Abstract:
A device with a suspended beam and piezoresistive means of detecting displacement of the beam and a method of manufacturing the device are disclosed. The device comprises a support, a suspended beam, moving parallel to the plane of the support, and means of detecting displacement, comprising at least two piezoresistive strain gauges that are not in line with each other. The beam is suspended through detection means. The two gauges are located on two opposite lateral faces of the beam respectively.
Abstract:
The device resonant comprises a plurality of synchronized oscillators. Each oscillator comprises a resonator which comprises detection means providing detection signals representative of oscillation of the resonator to a feedback loop connected to an excitation input of the resonator. The detection signals control the conductivity of the feedback loop of the oscillator. The excitation inputs of all the resonators are connected to a common point which constitutes the output of the resonant device. A capacitive load is connected between said common point and a reference voltage.
Abstract:
A device for analyzing a fluid, including a layer including a plurality of sensors of MEMS and/or NEMS type, a layer including a mechanism controlling the sensor and for processing information transmitted by the sensors, the control and processing mechanism being electrically connected to the detectors, and a layer positioned on the layer including the sensors on a side of a face including the sensors including a mechanism spatially and temporally distributing the fluid on the sensors.
Abstract:
The resonant device comprises an electromechanical resonator of nanometric or micrometric size that comprises a mobile element and a fixed element. Detection means provide detection signals representative of movement of the mobile element with respect to the fixed element to a feedback loop that is connected to an excitation input of the resonator. The resonator is formed on the same substrate as the detection means and feedback loop. The feedback loop comprises at most first and second transistors connected in series between a reference voltage and the excitation terminal. A capacitive load is connected between the excitation terminal and reference voltage. The detection signals control the conductivity of the first transistor.
Abstract:
A measuring system including: at least two electromechanical resonators each having a resonant frequency varying around an offload resonant frequency according to a physical quantity to be measured; at least one reading device connected to inputs of the resonators and configured to supply an excitation signal on the inputs; and a memory in which is recorded, for each resonator, offload resonance information relating to the offload resonant frequency of the resonator. Each reading device is configured to determine the resonant frequency of one or more resonators selected for reading by configuring at least one element of the reading device using the offload resonance information stored for each selected resonator.
Abstract:
The oscillator comprises at least a first series of a multiple of four sub-assemblies each of which comprises an excitation terminal and an output terminal. The sub-assemblies are arranged in series in a closed loop. The output terminal of each sub-assembly is connected to the excitation terminal of the following sub-assembly. The output terminal of one of the sub-assemblies constitutes the output terminal of the oscillator. Each sub-assembly comprises excitation means and a nanowire which constitutes the electromechanical resonator and the piezoresistive detection means of movement of the resonator. A first terminal of the nanowire is connected to a first supply voltage. The second terminal of the nanowire constitutes the output terminal of the sub-assembly which is grounded via a corresponding resistive circuit. An input terminal of the excitation means constitutes the excitation terminal of the sub-assembly.
Abstract:
A measuring system including: at least two electromechanical resonators each having a resonant frequency varying around an offload resonant frequency according to a physical quantity to be measured; at least one reading device connected to inputs of the resonators and configured to supply an excitation signal on the inputs; and a memory in which is recorded, for each resonator, offload resonance information relating to the offload resonant frequency of the resonator. Each reading device is configured to determine the resonant frequency of one or more resonators selected for reading by configuring at least one element of the reading device using the offload resonance information stored for each selected resonator.
Abstract:
A device with a suspended beam and piezoresistive means of detecting displacement of the beam and a method of manufacturing the device are disclosed. The device comprises a support, a suspended beam, moving parallel to the plane of the support, and means of detecting displacement, comprising at least two piezoresistive strain gauges that are not in line with each other. The beam is suspended through detection means. The two gauges are located on two opposite lateral faces of the beam respectively.
Abstract:
A device for analyzing a fluid, including a layer including a plurality of sensors of MEMS and/or NEMS type, a layer including a mechanism controlling the sensor and for processing information transmitted by the sensors, the control and processing mechanism being electrically connected to the detectors, and a layer positioned on the layer including the sensors on a side of a face including the sensors including a mechanism spatially and temporally distributing the fluid on the sensors.
Abstract:
Analyzer 1 for analyzing a fluid 3 containing at least one substance to be analyzed and at least one inflammable substance containing: a source of gas 9 to provide a flux of diluent gas, an injecting nozzle 11 for introducing samples of the fluid into the flux of diluent gas and for producing a gaseous flux, and a detector 7 for analyzing the gaseous flux, wherein: the source of gas is intended to deliver a flux of diluent gas containing a material capable of supporting the combustion of the inflammable substance, preferably to deliver a flux of air, the injection nozzle is configured so as to introduce into the diluent gas samples of the fluid such that the average volume fraction of the fluid in the gaseous flux is less than 1/2,000 and preferably less than 1/20,000, and the detector contains at least one microsensor for detecting the substance to be analyzed. Corresponding method.