Process for manufacturing a field-emission device
    1.
    发明授权
    Process for manufacturing a field-emission device 失效
    制造场致发射装置的方法

    公开(公告)号:US5727977A

    公开(公告)日:1998-03-17

    申请号:US608023

    申请日:1996-03-04

    IPC分类号: H01J9/02

    CPC分类号: H01J9/025 B82Y10/00 B82Y30/00

    摘要: A process for manufacturing of a field emission device (100, 200) including the steps of i) providing a substrate (101, 201), ii) forming a conductive row (106, 206), ii) forming a dielectric layer (102, 202), iv) forming a resist layer (116, 216), v) forming a self-assembled monolayer (112, 212) of a self-assembled monolayer-forming molecular species on the resist layer (116, 216) so that the self-assembled monolayer (112, 212) defines an etch pattern for an emitter well (107, 207), vi) etching the resist layer (116, 216), vii) etching the dielectric layer ((102, 202), viii) forming conductive column (103, 203), and ix) forming the electron-emitter structure (105, 208) within the emitter well (107, 207).

    摘要翻译: 一种用于制造场致发射器件(100,200)的方法,包括以下步骤:i)提供衬底(101,201),ii)形成导电行(106,206),ii)形成介电层(102, 202),iv)形成抗蚀剂层(116,216),v)在抗蚀剂层(116,216)上形成自组装单层形成分子物质的自组装单层(112,212),使得 自组装单层(112,212)限定了用于发射极阱(107,207)的蚀刻图案,vi)蚀刻抗蚀剂层(116,216),vii)蚀刻介电层((102,202)),viii) 形成导电柱(103,203),以及ix)在发射阱(107,207)内形成电子 - 发射结构(105,208)。

    Apparatus and method for stamping a surface
    2.
    发明授权
    Apparatus and method for stamping a surface 失效
    用于冲压表面的装置和方法

    公开(公告)号:US5669303A

    公开(公告)日:1997-09-23

    申请号:US610776

    申请日:1996-03-04

    摘要: An apparatus (100) including a support structure (104), a flexible stamp (106) having a stamping surface (110) including a predetermined pattern disposed opposite the support structure (104), a pressure controlled chamber (112) disposed above the support structure (104), and a mechanical attachment (114) affixed to the flexible stamp (106). A method is provided for stamping the surface (101) of an article (102) including the steps of i) placing the article (102) on the support structure (104) within the pressure-controlled chamber (112), ii) wetting the stamping surface (110) with a solution containing a self-assembled monolayer-forming molecular species, iii) aligning alignment patterns (118) on the flexible stamp (106) with alignment patterns (124) on the surface (101) of the article (102), iv) controllably contacting the wetted stamping surface (110) with the surface (101) of the article (102) by changing the pressure differential across the flexible stamp (106) so that contact commences at the center of the flexible stamp (106) and proceeds outwardly in a controlled manner, and v) removing the stamping surface (110) from the surface (101) of the article so that a self-assembled monolayer (134) having the predetermined pattern is formed on the surface (101) of the article (102).

    摘要翻译: 一种包括支撑结构(104)的装置(100),具有包括与所述支撑结构(104)相对设置的预定图案的冲压表面的柔性印模(106),设置在所述支撑结构(104)上方的压力控制室 结构(104)和固定到柔性印模(106)上的机械附件(114)。 提供了一种用于冲压制品(102)的表面(101)的方法,包括以下步骤:i)将制品(102)放置在压力控制室(112)内的支撑结构(104)上,ii)润湿 用包含自组装单层形成分子种类的溶液冲压表面(110),iii)将柔性印模(106)上的对准图案(118)与制品的表面(101)上的对准图案(124)对准( 102),iv)通过改变柔性印章(106)上的压差来可控地将湿润的冲压表面(110)与制品(102)的表面(101)接触,使得在柔性印模的中心开始接触 106),并且以受控的方式向外移动,以及v)从制品的表面(101)移除冲压表面(110),使得在表面(101)上形成具有预定图案的自组装单层(134) )的物品(102)。

    Spacer for a field emission display
    4.
    发明授权
    Spacer for a field emission display 失效
    用于场发射显示的间隔物

    公开(公告)号:US5726529A

    公开(公告)日:1998-03-10

    申请号:US656993

    申请日:1996-05-28

    摘要: A spacer (200) for a field emission display (201) is disclosed. The spacer (200) includes a lower resistive region (220) and an upper insulative region (222). The spacer (200) has a member (210) which is coated with a resistive coating (212) extending between the lower end of the member and a height (h.sub.2) less than the total height (h.sub.1) of the spacer (200). An insulative coating (218) is formed on the member (210) and extends between the upper end of the resistive coating (212) and the upper end of the member (210). The resistive coating (212) has a secondary electron yield less than 2 over the lower resistive region (220) of the spacer (200). The insulative coating (218) has a secondary electron yield between 0.75-2 over the upper insulative region (222) of the spacer (200).

    摘要翻译: 公开了一种用于场发射显示器(201)的间隔物(200)。 间隔物(200)包括下电阻区(220)和上绝缘区(222)。 间隔件(200)具有构件(210),其被涂覆有在构件的下端之间延伸的电阻涂层(212)和小于间隔件(200)的总高度(h1)的高度(h2)。 绝缘涂层(218)形成在构件(210)上并且在电阻涂层(212)的上端和构件(210)的上端之间延伸。 电阻涂层(212)在间隔物(200)的下电阻区域(220)上具有小于2的二次电子产率。 绝缘涂层(218)在间隔物(200)的上绝缘区域(222)之间具有0.75-2之间的二次电子产率。