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公开(公告)号:US06529531B1
公开(公告)日:2003-03-04
申请号:US09597812
申请日:2000-06-19
申请人: George J. Everage , Igor V. Fomenkov , Palash P. Das , Richard L. Sandstrom , Frederick G. Erie , John M. Algots
发明人: George J. Everage , Igor V. Fomenkov , Palash P. Das , Richard L. Sandstrom , Frederick G. Erie , John M. Algots
IPC分类号: H01S310
CPC分类号: G03F7/70333 , G03F7/70575 , G03F7/70933 , H01S3/036 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/13 , H01S3/134 , H01S3/139 , H01S3/225
摘要: Electric discharge laser with fast chirp correction. Fast wavelength chirp correction equipment includes at least one piezoelectric drive and a fast wavelength detection means and has a feedback response time of less than 1.0 millisecond. In a preferred embodiment a simple learning algorithm is described to allow advance tuning mirror adjustment in anticipation of the learned chirp pattern. Techniques include a combination of a relatively slow stepper motor and a very fast piezoelectric driver. In another preferred embodiment chirp correction is made on a pulse-to-pulse basis where the wavelength of one pulse is measured and the wavelength of the next pulse is corrected based on the measurement. This correction technique is able to function at repetition rates as rapid as 2000 Hz and greater.
摘要翻译: 具有快速啁啾校正的放电激光器。 快速波长啁啾校正装置包括至少一个压电驱动器和快速波长检测装置,并具有小于1.0毫秒的反馈响应时间。 在优选实施例中,描述了一种简单的学习算法,以便在预期学习的啁啾模式中允许预调谐镜调节。 技术包括相对较慢的步进电机和非常快的压电驱动器的组合。 在另一个优选实施例中,在脉冲对脉冲基础上进行啁啾校正,其中测量一个脉冲的波长,并且基于测量校正下一个脉冲的波长。 该校正技术能够以2000Hz及更高的重复速率工作。
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公开(公告)号:US06621846B1
公开(公告)日:2003-09-16
申请号:US09501160
申请日:2000-02-09
申请人: Richard L. Sandstrom , Palash P. Das , George J. Everage , Frederick G. Erie , William N. Partlo , Igor V. Fomenkov
发明人: Richard L. Sandstrom , Palash P. Das , George J. Everage , Frederick G. Erie , William N. Partlo , Igor V. Fomenkov
IPC分类号: H01S322
CPC分类号: H01S3/104 , G03F7/70025 , G03F7/70333 , G03F7/70575 , G03F7/708 , H01S3/036 , H01S3/038 , H01S3/0381 , H01S3/0382 , H01S3/105 , H01S3/1055 , H01S3/13 , H01S3/134 , H01S3/225
摘要: Electric discharge laser with active chirp correction. This application discloses techniques for moderating and dispensing these pressure waves. In some lasers small predictable patterns remain which can be substantially corrected with active wavelength control using relatively slow wavelength control instruments of the prior art. In a preferred embodiment a simple learning algorithm is described to allow advance tuning mirror adjustment in anticipation of the learned chirp pattern. Embodiments include stepper motors having very fine adjustments so that size of tuning steps are substantially reduced for more precise tuning. However, complete elimination of wavelength chirp is normally not feasible with structural changes in the laser chamber and advance tuning; therefore, Applicants have developed equipment and techniques for very fast active chirp correction. Improved techniques include a combination of a relatively slow stepper motor and a very fast piezoelectric driver. In another preferred embodiment chirp correction is made on a pulse-to-pulse basis where the wavelength of one pulse is measured and the wavelength of the next pulse is corrected based on the measurement. This correction technique is able to function at repetition rates as rapid as 2000 Hz and greater.
