公开(公告)号：US20160260824A1

公开(公告)日：2016-09-08

申请号：US14986150

申请日：2015-12-31

申请人： Florin Udrea ,  Alice Pei-Shan Hsieh ,  Gianluca Camuso ,  Chiu Ng ,  Yi Tang ,  Rajeev Krishna Vytla

发明人： Florin Udrea ,  Alice Pei-Shan Hsieh ,  Gianluca Camuso ,  Chiu Ng ,  Yi Tang ,  Rajeev Krishna Vytla

IPC分类号： H01L29/739 ,  H01L29/10 ,  H01L29/06

CPC分类号： H01L29/7397 ,  H01L29/0634 ,  H01L29/41708 ,  H01L29/7394

摘要： There are disclosed herein various implementations of a bipolar semiconductor device having a charge-balanced inter-trench structure. Such a device includes a drift region having a first conductivity type situated over an anode layer having a second conductivity type. The device also includes first and second control trenches extending through an inversion region having the second conductivity type into the drift region, each of the first and second control trenches being bordered by a cathode diffusion having the first conductivity type. In addition, the device includes an inter-trench structure situated in the drift region between the first and second control trenches. The inter-trench structure includes one or more first conductivity regions having the first conductivity type and one or more second conductivity region having the second conductivity type, the one or more first conductivity regions and the one or more second conductivity regions configured to substantially charge-balance the inter-trench structure.

摘要翻译： 这里公开了具有电荷平衡的沟槽间结构的双极半导体器件的各种实施方式。 这种器件包括位于具有第二导电类型的阳极层上的具有第一导电类型的漂移区。 该器件还包括延伸穿过具有第二导电类型的反向区域到漂移区域中的第一和第二控制沟槽，第一和第二控制沟槽中的每一个都由具有第一导电类型的阴极扩散区界定。 此外，该器件包括位于第一和第二控制沟槽之间的漂移区域中的沟槽间结构。 沟槽间结构包括具有第一导电类型的一个或多个第一导电区域和具有第二导电类型的一个或多个第二导电区域，一个或多个第一导电区域和一个或多个第二导电区域， 平衡沟槽间结构。

公开(公告)号：US07507608B2

公开(公告)日：2009-03-24

申请号：US11297571

申请日：2005-12-08

申请人： Richard Francis ,  Chiu Ng ,  Hamilton Lu ,  Ranadeep Dutta

发明人： Richard Francis ,  Chiu Ng ,  Hamilton Lu ,  Ranadeep Dutta

IPC分类号： H01L21/332

CPC分类号： H01L29/66333 ,  H01L29/0834 ,  H01L29/7395

摘要： The collector or anode of a non-punch through IGBT formed in a float zone silicon wafer is formed by a P doped amorphous silicon layer deposited on the back surface of an ultra thin wafer. A DMOS structure is formed on the top surface of the wafer before the bottom structure is formed. A back contact is formed over the amorphous silicon layer. No alloy step is needed to activate the anode defined by the P type amorphous silicon.

摘要翻译： 形成在浮动区硅晶片中的非穿通IGBT的集电极或阳极由沉积在超薄晶片的背表面上的P掺杂非晶硅层形成。 在形成底部结构之前，在晶片的顶表面上形成DMOS结构。 在非晶硅层上形成背接触。 不需要合金步骤来激活由P型非晶硅限定的阳极。

公开(公告)号：US20070096167A1

公开(公告)日：2007-05-03

申请号：US11265489

申请日：2005-11-02

申请人： Richard Francis ,  Chiu Ng

发明人： Richard Francis ,  Chiu Ng

IPC分类号： H01L29/80 ,  H01L31/112

CPC分类号： H01L29/0834 ,  H01L29/456 ,  H01L29/66348 ,  H01L29/7397

摘要： A very low VCEON non punch through trench IGBT built-in non-epitaxial float zone silicon has a depletion stop layer structure added to its bottom surface.

