Implementing Semiconductor Signal-Capable Capacitors with Deep Trench and TSV Technologies
    2.
    发明申请
    Implementing Semiconductor Signal-Capable Capacitors with Deep Trench and TSV Technologies 失效
    采用深沟槽和TSV技术实现半导体信号电容

    公开(公告)号:US20130277798A1

    公开(公告)日:2013-10-24

    申请号:US13449480

    申请日:2012-04-18

    IPC分类号: H01L29/02 H01L21/02

    CPC分类号: H01L29/945 H01L29/66181

    摘要: A method and structures are provided for implementing semiconductor signal-capable capacitors with deep trench and Through-Silicon-Via (TSV) technologies. A deep trench N-well structure is formed and an implant is provided in the deep trench N-well structure with a TSV formed in a semiconductor chip. At least one angled implant is created around the TSV in a semiconductor chip. The TSV is surrounded with a dielectric layer and filled with a conducting material which forms one electrode of the capacitor. A connection is made to one implant forming a second electrode to the capacitor.

    摘要翻译: 提供了一种用于实现具有深沟槽和透硅(Via-Silicon-Via,TSV)技术的具有半导体信号能力的电容器的方法和结构。 形成深沟槽N阱结构,并且在深沟槽N阱结构中提供植入物,其中TSV形成在半导体芯片中。 在半导体芯片中的TSV周围形成至少一个成角度的植入物。 TSV被介电层包围并填充有形成电容器的一个电极的导电材料。 连接到形成到电容器的第二电极的一个注入件。

    Implementing semiconductor signal-capable capacitors with deep trench and TSV technologies
    9.
    发明授权
    Implementing semiconductor signal-capable capacitors with deep trench and TSV technologies 失效
    实现具有深沟槽和TSV技术的半导体信号电容器

    公开(公告)号:US08642456B2

    公开(公告)日:2014-02-04

    申请号:US13449480

    申请日:2012-04-18

    IPC分类号: H01L21/425

    CPC分类号: H01L29/945 H01L29/66181

    摘要: A method and structures are provided for implementing semiconductor signal-capable capacitors with deep trench and Through-Silicon-Via (TSV) technologies. A deep trench N-well structure is formed and an implant is provided in the deep trench N-well structure with a TSV formed in a semiconductor chip. At least one angled implant is created around the TSV in a semiconductor chip. The TSV is surrounded with a dielectric layer and filled with a conducting material which forms one electrode of the capacitor. A connection is made to one implant forming a second electrode to the capacitor.

    摘要翻译: 提供了一种用于实现具有深沟槽和透硅(Via-Silicon-Via,TSV)技术的具有半导体信号能力的电容器的方法和结构。 形成深沟槽N阱结构,并且在深沟槽N阱结构中提供植入物,其中TSV形成在半导体芯片中。 在半导体芯片中的TSV周围形成至少一个成角度的植入物。 TSV被介电层包围并填充有形成电容器的一个电极的导电材料。 连接到形成到电容器的第二电极的一个注入件。