公开(公告)号：US20160111374A1

公开(公告)日：2016-04-21

申请号：US14887984

申请日：2015-10-20

Applicant: GLOBALFOUNDRIES Inc. ,  ZEON CORPORATION

Inventor： Markus Brink ,  Robert L. Bruce ,  Sebastian U. Engelmann ,  Nicholas C. M. Fuller ,  Hiroyuki Miyazoe ,  Masahiro Nakamura

IPC: H01L23/532 ,  H01L23/522 ,  H01L23/528

CPC classification number: H01L23/53295 ,  H01L21/31116 ,  H01L21/31144 ,  H01L21/3212 ,  H01L21/76802 ,  H01L21/76813 ,  H01L21/76831 ,  H01L21/76834 ,  H01L21/76835 ,  H01L23/5226 ,  H01L23/528 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A stack that includes, from bottom to top, a nitrogen-containing dielectric layer, an interconnect level dielectric material layer, and a hard mask layer is formed on a substrate. The hard mask layer and the interconnect level dielectric material layer are patterned by an etch. Employing the patterned hard mask layer as an etch mask, the nitrogen-containing dielectric layer is patterned by a break-through anisotropic etch, which employs a fluorohydrocarbon-containing plasma to break through the nitrogen-containing dielectric layer. Fluorohydrocarbon gases used to generate the fluorohydrocarbon-containing plasma generate a carbon-rich polymer residue, which interact with the nitrogen-containing dielectric layer to form volatile compounds. Plasma energy can be decreased below 100 eV to reduce damage to physically exposed surfaces of the interconnect level dielectric material layer.

公开(公告)号：US09633948B2

公开(公告)日：2017-04-25

申请号：US14887984

申请日：2015-10-20

Applicant: GLOBALFOUNDRIES Inc. ,  ZEON CORPORATION

Inventor： Markus Brink ,  Robert L. Bruce ,  Sebastian U. Engelmann ,  Nicholas C. M. Fuller ,  Hiroyuki Miyazoe ,  Masahiro Nakamura

IPC: H01L23/528 ,  H01L23/532 ,  H01L21/768 ,  H01L21/311 ,  H01L21/321 ,  H01L23/522

CPC classification number: H01L23/53295 ,  H01L21/31116 ,  H01L21/31144 ,  H01L21/3212 ,  H01L21/76802 ,  H01L21/76813 ,  H01L21/76831 ,  H01L21/76834 ,  H01L21/76835 ,  H01L23/5226 ,  H01L23/528 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A stack that includes, from bottom to top, a nitrogen-containing dielectric layer, an interconnect level dielectric material layer, and a hard mask layer is formed on a substrate. The hard mask layer and the interconnect level dielectric material layer are patterned by an etch. Employing the patterned hard mask layer as an etch mask, the nitrogen-containing dielectric layer is patterned by a break-through anisotropic etch, which employs a fluorohydrocarbon-containing plasma to break through the nitrogen-containing dielectric layer. Fluorohydrocarbon gases used to generate the fluorohydrocarbon-containing plasma generate a carbon-rich polymer residue, which interact with the nitrogen-containing dielectric layer to form volatile compounds. Plasma energy can be decreased below 100 eV to reduce damage to physically exposed surfaces of the interconnect level dielectric material layer.

公开(公告)号：US09437443B2

公开(公告)日：2016-09-06

申请号：US13916109

申请日：2013-06-12

Applicant: GLOBALFOUNDRIES INC.

Inventor： Markus Brink ,  Michael A. Guillorn ,  Sebastian U. Engelmann ,  Hiroyuki Miyazoe ,  Adam M. Pyzyna ,  Jeffrey W. Sleight

IPC: H01L21/308 ,  H01L21/033 ,  H01L21/02 ,  H01L21/3213 ,  H01L21/28

CPC classification number: H01L21/3086 ,  H01L21/0228 ,  H01L21/0337 ,  H01L21/0338 ,  H01L21/28132 ,  H01L21/3088 ,  H01L21/32139

Abstract: A SIT method includes the following steps. An SIT mandrel material is deposited onto a substrate and formed into a plurality of SIT mandrels. A spacer material is conformally deposited onto the substrate covering a top and sides of each of the SIT mandrels. Atomic Layer Deposition (ALD) is used to deposit the SIT spacer at low temperatures. The spacer material is selected from the group including a metal, a metal oxide, a metal nitride and combinations including at least one of the foregoing materials. The spacer material is removed from all but the sides of each of the SIT mandrels to form SIT sidewall spacers on the sides of each of the SIT mandrels. The SIT mandrels are removed selective to the SIT sidewall spacers revealing a pattern of the SIT sidewall spacers. The pattern of the SIT sidewall spacers is transferred to the underlying stack or substrate.

Abstract translation: SIT方法包括以下步骤。 将SIT芯棒材料沉积到衬底上并形成多个SIT芯棒。 间隔物材料被共形沉积到基底上，覆盖每个SIT心轴的顶部和侧面。 原子层沉积（ALD）用于在低温下沉积SIT间隔物。 间隔材料选自金属，金属氧化物，金属氮化物和包括至少一种前述材料的组合。 隔离材料从每个SIT心轴的所有侧面除去，以在每个SIT心轴的侧面上形成SIT侧壁间隔物。 SIT心轴被选择性地移除到SIT侧壁间隔件上，露出SIT侧壁间隔物的图案。 SIT侧壁间隔物的图案被转移到下面的堆叠或衬底。