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31 条记录 (耗时 0.018 秒)

    Ion source
    1.
    发明授权
    Ion source 失效
    离子源

    公开(公告)号：US4560907A

    公开(公告)日：1985-12-24

    申请号：US505721

    申请日：1983-06-20

    申请人： Hifumi Tamura ,  Hiroshi Okano ,  Tohru Ishitani ,  Akira Shimase

    发明人： Hifumi Tamura ,  Hiroshi Okano ,  Tohru Ishitani ,  Akira Shimase

    IPC分类号： H01J37/08 ,  B01J19/08 ,  H01J3/04 ,  H01J27/26 ,  H01J49/16 ,  H01J7/24 ,  H05B31/26

    CPC分类号： H01J27/26

    摘要： An ion source apparatus of surface ionization type comprises an emitter tip in the form of a round rod having a sharp-pointed end, an ion source material holder for holding the emitter tip coaxially within a crucible made of a material of a high melting point, the crucible having an opening formed in a bottom wall thereof through which the sharp-pointed end of the emitter tip extends outwardly, the ion source material is being filled in the crucible so as to enclose the outer periphery of the sharp-pointed end of the emitter tip, a filament for emitting electrons with which the emitter tip is bombarded from below, a heating power supply for the filament, an ion beam extracting electrode disposed between the emitter tip and the filament and maintained at a potential of a substantially the level as that of the filament, and an accelerating voltage power supply for applying a high voltage between the ion beam extracting electrode and the emitter tip to accelerate the electrons and ion beam.

    摘要翻译： 表面电离型的离子源装置包括具有尖锐端的圆棒形式的发射极尖端，用于将发射极尖端同轴地保持在由高熔点材料制成的坩埚内的离子源材料保持器， 所述坩埚具有形成在其底壁中的开口，所述发射极尖端的尖锐尖端通过所述开口向外延伸，所述离子源材料被填充在所述坩埚中，以便包围所述坩埚的所述尖端的外周 发射极尖端，用于发射发射极尖端从下方被轰击的电子的灯丝，用于灯丝的加热电源，设置在发射极尖端和灯丝之间的离子束提取电极，并保持在基本上等级的电位 以及用于在离子束提取电极和发射极尖端之间施加高电压的加速电压电源，以加速电子和离子束 m。

    Apparatus for irradiation with charged particle beams
    2.
    发明授权
    Apparatus for irradiation with charged particle beams 失效
    用于带电粒子束照射的装置

    公开(公告)号：US4479060A

    公开(公告)日：1984-10-23

    申请号：US454027

    申请日：1982-12-28

    申请人： Hifumi Tamura ,  Tohru Ishitani ,  Akira Shimase

    发明人： Hifumi Tamura ,  Tohru Ishitani ,  Akira Shimase

    IPC分类号： H01J37/073 ,  G01Q30/20 ,  H01J37/08 ,  H01J37/10 ,  H01J37/12 ,  H01J37/252 ,  H01J3/14 ,  G01N23/04 ,  G01N23/225

    CPC分类号： H01J37/10 ,  H01J37/252

    摘要： An apparatus according to the present invention for irradiating a specimen with charged particle beams comprises a single charged particle generating source from which the charged particle beams formed of electrons and negative ions, respectively, can be simultaneously derived; a specimen holder on which the specimen is placed; and charged particle irradiation means which is interposed between the charged particle generating source and the specimen holder in order to focus the charged particle beams and to irradiate the surface of the specimen with the focused beams, and which includes at least one magnetic lens and at least one electrostatic lens that are individually disposed.

    摘要翻译： 根据本发明的用于用带电粒子束照射样本的装置包括单个带电粒子发生源，可以同时衍生由电子和负离子形成的带电粒子束; 放置样品的样品架; 以及带电粒子照射装置，其被插入在带电粒子发生源和样本保持器之间，以便聚焦带电粒子束并用聚焦束照射样本的表面，并且至少包括至少一个磁性透镜 一个静电透镜单独设置。

    Liquid metal ion source
    3.
    发明授权
    Liquid metal ion source 失效
    液态金属离子源

    公开(公告)号：US4567398A

    公开(公告)日：1986-01-28

    申请号：US474473

    申请日：1983-03-11

    申请人： Tohru Ishitani ,  Hifumi Tamura ,  Akira Shimase

    发明人： Tohru Ishitani ,  Hifumi Tamura ,  Akira Shimase

    IPC分类号： H01J37/08 ,  H01J3/04 ,  H01J27/26 ,  H05H1/00 ,  H01J1/02

    CPC分类号： H01J27/26

    摘要： A liquid metal ion source according to the present invention has a needle electrode disposed at a position spaced from a reservoir for holding a source material, and is provided with means for freely varying a distance from the reservoir to the fore end of the needle electrode.

