Sensor element, in particular a planar gas sensor element
    3.
    发明申请
    Sensor element, in particular a planar gas sensor element 审中-公开
    传感器元件,特别是平面气体传感器元件

    公开(公告)号:US20050160793A1

    公开(公告)日:2005-07-28

    申请号:US10504942

    申请日:2002-12-03

    摘要: A sensor element, in particular a planar gas sensor element, having a sensor structure is described, which is heatable by a heater structure. A first spacer layer is provided between the heater structure and the sensor structure, the spacer layer having a first recess in the area of the heater structure into which a first inlay, which electrically insulates the heater structure from the sensor structure, is inserted.

    摘要翻译: 描述了具有传感器结构的传感器元件,特别是平面气体传感器元件,其可通过加热器结构加热。 第一间隔层设置在加热器结构和传感器结构之间,间隔层在加热器结构的区域中具有第一凹槽,第一嵌体将加热器结构与传感器结构电绝缘。