公开(公告)号：US5874929A

公开(公告)日：1999-02-23

申请号：US425123

申请日：1995-04-19

申请人： Hans Opower ,  Uwe Becker ,  Uwe Brauch

发明人： Hans Opower ,  Uwe Becker ,  Uwe Brauch

IPC分类号： G09F9/00 ,  B41J2/47 ,  G02F1/35 ,  G02F1/377 ,  G03F7/20 ,  H01S5/183 ,  H01S5/40 ,  H04N9/31 ,  G09G3/00 ,  H04N5/64

CPC分类号： G03F7/70391 ,  B41J2/473 ,  H04N9/3129 ,  G02F1/377 ,  G02F2001/3548 ,  H01S5/18305 ,  H01S5/4012

摘要： An image is produced in an image plane using a row of semiconductor laser emitters which provide a corresponding row of outlet spots as light sources. An optical projection system receives radiation from the outlet spots and the radiation on the image plane as one or more rows of images by virtue of the illumination of individual, adjacently located imaging spots. The optical projection system associates at least one outlet spot with each of the imaging spots, and simultaneously forms the image of the outlet spots of all of the semiconductor laser emitters of the row of light sources at the imaging spots associated therewith.

摘要翻译： 使用提供相应排出点作为光源的半导体激光发射器行在图像平面中产生图像。 光学投影系统通过单独的相邻位置的成像点的照射，从出射点和图像平面上的辐射接收作为一行或多行图像的辐射。 光学投影系统将至少一个出射点与每个成像点相关联，同时在与其相关联的成像点处形成该行光源的所有半导体激光发射器的出射点的图像。

公开(公告)号：US5818546A

公开(公告)日：1998-10-06

申请号：US512056

申请日：1995-08-07

申请人： Hans Opower ,  Uwe Becker ,  Uwe Brauch

发明人： Hans Opower ,  Uwe Becker ,  Uwe Brauch

IPC分类号： G02B26/10 ,  G09F9/00 ,  H01L33/00 ,  H04N5/225 ,  H04N9/31 ,  G02F1/00 ,  H04N3/08

CPC分类号： H04N9/3129

摘要： In order to improve an apparatus for generating an image in an image plane that is visible, in particular, for a human eye, comprising a radiation source which generates an image via an optical projection means by building up at least one row of image spots during an image build-up cycle by illuminating individual, adjacently located image spots and periodically repeating the image build-up cycle, so that it is possible to generate images as simply and, therefore, also as inexpensively as possible, it is suggested that a row of light sources comprising a plurality of semiconductor emitters be provided for the illumination of the image spots of the row of image spots, that the optical projection means associate each exit spot for the radiation of each semiconductor emitter with at least one of the image spots and that the optical projection means simultaneously image the exit spots of all the semiconductor emitters of the row of light sources onto the image spots associated therewith.

摘要翻译： 为了改善用于在图像平面中产生图像的装置，特别是人眼可见的装置，其包括通过光学投影装置通过在至少一行图像点处建立至少一行图像点而产生图像的辐射源 通过照亮单独的相邻位置的图像斑点并周期性地重复图像建立周期，从而可以简单地生成图像，并且因此也可以尽可能廉价地生成图像，从而建立一行 提供包括多个半导体发射器的光源用于照射该行像点的图像点，光学投影装置将每个半导体发射器的辐射的每个出射点与图像斑点和 光学投影装置同时将该行光源的所有半导体发射器的出射点成像到与其相关联的图像点上。

公开(公告)号：US6157755A

公开(公告)日：2000-12-05

申请号：US42597

申请日：1998-03-16

申请人： Uwe Brauch ,  Hans Opower ,  Adolf Giesen

发明人： Uwe Brauch ,  Hans Opower ,  Adolf Giesen

IPC分类号： G02B6/42 ,  H01S5/40 ,  G02B6/26

CPC分类号： G02B6/4249 ,  H01S5/4025 ,  H01S5/4006 ,  H01S5/4012 ,  H01S5/4062

摘要： In order to improve a laser system comprising a fiber bundle consisting of single mode fibers which form with a first end a fiber bundle end, at which a total radiation field, which can be imaged onto a target surface, is formed from laser radiation exiting from the first ends of the fibers, and which are coupled with a second end to a subsystem generating the laser radiation with at least one semiconductor laser, such that this also operates efficiently with semiconductor lasers or semiconductor laser amplifiers and can be realized in an inexpensive manner it is suggested that the subsystem comprise a plurality of semiconductor laser units operating parallel, that all the semiconductor laser units of the subsystem operate with the same wavelength in a phase-balanced manner relative to one another as a result of master laser radiation coupled into them and that individual laser radiation exiting from the individual semiconductor laser units of the respective subsystem be combined by means of a coupling device of the respective subsystem to form a coherent laser radiation field which can be coupled into one of the single mode fibers.