摘要翻译: 具有主动啁啾校正的放电激光器。 本申请公开了用于调节和分配这些压力波的技术。 在一些激光器中,可以使用现有技术的相对较慢的波长控制装置的主动波长控制基本上校正了小的可预测的图案。 在优选实施例中,描述了一种简单的学习算法,以便在预期学习的啁啾模式中允许预调谐镜调节。 实施例包括具有非常精细调节的步进电动机,使得调节步骤的尺寸被显着减小以便更精确的调谐。 然而,完全消除波长啁啾通常不可行,在激光室的结构变化和提前调谐; 因此,申请人已经开发了用于非常快的主动啁啾校正的设备和技术。 改进的技术包括相对较慢的步进电机和非常快的压电驱动器的组合。 在另一个优选实施例中,在脉冲对脉冲基础上进行啁啾校正,其中测量一个脉冲的波长,并且基于测量校正下一个脉冲的波长。 该校正技术能够以2000Hz及更高的重复速率工作。
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公开(公告)号:US06721340B1
公开(公告)日:2004-04-13
申请号:US09608543
申请日:2000-06-30
申请人: Igor V. Fomenkov , Armen Kroyan , Jesse D. Buck , Palash P. Das , Richard L. Sandstrom , Frederick G. Erie , John M. Algots , Gamaralalage G. Padmabandu
发明人: Igor V. Fomenkov , Armen Kroyan , Jesse D. Buck , Palash P. Das , Richard L. Sandstrom , Frederick G. Erie , John M. Algots , Gamaralalage G. Padmabandu
IPC分类号: H01S310
CPC分类号: G03F7/70575 , G03F7/70025 , G03F7/70041 , G03F7/70333 , G03F7/70933 , H01S3/036 , H01S3/0385 , H01S3/0404 , H01S3/041 , H01S3/097 , H01S3/0975 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/13 , H01S3/134 , H01S3/22 , H01S3/2207 , H01S3/225
摘要: A technique for bandwidth control of an electric discharge laser. Line narrowing equipment is provided having at least one piezoelectric drive and a fast bandwidth detection means and a bandwidth control having a time response of less than about 1.0 millisecond. In a preferred embodiment wavelength tuning mirror is dithered at dither rates of more than 500 dithers per second within a very narrow range of pivot angles to cause a dither in nominal wavelength values to produce a desired effective bandwidth of series of laser pulses.
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公开(公告)号:US6078599A
公开(公告)日:2000-06-20
申请号:US898630
申请日:1997-07-22
CPC分类号: G03F7/70575 , G03F7/70333 , H01S3/13 , H01S3/225
摘要: A wavelength shift correction system for a laser system is provided for correcting wavelength chirps. This wavelength shift correction system includes a learning algorithm that learns characteristics of a wavelength chirp from a laser and a computer system that executes the learning algorithm and provides wavelength correction control signals based on the learned characteristics to reduce the magnitude of the wavelength shift of the present wavelength chirp and subsequent wavelength chirps.
摘要翻译: 提供用于激光系统的波长偏移校正系统用于校正波长线性调频脉冲。 该波长偏移校正系统包括学习算法,其学习来自激光器的波长啁啾特性和执行学习算法的计算机系统,并且基于所学习的特征提供波长校正控制信号,以减小本发明的波长偏移的幅度 波长啁啾和随后的波长啁啾。
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公开(公告)号:US06192064B1
公开(公告)日:2001-02-20
申请号:US09470724
申请日:1999-12-22
申请人: John M. Algots , Christopher A. Marchi , Frederick G. Erie , Jesse D. Buck , Alexander I. Ershov , Palash P. Das , Igor V. Fomenkov
发明人: John M. Algots , Christopher A. Marchi , Frederick G. Erie , Jesse D. Buck , Alexander I. Ershov , Palash P. Das , Igor V. Fomenkov
IPC分类号: H01S308
CPC分类号: G03F7/70025 , G02B5/1828 , G03F7/70483 , G03F7/70575 , H01S3/02 , H01S3/03 , H01S3/08009 , H01S3/08059 , H01S3/08081 , H01S3/0812 , H01S3/086 , H01S3/10 , H01S3/105 , H01S3/1055 , H01S3/13 , H01S3/134 , H01S3/1392 , H01S3/225 , H01S3/2256
摘要: A smart laser having automatic computer control of pulse energy, wavelength and bandwidth using feedback signals from a wavemeter. Pulse energy is controlled by controlling discharge voltage. Wavelength is controlled by very fine and rapid positioning of an RMAX mirror in a line narrowing module. Bandwidth is controller by adjusting the curvature of a grating in the line narrowing module. Preferred embodiments include automatic feedback control of horizontal and vertical beam profile by automatic adjustment of a prism plate on which beam expander prisms are located and automatic adjustment of the RMAX tilt. Other preferred embodiments include automatic adjustment of the horizontal position of the laser chamber within the resonance cavity. In preferred embodiments, feedback signals from a wavelength monitor are used to position the RMAX mirror. In other preferred embodiments a separate laser beam reflected off the RMAX mirror on to a photodiode array is used to position the mirror.
