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公开(公告)号：US06841919B2
公开(公告)日：2005-01-11
申请号：US10109356
申请日：2002-03-26
摘要： A piezoactuator has a diaphragm, and the diaphragm has flat piezoelectric elements that oscillate in a longitudinal oscillation mode and a sinusoidal oscillation mode. A first electrode for detecting oscillation in the longitudinal oscillation mode, and a second electrode for detecting the amplitude of oscillation in the sinusoidal oscillation mode, are disposed on the surface of the diaphragm. When the piezoactuator is driven with a drive signal, the phase difference of a first detection signal output from the first electrode and a second detection signal output from the second electrode is detected. The frequency at which the detected phase difference becomes the maximum phase difference is then obtained, and a drive signal of a matching frequency is applied to the piezoelectric elements.
摘要翻译： 压电致动器具有隔膜，并且隔膜具有以纵向振荡模式和正弦振荡模式振荡的平坦的压电元件。 用于检测纵向振荡模式中的振荡的第一电极和用于检测正弦振荡模式中的振荡幅度的第二电极设置在隔膜的表面上。 当用驱动信号驱动压电致动器时，检测从第一电极输出的第一检测信号和从第二电极输出的第二检测信号的相位差。 然后获得检测到的相位差成为最大相位差的频率，并且将匹配频率的驱动信号施加到压电元件。
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公开(公告)号：USRE40709E1
公开(公告)日：2009-05-12
申请号：US11591409
申请日：2006-11-01
IPC分类号： H01L41/08
摘要： A piezoactuator has a diaphragm, and the diaphragm has flat piezoelectric elements that oscillate in a longitudinal oscillation mode and a sinusoidal oscillation mode. A first electrode for detecting oscillation in the longitudinal oscillation mode, and a second electrode for detecting the amplitude of oscillation in the sinusoidal oscillation mode, are disposed on the surface of the diaphragm. When the piezoactuator is driven with a drive signal, the phase difference of a first detection signal output from the first electrode and a second detection signal output from the second electrode is detected. The frequency at which the detected phase difference becomes the maximum phase difference is then obtained, and a drive signal of a matching frequency is applied to the piezoelectric elements.
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3.发明申请TUNING FORK OSCILLATING PIECE, TUNING FORK OSCILLATOR, AND ACCELERATION SENSOR 有权调音台振荡片，调音台振荡器及加速传感器公开(公告)号：US20090058226A1
公开(公告)日：2009-03-05
申请号：US12204746
申请日：2008-09-04
CPC分类号： G01P15/097 , G01C19/5607 , G01P15/09 , H03H9/21
摘要： A tuning fork oscillating piece includes: a base; a pair of oscillating arms extending from the base in directions substantially parallel with each other; a drive piezoelectric element provided at least on one main surface or side surface of each of the oscillating arms to allow bending oscillation of the oscillating arms by piezoelectric distortion caused by applied charge; a detection piezoelectric element provided on the surface opposed to the surface of each of the oscillating arms on which the drive piezoelectric element is provided to convert the piezoelectric distortion caused by the bending oscillation of the oscillating arms into charge and output the charge. The drive piezoelectric element has a drive piezoelectric section. The detection piezoelectric element has a detection piezoelectric section. The absolute value of the piezoelectric d constant of the drive piezoelectric section is larger than the absolute value of the piezoelectric d constant of the detection piezoelectric section. The absolute value of the piezoelectric g constant of the detection piezoelectric section is larger than the absolute value of the piezoelectric g constant of the drive piezoelectric section.
