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公开(公告)号：US5892207A
公开(公告)日：1999-04-06
申请号：US758246
申请日：1996-11-27
IPC分类号： C23C14/54 , C23C16/46 , G05D23/19 , H01L21/00 , H01L21/203 , H01L21/302 , H01L21/3065 , H01L21/683 , B23K10/00
CPC分类号： H01L21/67248 , C23C14/541 , C23C16/46 , C23C16/463 , G05D23/192 , H01L21/67103
摘要： The present invention relates to a temperature regulation apparatus capable of easily regulating the temperature of a support for a substance to be treated, such as a semiconductor wafer.The temperature regulation apparatus includes a liquid nitrogen supply device for supplying liquid nitrogen into a temperature regulation space provided in the inside of a support so as to effect flashing of the liquid nitrogen. A heating device for heating the support and temperature sensors for detecting the temperature of the support are also provided. A temperature setting device sets the temperature of the support at a desired temperature and a controller controls the liquid nitrogen supply device and the heating device based on a temperature detected by the temperature sensors, so that the support reaches and is maintained at the set temperature.
摘要翻译： 本发明涉及一种温度调节装置，其能够容易地调节诸如半导体晶片的待处理物质的载体的温度。 温度调节装置包括用于将液氮供应到设置在支撑体内部的温度调节空间中的液氮供给装置，以实现液氮的闪蒸。 还提供了用于加热支撑件的加热装置和用于检测支撑件的温度的温度传感器。 温度设定装置将支撑体的温度设定在期望的温度，并且控制器基于由温度传感器检测到的温度来控制液氮供应装置和加热装置，使得支撑件达到并保持在设定温度。
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公开(公告)号：US5557925A
公开(公告)日：1996-09-24
申请号：US432167
申请日：1995-05-08
IPC分类号： F16L55/103 , F17C9/00 , F17D1/08 , H01F7/16 , F17C9/02
CPC分类号： F17C9/00 , F16L55/103 , F17D1/082 , F17C2201/0109 , F17C2201/032 , F17C2201/056 , F17C2205/0326 , F17C2205/0355 , F17C2221/014 , F17C2221/017 , F17C2223/0161 , F17C2270/0518
摘要： According to the present invention, a piping installation for supplying a low temperature fluid such as liquid nitrogen from a main pipe (17) of transporting the low temperature fluid to predetermined equipments (2, 4, 6), for example a cooling apparatus, by way of branch pipes (18, 19), is characterized in that a thermally insulated pipe having a small outer diameter is used for the branch pipes (18, 19). By reducing the diameter of the branch pipes (18, 19) of the piping installation, the occupation of them in a space can be reduced, whereby spaces (3, 5) where they are installed can be effectively utilized. By reducing the diameter of the branch pipes (18, 19), furthermore, the quantity of the low temperature fluid which has been hitherto discharged wastefully can be decreased.
摘要翻译： PCT No.PCT / JP94 / 01494 Sec。 371日期1995年5月8日 102（e）日期1995年5月8日PCT 1994年9月9日PCT公布。 第WO95 / 07434号公报 日期：1995年3月16日根据本发明，一种用于从低温流体输送到预定设备（2,4,6）的主管（17）供应液氮等低温流体的配管装置 通过支管（18,19）的冷却装置的特征在于，对于分支管（18,19）使用外径小的隔热管。 通过减小配管设备的分支管道（18,19）的直径，可以减少它们在空间中的占用，由此可以有效地利用它们所在的空间（3,5）。 此外，通过减小支管（18,19）的直径，可以减少迄今为止已经排放的低温流体的量。
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公开(公告)号：US20080174389A1
公开(公告)日：2008-07-24
申请号：US11871285
申请日：2007-10-12
申请人： Yuka Mori , Hideki Kawamura
发明人： Yuka Mori , Hideki Kawamura
CPC分类号： H03H9/0211 , H03H9/13 , H03H9/132 , H03H9/173
摘要： A piezoelectric resonator and a piezoelectric thin-film filter including the piezoelectric resonator. The piezoelectric resonator includes a piezoelectric layer disposed between a pair of conductive layers to form a vibrating region. Outer edges of the vibrating region each have a waveform. The vibrating region includes a peripheral portion extending along the outer edges of the planar shape and having a relatively small thickness; and a central portion extending inside the peripheral portion and having a relatively large thickness. The piezoelectric resonator is thus capable of suppressing long-wavelength spurious modes and short-wavelength spurious modes.