摘要翻译: 智能激光器具有使用来自波形计的反馈信号自动计算脉冲能量,波长和带宽的计算机控制。 通过控制放电电压来控制脉冲能量。 通过在线窄模块中的RMAX镜子的非常精细和快速的定位来控制波长。 带宽是通过调整线窄化模块中的光栅的曲率来控制的。 优选实施例包括通过自动调节光束扩展器棱镜所在的棱镜板和自动调整RMAX倾斜来自动反馈水平和垂直光束轮廓。 其它优选实施例包括在谐振腔内自动调整激光室的水平位置。 在优选实施例中,使用来自波长监视器的反馈信号来定位RMAX镜。 在其它优选实施例中,使用从RMAX镜反射到光电二极管阵列上的分离的激光束来定位反射镜。
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公开(公告)号:US07139301B2
公开(公告)日:2006-11-21
申请号:US10701280
申请日:2003-11-03
申请人: Armen Kroyan , Ivan Lalovic , Igor V. Fomenkov , Palash P. Das , Richard L. Sandstrom , John M. Algots , Khurshid Ahmed
发明人: Armen Kroyan , Ivan Lalovic , Igor V. Fomenkov , Palash P. Das , Richard L. Sandstrom , John M. Algots , Khurshid Ahmed
IPC分类号: H01S3/22
CPC分类号: G03F7/70025 , G03F7/70041 , G03F7/70333 , G03F7/70575 , G03F7/70933 , H01S3/02 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0404 , H01S3/041 , H01S3/08009 , H01S3/08036 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/1024 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/13 , H01S3/1305 , H01S3/134 , H01S3/139 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258 , H01S3/2308
摘要: An integrated circuit lithography technique called spectral engineering by Applicants, for bandwidth control of an electric discharge laser. In a preferred process, a computer model is used to model lithographic parameters to determine a desired laser spectrum needed to produce a desired lithographic result. A fast responding tuning mechanism is then used to adjust center wavelength of laser pulses in a burst of pulses to achieve an integrated spectrum for the burst of pulses approximating the desired laser spectrum. The laser beam bandwidth is controlled to produce an effective beam spectrum having at least two spectral peaks in order to produce improved pattern resolution in photo resist film. Line narrowing equipment is provided having at least one piezoelectric drive and a fast bandwidth detection control system having a time response of less than about 2.0 millisecond. In a preferred embodiment, a wavelength tuning mirror is dithered at dither rates of more than 500 dithers per second in phase with the repetition rate of the laser. In one case, the piezoelectric drive was driven with a square wave signal and in a second case it was driven with a sine wave signal. In another embodiment, the maximum displacement was matched on a one-to-one basis with the laser pulses in order to produce a desired average spectrum with two peaks for a series of laser pulses. Other preferred embodiments utilize three separate wavelength tuning positions producing a spectrum with three separate peaks.
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公开(公告)号:US07079556B2
公开(公告)日:2006-07-18
申请号:US10670406
申请日:2003-09-24
申请人: Igor V. Fomenkov , Armen Kroyan , Jesse D. Buck , Palash P. Das , Richard L. Sandstrom , Frederick G. Erie , John Martin Algots , Gamaralalage G. Padmabandu
发明人: Igor V. Fomenkov , Armen Kroyan , Jesse D. Buck , Palash P. Das , Richard L. Sandstrom , Frederick G. Erie , John Martin Algots , Gamaralalage G. Padmabandu
CPC分类号: G03F7/70575 , G03F7/70025 , G03F7/70041 , G03F7/70333 , G03F7/70933 , H01S3/036 , H01S3/0385 , H01S3/0404 , H01S3/041 , H01S3/097 , H01S3/0975 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/13 , H01S3/134 , H01S3/22 , H01S3/2207 , H01S3/225
摘要: A technique for bandwidth control of an electric discharge laser. Line narrowing equipment is provided having at least one piezoelectric drive and a fast bandwidth detection means and a bandwidth control having a time response of less than about 1.0 millisecond. In a preferred embodiment wavelength tuning mirror is dithered at dither rates of more than 500 dithers per second within a very narrow range of pivot angles to cause a dither in nominal wavelength values to produce a desired effective bandwidth of series of laser pulses.
摘要翻译: 一种用于放电激光器带宽控制的技术。 提供线窄设备具有至少一个压电驱动器和快速带宽检测装置以及具有小于约1.0毫秒的时间响应的带宽控制。 在优选实施例中,波长调谐镜在非常窄的转角范围内以每秒超过500次抖动的抖动速率抖动,以使标称波长值的抖动产生期望的一系列激光脉冲的有效带宽。
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公开(公告)号:US06671294B2
公开(公告)日:2003-12-30
申请号:US09918773
申请日:2001-07-27
申请人: Armen Kroyan , Ivan Lalovic , Igor V. Fomenkov , Palash P. Das , Richard L. Sandstrom , John M. Algots , Khurshid Ahmed
发明人: Armen Kroyan , Ivan Lalovic , Igor V. Fomenkov , Palash P. Das , Richard L. Sandstrom , John M. Algots , Khurshid Ahmed
IPC分类号: H01S310
CPC分类号: G03F7/70025 , G03F7/70041 , G03F7/70333 , G03F7/70575 , G03F7/70933 , H01S3/02 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0404 , H01S3/041 , H01S3/08009 , H01S3/08036 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/1024 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/13 , H01S3/1305 , H01S3/134 , H01S3/139 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258 , H01S3/2308
摘要: An integrated circuit lithography technique called spectral engineering by Applicants, for bandwidth control of an electric discharge laser. In a preferred process, a computer model is used to model lithographic parameters to determine a desired laser spectrum needed to produce a desired lithographic result. A fast responding tuning mechanism is then used to adjust center wavelength of laser pulses in a burst of pulses to achieve an integrated spectrum for the burst of pulses approximating the desired laser spectrum. The laser beam bandwidth is controlled to produce an effective beam spectrum having at least two spectral peaks in order to produce improved pattern resolution in photo resist film. Line narrowing equipment is provided having at least one piezoelectric drive and a fast bandwidth detection control system having a time response of less than about 2.0 millisecond. In a preferred embodiment, a wavelength tuning mirror is dithered at dither rates of more than 500 dithers per second in phase with the repetition rate of the laser. In one case, the piezoelectric drive was driven with a square wave signal and in a second case it was driven with a sine wave signal. In another embodiment, the maximum displacement was matched on a one-to-one basis with the laser pulses in order to produce a desired average spectrum with two peaks for a series of laser pulses. Other preferred embodiments utilize three separate wavelength tuning positions producing a spectrum with three separate peaks.