    摘要翻译： 根据本发明的液体金属离子源具有设置在与用于保持源材料的储存器间隔开的位置处的针电极，并且设置有用于自由地改变从储存器到针电极的前端的距离的装置。

    Liquid metal ion source
    4.
    发明授权
    Liquid metal ion source 失效
    液态金属离子源

    公开(公告)号：US4774414A

    公开(公告)日：1988-09-27

    申请号：US086093

    申请日：1987-08-12

    申请人： Kaoru Umemura ,  Tohru Ishitani ,  Toshiyuki Aida ,  Hifumi Tamura

    发明人： Kaoru Umemura ,  Tohru Ishitani ,  Toshiyuki Aida ,  Hifumi Tamura

    IPC分类号： H01J37/08 ,  H01J1/02 ,  H01J27/26 ,  H01J1/05

    CPC分类号： H01J27/26

    摘要： This invention relates to a liquid metal ion source which melts a source material and extracts ions. Stable extraction of ions of at least one element selected from among As, P and B for a long period of time can be attained by using as a source material an alloy having a composition represented by the formula L.sub.X R.sub.Y M.sub.A wherein X, Y and A each stands for atomic percentage; L at least one element selected from among Pt, Pd and Ag; R at least one element selected from among As, P and B; M at least one element selected from among Ge, Si and Sb; 5

    Liquid metal ion source
    5.
    发明授权
    Liquid metal ion source 失效
    液态金属离子源

    公开(公告)号：US4680507A

    公开(公告)日：1987-07-14

    申请号：US669796

    申请日：1984-11-09

    申请人： Kaoru Uemura ,  Tohru Ishitani ,  Hifumi Tamura

    发明人： Kaoru Uemura ,  Tohru Ishitani ,  Hifumi Tamura

    IPC分类号： H01J27/26 ,  H01J37/08 ,  H01J7/24

    CPC分类号： H01J27/26 ,  H01J37/08

    摘要： A liquid metal ion source has a reservoir which holds a source material to-be-ionized in a melted state; an emitter which emits from its tip, ions of the melted source material fed from the reservoir; and an extracting electrode which applies a high electric field to the tip of the emitter, thereby to extract the ions from the tip of the emitter. The liquid metal ion source further comprises tank means for storing the source material to be fed to the reservoir, transfer means for transferring the source material from the tank means to the reservoir, and a vacuum chamber for holding the constituents in a vacuum state.

    摘要翻译： 液态金属离子源具有储存器，其将待熔化的源材料保持在原状态; 从其尖端发射的发射体，从储存器供给的熔融源材料的离子; 以及向发射极的顶端施加高电场的提取电极，从而从发射极的顶端取出离子。 液体金属离子源还包括储存装置，用于存储要供给到储存器的源材料，用于将源材料从罐装置传送到储存器的转印装置，以及用于将成分保持在真空状态的真空室。

    Ion microprobe analyzer
    9.
    发明授权
    Ion microprobe analyzer 失效
    离子微探针分析仪

    公开(公告)号：US4081674A

    公开(公告)日：1978-03-28

    申请号：US751986

    申请日：1976-12-20

    申请人： Hifumi Tamura ,  Tohru Ishitani ,  Tokuro Hirano

    发明人： Hifumi Tamura ,  Tohru Ishitani ,  Tokuro Hirano

    IPC分类号： G01N23/225 ,  G01Q10/00

    CPC分类号： G01N23/225 ,  H01J2237/244 ,  H01J2237/2566

    摘要： An ion microprobe analyzer capable of high-precision analyses, and which provides a beam made up of both ions and neutral particles includes an ion beam deflecting means made up of an aperture which is movable between a position on the ion beam optical axis and a position deviating from the optical axis. At least one first deflector is provided which deflects the ion beam towards the point to be occupied by the aperture situated at the deviating position while leaving the path of the neutral particles unaffected, and at least two second deflectors are provided which deflect the ion beam back towards the ion beam optical axis, so that in the vertical direction the ion beam which has passed through the aperture situated at the deviating position is returned to the optical axis. In this way either the ions or the neutral particles may be selected in accordance with the position of the aperture.

    摘要翻译： 能够进行高精度分析并提供由离子和中性粒子组成的光束的离子微探针分析仪包括由可在离子束光轴上的位置和离子束光轴上的位置之间移动的孔的离子束偏转装置， 偏离光轴。 提供至少一个第一偏转器，其将离子束偏转到待位于偏离位置处的孔的位置，同时保持中性粒子的路径不受影响，并且提供至少两个第二偏转器，其将离子束偏转回 朝向离子束光轴，使得在垂直方向上，已经穿过位于偏离位置的孔的离子束返回到光轴。 以这种方式，可以根据孔的位置来选择离子或中性粒子。

    Ion source
    10.
    发明授权
    Ion source 失效
    离子源

    公开(公告)号：US4900974A

    公开(公告)日：1990-02-13

    申请号：US668932

    申请日：1984-11-07

    申请人： Tohru Ishitani ,  Hideo Todokoro ,  Hifumi Tamura

    发明人： Tohru Ishitani ,  Hideo Todokoro ,  Hifumi Tamura

    IPC分类号： H01J37/08 ,  H01J27/02 ,  H01J27/26 ,  H01L21/027 ,  H01L21/265

    CPC分类号： H01J27/26

    摘要： An EHD ion source includes an extractor and a control electrode with extractor being disposed below a tip of an electrode, and functioning to apply an electric field to a substance to-be-ionized wetting a pointed end of the tip, so as to derive ions from the pointed tip end. The control electrode is disposed in the vicinity of the pointed end of the tip, and it functions to apply an electric field to the substance to-be-ionized in its molten state so as to supply the pointed tip end with the substance to-be-ionized in a suitable amount. As a result, a great ion current which is substantially proportional to an extracting voltage can be derived from the pointed tip end.

    摘要翻译： EHD离子源包括提取器和控制电极，其中提取器设置在电极的尖端下方，并且能够对待离子化的物质施加电场以润湿尖端的尖端，从而导出离子 从尖尖端。 控制电极设置在尖端的尖端附近，其功能是在其熔融状态下对要被离子化的物质施加电场，以将尖端提供物质待 以合适的量除去。 结果，可以从尖尖端导出与提取电压基本成比例的大离子电流。