摘要翻译： 一个非常低的非穿孔式IGBT内置的非外延浮区硅具有向其底表面添加的耗尽阻挡层结构。

公开(公告)号：US06627961B1

公开(公告)日：2003-09-30

申请号：US09565151

申请日：2000-05-05

申请人： Richard Francis ,  Ranadeep Dutta ,  Chiu Ng ,  Peter Wood

发明人： Richard Francis ,  Ranadeep Dutta ,  Chiu Ng ,  Peter Wood

IPC分类号： H01L2972

CPC分类号： H01L29/7395

摘要： A high voltage MOSgated semiconductor device has a generally linear MOSFET type forward current versus forward voltage characteristic at low voltage and the high current, low forward drop capability of an IGBT. The device is particularly useful as the control transistor for a television tube deflection coil. The device is formed by a copacked discrete IGBT die and power MOSFET die in which the ratio of the MOSFET die area is preferably about 25% that of the IGBT. Alternatively, the IGBT and MOSFET can be integrated into the same die, with the IGBT and MOSFET elements alternating laterally with one another and overlying respective P+ injection regions and N+ contact regions respectively on the bottom of the die. The MOSFET and IGBT elements are preferably spaced apart by a distance of about 1 minority carrier length (50-100 microns for a 1500 volt device).

摘要翻译： 高压MOS电容半导体器件具有大致线性的MOSFET型正向电流与低电压时的正向电压特性以及IGBT的高电流，低正向下降能力。 该装置特别适用于电视机管偏转线圈的控制晶体管。 该器件由共模封装的分立IGBT管芯和功率MOSFET管芯形成，其中MOSFET管芯面积的比率优选为IGBT的约25％。 或者，IGBT和MOSFET可以集成到相同的管芯中，其中IGBT和MOSFET元件彼此横向交替并且分别叠置在管芯底部上的相应的P +注入区域和N +接触区域。 MOSFET和IGBT元件优选地间隔开约1个少数载流子长度（对于1500伏装置为50-100微米）的距离。

公开(公告)号：US06242288B1

公开(公告)日：2001-06-05

申请号：US09565928

申请日：2000-05-05

申请人： Richard Francis ,  Chiu Ng

发明人： Richard Francis ,  Chiu Ng

IPC分类号： H01L21332

CPC分类号： H01L29/66333 ,  H01L21/26513 ,  H01L21/324

摘要： The collector (anode) of a non punch through IGBT formed in a float zone silicon monocrystaline wafer is formed with a DMOS top structure and is thereafter ground at its bottom surface to a less than 250 micron thickness. A shallow P type implant is then made in the bottom surface and the wafer is then heated in vacuum to about 400° C. for about 30 to 60 seconds to remove moisture and other contaminants from the bottom surface. An aluminum layer is then sputtered on the bottom surface, followed by other metals to form the bottom electrode. No activation anneal is necessary to activate the weak collector junction.

摘要翻译： 形成在浮动区硅单晶晶片中的非穿通IGBT的集电极（阳极）形成有DMOS顶部结构，然后在其底表面处研磨至小于250微米厚度。 然后在底表面中制造浅P型植入物，然后将晶片在真空中加热至约400℃约30至60秒，以从底部表面除去水分和其它污染物。 然后将铝层溅射在底表面上，随后溅射其它金属以形成底部电极。 不需要激活退火来激活弱集电极结。

公开(公告)号：US07956419B2

公开(公告)日：2011-06-07

申请号：US11265489

申请日：2005-11-02

申请人： Richard Francis ,  Chiu Ng

发明人： Richard Francis ,  Chiu Ng

IPC分类号： H01L23/62

CPC分类号： H01L29/0834 ,  H01L29/456 ,  H01L29/66348 ,  H01L29/7397

摘要： A very low VCEON non punch through trench IGBT built-in non-epitaxial float zone silicon has a depletion stop layer structure added to its bottom surface.

摘要翻译： 非常低的VCEON非穿通沟槽IGBT内置非外延浮区硅在其底表面上添加有耗尽阻挡层结构。

公开(公告)号：US07485920B2

公开(公告)日：2009-02-03

申请号：US10288696

申请日：2002-11-04

申请人： Richard Francis ,  Chiu Ng

发明人： Richard Francis ,  Chiu Ng

IPC分类号： H01L29/02

CPC分类号： H01L29/66136 ,  H01L21/221 ,  H01L21/263 ,  H01L21/26506 ,  H01L29/167 ,  H01L29/32 ,  H01L29/66333

摘要： Semiconductor devices having recombination centers comprised of well-positioned heavy metals. At least one lattice defect region within the semiconductor device is first created using particle beam implantation. Use of particle beam implantation positions the lattice defect region(s) with high accuracy in the semiconductor device. A heavy metal implantation treatment of the device is applied. The lattice defects created by the particle beam implantation act as gettering sites for the heavy metal implantation. Thus, after the creation of lattice defects and heavy metal diffusion, the heavy metal atoms are concentrated in the well-positioned lattice defect region(s).

