公开(公告)号：US07034924B2

公开(公告)日：2006-04-25

申请号：US10754634

申请日：2004-01-12

申请人： Harmen Klass Van Der Schoot ,  Hernes Jacobs ,  Martinus Arnoldus Henricus Terken

发明人： Harmen Klass Van Der Schoot ,  Hernes Jacobs ,  Martinus Arnoldus Henricus Terken

IPC分类号： G03B27/60

CPC分类号： G03F7/70841 ,  G03F7/707 ,  G03F7/70716 ,  G03F7/70808 ,  G03F7/70991

摘要： A lithographic apparatus includes at least one object support structure in a high vacuum chamber. The object support structure includes a carrier device in which a number of dividing walls are provided forming a number of compartments in the carrier device. At least one of the compartments is shielded from the high vacuum chamber and is provided with separate gas evacuating structures.

摘要翻译： 光刻设备包括在高真空室中的至少一个物体支撑结构。 物体支撑结构包括载体装置，其中多个分隔壁被设置成在载体装置中形成多个隔间。 隔室中的至少一个与高真空室隔离，并设有单独的排气结构。

公开(公告)号：US07184121B2

公开(公告)日：2007-02-27

申请号：US10845604

申请日：2004-05-14

申请人： Frits Van Der Meulen ,  Hernes Jacobs ,  Martinus Arnoldus Henricus Terken

发明人： Frits Van Der Meulen ,  Hernes Jacobs ,  Martinus Arnoldus Henricus Terken

IPC分类号： G03B27/32 ,  G03B27/42

CPC分类号： G03F7/70733 ,  G03F7/70716 ,  G03F7/70725

摘要： A lithographic projection apparatus is presented herein that includes a collision protection system for protecting internal components against damage from a collision. The collision protection apparatus includes at least one damper for applying a braking force and/or for absorbing a collision force, reducing or eliminating any damage to delicate and costly parts. The collision protection apparatus can also monitor the position and velocity of a moving part to determine when a collision is likely to occur.

摘要翻译： 本文提出了一种光刻投影装置，其包括用于保护内部部件免受碰撞破坏的防撞系统。 碰撞保护装置包括用于施加制动力和/或吸收碰撞力的至少一个阻尼器，减少或消除对精细和昂贵部件的任何损坏。 碰撞保护装置还可以监视移动部件的位置和速度，以确定何时可能发生碰撞。

公开(公告)号：US07012264B2

公开(公告)日：2006-03-14

申请号：US10860654

申请日：2004-06-04

申请人： Martinus Arnoldus Henricus Terken ,  Hernes Jacobs ,  Harmen Klaas Van Der Schoot ,  Petrus M H Vosters ,  Koen J J M Zaal

发明人： Martinus Arnoldus Henricus Terken ,  Hernes Jacobs ,  Harmen Klaas Van Der Schoot ,  Petrus M H Vosters ,  Koen J J M Zaal

IPC分类号： G21K5/10

CPC分类号： G03F7/70716

摘要： A lithographic apparatus is provided. The apparatus includes an illumination system that conditions a beam of radiation, an article support member that supports an article to be placed in a beam path of the beam of radiation on the article support, and a movable carriage for moving the article support member. The carriage includes a compartmented composite structure provided with a non-composite mounting interface and/or cooling interface With such an arrangement, conventional interfacing using, for example metal or ceramic materials, can be applied in combination with the advantages of composite structures, such as a low specific weight, a high Young's modulus at places and directions where required, high strength, high stability, and high electrical resistivity.

摘要翻译： 提供光刻设备。 该装置包括照射辐射束的照明系统，支撑待放置在物品支撑件上的辐射束的光束路径中的物品的物品支撑构件以及用于移动物品支撑构件的可移动托架。 托架包括设置有非复合安装界面和/或冷却界面的分隔复合结构。通过这种布置，使用例如金属或陶瓷材料的常规接口可以与复合结构的优点结合使用，诸如 低比重，高的杨氏模量和需要的方向，高强度，高稳定性和高电阻率。

公开(公告)号：US07230254B2

公开(公告)日：2007-06-12

申请号：US11231791

申请日：2005-09-22

申请人： Martinus Arnoldus Henricus Terken ,  Hernes Jacobs ,  Harmen Klaas Van Der Schoot ,  Petrus Matthijs Henricus Vosters ,  Koen Jacobus Johannes Maria Zaal

发明人： Martinus Arnoldus Henricus Terken ,  Hernes Jacobs ,  Harmen Klaas Van Der Schoot ,  Petrus Matthijs Henricus Vosters ,  Koen Jacobus Johannes Maria Zaal

IPC分类号： G21K5/10

CPC分类号： G03F7/70716

摘要： A movable carriage for moving an article support member in a lithographic apparatus is provided. The article support member is constructed and arranged to move and support an article to be placed in a beam path of the lithographic apparatus. The carriage includes a compartmented composite structure.