摘要翻译： 音叉振荡片包括：基座; 一对摆动臂，其基本上彼此平行地延伸; 驱动压电元件，其设置在每个摆动臂的至少一个主表面或侧表面上，以通过由施加的电荷引起的压电变形来允许振荡臂的弯曲振荡; 检测压电元件设置在与设置有驱动压电元件的每个振荡臂的表面相对的表面上，以将由振荡臂的弯曲振荡引起的压电变形转换为充电并输出电荷。 驱动压电元件具有驱动压电部。 检测用压电元件具有检测压电部。 驱动压电部的压电d常数的绝对值大于检测压电部的压电d常数的绝对值。 检测用压电部的压电g常数的绝对值大于驱动压电部的压电体g的绝对值。
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公开(公告)号：US07078847B2
公开(公告)日：2006-07-18
申请号：US10771786
申请日：2004-02-04
IPC分类号： H01L41/08
CPC分类号： H01L41/0913 , H02N2/004 , H02N2/103
摘要： A rectangular vibrating plate 10 in which a piezoelectric element and a reinforcing plate are stacked is supported on a main plate by a support member 11, and is urged toward the rotor 100 by an elastic force of the support member 11. This brings a projection 36 provided on the vibrating plate 10 into abutment with an outer peripheral surface of the rotor 100. In this construction, when the vibrating plate 10 vibrates in the horizontal direction in the figure by an applied voltage from a driving circuit (not shown), the rotor 100 is rotated in a clockwise direction in accordance with the displacement of the projection 36 due to the vibration.
摘要翻译： 堆叠有压电元件和加强板的矩形振动板10通过支撑构件11支撑在主板上，并且通过支撑构件11的弹力而朝向转子100施力。 这使得设置在振动板10上的突起36与转子100的外周表面邻接。 在这种结构中，当振动板10通过来自驱动电路（未示出）的施加电压在图中的水平方向上振动时，转子100根据突起36的位移而沿顺时针方向旋转，由于 振动。
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公开(公告)号：US08766515B2
公开(公告)日：2014-07-01
申请号：US13125000
申请日：2009-10-22
IPC分类号： H03H9/21
CPC分类号： H03H9/21 , H03H9/0547 , H03H9/1021 , H03H9/19 , H03H9/215
摘要： Deterioration of the Q value caused by the thermoelastic effect is suppressed. Since a first depth of a first groove and a second depth of a second groove are smaller than a distance between a surface including a third surface and a surface including a fourth surface, the first and second grooves do not penetrate between the surface including the third surface and the surface including the fourth surface. In addition, the sum of the first depth of the first groove and the second depth of the second groove is greater than the distance between the third and fourth surfaces, a heat transfer path between a first expandable portion (the first surface) and a second expandable portion (the second surface) cannot be formed as a straight line. As such, the heat transfer path between the first expandable portion (the first surface) and a second expandable portion (the second surface) is made to detour to the first and second grooves and and thus be lengthened.
摘要翻译： 抑制由热弹性效应引起的Q值的劣化。 由于第一凹槽的第一深度和第二凹槽的第二深度小于包括第三表面的表面和包括第四表面的表面之间的距离，所以第一和第二凹槽不会穿过包括第三凹槽的表面 表面和包括第四表面的表面。 此外，第一凹槽的第一深度和第二凹槽的第二深度之和大于第三和第四表面之间的距离，第一可膨胀部分（第一表面）和第二凹槽之间的传热路径 可膨胀部分（第二表面）不能形成为直线。 因此，使第一可膨胀部分（第一表面）和第二可膨胀部分（第二表面）之间的传热路径绕第一和第二槽弯曲并因此被延长。
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公开(公告)号：US07944132B2
公开(公告)日：2011-05-17
申请号：US12892096
申请日：2010-09-28
申请人： Makoto Furuhata , Takashi Yamazaki
发明人： Makoto Furuhata , Takashi Yamazaki
CPC分类号： H03H9/215 , H03H9/0547 , H03H9/1021
摘要： A resonator having a base part; and a resonating arm that performs flexing vibration, the resonating arm part has two principal surfaces, a first groove provided on one principal surface, a second groove provided in juxtaposition with the first groove on the other principal surface, a third groove provided in juxtaposition with the first groove and provided nearer the base part side than the first groove on the other principal surface, and a fourth groove provided in juxtaposition with the second groove and provided nearer the base part side than the second groove on the principal surface. The sum of a depth of the first and second groove part and a sum of a depth of the third and fourth groove part are larger than a distance between the one principal surface and the other principal surface.
