Method for forming MRAM bit having a bottom sense layer utilizing electroless plating
    1.
    发明申请
    Method for forming MRAM bit having a bottom sense layer utilizing electroless plating 有权
    用于形成具有利用无电镀的底部感测层的MRAM钻头的方法

    公开(公告)号:US20070161127A1

    公开(公告)日:2007-07-12

    申请号:US11657725

    申请日:2007-01-25

    CPC classification number: H01L27/222 H01L43/12

    Abstract: The present invention provides a method of forming an MRAM cell which minimizes the occurrence of electrical shorts during fabrication. A first conductor in a trench is provided in an insulating layer and an upper surface of the insulating layer and the first conductor is planarized. Then, a dielectric layer is deposited to a thickness slightly greater than the desired final thickness of a sense layer, which is formed later. The dielectric layer is then patterned and etched to form an opening for the cell shapes over the first conductor. Then, a permalloy is electroplated in the cell shapes to form the sense layer. The sense layer and dielectric layer are flattened and then a nonmagnetic tunnel barrier layer is deposited. Finally, the pinned layer is formed over the tunnel barrier layer.

    Abstract translation: 本发明提供一种形成MRAM单元的方法,该方法在制造期间使电短路的发生最小化。 沟槽中的第一导体设置在绝缘层中,并且绝缘层和第一导体的上表面被平坦化。 然后,电介质层被沉积成稍大于稍后形成的感应层的期望最终厚度的厚度。 然后对电介质层进行图案化和蚀刻,以形成第一导体上的电池形状的开口。 然后,将坡莫合金电镀在电池形状中以形成感测层。 感应层和电介质层被平坦化,然后沉积非磁性隧道势垒层。 最后,在隧道势垒层上方形成钉扎层。

    Magnetoresistive memory device assemblies, and methods of forming magnetoresistive memory device assemblies
    2.
    发明申请
    Magnetoresistive memory device assemblies, and methods of forming magnetoresistive memory device assemblies 有权
    磁阻存储器件组件,以及形成磁阻存储器件组件的方法

    公开(公告)号:US20060076635A1

    公开(公告)日:2006-04-13

    申请号:US11295177

    申请日:2005-12-05

    CPC classification number: H01L27/222

    Abstract: The invention includes a construction comprising an MRAM device between a pair of conductive lines. Each of the conductive lines can generate a magnetic field encompassing at least a portion of the MRAM device. Each of the conductive lines is surrounded on three sides by magnetic material to concentrate the magnetic fields generated by the conductive lines at the MRAM device. The invention also includes a method of forming an assembly containing MRAM devices. A plurality of MRAM devices are formed over a substrate. An electrically conductive material is formed over the MRAM devices, and patterned into a plurality of lines. The lines are in a one-to-one correspondence with the MRAM devices and are spaced from one another. After the conductive material is patterned into lines, a magnetic material is formed to extend over the lines and within spaces between the lines.

    Abstract translation: 本发明包括在一对导线之间包括MRAM器件的结构。 每个导线可以产生包围MRAM装置的至少一部分的磁场。 每个导线在三面被磁性材料包围以将由导线产生的磁场集中在MRAM器件上。 本发明还包括形成包含MRAM器件的组件的方法。 在衬底上形成多个MRAM器件。 导电材料形成在MRAM器件上,并被图案化成多条线。 这些线与MRAM器件一一对应,并且彼此间隔开。 在将导电材料图案化成线之后,形成磁性材料以在线之间和线之间的空间内延伸。

    Magnetoresistive memory device assemblies
    3.
    发明申请
    Magnetoresistive memory device assemblies 有权
    磁阻存储器件组件

    公开(公告)号:US20050040453A1

    公开(公告)日:2005-02-24

    申请号:US10920740

    申请日:2004-08-17

    CPC classification number: H01L27/222

    Abstract: The invention includes a construction comprising an MRAM device between a pair of conductive lines. Each of the conductive lines can generate a magnetic field encompassing at least a portion of the MRAM device. Each of the conductive lines is surrounded on three sides by magnetic material to concentrate the magnetic fields generated by the conductive lines at the MRAM device. The invention also includes a method of forming an assembly containing MRAM devices. A plurality of MRAM devices are formed over a substrate. An electrically conductive material is formed over the MRAM devices, and patterned into a plurality of lines. The lines are in a one-to-one correspondence with the MRAM devices and are spaced from one another. After the conductive material is patterned into lines, a magnetic material is formed to extend over the lines and within spaces between the lines.

    Abstract translation: 本发明包括在一对导线之间包括MRAM器件的结构。 每个导线可以产生包围MRAM装置的至少一部分的磁场。 每个导线在三面被磁性材料包围以将由导线产生的磁场集中在MRAM器件上。 本发明还包括形成包含MRAM器件的组件的方法。 在衬底上形成多个MRAM器件。 导电材料形成在MRAM器件上,并被图案化成多条线。 这些线与MRAM器件一一对应,并且彼此间隔开。 在将导电材料图案化成线之后,形成磁性材料以在线之间和线之间的空间内延伸。

    VARIABLE RESISTANCE MEMORY DEVICE HAVING REDUCED BOTTOM CONTACT AREA AND METHOD OF FORMING THE SAME
    4.
    发明申请
    VARIABLE RESISTANCE MEMORY DEVICE HAVING REDUCED BOTTOM CONTACT AREA AND METHOD OF FORMING THE SAME 有权
    具有减少底部接触面积的可变电阻存储器件及其形成方法

    公开(公告)号:US20120319073A1

    公开(公告)日:2012-12-20

    申请号:US13591891

    申请日:2012-08-22

    Applicant: Hasan Nejad

    Inventor: Hasan Nejad

    Abstract: A variable resistance memory element and method of forming the same. The memory element includes a substrate supporting a bottom electrode having a small bottom contact area. A variable resistance material is formed over the bottom electrodes such that the variable resistance material has a surface that is in electrical communication with the bottom electrode and a top electrode is formed over the variable resistance material. The small bottom electrode contact area reduces the reset current requirement which in turn reduces the write transistor size for each bit.