摘要翻译： 压电谐振器和包括压电谐振器的压电薄膜滤波器。 压电谐振器包括设置在一对导电层之间以形成振动区域的压电层。 振动区域的外边缘各自具有波形。 振动区域包括沿着平面形状的外边缘延伸并具有相对小的厚度的周边部分; 以及在周边部分内延伸并具有较大厚度的中心部分。 因此，压电谐振器能够抑制长波浪寄生模式和短波浪杂散模式。
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公开(公告)号：US06575663B2
公开(公告)日：2003-06-10
申请号：US09729435
申请日：2000-12-04
IPC分类号： B09B100
CPC分类号： B09B1/00 , B09C1/002 , E02D19/185 , E02D31/006
摘要： A containment system to isolate waste in the ground including parallel interlocking tubes.
摘要翻译： 一种用于隔离地面上的废物的遏制系统，包括平行互锁管
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5.发明授权Static semiconductor memory device having a variable power supply voltage applied to a memory cell depending on the state in use and method of testing the same 失效具有根据使用状态向存储单元施加可变电源电压的静态半导体存储器件及其测试方法
公开(公告)号：US5963490A
公开(公告)日：1999-10-05
申请号：US881281
申请日：1997-06-24
申请人： Hideki Kawamura
发明人： Hideki Kawamura
IPC分类号： G01R31/28 , G11C11/413 , G11C29/06 , G11C29/46 , H01L21/8244 , H01L27/11 , G11C29/00
CPC分类号： G11C29/46
摘要： In carrying out testing, the potential of the node N1 of the state change detect circuit attains high level. This allows the power supply voltage supply line to receive a voltage down-converted by the voltage-down converter from the power supply voltage supplied from the power supply. In the normal use, the potential of the node of the state change detecting circuit attains a low level and the power supply voltage supply line receives the power supply voltage from the power supply. Since the power supply voltage supply line is connected to load elements for a memory cell and a voltage applied to the load elements for the memory cell is smaller than that in the normal use, the difference in potential between two storage nodes of the memory cell can be reduced as compared with that in the normal use. Thus, a condition comparable to that of an SRAM placed in the low-temperature environment can be created.
摘要翻译： 在进行测试时，状态变化检测电路的节点N1的电位达到高水平。 这允许电源电压供应线从电源提供的电源电压接收由降压转换器降压转换的电压。 在正常使用中，状态变化检测电路的节点的电位达到低电平，电源电压供给线从电源接收电源电压。 由于电源电压供给线连接到存储单元的负载元件，所以施加到存储单元的负载元件的电压小于正常使用的电压，因此存储单元的两个存储节点之间的电位差可以 与正常使用相比减少。 因此，可以产生与放置在低温环境中的SRAM相当的条件。
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公开(公告)号：US5698778A
公开(公告)日：1997-12-16
申请号：US705177
申请日：1996-08-29
申请人： Takao Ban , Hideki Kawamura
发明人： Takao Ban , Hideki Kawamura
CPC分类号： G01D3/028 , F02D11/106 , G01D5/145 , Y10S73/03
摘要： A sensor has a rotor mounted on a throttle shaft, permanent magnets mounted on an end of the rotor and rotatable together with the rotor and the throttle shaft, a Hall-effect element fixed on a rotational axis of the magnets for outputting an electric signal corresponding to the direction of the magnetic field, and a circuit member for compensating the temperature characteristics of the magnets and the Hall-effect element and for driving the Hall-effect element and processing the output from the Hall-effect element. A circuit chamber of the sensor is filled with silicon gel to add heat capacity to the circuit member. A resin member having notches around a periphery thereof is disposed in a connecting portion of the rotor at which the rotor is connected to the throttle shaft to block heat conduction from the shaft toward the magnets. Thus, the temperature conditions of the circuit member, the magnets and the Hall-effect elements are substantially equalized to achieve high precision in detection of the throttle valve opening regardless of external temperature changes.