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公开(公告)号:US06532247B2
公开(公告)日:2003-03-11
申请号:US09794782
申请日:2001-02-27
申请人: Ronald L. Spangler , Robert N. Jacques , George J. Everage , Stuart L. Anderson , Frederick A. Palenschat , Igor V. Fomenkov , Richard L. Sandstrom , William N. Partlo , John M. Algots , Daniel J. W. Brown
发明人: Ronald L. Spangler , Robert N. Jacques , George J. Everage , Stuart L. Anderson , Frederick A. Palenschat , Igor V. Fomenkov , Richard L. Sandstrom , William N. Partlo , John M. Algots , Daniel J. W. Brown
IPC分类号: H01S322
CPC分类号: G03F7/70025 , G03F7/70041 , G03F7/70333 , G03F7/70575 , G03F7/70933 , H01S3/02 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0404 , H01S3/041 , H01S3/08036 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/1305 , H01S3/1312 , H01S3/134 , H01S3/137 , H01S3/22 , H01S3/2207 , H01S3/225
摘要: An electric discharge laser with fast wavelength correction. Fast wavelength correction equipment includes at least one piezoelectric drive and a fast wavelength measurement system and fast feedback response times. In a preferred embodiment, equipment is provided to control wavelength on a slow time frame of several milliseconds, on a intermediate time from of about one to three millisecond and on a very fast time frame of a few microseconds. Techniques include a combination of a relatively slow stepper motor and a very fast piezoelectric driver for tuning the laser wavelength using a tuning mirror. A preferred control technique is described (utilizing a very fast wavelength monitor) to provide the slow and intermediate wavelength control and a piezoelectric load cell in combination with the piezoelectric driver to provide the very fast (few microseconds) wavelength control.
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公开(公告)号:US06493374B1
公开(公告)日:2002-12-10
申请号:US09703317
申请日:2000-10-31
IPC分类号: H01S308
CPC分类号: H01S3/13 , G03F7/70025 , G03F7/70575 , H01S3/02 , H01S3/03 , H01S3/0401 , H01S3/08059 , H01S3/0812 , H01S3/086 , H01S3/1055 , H01S3/134 , H01S3/139 , H01S3/1392 , H01S3/225 , H01S3/2256
摘要: A smart laser having automatic computer control of pulse energy, wavelength and bandwidth using feedback signals from a wavemeter. Pulse energy is controlled by controlling discharge voltage, wavelength by controlling the position of an RMAX mirror and bandwidth is controller by adjusting the curvature of a grating to shapes more complicated than simple convex or simple concave. A preferred embodiment provides seven piezoelectric driven pressure-tension locations on the back side of the grating at 5 horizontal locations to produce shapes such as S shapes, W shapes and twisted shapes. Preferred embodiments include automatic feedback control of horizontal and vertical beam profile by automatic adjustment of a prism plate on which beam expander prisms are located and automatic adjustment of the RMAX tilt.
摘要翻译: 智能激光器具有使用来自波形计的反馈信号自动计算脉冲能量,波长和带宽的计算机控制。 通过控制RMAX镜的位置来控制放电电压,波长来控制脉冲能量,通过调整光栅的曲率使形状比简单的凸形或简单的凹形更复杂,带宽是控制器。 优选实施例在5个水平位置上在光栅背面提供七个压电驱动压力 - 张力位置,以产生诸如S形,W形和扭曲形状的形状。 优选实施例包括通过自动调节光束扩展器棱镜所在的棱镜板和自动调整RMAX倾斜来自动反馈水平和垂直光束轮廓。
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