摘要翻译： 具有基部的谐振器; 以及谐振臂，其进行弯曲振动，所述谐振臂部分具有两个主表面，设置在一个主表面上的第一凹槽，与另一个主表面上的第一凹槽并置设置的第二凹槽，设置成与第一凹槽并排设置的第三凹槽， 所述第一槽比所述另一主面上的所述第一槽更靠近所述基部侧;以及第四槽，与所述第二槽并列设置，并且在所述主面上设置为比所述基部侧更靠近所述第二槽。 第一槽部分和第二槽部分的深度之和和第三和第四槽部分的深度之和大于一个主表面和另一个主表面之间的距离。
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7.发明授权Surface acoustic wave device and method of manufacturing a surface acoustic wave device 失效声表面波装置及声表面波装置的制造方法公开(公告)号：US07400219B2
公开(公告)日：2008-07-15
申请号：US11290570
申请日：2005-12-01
申请人： Makoto Furuhata , Hisakatsu Sato
发明人： Makoto Furuhata , Hisakatsu Sato
CPC分类号： H03H3/08 , H03H9/02866 , H03H9/02976
摘要： A surface acoustic wave (SAW) device includes at least an IC region and a SAW element region. A semiconductor element layer and wiring layer is located in the IC region, and the semiconductor element layer has a semiconductor element and an element insulating film. The wiring layer is formed by stacking wiring to connect with the semiconductor element and a wiring insulating film extending to the SAW region. The semiconductor element layer further includes a piezoelectric thin film formed above the wiring insulating film, and in the SAW element region, a SAW element is formed on the piezoelectric thin film equipped with an IDT electrode provided with a plurality of electrode fingers, and at least one layer of layer thickness adjusting films having linear shapes and arranged in parallel to and with the same pitch as the electrode fingers of the IDT electrode.
摘要翻译： 表面声波（SAW）器件至少包括IC区域和SAW元件区域。 半导体元件层和布线层位于IC区域中，半导体元件层具有半导体元件和元件绝缘膜。 布线层通过层叠布线以与半导体元件连接并且延伸到SAW区域的布线绝缘膜形成。 半导体元件层还包括形成在布线绝缘膜上方的压电薄膜，并且在SAW元件区域中，在配备有设置有多个电极指的IDT电极的压电薄膜上形成SAW元件，并且至少 一层具有直线形状并且与IDT电极的电极指平行并以相同间距排列的层厚度调节膜。
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8.发明申请Surface acoustic wave device and method of manufacturing a surface acoustic wave device 失效声表面波装置及声表面波装置的制造方法公开(公告)号：US20060131993A1
公开(公告)日：2006-06-22
申请号：US11290570
申请日：2005-12-01
申请人： Makoto Furuhata , Hisakatsu Sato
发明人： Makoto Furuhata , Hisakatsu Sato
IPC分类号： H03H9/25
CPC分类号： H03H3/08 , H03H9/02866 , H03H9/02976
摘要： A surface acoustic wave device including at least an IC region and a surface acoustic wave element region in a semiconductor substrate and formed as a single chip, including, in the IC region, a semiconductor element layer having a semiconductor element and an element insulating film formed to cover the semiconductor element and extending to the surface acoustic wave element region, a wiring layer formed by stacking, on the semiconductor element layer, wiring for establishing connection with the semiconductor element and a wiring insulating film extending to the surface acoustic wave element region and for insulating the wiring, and a piezoelectric thin film formed above the wiring insulating film, and in the surface acoustic wave element region, a surface acoustic wave element formed on the piezoelectric thin film and equipped with an IDT electrode provided with a plurality of electrode fingers, and at least one layer of layer thickness adjusting films having linear shapes and arranged in parallel to and with the same pitch as the electrode fingers of the IDT electrode, and formed above one of the semiconductor substrate, the element insulating film, and the wiring insulating film, and below an area in which the surface acoustic wave element is formed.