摘要翻译： 传感器具有安装在节气门轴上的转子，安装在转子的端部上并与转子和节流轴一起旋转的永磁体，固定在磁体的旋转轴上的霍尔效应元件，用于输出相应的电信号 以及用于补偿磁体和霍尔效应元件的温度特性并用于驱动霍尔效应元件并处理霍尔效应元件的输出的电路元件。 传感器的电路室填充有硅胶，以向电路部件增加热容量。 在其周围具有切口的树脂构件设置在转子的与节流轴连接的连接部分，以阻止从轴向磁体的热传导。 因此，无论外部温度变化如何，电路部件，磁体和霍尔效应元件的温度条件基本相等，以实现节气门开度检测的高精度。
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7.发明授权
公开(公告)号：US5623960A
公开(公告)日：1997-04-29
申请号：US436422
申请日：1995-05-23
申请人： Hideki Kawamura , Yoji Mori , Minoru Ueta
发明人： Hideki Kawamura , Yoji Mori , Minoru Ueta
CPC分类号： F16K31/0655 , F16K31/0651 , H01F7/1607 , Y10T137/5987 , Y10T137/6416 , Y10T137/7036
摘要： The present invention relates to a solenoid-operated valve for a thermally insulated piping having a thermally insulated outer periphery suitable for transporting low-temperature fluid, high-temperature fluid or the like and relates also to an attachment construction for the valve.Conventionally, with this type of solenoid-operated valve for a thermally insulated piping, since it is necessary to to increase a magnetic flux density of the solenoid coil by increasing the number of turns of the oil or the electric current to be applied thereto, there has been the problem of high production costs and running costs.In the case of the solenoid-operated valve for a thermally insulated piping according to the present invention, inside a heat-insulating layer (6) surrounding flow passages (7, 20, 21, 26, 33) in the form of a pipe, there is provided a fixed core (23) constituting a magnetic circuit between a solenoid coil (17) and a movable coil (18). Then, magnetic resistance between the solenoid coil and the movable core may be reduced, without entailing enlargement of the movable core and the production costs and the running costs may be reduced.
摘要翻译： PCT No.PCT / JP93 / 01839 Sec。 371日期：1995年5月23日 102（e）日期1995年5月23日PCT提交1993年12月17日PCT公布。 出版物WO94 / 15127 日期：1994年7月7日本发明涉及一种用于隔热管道的电磁阀，其具有适用于输送低温流体，高温流体等的绝热外周边，还涉及用于 阀。 通常，对于这种用于隔热管道的电磁阀，由于需要通过增加油的匝数或施加到其上的电流来增加螺线管线圈的磁通密度，所以 一直是高生产成本和运行成本的问题。 在根据本发明的用于绝热管道的电磁阀的情况下，围绕管道形式的流动通道（7,20,21,26,33）的隔热层（6）内部， 提供构成螺线管线圈（17）和可动线圈（18）之间的磁路的固定铁心（23）。 于是，可以减小螺线管线圈和可动铁芯之间的磁阻，而不需要增大可动铁芯，并且可以降低生产成本并降低运行成本。
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公开(公告)号：US09608468B2
公开(公告)日：2017-03-28
申请号：US14349406
申请日：2011-10-04
申请人： Yoshiaki Kikuchi , Masahiko Kubo , Yoshihiko Hiroe , Motoyoshi Okumura , Kimihito Nakamura , Hideki Kawamura
发明人： Yoshiaki Kikuchi , Masahiko Kubo , Yoshihiko Hiroe , Motoyoshi Okumura , Kimihito Nakamura , Hideki Kawamura
CPC分类号： H02J7/0091 , B60L3/0046 , B60L11/1861 , B60L11/187 , B60L2240/545 , H01M10/443 , H01M10/486 , H01M2220/20 , H02J7/0029 , H02J7/0031 , H02J7/007 , H02J7/044 , H02J7/047 , H02J2007/0037 , Y02T10/7005 , Y02T10/7044 , Y02T10/705
摘要： ECU executes program including the steps of turning on an overcharge tentative determination flag and performing limitation on Win in a case where a rising rate ΔTB is higher than or equal to ΔTB(0), and a current average value IBs is a value on a side of charging, and the steps of turning off the overcharge tentative determination flag and cancelling the limitation on Win in a case where the rising rate ΔTB is lower than or equal to ΔTB(1), or the current average value IBs exhibits a value on a side of discharging, and the steps of determining that a battery is in the overcharging state and executing a fail safe process in a case where the integrated value IBs of current from a time point at which the overcharge tentative determination flag is switched from an off-state to an on-state becomes greater than or equal to IBs(0).