摘要翻译： 提供了用于在光刻设备中移动物品支撑构件的可动托架。 物品支撑构件被构造和布置成移动和支撑待放置在光刻设备的光束路径中的物品。 托架包括隔层复合结构。

公开(公告)号：US20050269525A1

公开(公告)日：2005-12-08

申请号：US10860654

申请日：2004-06-04

申请人： Martinus Arnoldus Henricus Terken ,  Hernes Jacobs ,  Harmen Klaas Van Der Schoot ,  Petrus M. H. Vosters ,  Koen J. J. M. Zaal

发明人： Martinus Arnoldus Henricus Terken ,  Hernes Jacobs ,  Harmen Klaas Van Der Schoot ,  Petrus M. H. Vosters ,  Koen J. J. M. Zaal

IPC分类号： H01L21/027 ,  G03F7/20 ,  H01J37/20

CPC分类号： G03F7/70716

摘要： A lithographic apparatus is provided. The apparatus includes an illumination system that conditions a beam of radiation, an article support member that supports an article to be placed in a beam path of the beam of radiation on the article support, and a movable carriage for moving the article support member. The carriage includes a compartmented composite structure provided with a non-composite mounting interface and/or cooling interface With such an arrangement, conventional interfacing using, for example metal or ceramic materials, can be applied in combination with the advantages of composite structures, such as a low specific weight, a high Young's modulus at places and directions where required, high strength, high stability, and high electrical resistivity.

摘要翻译： 提供光刻设备。 该装置包括照射辐射束的照明系统，支撑待放置在物品支撑件上的辐射束的光束路径中的物品的物品支撑构件以及用于移动物品支撑构件的可移动托架。 托架包括设置有非复合安装界面和/或冷却界面的分隔复合结构。通过这种布置，使用例如金属或陶瓷材料的常规接口可以与复合结构的优点结合使用，诸如 低比重，高的杨氏模量和需要的方向，高强度，高稳定性和高电阻率。

公开(公告)号：US07423721B2

公开(公告)日：2008-09-09

申请号：US11012062

申请日：2004-12-15

申请人： Antonius Johannes Josephus Van Dijsseldonk ,  Mustafa Amhaouch ,  Wilhelmus Josephus Box ,  Johannes Henricus Wilhelmus Jacobs ,  Hernes Jacobs ,  Marius Ravensbergen ,  Martinus Arnoldus Henricus Terken ,  Robert Gordon Livesey ,  Franciscus Catharina Bernardus Marinus Van Vroonhoven

发明人： Antonius Johannes Josephus Van Dijsseldonk ,  Mustafa Amhaouch ,  Wilhelmus Josephus Box ,  Johannes Henricus Wilhelmus Jacobs ,  Hernes Jacobs ,  Marius Ravensbergen ,  Martinus Arnoldus Henricus Terken ,  Robert Gordon Livesey ,  Franciscus Catharina Bernardus Marinus Van Vroonhoven

IPC分类号： G03B27/42

CPC分类号： G03F7/70841 ,  G03F7/70991

摘要： A vacuum operated lithographic apparatus includes a vacuum housing for providing a vacuum environment to a support constructed to support a patterning device, or a substrate table, or a projection system, or any combination thereof. An interior of the vacuum housing includes a plurality of transport circuits for transporting fluids and/or electrical signals for use in a first process mode for lithographic processing. At least one of the transport circuits is adapted to transport energy towards the interior of the vacuum housing to stimulate outgassing in the vacuum housing for use in a second process mode for bringing the lithographic apparatus into a vacuum operating condition.

摘要翻译： 真空操作的光刻设备包括真空壳体，用于为构造成支撑图案形成装置的支撑件，或衬底台，投影系统或其任何组合提供真空环境。 真空壳体的内部包括用于输送用于光刻处理的第一工艺模式的流体和/或电信号的多个输送电路。 传送电路中的至少一个适于将能量传送到真空壳体的内部，以刺激真空壳体中的除气，以用于使光刻设备进入真空操作状态的第二工艺模式。

公开(公告)号：US08492935B2

公开(公告)日：2013-07-23

申请号：US13396139

申请日：2012-02-14

申请人： Petrus Mathijs Henricus Vosters ,  Martinus Arnoldus Henricus Terken

发明人： Petrus Mathijs Henricus Vosters ,  Martinus Arnoldus Henricus Terken

IPC分类号： H02K41/02 ,  G03B27/58 ,  G03F7/20

CPC分类号： G03F7/70758 ,  G03F7/70716 ,  G03F7/7095 ,  H02K41/0354 ,  H02K2201/18

摘要： An actuator is configured to produce a displacement force between a first and a second part to displace the first and second parts relative to each other. The Actuator includes a first magnet subassembly, attached to one of a first and a second part, and an electrically conductive element, attached to the other one of the first and second part and placed near the first magnet subassembly. The first magnet subassembly includes at least one set of at least two adjacently placed magnets oriented such that their magnetic polarizations are substantially mutually opposite, and a back mass made out of a magnetic flux guiding material and connecting the magnets to guide a magnetic flux there between. The first magnet subassembly includes a carrier made of a non-magnetic-flux-guiding material, the carrier including at least one recess in which the at least one set of back mass and magnets is embedded.