摘要翻译： 为了改进包括由单模光纤组成的光纤束的激光系统，该光纤束与第一端形成纤维束端，在该光纤束端可以从激光辐射出射可以成像到目标表面上的总辐射场 纤维的第一端，并且与第二端耦合到产生具有至少一个半导体激光器的激光辐射的子系统，使得其也可以用半导体激光器或半导体激光放大器有效地工作，并且可以以便宜的方式实现 建议子系统包括多个平行操作的半导体激光器单元，子系统的所有半导体激光器单元以彼此相位的相位波形相互作用，作为耦合到其中的主激光辐射的结果 并且从各个子系统的各个半导体激光器单元射出的各个激光辐射由我组合 以便形成相关的激光辐射场，所述相干激光辐射场可耦合到单模光纤之一中。

公开(公告)号：US6002466A

公开(公告)日：1999-12-14

申请号：US48374

申请日：1998-03-26

申请人： Uwe Brauch ,  Hans Opower ,  Bernd Hoefflinger ,  Reinhard Springer

发明人： Uwe Brauch ,  Hans Opower ,  Bernd Hoefflinger ,  Reinhard Springer

IPC分类号： G03F7/20 ,  H01L21/027 ,  G03B27/42

CPC分类号： G03F7/7005 ,  G03F7/70383 ,  G03F7/704

摘要： A lithography exposure device allows more effective production of small structures within a short time by lithography. The device includes a retainer for a substrate, an exposure unit for producing a light spot on the light-sensitive layer of the substrate, a motion unit for producing apparent motion between the exposure unit and the retainer, and a control unit for controlling the intensity and position of the light spot on the light-sensitive layer. The exposure unit has several solid-state lasers, and a focusing unit that guides the laser beam of each solid-state laser to a light spot of a defined light spot pattern. The entire light spot pattern and the retainer are displaceable relative to each other in an exposure motional direction. Moreover, the light spots of the light spot pattern which correspond to the form of the partial areas to be exposed can be activated or deactivated.

摘要翻译： 光刻曝光装置允许通过光刻在短时间内更有效地生产小结构。 该装置包括用于基板的保持器，用于在基板的感光层上产生光点的曝光单元，用于在曝光单元和保持器之间产生视在运动的运动单元，以及用于控制强度的控制单元 光点在感光层上的位置。 曝光单元具有多个固态激光器，以及聚焦单元，其将每个固态激光器的激光束引导到限定的光点图案的光点。 整个光点图案和保持器在曝光运动方向上可相对于彼此移动。 此外，可以激活或去激活对应于要暴露的部分区域的形式的光点图案的光点。

公开(公告)号：US5862278A

公开(公告)日：1999-01-19

申请号：US784110

申请日：1997-01-15

申请人： Uwe Brauch ,  Helmut Huegel ,  Hans Opower ,  Adolf Giesen

发明人： Uwe Brauch ,  Helmut Huegel ,  Hans Opower ,  Adolf Giesen

IPC分类号： B23K26/06 ,  G02B6/28 ,  G02B6/32 ,  G02B6/42 ,  H01S5/40

CPC分类号： B23K26/0613 ,  B23K26/0604 ,  G02B6/2848 ,  G02B6/32 ,  G02B6/4249 ,  H01S5/4012 ,  H01S5/4025

摘要： In order to improve a laser system comprising several laser radiation sources, each of which generates laser radiation which is coupled into a first end of a respective optical single-mode fiber, wherein all optical single-mode fibers form a fiber bundle and have second ends lying at a fiber bundle end, the laser radiation exiting from the second ends and thereby forming a total laser radiation field, and further comprising an optical transformation means which transforms the total laser radiation field onto an object, such that a focal point with a highest possible power per area and per solid angle can be generated therewith, it is proposed that the optical transformation means comprise a collimating element which collimates the laser radiation exiting divergently from each individual second end of the single-mode fibers and forms a collimated radiation bundle therefrom, and that the optical transformation means comprise a focusing element which images the collimated radiation bundle as a whole onto a focal point.