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9.发明授权公开(公告)号：US07504910B2
公开(公告)日：2009-03-17
申请号：US11583696
申请日：2006-10-20
申请人： Hideki Kawamura , Takahiro Oguchi , Keiichi Umeda , Hajime Yamada
发明人： Hideki Kawamura , Takahiro Oguchi , Keiichi Umeda , Hajime Yamada
CPC分类号： H03H9/02086 , H03H9/174
摘要： A thin-film piezoelectric resonator having a thin-film portion with a piezoelectric thin film disposed between a pair of opposing electrodes, an insulating layer formed on one of the pair of electrodes of the thin-film portion, and a substrate supporting the other electrode of the thin-film portion. The thin-film portion and the insulating layer together vibrate in at least one mode of second and higher harmonic modes, and an antinode in the at least one mode of the second and higher harmonic modes is located in the insulating layer.
摘要翻译： 一种薄膜压电谐振器，具有设置在一对相对电极之间的具有压电薄膜的薄膜部分，形成在薄膜部分的一对电极中的一个上的绝缘层和支撑另一个电极的基板 的薄膜部分。 薄膜部分和绝缘层一起在至少一种第二和高次谐波模式下振动，并且第二和高次谐波模式的至少一种模式中的波腹位于绝缘层中。
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公开(公告)号：US07320164B2
公开(公告)日：2008-01-22
申请号：US11097888
申请日：2005-03-31
申请人： Hajime Yamada , Masaki Takeuchi , Hideki Kawamura , Yukio Yoshino
发明人： Hajime Yamada , Masaki Takeuchi , Hideki Kawamura , Yukio Yoshino
IPC分类号： H01L41/047
CPC分类号： H01L41/316 , H03H3/04 , H03H9/132 , H03H9/173 , H03H9/174 , Y10T29/42 , Y10T29/49156
摘要： A manufacturing method for an electronic component includes a process of forming a lower electrode and a dummy electrode, which are electrically connected to each other, on a substrate, and a process of forming a piezoelectric thin film on the dummy electrode and the lower electrode while a predetermined bias potential is applied to the lower electrode via the dummy electrode. In this method, the piezoelectric thin film is formed on the lower electrode by stabilizing the potential of the lower electrode, thereby decreasing the surface roughness of the piezoelectric thin film. It is thus possible to manufacture an electronic component that exhibits excellent piezoelectric characteristics, in which the electromechanical coupling coefficient and the quality factor of a resonator are increased.
摘要翻译： 电子部件的制造方法包括在基板上形成彼此电连接的下电极和虚拟电极的处理以及在虚拟电极和下电极上形成压电薄膜的工艺，同时 经由虚拟电极向下部电极施加规定的偏置电位。 在该方法中，通过稳定下部电极的电位，在下部电极上形成压电薄膜，从而降低压电薄膜的表面粗糙度。 因此，可以制造显示优异的压电特性的电子部件，其中机电耦合系数和谐振器的品质因数增加。
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