摘要翻译： 致动器构造成在第一和第二部分之间产生位移力，以相对于彼此移动第一和第二部分。 致动器包括附接到第一和第二部分中的一个的第一磁体子组件和附接到第一和第二部分中的另一个的导电元件并且放置在第一磁体子组件附近。 第一磁体子组件包括至少一组至少两个相邻放置的磁体，这些磁体定向为使得它们的磁极化基本相互相反，以及由磁通量引导材料制成的后质量并连接磁体以在其间引导磁通 。 所述第一磁体子组件包括由非磁通量引导材料制成的载体，所述载体包括至少一个凹陷，所述至少一个凹陷嵌入所述至少一组背质和磁体中。

公开(公告)号：US20120147354A1

公开(公告)日：2012-06-14

申请号：US13396139

申请日：2012-02-14

申请人： Petrus Mathijs Henricus Vosters ,  Martinus Arnoldus Henricus Terken

发明人： Petrus Mathijs Henricus Vosters ,  Martinus Arnoldus Henricus Terken

IPC分类号： G03B27/58 ,  H02K41/02

CPC分类号： G03F7/70758 ,  G03F7/70716 ,  G03F7/7095 ,  H02K41/0354 ,  H02K2201/18

摘要： An actuator is configured to produce a displacement force between a first and a second part to displace the first and second parts relative to each other. The Actuator includes a first magnet subassembly, attached to one of a first and a second part, and an electrically conductive element, attached to the other one of the first and second part and placed near the first magnet subassembly. The first magnet subassembly includes at least one set of at least two adjacently placed magnets oriented such that their magnetic polarizations are substantially mutually opposite, and a back mass made out of a magnetic flux guiding material and connecting the magnets to guide a magnetic flux there between. The first magnet subassembly includes a carrier made of a non-magnetic-flux-guiding material, the carrier including at least one recess in which the at least one set of back mass and magnets is embedded.

摘要翻译： 致动器构造成在第一和第二部分之间产生位移力，以相对于彼此移动第一和第二部分。 致动器包括附接到第一和第二部分中的一个的第一磁体子组件和附接到第一和第二部分中的另一个的导电元件并且放置在第一磁体子组件附近。 第一磁体子组件包括至少一组至少两个相邻放置的磁体，这些磁体定向为使得它们的磁极化基本相互相反，以及由磁通量引导材料制成的后质量并连接磁体以在其间引导磁通 。 所述第一磁体子组件包括由非磁通量引导材料制成的载体，所述载体包括至少一个凹陷，所述至少一个凹陷嵌入所述至少一组背质和磁体中。

公开(公告)号：US08134257B2

公开(公告)日：2012-03-13

申请号：US12234955

申请日：2008-09-22

申请人： Petrus Mathijs Henricus Vosters ,  Martinus Arnoldus Henricus Terken

发明人： Petrus Mathijs Henricus Vosters ,  Martinus Arnoldus Henricus Terken

IPC分类号： H02K41/02 ,  G03B27/58

CPC分类号： G03F7/70758 ,  G03F7/70716 ,  G03F7/7095 ,  H02K41/0354 ,  H02K2201/18

摘要： An actuator is configured to produce a displacement force between a first and a second part to displace the first and second parts relative to each other. The Actuator includes a first magnet subassembly, attached to one of a first and a second part, and an electrically conductive element, attached to the other one of the first and second part and placed near the first magnet subassembly. The first magnet subassembly includes at least one set of at least two adjacently placed magnets oriented such that their magnetic polarizations are substantially mutually opposite, and a back mass made out of a magnetic flux guiding material and connecting the magnets to guide a magnetic flux there between. The first magnet subassembly includes a carrier made of a non-magnetic-flux-guiding material, the carrier including at least one recess in which the at least one set of back mass and magnets is embedded.

摘要翻译： 致动器构造成在第一和第二部分之间产生位移力，以相对于彼此移动第一和第二部分。 致动器包括附接到第一和第二部分中的一个的第一磁体子组件和附接到第一和第二部分中的另一个的导电元件并且放置在第一磁体子组件附近。 第一磁体子组件包括至少一组至少两个相邻放置的磁体，这些磁体定向为使得它们的磁极化基本相互相反，以及由磁通量引导材料制成的后质量并连接磁体以在其间引导磁通 。 所述第一磁体子组件包括由非磁通量引导材料制成的载体，所述载体包括至少一个凹陷，所述至少一个凹陷嵌入所述至少一组背质和磁体中。