing interconnection between layers through vias respectively formed in the multiple ceramic layers, the method includes: preparing a ceramic laminate in which a void is formed around a via in at least one ceramic layer of multiple ceramic layers; immersing the ceramic laminate in a precipitating bath in which an electrode solution is contained; putting the ceramic laminate out of the precipitating bath after a predetermined period of time, and then removing a nanoparticle film stacked on a surface of a multilayer ceramic substrate; and applying heat to the multilayer ceramic substrate to form nanoparticles filling an inside of the void, after the removing of the nanoparticle film.

    摘要翻译: 本文公开了多层陶瓷基板及其制造方法。 在具有陶瓷层叠体的多层陶瓷基板的制造方法中,所述多层陶瓷基板具有包含多个陶瓷层的陶瓷层叠体,并且能够通过分别形成在多个陶瓷层中的通孔的层间的相互连接,所述方法包括:准备陶瓷层叠体, 在多个陶瓷层的至少一个陶瓷层中通孔; 将陶瓷层压体浸渍在其中含有电极溶液的沉淀浴中; 在预定时间后将陶瓷层压体放出沉淀池,然后除去堆叠在多层陶瓷基板的表面上的纳米颗粒膜; 并且在除去纳米颗粒膜之后,向多层陶瓷基板施加热量以形成填充空隙内部的纳米颗粒。

    SPACE TRANSFORMER FOR PROBE CARD AND METHOD OF REPAIRING SPACE TRANSFORMER
    4.
    发明申请
    SPACE TRANSFORMER FOR PROBE CARD AND METHOD OF REPAIRING SPACE TRANSFORMER 审中-公开
    用于探针卡的空间变压器和维修空间变压器的方法

    公开(公告)号:US20110063066A1

    公开(公告)日:2011-03-17

    申请号:US12642060

    申请日:2009-12-18

    IPC分类号: H01F27/28 H01F41/04

    摘要: A space transformer for a probe card includes: a multilayered circuit board having first and second faces which face each other and a plurality of side faces connecting the first and second faces; a plurality of channels including a first pad formed on the first face and receiving an electrical signal applied from the exterior, a second pad formed on the second face, to which a probe is connected, and a through wiring penetrating the multilayered circuit board and connecting the first and second pads; and side wirings formed on the side faces and connecting first and second pads of a damaged channel among a plurality of channels. When a portion of channels transferring an electrical signal to probes is damaged, the space transformer can repair the damaged channel by means of the side wirings.

    摘要翻译: 一种用于探针卡的空间变压器包括:具有彼此面对的第一和第二面以及连接第一和第二面的多个侧面的多层电路板; 多个通道,包括形成在第一面上并且接收从外部施加的电信号的第一焊盘,形成在第二面上的第二焊盘,探针连接到该多个通道,以及贯穿多层电路板的通孔和连接 第一和第二垫; 以及在多个通道中形成在侧面上并连接损坏通道的第一和第二焊盘的侧布线。 当传输电信号到探头的通道的一部分被损坏时,空间变压器可以通过侧面布线修复损坏的通道。