摘要翻译： 为了改进包括几个激光辐射源的激光系统，每个激光辐射源产生激光辐射，该激光辐射耦合到相应的光学单模光纤的第一端，其中所有的光学单模光纤形成纤维束并具有第二端 位于光纤束端，激光辐射从第二端射出，从而形成总的激光辐射场，并且还包括光学变换装置，其将总激光辐射场转换到物体上，使得具有最高的焦点 可以产生每个面积和每个立体角的可能的功率，因此提出了光学变换装置包括准直元件，其准直从单模光纤的每个独立的第二端发散出的激光辐射，并形成准直辐射束 并且光学变换装置包括对准直辐射束成像的聚焦元件 作为一个整体到一个焦点。

公开(公告)号：US06586169B2

公开(公告)日：2003-07-01

申请号：US09768383

申请日：2001-01-19

申请人： Uwe Brauch ,  Hans Opower

发明人： Uwe Brauch ,  Hans Opower

IPC分类号： G03F720

CPC分类号： G03F7/7005 ,  G03F7/70383 ,  G03F7/704

摘要： In order to create a lithography exposure device for producing structures extending in a surface area in a light-sensitive layer, with which a radiation field can be generated in the light-sensitive layer and with a control for controlling the intensity and position of the radiation field in such a manner that by means of a large number of successive exposure steps a plurality of conversion areas can be generated, in which the material of the light-sensitive layer is converted from an initial state into an end state and which together result in the structures, with which it is possible to produce, without masks, structures which have in at least one direction an extension which is smaller than that of one of the radiation fields used, it is suggested that with at least some of the exposure steps the control generate radiation fields with a distribution of energy which makes the action of at least two radiation fields on the same conversion area necessary in order to transfer the material of the light-sensitive layer in this area into the converted end state.

摘要翻译： 为了产生光刻曝光装置，用于产生在光敏层中的表面区域延伸的结构，通过该光敏层可以在光敏层中产生辐射场，并具有用于控制辐射的强度和位置的控制 以这样的方式，通过大量的连续曝光步骤，可以产生多个转换区域，其中感光层的材料从初始状态转换成结束状态，并且一起导致 可以产生的结构，没有掩模，在至少一个方向上具有小于所使用的辐射场之一的延伸的结构，建议在至少一些曝光步骤中， 控制产生具有能量分布的辐射场，其使得至少两个辐射场的作用必须在相同的转换区域上，以便将物质 这个区域的光敏层中的al变为结束状态。

公开(公告)号：US06741225B1

公开(公告)日：2004-05-25

申请号：US09693590

申请日：2000-10-20

申请人： Uwe Brauch ,  Hans Opower

发明人： Uwe Brauch ,  Hans Opower

IPC分类号： H04N1304

CPC分类号： H04N9/12 ,  G02B26/08 ,  G02B26/0816 ,  G02B26/0875 ,  G09G3/02 ,  Y10S345/903

摘要： In order to provide a device for generating an image on an image surface with N×M image elements which can be illuminated individually, comprising a plurality of semiconductor radiation sources, each of which generates radiation with at least one color, an optical imaging means with a beam guidance, by means of which a plurality of image elements can be illuminated with each of the semiconductor radiation sources, with which it is possible to generate an image on an image surface in as simple a manner as possible using radiation sources, it is suggested that the image surface (12) be divided into a plurality of continuous image surface sections (14), each comprising a two-dimensional ensemble of image elements (16), that an illumination unit (20, 220, 320) be associated with each of the image surface sections (14) and that each illumination unit (20, 220, 320) have at least one semiconductor radiation source (30) and at least one optical imaging means (40, 240, 340) of its own associated with this illumination unit (20, 220, 230), this optical imaging means imaging a radiation outlet (31, 82, 224, 326) onto the corresponding image surface section (14) in a free beam propagation.

摘要翻译： 为了提供一种用于在可以单独照亮的N×M图像元素的图像表面上生成图像的装置，包括多个半导体辐射源，每个半导体辐射源产生至少一种颜色的辐射，具有光束的光学成像装置 引导，通过这些引导，可以利用每个半导体辐射源照射多个图像元素，利用该半导体辐射源可以以尽可能简单的方式使用辐射源在图像表面上生成图像，因此建议 图像表面（12）被分成多个连续图像表面部分（14），每个连续图像表面部分包括图像元素（16）的二维集合，照明单元（20,220,320）与每个图像元素 图像表面部分（14）以及每个照明单元（20,220,320）具有至少一个半导体辐射源（30）和至少一个其自身关联的光学成像装置（40,240,340） 在该照明单元（20,220,230）中，该光学成像装置以自由光束传播将辐射出口（31,82,224,326）成像到对应的图像表面部分（14）上。

公开(公告)号：US06570896B2

公开(公告)日：2003-05-27

申请号：US09874941

申请日：2001-06-05

申请人： Norbert Bissinger ,  Uwe Brauch ,  Guido Hergenhan ,  Hans Opower ,  Marcus Scholl ,  Bernd Luecke ,  Werner Spaeth

发明人： Norbert Bissinger ,  Uwe Brauch ,  Guido Hergenhan ,  Hans Opower ,  Marcus Scholl ,  Bernd Luecke ,  Werner Spaeth

