公开(公告)号：US11569170B2

公开(公告)日：2023-01-31

申请号：US17064602

申请日：2020-10-07

Applicant: GLOBALFOUNDRIES U.S. INC.

Inventor： Siva P. Adusumilli ,  Mark David Levy ,  Ramsey Hazbun ,  Alvin Joseph ,  Steven Bentley

IPC: H01L23/535 ,  H01L21/74 ,  H01L21/768 ,  H01L23/367 ,  H01L23/48 ,  H01L29/10 ,  H01L21/8234 ,  H01L27/092 ,  H01L29/778 ,  H01L29/735

Abstract: A semiconductor device is provided, the semiconductor device comprising a substrate having merged cavities in the substrate. An active region is over the merged cavities in the substrate. A thermally conductive layer is in the merged cavities in the substrate, whereby the thermally conductive layer at least partially fills up the merged cavities in the substrate. A first contact pillar connects the thermally conductive layer in the merged cavities in the substrate with a metallization layer above the active region.

公开(公告)号：US11049932B2

公开(公告)日：2021-06-29

申请号：US16226640

申请日：2018-12-20

Applicant: GLOBALFOUNDRIES U.S. INC.

Inventor： Steven M. Shank ,  Mark David Levy ,  Bruce W. Porth

IPC: H01L29/06 ,  H01L29/732 ,  H01L21/762 ,  H01L21/763 ,  H01L21/765

Abstract: The present disclosure relates to isolation structures for semiconductor devices and, more particularly, to dual trench isolation structures having a deep trench and a shallow trench for electrically isolating integrated circuit (IC) components formed on a semiconductor substrate. The semiconductor isolation structure of the present disclosure includes a semiconductor substrate, a shallow trench isolation (STI) disposed over the semiconductor substrate, a deep trench isolation (DTI) with sidewalls extending from a bottom surface of the STI and terminating in the semiconductor substrate, a multilayer dielectric lining disposed on the sidewalls of the DTI, the multilayer dielectric lining including an etch stop layer positioned between inner and outer dielectric liners, and a filler material disposed within the DTI.

公开(公告)号：US12243935B2

公开(公告)日：2025-03-04

申请号：US18487114

申请日：2023-10-15

Applicant: GlobalFoundries U.S. Inc.

Inventor： Vibhor Jain ,  Johnatan Avraham Kantarovsky ,  Mark David Levy ,  Ephrem Gebreselasie ,  Yves Ngu ,  Siva P. Adusumilli

IPC: H01L29/778 ,  H01L29/40 ,  H01L29/43 ,  H01L29/49 ,  H01L29/66

Abstract: The present disclosure relates generally to structures in semiconductor devices and methods of forming the same. More particularly, the present disclosure relates to high electron mobility transistor (HEMT) devices having a silicided polysilicon layer. The present disclosure may provide an active region above a substrate, source and drain electrodes in contact with the active region, a gate above the active region, the gate being laterally between the source and drain electrodes, a polysilicon layer above the substrate, and a silicide layer on the polysilicon layer. The active region includes at least two material layers with different band gaps. The polysilicon layer may be configured as an electronic fuse, a resistor, or a diode.

公开(公告)号：US11923446B2

公开(公告)日：2024-03-05

申请号：US17503345

申请日：2021-10-17

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Vibhor Jain ,  Johnatan Avraham Kantarovsky ,  Mark David Levy ,  Ephrem Gebreselasie ,  Yves Ngu ,  Siva P. Adusumilli

IPC: H01L29/778 ,  H01L29/40 ,  H01L29/66 ,  H01L29/49 ,  H01L29/43

CPC classification number: H01L29/7781 ,  H01L29/407 ,  H01L29/435 ,  H01L29/4916 ,  H01L29/4983 ,  H01L29/66431

Abstract: The present disclosure relates generally to structures in semiconductor devices and methods of forming the same. More particularly, the present disclosure relates to high electron mobility transistor (HEMT) devices having a silicided polysilicon layer. The present disclosure may provide an active region above a substrate, source and drain electrodes in contact with the active region, a gate above the active region, the gate being laterally between the source and drain electrodes, a polysilicon layer above the substrate, and a silicide layer on the polysilicon layer. The active region includes at least two material layers with different band gaps. The polysilicon layer may be configured as an electronic fuse, a resistor, or a diode.

公开(公告)号：US11842940B2

公开(公告)日：2023-12-12

申请号：US17156634

申请日：2021-01-25

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Ramsey Hazbun ,  Siva P. Adusumilli ,  Mark David Levy ,  Alvin Joseph

IPC: H01L23/367 ,  H01L21/48

CPC classification number: H01L23/367 ,  H01L21/4882

Abstract: A semiconductor structure is provided. The semiconductor structure comprises a heat generating device arranged over a substrate. An interlayer dielectric (ILD) material may be arranged over the heat generating device and the substrate. A metallization layer may be arranged over the interlayer dielectric material. A thermal shunt structure may be arranged proximal the heat generating device, whereby an upper portion of the thermal shunt structure may be arranged in the interlayer dielectric material and may be lower than the metallization layer, and a lower portion of the thermal shunt structure may be arranged in the substrate.