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1.Scanning ion microscope with magnetic sector lens to purify the primary ion beam 失效
Title translation: 扫描离子显微镜用磁性镜片净化主光束公开(公告)号:US3517191A
公开(公告)日:1970-06-23
申请号:US3517191D
申请日:1965-10-11
Applicant: HELMUT J LIEBL
Inventor: LIEBL HELMUT J
IPC: G01Q10/00 , G01Q30/06 , H01J29/58 , H01J37/05 , H01J37/252 , H01J37/256 , H01J49/02 , H01J49/14 , H01J49/20 , H01J49/28 , H01J49/30 , H01J49/32 , G01N23/22 , H01J37/08 , H01J37/28
CPC classification number: H01J49/30 , H01J29/58 , H01J37/05 , H01J37/252 , H01J37/256 , H01J49/022 , H01J49/142 , H01J49/20 , H01J49/286 , H01J49/32 , H01J49/322