    Abstract translation: 一种可变电阻记忆元件及其形成方法。 存储元件包括支撑具有小的底部接触区域的底部电极的衬底。 在底部电极上形成可变电阻材料,使得可变电阻材料具有与底部电极电连通的表面,并且顶部电极形成在可变电阻材料上。 小的底部电极接触面积减小了复位电流要求,进而降低了每个位的写入晶体管尺寸。

    Stacked 1T-nMTJ MRAM structure
    5.
    发明授权
    Stacked 1T-nMTJ MRAM structure 有权
    堆叠1T-nMTJ MRAM结构

    公开(公告)号:US07330367B2

    公开(公告)日:2008-02-12

    申请号:US11081652

    申请日:2005-03-17

    CPC classification number: G11C11/16 B82Y10/00 G11C11/15 H01L27/228

    Abstract: This invention relates to MRAM technology and new variations on MRAM array architecture to incorporate certain advantages from both cross-point and 1T-1MTJ architectures. The fast read-time and higher signal-to-noise ratio of the 1T-1MTJ architecture and the higher packing density of the cross-point architecture are both exploited by combining certain characteristics of these layouts. A single access transistor 16 is used to read multiple MRAM cells, which can be stacked vertically above one another in a plurality of MRAM array layers arranged in a “Z” axis direction.

    Abstract translation: 本发明涉及MRAM技术和MRAM阵列体系结构的新变型,其中包含了来自交叉点和1T-1MTJ架构的某些优点。 通过组合这些布局的某些特性,可以利用1T-1MTJ架构的快速读取时间和更高的信噪比以及交叉点架构的更高的封装密度。 单个访问晶体管16用于读取多个MRAM单元,其可以在以“Z”轴方向布置的多个MRAM阵列层中彼此垂直堆叠堆叠。

    Stacked 1T-nmemory cell structure

    公开(公告)号:US07042749B2

    公开(公告)日:2006-05-09

    申请号:US10438344

    申请日:2003-05-15

    Abstract: This invention relates to memory technology and new variations on memory array architecture to incorporate certain advantages from both cross-point and 1T-1Cell architectures. The fast read-time and higher signal-to-noise ratio of the 1T-1Cell architecture and the higher packing density of the cross-point architecture are both exploited by combining certain characteristics of these layouts. A single access transistor 16 is used to read multiple memory cells, which can be stacked vertically above one another in a plurality of memory array layers arranged in a “Z” axis direction.

    Stacked columnar 1T-nMTJ structure and its method of formation and operation
    8.
    发明授权
    Stacked columnar 1T-nMTJ structure and its method of formation and operation 有权
    堆叠柱状1T-nMTJ结构及其形成和操作方法

    公开(公告)号:US07023743B2

    公开(公告)日:2006-04-04

    申请号:US10784786

    申请日:2004-02-24

    CPC classification number: H01L27/228 G11C5/02 G11C11/16

    Abstract: This invention relates to an array architecture which incorporates certain advantages from both cross-point and 1T-1MTJ architectures during reading operations. The fast read-time and higher signal to noise ratio of the 1T-1MTJ architecture and the higher packing density of the cross-point architecture are both exploited by using a single access transistor to control the reading of multiple stacked columns of cells each column being provided in a respective stacked memory layer.

    Abstract translation: 本发明涉及在读取操作期间结合了交叉点和1T-1MTJ架构的某些优点的阵列体系结构。 通过使用单个存取晶体管来控制1T-1MTJ架构的快速读取时间和更高的信噪比以及交叉点架构的更高的封装密度,以控制每列的​​多个堆叠列的读数 设置在相应的堆叠存储器层中。

    Columnar 1T-nMemory cell structure and its method of formation and operation
    9.
    发明申请
    Columnar 1T-nMemory cell structure and its method of formation and operation 有权
    柱状1T-神经细胞结构及其形成和操作方法

    公开(公告)号:US20050162883A1

    公开(公告)日:2005-07-28

    申请号:US10925243

    申请日:2004-08-25

    Abstract: A memory array architecture incorporates certain advantages from both cross-point and 1T-1Cell architectures during reading operations. The fast read-time and higher signal to noise ratio of the 1T-1Cell architecture and the higher packing density of the cross-point architecture are both exploited by using a single access transistor to control the reading of multiple stacked columns of memory cells, each column being provided in a respective stacked memory layer.

    Abstract translation: 存储器阵列架构在读取操作期间融合了交叉点和1T-1Cell架构的某些优点。 通过使用单个存取晶体管来控制多个堆叠列的存储单元的读取,利用了1T-1Cell架构的快速读取时间和更高的信噪比以及交叉点架构的更高的封装密度 列设置在相应的堆叠存储层中。

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