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    Smart laser with fast deformable grating
    3.
    发明授权
    Smart laser with fast deformable grating 失效
    具有快速可变形光栅的智能激光

    公开(公告)号：US06493374B1

    公开(公告)日：2002-12-10

    申请号：US09703317

    申请日：2000-10-31

    申请人： Igor V. Fomenkov ,  Frederick G. Erie ,  Jesse D. Buck ,  Palash P. Das

    发明人： Igor V. Fomenkov ,  Frederick G. Erie ,  Jesse D. Buck ,  Palash P. Das

    IPC分类号： H01S308

    CPC分类号： H01S3/13 ,  G03F7/70025 ,  G03F7/70575 ,  H01S3/02 ,  H01S3/03 ,  H01S3/0401 ,  H01S3/08059 ,  H01S3/0812 ,  H01S3/086 ,  H01S3/1055 ,  H01S3/134 ,  H01S3/139 ,  H01S3/1392 ,  H01S3/225 ,  H01S3/2256

    摘要： A smart laser having automatic computer control of pulse energy, wavelength and bandwidth using feedback signals from a wavemeter. Pulse energy is controlled by controlling discharge voltage, wavelength by controlling the position of an RMAX mirror and bandwidth is controller by adjusting the curvature of a grating to shapes more complicated than simple convex or simple concave. A preferred embodiment provides seven piezoelectric driven pressure-tension locations on the back side of the grating at 5 horizontal locations to produce shapes such as S shapes, W shapes and twisted shapes. Preferred embodiments include automatic feedback control of horizontal and vertical beam profile by automatic adjustment of a prism plate on which beam expander prisms are located and automatic adjustment of the RMAX tilt.

    摘要翻译： 智能激光器具有使用来自波形计的反馈信号自动计算脉冲能量，波长和带宽的计算机控制。 通过控制RMAX镜的位置来控制放电电压，波长来控制脉冲能量，通过调整光栅的曲率使形状比简单的凸形或简单的凹形更复杂，带宽是控制器。 优选实施例在5个水平位置上在光栅背面提供七个压电驱动压力 - 张力位置，以产生诸如S形，W形和扭曲形状的形状。 优选实施例包括通过自动调节光束扩展器棱镜所在的棱镜板和自动调整RMAX倾斜来自动反馈水平和垂直光束轮廓。

    Narrow band laser with fine wavelength control
    4.
    发明授权
    Narrow band laser with fine wavelength control 有权
    窄带激光器，具有良好的波长控制

    公开(公告)号：US06192064B1

    公开(公告)日：2001-02-20

    申请号：US09470724

    申请日：1999-12-22

    申请人： John M. Algots ,  Christopher A. Marchi ,  Frederick G. Erie ,  Jesse D. Buck ,  Alexander I. Ershov ,  Palash P. Das ,  Igor V. Fomenkov

    发明人： John M. Algots ,  Christopher A. Marchi ,  Frederick G. Erie ,  Jesse D. Buck ,  Alexander I. Ershov ,  Palash P. Das ,  Igor V. Fomenkov

    IPC分类号： H01S308

    CPC分类号： G03F7/70025 ,  G02B5/1828 ,  G03F7/70483 ,  G03F7/70575 ,  H01S3/02 ,  H01S3/03 ,  H01S3/08009 ,  H01S3/08059 ,  H01S3/08081 ,  H01S3/0812 ,  H01S3/086 ,  H01S3/10 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/13 ,  H01S3/134 ,  H01S3/1392 ,  H01S3/225 ,  H01S3/2256

    摘要： A smart laser having automatic computer control of pulse energy, wavelength and bandwidth using feedback signals from a wavemeter. Pulse energy is controlled by controlling discharge voltage. Wavelength is controlled by very fine and rapid positioning of an RMAX mirror in a line narrowing module. Bandwidth is controller by adjusting the curvature of a grating in the line narrowing module. Preferred embodiments include automatic feedback control of horizontal and vertical beam profile by automatic adjustment of a prism plate on which beam expander prisms are located and automatic adjustment of the RMAX tilt. Other preferred embodiments include automatic adjustment of the horizontal position of the laser chamber within the resonance cavity. In preferred embodiments, feedback signals from a wavelength monitor are used to position the RMAX mirror. In other preferred embodiments a separate laser beam reflected off the RMAX mirror on to a photodiode array is used to position the mirror.

