摘要:
A physical test integrated circuit has a plurality of repeating circuit portions corresponding to an integrated circuit design. A first of the portions is fabricated with a nominal block mask location, and additional ones of the portions are deliberately fabricated with predetermined progressive increased offset of the block mask location from the nominal block mask location. For each of the portions, the difference in threshold voltage between a first field effect transistor and a second field effect transistor is determined. The predetermined progressive increased offset of the block mask location is in a direction from the first field effect transistor to the second field effect transistor. The block mask overlay tolerance is determined at a value of the progressive increased offset corresponding to an inflection of the difference in threshold voltage from a zero difference. A method for on-chip monitoring, and corresponding circuits, are also disclosed.
摘要:
A physical test integrated circuit has a plurality of repeating circuit portions corresponding to an integrated circuit design. A first of the portions is fabricated with a nominal block mask location, and additional ones of the portions are deliberately fabricated with predetermined progressive increased offset of the block mask location from the nominal block mask location. For each of the portions, the difference in threshold voltage between a first field effect transistor and a second field effect transistor is determined. The predetermined progressive increased offset of the block mask location is in a direction from the first field effect transistor to the second field effect transistor. The block mask overlay tolerance is determined at a value of the progressive increased offset corresponding to an inflection of the difference in threshold voltage from a zero difference. A method for on-chip monitoring, and corresponding circuits, are also disclosed.
摘要:
Techniques for generating variants of a circuit layout and evaluating quality of the variants are provided. In one aspect, a method for generating at least one variant layout for a cell design includes the following steps. At least a first basis layout and a second basis layout are obtained for the cell design, each having a plurality of shapes, each of the shapes being a polygon having a plurality of sides and vertices. One or more of the shapes in the first basis layout are linked with one or more of the shapes in the second basis layout that represent a common feature of the cell design resulting in a plurality of linked shapes. Starting with either the first basis layout or the second basis layout, a location of the vertices of each of the linked shapes are changed to produce the variant layout for the cell design.
摘要:
A method and apparatus for determining overlay includes an array of electronic devices having structures formed in a plurality of layers and such that a device on a first end of the array includes an offset from a position of a device on a second end of the array. A measurement device is configured to measure electrical characteristics of the devices in the array to determine a transition position between the electrical characteristics. A comparison device is configured to determine an overlay between the layers based on a device associated with the transition position.
摘要:
A method and apparatus for determining overlay includes an array of electronic devices having structures formed in a plurality of layers and such that a device on a first end of the array includes an offset from a position of a device on a second end of the array. A measurement device is configured to measure electrical characteristics of the devices in the array to determine a transition position between the electrical characteristics. A comparison device is configured to determine an overlay between the layers based on a device associated with the transition position.
摘要:
A method is disclosed for evaluating a model, characterized as being a computer executable device and circuit simulator. The method includes accepting measured parameters of devices, which devices are essentially identical with, or are actually from, a simulated circuit instance. The model is executed with adjusted input parameters to generate simulated values for properties of the circuit instance. These simulated values are compared with measured values of the same properties. The goodness of the model is determined based on the degree of direct, or statistical, agreement between the simulated and measured values.
摘要:
A method is disclosed for evaluating a model, characterized as being a computer executable device and circuit simulator. The method includes accepting measured parameters of devices, which devices are essentially identical with, or are actually from, a simulated circuit instance. The model is executed with adjusted input parameters to generate simulated values for properties of the circuit instance. These simulated values are compared with measured values of the same properties. The goodness of the model is determined based on the degree of direct, or statistical, agreement between the simulated and measured values.
摘要:
A logic circuit is operated in a normal mode, with a supply voltage coupled to a supply rail of the logic circuit, and with a ground rail of the logic circuit grounded; It is determined that at least a portion of the logic circuit has experienced degradation due to bias temperature instability. Responsive to the determining, the logic circuit is operated in a power napping mode, with the supply voltage coupled to the ground rail of the circuit, with the supply rail of the circuit grounded, and with primary inputs of the circuit toggled between logical zero and logical one at low frequency. A logic circuit and corresponding design structures are also provided.
摘要:
A system has at least a first circuit portion and a second circuit portion. The first circuit portion is operated at normal AC frequency. The second circuit portion is operated in a back-up mode at low AC frequency, such that the second circuit portion can rapidly come-online but has limited temperature bias instability degradation. The second circuit portion can then be brought on-line and operated at the normal AC frequency. A system including first and second circuit portions and a control unit, as well as a computer program product, are also provided.