摘要:
A discharge plasma generating method includes (a) opposing a discharge electrode having a substantially plane discharge portion to a substrate to be processed in a vacuum reaction vessel such that the discharge electrode and the substrate are substantially parallel to each other, (b) evacuating the vacuum reaction vessel and supplying a process gas to a space between the discharge electrode and the substrate, and (c) applying HF power to the discharge electrode such that an envelope representing the spatial distribution of a HF voltage &phgr; on the discharge electrode in a split second changes in accordance with a function including time as a parameter, thereby generating a discharge plasma of the process gas between the discharge electrode and the substrate, with substantially no standing wave of the HF voltage &phgr; generated on the discharge electrode.
摘要:
A plurality of electrode bars are arranged in parallel with each other, and side electrode bars are connected to the corresponding opposite ends of the electrode bars, thereby forming a ladder-like RF discharge electrode. Power supply points are arranged axisymmetrically with respect to a reference line, which is a bisector which bisects one side of the RF discharge electrode, while being spaced a predetermined distance from the reference line, thereby suppressing voltage distribution on the ladder electrode, which has an effect on uniformity of discharge distribution, to a sufficiently low level of nonuniformity. Thus, uniform distribution of film deposition rate can be obtained, thereby enabling uniform deposition even in large-area applications.
摘要:
A discharge electrode improves the uniformity of discharge such as plasma. The electrical discharge electrode, which receives high-frequency power and produces a discharge, comprises an electrode body adapted to receive high-frequency power, and a member for preventing the reflection of high-frequency power from the electrode body. The electrical discharge may comprise plasma generated by an electrical discharge.
摘要:
A photoelectric conversion device is composed of a substrate, a lower electrode layer formed to cover the substrate, and a first semiconductor layer formed on the lower electrode. The lower electrode layer includes a first matrix formed of transparent conductive material, and light scattering granules embedded within the first matrix.
摘要:
A method of manufacturing a cam for a camshaft, comprising the steps of continuously applying, to a billet having a volume larger by a specified volume than a final product, a plurality of cold forging steps formed of a preliminary outline upsetting, an outline drawing, a simultaneous piercing of inner and outer diameter surfaces, a press-molding forming excess amount as burrs on the inner diameter surface, a piercing of the inner diameter surface for removing the burrs from the inner diameter surface, and a simultaneous ironing of the inner and outer diameter surfaces. The final finishing (machining) of a cam (profile) surface can be eliminated, and the final product of the cam for the camshaft having a high dimensional accuracy can be provided.
摘要:
A method of manufacturing a cam for a camshaft, comprising the steps of continuously applying, to a billet having a volume larger by a specified volume than a final product, a plurality of cold forging steps formed of a preliminary outline upsetting, an outline drawing, a simultaneous piercing of inner and outer diameter surfaces, a press-molding forming excess amount as burrs on the inner diameter surface, a piercing of the inner diameter surface for removing the burrs from the inner diameter surface, and a simultaneous ironing of the inner and outer diameter surfaces. The final finishing (machining) of a cam (profile) surface can be eliminated, and the final product of the cam for the camshaft having a high dimensional accuracy can be provided.
摘要:
A light scattering film having the structure which guides electrical signal to a desired position and scatters incident light and the surface of which is substantially flat, and a photoelectric device using the same. The light scattering film includes a medium made of transparent conductive material and a light scatterer embedded in the medium. The light scattering film realizes conductivity and the light-scattering characteristic by single component. It is not necessary to make the texture of a surface with concavity and convexity deliberately to achieve the light-scattering characteristic. Desirably, the surface is substantially flat. When a semiconductor layer is formed on the surface, the defects are suppressed because of the flatness of the surface. The photoelectric device having the light scattering film and the semiconductor device on the surface of the film can achieve high photoelectric conversion efficiency.