METHOD AND APPARATUS PROVIDING SEPARATE MODULES FOR PROCESSING A SUBSTRATE
    6.
    发明申请
    METHOD AND APPARATUS PROVIDING SEPARATE MODULES FOR PROCESSING A SUBSTRATE 审中-公开
    提供用于处理基板的分离模块的方法和装置

    公开(公告)号:US20130189635A1

    公开(公告)日:2013-07-25

    申请号:US13748344

    申请日:2013-01-23

    Abstract: A method and apparatus for heat treating a photovoltaic device. The apparatus includes a heating module, a processing module, and a cooling module in which the operating temperatures of the modules may be controlled separately. The heating module is configured to pre-heat a substrate and stabilize the substrate at the desired target temperature, the processing module is configured to thermally process the substrate, and the cooling module is configured for post-treatment cooling of the substrate.

    Abstract translation: 一种用于热处理光伏器件的方法和装置。 该装置包括加热模块,处理模块和冷却模块,其中模块的操作温度可以分开控制。 加热模块被配置为预热基底并将基底稳定在期望的目标温度,处理模块被配置为热处理基底,并且冷却模块被配置用于对基底进行后处理冷却。

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