IPC分类号： H01S310

CPC分类号： H01S5/4025 ,  G02B27/09 ,  H01S5/005 ,  H01S5/042 ,  H01S5/0425 ,  H01S5/0683 ,  H01S5/4006 ,  H01S5/4081 ,  H01S5/423

摘要： A laser radiation source is provided with an array of N individual slave laser diodes in a predetermined surface area. Adjustable power supply networks enable adjustment of the slave laser diodes relative to one another for operation in a stable manner. The slave power supply has a separate power supply network for each slave laser diode. Each of the power supply networks can be adjusted with respect to the current supplied to the respective slave laser diode during a certain operating period. This enables adjusting the slave laser diodes relative to one another. The power supply networks can be connected in parallel and supplied by a common source.

摘要翻译： 激光辐射源在预定表面积中设置有N个单独从属激光二极管的阵列。 可调电源网络可以调节从属激光二极管相对于彼此以稳定的方式操作。 从电源为每个从属激光二极管提供单独的电源网络。 每个电源网络可以相对于在某个操作期间提供给相应的从属激光二极管的电流进行调整。 这使得能够相对于彼此调节从属激光二极管。 电源网络可以并联连接并由公共源提供。

公开(公告)号：US5492861A

公开(公告)日：1996-02-20

申请号：US112711

申请日：1993-08-26

申请人： Hans Opower

发明人： Hans Opower

IPC分类号： C23C14/00 ,  C23C14/22 ,  G03F7/16 ,  H01L21/203 ,  H01L21/268 ,  H01L21/283 ,  H01L21/285 ,  C23C14/14

CPC分类号： C23C14/048 ,  C23C14/28 ,  G03F7/16 ,  H01L21/2855 ,  Y10S148/093 ,  Y10S438/94

摘要： In order to provide a process for applying structured layers of a functional structure of a semiconductor component, with which structured layers of a functional structure of a semiconductor component can be produced as simply as possible and with as little susceptibility as possible with respect to the quality of the semiconductor components, it is suggested that a material film be arranged above a surface region of a process substrate to be provided with the structured layer, that the material film be acted upon on its side remote from the process substrate by a focus of a laser beam located in a defined position corresponding to the structured layer to be produced and that with the laser beam in the region of the focus the material from the material film migrate to the surface region.

摘要翻译： 为了提供一种用于施加半导体部件的功能结构的结构层的工艺，半导体部件的功能结构的结构层可以尽可能简单地制造，并且在质量上尽可能少的敏感性 的半导体部件，建议将材料膜布置在处理基板的表面区域之上，以提供结构化层，使材料膜通过焦点位于远离处理基板的一侧 激光束位于对应于要产生的结构化层的限定位置，并且激光束在聚焦区域中，材料膜的材料迁移到表面区域。

公开(公告)号：US4930138A

公开(公告)日：1990-05-29

申请号：US399030

申请日：1989-08-24

申请人： Hans Opower

发明人： Hans Opower

IPC分类号： H01S3/03 ,  H01S3/07 ,  H01S3/08

CPC分类号： H01S3/0315 ,  H01S3/076 ,  H01S3/08081

摘要： In order to improve an electrically excited, diffusion-cooled laser system comprising two wall surfaces slightly spaced from one another and forming an optical waveguide, the width of the wall surfaces being a multiple of the space between them and the surfaces enclosing between them a flow-free discharge chamber, and also comprising an optically unstable resonator having a resonator beam path travelling through at least part of the discharge chamber and extending lengthwise of a resonator axis as well as having an expansion transverse to the resonator axis extending as far as at least one laser beam exiting from the resonator, this transverse expansion extending transversely to a longitudinal direction of said waveguide and approximately parallel to said wall surfaces, such that the waveguide can be constructed with as large a surface area as possible without losing the beam quality of the beam exiting the waveguide, it is suggested that the resonator be followed by a laser amplifier, the amplifier beam path thereof travelling through an additional part of said discharge chamber.

摘要翻译： 为了改进电激发的扩散冷却激光系统，其包括彼此稍微间隔开并形成光波导的两个壁表面，壁表面的宽度是它们之间的空间和包围它们之间的表面的倍数 并且还包括光学不稳定的谐振器，其具有穿过至少部分放电室并且沿着谐振器轴线的纵向延伸的谐振器光束路径，并且具有横向于至少延伸的谐振器轴线的扩展 一个从谐振器出射的激光束，该横向膨胀横向于所述波导的纵向方向延伸并且大致平行于所述壁表面，使得波导可以被构造成具有尽可能大的表面积，而不会损失波导质量 光束离开波导，建议谐振器后面是激光放大器， 其放大器光束路径穿过所述放电室的附加部分。