    摘要翻译： 智能激光器具有使用来自波形计的反馈信号自动计算脉冲能量，波长和带宽的计算机控制。 通过控制放电电压来控制脉冲能量。 通过在线窄模块中的RMAX镜子的非常精细和快速的定位来控制波长。 带宽是通过调整线窄化模块中的光栅的曲率来控制的。 优选实施例包括通过自动调节光束扩展器棱镜所在的棱镜板和自动调整RMAX倾斜来自动反馈水平和垂直光束轮廓。 其它优选实施例包括在谐振腔内自动调整激光室的水平位置。 在优选实施例中，使用来自波长监视器的反馈信号来定位RMAX镜。 在其它优选实施例中，使用从RMAX镜反射到光电二极管阵列上的分离的激光束来定位反射镜。

    Electric discharge laser with active wavelength chirp correction
    5.
    发明授权
    Electric discharge laser with active wavelength chirp correction 有权
    具有有源波长啁啾校正的放电激光器

    公开(公告)号：US06621846B1

    公开(公告)日：2003-09-16

    申请号：US09501160

    申请日：2000-02-09

    申请人： Richard L. Sandstrom ,  Palash P. Das ,  George J. Everage ,  Frederick G. Erie ,  William N. Partlo ,  Igor V. Fomenkov

    发明人： Richard L. Sandstrom ,  Palash P. Das ,  George J. Everage ,  Frederick G. Erie ,  William N. Partlo ,  Igor V. Fomenkov

    IPC分类号： H01S322

    CPC分类号： H01S3/104 ,  G03F7/70025 ,  G03F7/70333 ,  G03F7/70575 ,  G03F7/708 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0381 ,  H01S3/0382 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/13 ,  H01S3/134 ,  H01S3/225

    摘要： Electric discharge laser with active chirp correction. This application discloses techniques for moderating and dispensing these pressure waves. In some lasers small predictable patterns remain which can be substantially corrected with active wavelength control using relatively slow wavelength control instruments of the prior art. In a preferred embodiment a simple learning algorithm is described to allow advance tuning mirror adjustment in anticipation of the learned chirp pattern. Embodiments include stepper motors having very fine adjustments so that size of tuning steps are substantially reduced for more precise tuning. However, complete elimination of wavelength chirp is normally not feasible with structural changes in the laser chamber and advance tuning; therefore, Applicants have developed equipment and techniques for very fast active chirp correction. Improved techniques include a combination of a relatively slow stepper motor and a very fast piezoelectric driver. In another preferred embodiment chirp correction is made on a pulse-to-pulse basis where the wavelength of one pulse is measured and the wavelength of the next pulse is corrected based on the measurement. This correction technique is able to function at repetition rates as rapid as 2000 Hz and greater.

    摘要翻译： 具有主动啁啾校正的放电激光器。 本申请公开了用于调节和分配这些压力波的技术。 在一些激光器中，可以使用现有技术的相对较慢的波长控制装置的主动波长控制基本上校正了小的可预测的图案。 在优选实施例中，描述了一种简单的学习算法，以便在预期学习的啁啾模式中允许预调谐镜调节。 实施例包括具有非常精细调节的步进电动机，使得调节步骤的尺寸被显着减小以便更精确的调谐。 然而，完全消除波长啁啾通常不可行，在激光室的结构变化和提前调谐; 因此，申请人已经开发了用于非常快的主动啁啾校正的设备和技术。 改进的技术包括相对较慢的步进电机和非常快的压电驱动器的组合。 在另一个优选实施例中，在脉冲对脉冲基础上进行啁啾校正，其中测量一个脉冲的波长，并且基于测量校正下一个脉冲的波长。 该校正技术能够以2000Hz及更高​​的重复速率工作。

    Fast wavelength correction technique for a laser
    6.
    发明授权
    Fast wavelength correction technique for a laser 有权
    用于激光的快速波长校正技术

    公开(公告)号：US06529531B1

    公开(公告)日：2003-03-04

    申请号：US09597812

    申请日：2000-06-19

    申请人： George J. Everage ,  Igor V. Fomenkov ,  Palash P. Das ,  Richard L. Sandstrom ,  Frederick G. Erie ,  John M. Algots