摘要翻译： 一种在半导体衬底中至少包括IC区域和表面声波元件区域的表面声波装置，其形成为单个芯片，在IC区域中包括形成有半导体元件和元件绝缘膜的半导体元件层 覆盖半导体元件并延伸到表面声波元件区域，布线层通过在半导体元件层上堆叠而形成与半导体元件建立连接的布线和延伸到表面声波元件区域的布线绝缘膜，以及 用于绝缘布线，以及形成在布线绝缘膜上方的压电薄膜，并且在声表面波元件区域中，形成在压电薄膜上的表面声波元件，其配备有设置有多个电极指的IDT电极 ，以及至少一层具有直线形状和排列的层厚度调节膜 d与IDT电极的电极指平行并具有相同的间距，并且形成在半导体衬底，元件绝缘膜和布线绝缘膜之上，并且在表面声波元件为 形成。
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公开(公告)号：US20050151442A1
公开(公告)日：2005-07-14
申请号：US10990411
申请日：2004-11-18
申请人： Ryuji Kihara , Takuya Nakajima , Makoto Furuhata
发明人： Ryuji Kihara , Takuya Nakajima , Makoto Furuhata
IPC分类号： B81B3/00 , B81C1/00 , B81C3/00 , H02N1/00 , H02N2/00 , H03H3/007 , H03H9/00 , H03H9/02 , H03H9/10 , H03H9/24
CPC分类号： H03H9/2431 , H03H3/0072 , H03H9/02259 , H03H9/02433 , H03H9/1057 , H03H9/2436 , H03H9/2457 , H03H9/2463 , H03H2009/02496 , H03H2009/02503 , H03H2009/02519
摘要： Exemplary embodiments of the invention provide a micromechanical electrostatic resonator which designs high frequency, increases a ratio of output voltage to input voltage, and designs low drive voltage or reduced power consumption. A micromechanical electrostatic resonator of exemplary embodiments includes a plate-shaped vibration body, a pair of electrodes arranged oppositely to each other at both sides of the vibration body with a gap from an outer circumferential portion of the vibration body, a feeding device to apply in-phase alternating-current power to the pair of electrodes, and a detecting device to obtain an output corresponding to a change in capacitance between the vibration body and the electrodes. The planar shape of the vibration body takes a shape having a curved outline which comprises a neck portion.
摘要翻译： 本发明的示例性实施例提供一种微机械静电谐振器，其设计高频率，增加输出电压与输入电压的比率，并且设计低驱动电压或降低功耗。 示例性实施例的微机械静电谐振器包括板状振动体，在振动体两侧彼此相对布置的一对电极，与振动体的外周部分具有间隙，施加在 相对于该对电极的相位交流电力，以及检测装置，以获得与振动体和电极之间的电容变化相对应的输出。 振动体的平面形状具有包括颈部的弯曲轮廓的形状。
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公开(公告)号：US06885615B1
公开(公告)日：2005-04-26
申请号：US09622685
申请日：1999-09-08
CPC分类号： H01L41/0913 , H02N2/004 , H02N2/103
摘要： A rectangular vibrating plate 10 in which a piezoelectric element and a reinforcing plate are stacked is supported on a main plate by a support member 11, and is urged toward the rotor 100 by an elastic force of the support member 11. This brings a projection 36 provided on the vibrating plate 10 into abutment with an outer peripheral surface of the rotor 100. In this construction, when the vibrating plate 10 vibrates in the horizontal direction in the figure by an applied voltage from a driving circuit (not shown), the rotor 100 is rotated in a clockwise direction in accordance with the displacement of the projection 36 due to the vibration.
摘要翻译： 堆叠有压电元件和加强板的矩形振动板10通过支撑构件11支撑在主板上，并且通过支撑构件11的弹力而朝向转子100施力。 这使得设置在振动板10上的突起36与转子100的外周表面邻接。 在这种结构中，当振动板10通过来自驱动电路（未示出）的施加电压在图中的水平方向上振动时，转子100根据突起36的位移而沿顺时针方向旋转，由于 振动。
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