公开(公告)号：US20160165729A1

公开(公告)日：2016-06-09

申请号：US15046594

申请日：2016-02-18

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Saket CHADDA ,  Ramakanth ALAPATI ,  Adam BEECE

IPC: H05K1/18 ,  H05K1/03 ,  H05K1/11

CPC classification number: H01L25/0652 ,  H01L23/14 ,  H01L23/142 ,  H01L23/147 ,  H01L23/49822 ,  H01L23/49827 ,  H01L24/81 ,  H01L25/16 ,  H01L25/50 ,  H01L27/016 ,  H01L2224/131 ,  H01L2224/16235 ,  H01L2224/16237 ,  H01L2225/06517 ,  H01L2225/06524 ,  H01L2225/06548 ,  H01L2225/06589 ,  H05K1/032 ,  H05K1/053 ,  H05K1/115 ,  H05K1/16 ,  H05K1/18 ,  H05K1/181 ,  H05K3/4053 ,  H05K3/445 ,  H05K3/4644 ,  H05K2201/032 ,  H01L2924/014

Abstract: A methodology for a thin, flexible substrate having integrated passive circuit elements, and the resulting device are disclosed. Embodiments may include integrating one or more passive circuit components on a first or second surface of a substrate, and interconnecting one or more integrated circuit (IC) dies on a second surface of the interposer to the one or more passive circuit components with one or more metal-filled vias between the first and second surfaces, the first and second surfaces being opposite surfaces of the substrate.

Abstract translation: 公开了一种用于具有集成无源电路元件的薄柔性基板的方法，以及所得到的器件。 实施例可以包括在衬底的第一或第二表面上集成一个或多个无源电路部件，以及将一个或多个无源电路部件与一个或多个内插器的第二表面上的一个或多个集成电路（IC）管芯互连 在第一和第二表面之间的金属填充的通孔，第一和第二表面是基板的相对表面。

公开(公告)号：US20160064354A1

公开(公告)日：2016-03-03

申请号：US14471620

申请日：2014-08-28

Applicant: GLOBALFOUNDRIES INC.

Inventor： Saket CHADDA ,  Ramakanth ALAPATI ,  Adam BEECE

IPC: H01L25/065 ,  H01L25/00

CPC classification number: H05K1/18 ,  H01L23/14 ,  H01L23/142 ,  H01L23/147 ,  H01L23/49822 ,  H01L23/49827 ,  H01L24/81 ,  H01L25/0652 ,  H01L25/16 ,  H01L25/50 ,  H01L27/016 ,  H01L2224/131 ,  H01L2224/16235 ,  H01L2224/16237 ,  H01L2225/06517 ,  H01L2225/06524 ,  H01L2225/06548 ,  H01L2225/06589 ,  H05K1/032 ,  H05K1/053 ,  H05K1/115 ,  H05K1/16 ,  H05K1/181 ,  H05K3/4053 ,  H05K3/445 ,  H05K3/4644 ,  H05K2201/032 ,  H01L2924/014

Abstract: A methodology for a thin, flexible substrate having integrated passive circuit elements, and the resulting device are disclosed. Embodiments may include integrating one or more passive circuit components on a first or second surface of a substrate, and interconnecting one or more integrated circuit (IC) dies on a second surface of the interposer to the one or more passive circuit components with one or more metal-filled vias between the first and second surfaces, the first and second surfaces being opposite surfaces of the substrate.

Abstract translation: 公开了一种用于具有集成无源电路元件的薄柔性基板的方法，以及所得到的器件。 实施例可以包括在衬底的第一或第二表面上集成一个或多个无源电路部件，以及将一个或多个无源电路部件与一个或多个内插器的第二表面上的一个或多个集成电路（IC）管芯互连 在第一和第二表面之间的金属填充的通孔，第一和第二表面是基板的相对表面。

公开(公告)号：US20180254239A1

公开(公告)日：2018-09-06

申请号：US15446109

申请日：2017-03-01

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Vijay SUKUMARAN ,  Ivan Junju HUANG ,  Saket CHADDA ,  Elavarasan T. PANNERSELVAM ,  Chok W. HO

IPC: H01L23/498 ,  H01L21/48

CPC classification number: H01L23/49827 ,  H01L21/486 ,  H01L23/15

Abstract: Methods for reliable interconnect structures between thin metal capture pads and TGV metallization and resulting devices are provided. Embodiments include forming a TGV in a glass substrate; filling with metal conductive paste; forming a metal layer on top and bottom surfaces of the substrate; patterning the metal layer, leaving at least a portion over the TGV top surface and an area surrounding the TGV; forming a dielectric layer on the metal layer and on the substrate top and bottom surfaces; patterning the dielectric layer, including exposing the metal layer over the TGV top surface and the area surrounding the TGV; forming a second metal layer on the dielectric layer and on the exposed portion of the first metal layer over the TGV top surface and the area surrounding the TGV; patterning the second metal layer exposing the dielectric layer; and forming a third metal layer on the second metal layer.