    发明人： George J. Everage ,  Igor V. Fomenkov ,  Palash P. Das ,  Richard L. Sandstrom ,  Frederick G. Erie ,  John M. Algots

    IPC分类号： H01S310

    CPC分类号： G03F7/70333 ,  G03F7/70575 ,  G03F7/70933 ,  H01S3/036 ,  H01S3/104 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/13 ,  H01S3/134 ,  H01S3/139 ,  H01S3/225

    摘要： Electric discharge laser with fast chirp correction. Fast wavelength chirp correction equipment includes at least one piezoelectric drive and a fast wavelength detection means and has a feedback response time of less than 1.0 millisecond. In a preferred embodiment a simple learning algorithm is described to allow advance tuning mirror adjustment in anticipation of the learned chirp pattern. Techniques include a combination of a relatively slow stepper motor and a very fast piezoelectric driver. In another preferred embodiment chirp correction is made on a pulse-to-pulse basis where the wavelength of one pulse is measured and the wavelength of the next pulse is corrected based on the measurement. This correction technique is able to function at repetition rates as rapid as 2000 Hz and greater.

    摘要翻译： 具有快速啁啾校正的放电激光器。 快速波长啁啾校正装置包括至少一个压电驱动器和快速波长检测装置，并具有小于1.0毫秒的反馈响应时间。 在优选实施例中，描述了一种简单的学习算法，以便在预期学习的啁啾模式中允许预调谐镜调节。 技术包括相对较慢的步进电机和非常快的压电驱动器的组合。 在另一个优选实施例中，在脉冲对脉冲基础上进行啁啾校正，其中测量一个脉冲的波长，并且基于测量校正下一个脉冲的波长。 该校正技术能够以2000Hz及更高​​的重复速率工作。

    Laser having baffled enclosure
    9.
    发明授权
    Laser having baffled enclosure 失效
    激光具有挡板外壳

    公开(公告)号：US6021150A

    公开(公告)日：2000-02-01

    申请号：US41832

    申请日：1998-03-12

    申请人： William N. Partio ,  Donald G. Larson ,  Igor V. Fomenkov ,  Anthony J. de Ruyter ,  Palash P. Das

    发明人： William N. Partio ,  Donald G. Larson ,  Igor V. Fomenkov ,  Anthony J. de Ruyter ,  Palash P. Das

    IPC分类号： H01S3/03 ,  H01S3/036 ,  H01S3/04 ,  H01S3/041 ,  H01S3/225 ,  H01S3/22

    CPC分类号： H01S3/036 ,  H01S3/04 ,  H01S3/041 ,  F28D2021/0077 ,  H01S3/225

    摘要： Disclosed is a laser useful in, e.g., photolithography or medical surgery. In one embodiment, the laser comprises a discharge chamber and heat-generating electronics that are enclosed in a baffled enclosure that requires less cooling air to reliably cool the components in the enclosure than previous unbaffled enclosures. A method of reducing the amount of conditioned air is also provided. In a further embodiment, the laser has a heat-exchange system that acts quickly in response to changes in laser gas temperature by adjusting a flow-proportioning valve regulating water flow through a heat exchanger, thereby providing a continuously variable rate of heat exchange through the heat exchanger to maintain the lasing gas temperature constant. Methods of providing a laser beam and of improving the uniformity of a laser beam are disclosed, as are photolithography methods utilizing a laser and method of this invention.

    摘要翻译： 公开了一种可用于例如光刻或医疗手术中的激光。 在一个实施例中，激光器包括放电室和发热电子器件，其封闭在挡板外壳中，其需要较少的冷却空气以可靠地冷却外壳中的部件比先前的未封闭的外壳。 还提供了减少调节空气量的方法。 在另一个实施例中，激光器具有热交换系统，其响应于激光气体温度的变化而快速作用，通过调节调节通过热交换器的水流的流量比例阀，由此通过所述热交换系统提供连续可变的热交换速率 热交换器保持激光温度恒定。 公开了提供激光束并提高激光束的均匀性的方法，以及利用激光的光刻方法和本发明的方法。