摘要翻译： 具有复合中心的半导体器件由良好定位的重金属构成。 首先使用粒子束注入产生半导体器件内的至少一个晶格缺陷区域。 使用粒子束注入在半导体器件中高精度地定位晶格缺陷区域。 应用该装置的重金属植入处理。 通过粒子束注入产生的晶格缺陷作为重金属注入的吸杂位置。 因此，在形成晶格缺陷和重金属扩散之后，重金属原子集中在良好定位的晶格缺陷区域中。

公开(公告)号：US06707111B2

公开(公告)日：2004-03-16

申请号：US10217988

申请日：2002-08-13

申请人： Richard Francis ,  Chiu Ng

发明人： Richard Francis ,  Chiu Ng

IPC分类号： H01L2362

CPC分类号： H01L29/456 ,  H01L21/26506 ,  H01L21/28512 ,  H01L29/1095 ,  H01L29/32 ,  H01L29/66333 ,  H01L29/7395 ,  H01L2924/0002 ,  H01L2924/00

摘要： An IGBT is formed in a thin (less than 250 microns thick) float zone silicon wafer using a hydrogen implant to form an N+ buffer layer at the bottom of the wafer. A weak anode is formed on the bottom of the wafer. A single hydrogen implant, or a plurality of hydrogen implants of progressively shallower depth and increasing dose can be used to form the implant in a diffused float zone wafer. The process may also be used to form an N+ contact region in silicon to permit a good ohmic contact to the silicon for any type device.

摘要翻译： 使用氢气注入在薄的（小于250微米厚）的浮动区硅晶片中形成IGBT，以在晶片的底部形成N +缓冲层。 在晶片的底部形成弱阳极。 可以使用单个氢植入物或逐渐变浅的深度和增加剂量的多个氢植入物在扩散的浮动区晶片中形成植入物。 该工艺也可以用于在硅中形成N +接触区域，以允许任何类型的器件对硅进行良好的欧姆接触。

公开(公告)号：US06603153B2

公开(公告)日：2003-08-05

申请号：US09862017

申请日：2001-05-21

申请人： Richard Francis ,  Chiu Ng

发明人： Richard Francis ,  Chiu Ng

IPC分类号： H01L29861

CPC分类号： H01L29/66136 ,  H01L29/0619 ,  H01L29/32 ,  H01L29/872 ,  Y10S257/91

摘要： A soft recovery diode is made by first implanting helium into the die to a location below the P/N junction and the implant annealed. An E-beam radiation process then is applied to the entire wafer and is also annealed. The diode then has very soft recovery characteristics without requiring heavy metal doping.

公开(公告)号：US06426248B2

公开(公告)日：2002-07-30

申请号：US09734429

申请日：2000-12-11

申请人： Richard Francis ,  Chiu Ng

发明人： Richard Francis ,  Chiu Ng

IPC分类号： H01L21336

CPC分类号： H01L29/7802 ,  H01L29/1604 ,  H01L29/41766 ,  H01L29/456 ,  H01L29/66727

摘要： A vertical conduction MOSFET semiconductor device is formed in a non-epitaxial (float zone) lightly doped silicon substrate. Device junction regions are formed in the top surface of the lightly doped float zone substrate. The backside of the wafer is then ground by surface grinding to attain a desired thickness. Phosphorus, or another N type dopant species, is then implanted into the back surface and is activated by a laser anneal. Back surface damage caused by grinding and/or implantation is intentionally retained. Alternatively, a “transparent” layer is formed by depositing highly doped amorphous silicon on the back surface. Titanium, or another metal (excluding aluminum), is then deposited on the back surface and annealed to form a titanium silicide, or other silicide for a contact electrode.

摘要翻译： 在非外延（浮动区）轻掺杂硅衬底中形成垂直导通MOSFET半导体器件。 器件结区域形成在轻掺杂浮法区衬底的顶表面中。 然后通过表面研磨将晶片的背面研磨以获得所需的厚度。 然后将磷或另一种N型掺杂剂物质注入背表面，并通过激光退火来激活。 故意保留由研磨和/或植入引起的背面损伤。 或者，通过在后表面上沉积高度掺杂的非晶硅来形成“透明”层。 然后将钛或另一种金属（不包括铝）沉积在背面上并退火以形成硅化钛或用于接触电极的其它硅化物。